Microwave Discharge Ion Sources. Luigi Celona. Istituto Nazionale di Fisica Nucleare Laboratori Nazionali del Sud Via S. Sofia Catania Italy

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Microwave Discharge Ion Sources Luigi Celona Istituto Nazionale di Fisica Nucleare Laboratori Nazionali del Sud Via S. Sofia 64 95123 Catania Italy

Applications based on intense proton beams ADS for nuclear waste transmutation ( and Energy production) Radioactive ion beams Intense neutron spallation sources Radiation processing Neutrino factory Power range: 100 KW 10 MW Energy range: 100 MeV 2 GeV Average current: 100 ma 30 ma Pulsed or CW Proton driver Energy (GeV) Beam power (MW) ADS: XADS Ind. burner ~ 0.6 ~ 1 ~ 5 ~ 50 Spall. neutron source 1.33 5 (ESS) Irradiation facility ~ 1 >10 Neutrino factory (CERN) 2.2 4 RIB: one stage two stages ~ 0.2 ~ 1 ~ 0.1 ~ 5-10

kev ma ms Hz π mm. mad LEDA p 75 100 CW CW 0.25 IPHI p 95 100 CW CW 0.2 TRASCO p 80 35 CW CW 0.2 FAIR p 95 100 1 4 0.3 ESS p 75 60/90 2.84 14 0.25 IFMIF D + 100 2 125 CW/1 1-20 0.2 MYRRHA p 100 4 CW CW DAE ALUS H + 2 40 0.3 SPL H - 80 2.8 50 0.2 SNS H - 65 50 1 60 0.2 JKJ H - 30 0.5 50 0.25 ADSS H - 25 0.5 25 High reliability and high parameters reproducibility is requested (i.e. operator-indipendent) 3

Basic principles HYPOTHESIS: ABSENCE OF MAGENTIC FIELD, PLANE AND MONOCROMATIC WAVE E i( kz t ) 0 2 2 For propagation into the plasma must be: k>0 k 1 2 c 0 2 2 nce pe 0me It means: pe 2 0me pe 2 2 nc 1.2283 10 f m 2 e E e 2 2 2 pe pe 2 2 c0 3 Upper limit to density: n<n c The introduction of a magnetic field opens different coupling mechanism: ELECTRON CYCLOTRON RESONANCE (ECR) (see T. Thuiller lectures) me B-min magnetic configuration ECR heating occurs at BECR RHCP wave strongly coupled e K. Golovanivsky OFF RESONANCE HEATING ECRIS plasmas: stochastic heating or Energy absorbed by off resonance heating process Langmuir caviton collapses Proc. 11 th ECRIS Workshop (1993), KVI, 996

Pioneeristic work Sakudo 35 ys ago Later on, Okada and others in Japan and elsewhere produced tens of ma of B +, As +, P + and other monocharged ions, but Sakudo is recognized to be the pioneer.

First Ion Implanter

Chalk River Taylor &Wills Beginning of 90s Breakthrough simple design All successful sources are based on it Discharge RF Power 800W @ 2.45 GHz Total beam current 96 ma Proton fraction 86 % Proton beam 82.5 ma Beam energy 50 kev Beam emittance (rms norm.) 0.13 mm mrad Hydrogen mass flow 2 sccm

Chalk River Taylor &Wills Beginning of 90s

Los Alamos source for LEDA 9

Injector Parameter Value H 2 gas flow (sccm) 4.1 Ion source pressure (mtorr) 2 Ion source gas efficiency (%) 24 Discharge power, 2.45 GHz (kw) 1.2 Beam energy (kev) 75 High voltage power supply current (ma) 165 DC1 current (ma) 154 DC2 current (ma) 120 Proton fraction (%) 90 Injector emittance ( mm-mrad) (1rms norm) 0.18

Los Alamos source for LEDA Beam currents measured at DC1, DC2, and in the RFQ entrance collimator for 6.7 MeV RFQ. Beam focusing accomplished with LEBT solenoid magnets S1 and S2. Beam centroid controlled with steering magnets SM1 and SM2. 12

Gauss SILHI source and LEBT Bat 706 Since 1996, SILHI produces H+ beams with good characteristics: 1900 1400 900 400-200 -150-100 -50-100 0 50 100 150 200-600 m I1=63,I2=84,z1=80,z2=166 Bz = 875 Gauss I1=57,I2=83.4,z1=82,z2=176 I1=61, I2=84, z1=82, z2=176 Objet1 Objet2 Electrodes Série7 150 130 110 90 70 50 30 10-10 H+ Intensity > 100 ma at 95 kev H+ fraction > 80 % Beam noise < 2% 95 % < Reliability < 99.9 % Emittance < 0.2 mm.mrad CW or pulsed mode

DCCT Current (ma) Proton fraction (%) In CW mode, the source routinely produces 130 ma total (> 80% H + ) at 95keV 140 130 120 110 100 90 80 70 60 50 RF (command) (Watt) 237.2 369.3 501.5 633.6 765.7 897.9 1030.0 1162.2 200 300 400 500 600 700 800 900 RF power (Watt) Courant DCCT (ma) H+ (direct - reflected) 100% 95% 90% 85% 80% 75% 70% 65% 60% 55%

Space charge compensation with 84 Kr Emittance plot (99%) without injecting gas in the beam line: p=1.8 10-5 T RMS =0.335 mm mrad Emittance plot (99%) injecting 84Kr in the beam line: p=3.0 10-5 T RMS =0.116 mm mrad R. Gobin, R. Ferdinand, L.Celona, G. Ciavola, S. Gammino, Rev.Sci.Instr. 70(6),(1999), 2652

Space charge compensation with Ar Emittance plot (99%) without injecting gas in the beam line: p 1 =1.8 10-5 T, p 2 = 1.2 10-5 T RMS =0.291 mm mrad Emittance plot (99%) injecting Ar in the beam line: p 1 =4.5 10-5 T, p 2 = 4.4 10-5 T RMS =0.124 mm mrad R. Gobin, R. Ferdinand, L.Celona, G. Ciavola, S. Gammino, Rev.Sci.Instr. 70(6),(1999), 2652

Space charge compensation with N2 Emittance plot (99%) without injecting gas in the beam line: p 1 =1.6 10-5 T, p 2 = 1.2 10-5 T RMS =0.386 mm mrad Emittance plot injecting N2 in the beam line: p 1 =4.5 10-5 T, p 2 = 4.5 10-5 T RMS =0.13 mm mrad R. Gobin, R. Ferdinand, L.Celona, G. Ciavola, S. Gammino, Rev.Sci.Instr. 70(6),(1999), 2652

Space charge compensation with H2 Emittance plot (99%) without injecting gas in the beam line: p 1 =1.6 10-5 T, p 2 = 1.2 10-5 T RMS =0.292 mm mrad Emittance plot (99%) injecting H2 in the beam line: p 1 =5 10-5 T, p 2 = 4.9 10-5 T RMS =0.198 mm mrad R. Gobin, R. Ferdinand, L.Celona, G. Ciavola, S. Gammino, Rev.Sci.Instr. 70(6),(1999), 2652

r-r' rms norm. emittance Losses (%) Space charge compensation with H 2, N 2, Ar, Kr 0.45 14 0.4 0.35 0.3 H2 N2 Ar 84 Kr 12 10 Losses H2 (%) Losses N2(%) Losses Ar(%) Losses 84Kr(%) 0.25 8 0.2 0.15 0.1 0.05 0 1.00E-05 2.00E-05 3.00E-05 4.00E-05 5.00E-05 P (Torr) Vacuum during standard operation 6 4 2 0 1.E-05 2.E-05 3.E-05 4.E-05 5.E-05 P (Torr) In all the cases considered, a decrease of beam emittance has been observed with the increase of beam line pressure. Using 84 Kr gas addition a decrease of a factor three in beam emittance has been achieved losing less than 5% of the beam current with a small increase of pressure (from 1.8E-5 Torr to 2.4E-5 Torr). R. Gobin, R. Ferdinand, L.Celona, G. Ciavola, S. Gammino, Rev.Sci.Instr. 70(6),(1999), 2652

Space Charge Compensation (%) Without Ar TRIPS performance vs. forward power Beam compensation (%) 99% 98% 97% 96% 95% 94% 93% 92% 91% 90% 89% 88% 5 6 7 8 9 10 11 Pressure [mpa] Argon injection 100% 95% 90% 85% 80% 75% 70% 65% 60% 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 RMS beam size (mm) P Y. Beaubais, R. Gobin, R. Ferdinand, L.Celona, G. Ciavola, S. Gammino,J. Sherman, Rev.Sci.Instr. 71(3),(2000), 1413

The TRASCO linac (1 GeV, 30 ma) 80 kev 5 MeV 100 MeV ~200 MeV ~500 MeV >1000 MeV Proton Source RFQ Medium energy ISCL linac 3 sections high energy SC linac Proton beam current: 35 ma dc Beam Energy: 80 kev Beam emittance: RMS 0.2 mm mrad Reliability: close to 100% TRIPS (TRasco Intense Proton Sources) requirements

TRIPS (TRasco Intense Proton Source) Proton beam current: 35 ma dc Beam Energy: 80 kev Beam emittance: RMS 0.2 mm mrad Reliability: close to 100% Based on CRNL-LANL-CEA design MANY INNOVATIONS

TRIPS operating parameters Requirement Status Beam energy 80 kev 80 kev Proton current 35 ma 55 ma Proton fraction >70% 90% (estimated) RF power, Frequency 2 kw (max) @2.45 GHz Up to 1 kw @ 2.45 GHz Axial magnetic field 875-1000 G 875-1000 G Duty factor 100% (dc) 100% (dc) Extraction aperture 8 mm 6 mm Reliability 100% 99.8% @ 35mA (over 142 h) Beam emittance at RFQ entrance 0.2 mmmrad 0.07 mmmrad @ 32 ma

TRIPS (TRasco Intense Proton Source)

Extraction electrodes

TRIPS mounting procedure: from the grounded flange to the 100 kv flange.

TRIPS experimental layout A layout of the whole set-up at INFN-LNS: 1- Demineralizer; 2-120 kv insulating transformer; 3-19 Rack for the power supplies and for the remote control system; 4- Magnetron and circulator; 5- Directional coupler; 6 Automatic Tuning Unit; 7- Gas Box; 8- DCCT 1; 9- Solenoid; 10- Turbomolecular pump; 11- DCCT 2; 12- Quartz tube; 13- Beam stop.

Microwave injection and beam extraction optimisation Microwave Injection Use of a step binomial matching transformer with a field enhancement factor (E s4 /E 0 ) 1.95 (a 2 =0.0126 m) 2b 1 2b s 4 2b s 3 a 2 2b s 2 2b s 1 E 0 Z 0 > E s1 E s2 Z 1 > > > Z 2 E s3 Z 3 E s4 Z 4 PLASMA IMPEDANCE > Z 5 Beam extraction a 1 WR284 The extraction process has been deeply studied with the aim to increase the source reliability and to keep emittance low. The used codes were AXCEL-INP and IGUN. L.Celona, G. Ciavola, S. Gammino, R. Gobin, R. Ferdinand, Rev.Sci.Instr. 71(2),(2000), 771

Extracted current (ma) Optimum magnetic field profile Extracted current (ma) Extraction coil position (mm) Extraction coil current (A) Best operational point: Extraction coil: pos= 22 mm curr=128 A Injection coil: pos= 26 mm curr=127 A Injection coil position (mm) Injection coil current (A) ECR zones

LEBT with Saclay EMU beam sampler permanent magnets wire electron catcher HV electrodes permanent magnets

RMS Norm. Emittance ( mm mrad) Emittance measurements at nominal current 0.30 0.25 0.20 without Argon with Argon 0.15 0.10 0.05 0.00 30 35 40 45 50 55 Beam current (ma) The measured value is slightly above the theoretical value and in good agreement with the AXCEL calculation.

RMS Norm. Emittance ( mm mrad) Emittance measurements 0.30 0.25 without Argon 0.20 with Argon 0.15 0.10 0.05 0.00 30 35 40 45 50 55 Beam current (ma)

Beam current (ma) TRIPS reliability test: 35 ma @ 80 kv 40 Extracted current 35 30 Beam stop current 25 20 Availability over 142h 25 = 99.8 % 15 10 5 START 22/05/2003 19:32 0 22/05/2003 16.48 23/05/2003 16.48 Parameter Extraction voltage P uller voltage Repeller voltage D ischarge power Beam current Mass flow 24/05/2003 16.48 25/05/2003 16.48 Time 80 kv 42 kv -2.6 kv 435 W 35 ma 0.5 sccm 26/05/2003 16.48 27/05/2003 16.48 28/05/2003 16.48 STOP 28/05/2003 17:57

TRIPS performance vs. forward power Beam currents (ma) 65 60 Iextr Idcct1 Ibs 55 50 45 300 350 400 450 500 550 600 Forward RF Power (W) Operating voltage = 80 kv Mass flow= 0.6 sccm Optimized magnetic field profile Extraction aperture = 6 mm Electron donor= BN disks Current density up to 210 ma/cm 2 (close to J child )

Beam currents (ma) TRIPS performance vs. mass flow @ 450 W 60 50 I EXTR 40 I DCCT1 l BS 30 20 10 0 0,4 0,45 0,5 0,55 0,6 Mass flow (sccm)

Typical densities and temperatures of MDIS plasmas Density of ions along the chamber axis Langmuir Probe measurements Electron temperature of the bulk plasma

TRIPS vs. VIS New extraction system and accelerator column simplified to reduce the dimensions. New ionisation chamber. Insulation of coils, microwave and gas system to eliminate the HV-platform (implies a further simplification of the electronics involved in the control of the source because all the instrumentation will be placed at ground potential).

NEW MAGNETIC SYSTEM Based on three rings of NdFeB permanent magnets The ARMCO iron components lower the off axis magnetic stray field values, detrimentals for the reliability, by keeping high the field inside the plasma chamber Very good matching between the measurements and the numerical simulation carried out with the OPERA code Plasma electrode position 56 mm OFF-AXIS ARMCO IRON STAINLESS STEEL NdFeB ALUMINUM

ION EXTRACTION SYSTEM YOU ARE NOT OBLIGED TO DESIGN COMPLEX SYSTEM

VIS DESCRIPTION EXTRACTOR SOURCE BODY HIGH VOLTAGE PLATFORM FOCUSING SOLENOID PERMANENT MAGNET EXPECTED PERFORMANCES It will produce large proton beams (above 35 ma) and H2+ beams (above 20 ma) Emittance values below 0.2 π mm mrad are expected Generates an off-resonance 2.45 GHz Microwave operative 80 kv Extraction voltage High reliability (<0.1 T),will along the frequency (Magnetron orbe TWT) magnetic Long timefield operations plasma chamber axis ensured MICROWAVE SOURCE

VIS BEAM LINE DESCRIPTION Front view Top view

MICROWAVE LINE 1/3 Water-cooled Bend Microwave pressure window Placed behind the bend in order to avoid any damage due to the backstreaming electrons DC- Break Low microwave losses - Good voltage insulation up to 100 kv It is used to measure the forward and the reflected power Dual-arm Directional Coupler Water- cooled copper plasma chamber BN Disk Automatic Tuning Unit Matching Transformer It realizes a progressive match between the waveguide impedance and the plasma chamber impedance, thus concentrating the electric field at the center of the plasma chamber Adjusts the modulus/phase of the incoming wave to match the plasma impedance Waveguide /Coax Adapter Excytes the TE 10 dominant mode in WR340 waveguide

MW LINE 2/3: MATCHING TRANSFORMER Four step double ridges Matching transformer coupled to the plasma chamber TRIPS ELECTROMAGNETIC FIELD @ 2.45 GHz, 500 W S 21 Vs FREQUENCY FOR THE TWO STRUCTURES ELECTROMAGNETIC FIELD @ 2.45 GHz, 500 W VIS TRANSFORMER INSERTION LOSS 0.0085 db @ 2.45 GHz 10 % ENHANCEMENT WITH VIS TRANSFORMER VIS ELECTROMAGNETIC FIELD @ 2.45 GHz, 500 W

MW LINE 3/3 WAVEGUIDE DC-BREAK DESCRIPTION It consists of 31 aluminum sections of a WR340 waveguide insulated one each other by means of 30 fiberglass disks 0.5 mm thick in the metal separation gap PERFORMANCES Electrical Insulation up to 100 kv Transmission coefficient -1.4 db @ 2.45 GHz Low radiated electromagnetic field ELECTROMAGNETIC FIELD @ 2.45 GHz 500 W POWER

ION EXTRACTION SYSTEM The extraction geometry will employ only four electrodes. A plasma electrode at 80 kv voltage, two water-cooled grounded electrodes screening electrode and a 3.5 kv negatively biased electrode inserted between the two grounded electrodes in order to avoid secondary electrons due to residual gas ionisation going up to the extraction area. 80 KV TRIPS Five-electrodes topology on-line optimisation of the extracted beam wide range of operations (10-60 ma) -3.5 KV VIS Four-electrodes topology optimized for a 40 ma beam (90% proton, 10% H 2+ ) ground The rms normalized emittance calculated with Axcel code, 11 cm far from the extraction electrode is 0.04 π mm mrad.

High Intensity PM source (CEA, Saclay) 109 ma à 85 kv (75% H + ) with extraction hole 9 mm The PM source of Saclay produced 85 ma total beam at 80 kv,for 4 days with no beam off

Passive method to increase and to improve the intensity of the ion beam BN disk and wall coating effects BN disk Configuration with BN disk and alumina Alumina Configuration with BN disk and no alumina AL 2 O 3 Inner diameter: 79 mm. Outer diameter: 89.5 mm. Length: 95 mm. BN Inner diameter: 7.8 mm. Outer diameter: 89.5 mm. thick BN plates are located at two extremities of the plasma chamber. Al 2 O 3 tube is nested within the plasma chamber, it covers the entire walls from one side to other

proton fraction [%] proton fraction [%] extracted current [ma] extracted current [ma] Figures show the trends of the extracted current and the proton fraction as a function of microwave powers at 2 10-5 mbar (on the left ) and at 2.5 10-5 mbar (on the right). The improvement of the performance with the use of the alumina tube and of the disk of BN disk can be explained by means of two different theories. For the first one the BN and the alumina are electron donors that influence the plasma essentially by emitting cold electrons. The second one explains this phenomenon by introducing the Simon currents within the plasma. pressure= 2 10-5 mbar pressure= 2.5 10-5 mbar 50 40 2 10-5 mbar 50 40 30 30 20 20 No BN in ext. side 10 BN Al 2 O 3 and BN 0 0 200 400 600 800 1000 1200 1400 pressure= power 2 [W] 10-5 mbar 100 No BN in ext. side 10 BN 2.5 10-5 mbar Al 2 O 3 and BN 0 0 200 400 600 800 1000 1200 1400 pressure= power 2.5 [W] 10-5 mbar 100 80 80 60 60 40 40 20 No BN in ext. side BN Al 2 O 3 and BN 0 0 200 400 600 800 1000 1200 1400 power [W] 20 No BN in ext. side BN Al 2 O 3 and BN 0 0 200 400 600 800 1000 1200 1400 power [W] 2 10-5 mbar 2.5 10-5 mbar

Well established items Larger current, larger brightness, better reliability seem to be realistically achievable in few years term There are billion $ projects leading the run (ESS and IFMIF for p,d as it is SNS for H - ) Study of pulsed operation (2 ms-20 Hz) needs more insights Looking for short pulse rise time (100 ns) Beam dynamics vs. plasma simulations LEBT optimization Plasma chamber dimensions are not a free parameter Electron donors may help Microwave coupling may give some positive surprise Magnetic field probably not Space charge will be always a nightmare!