COHERENCE SCANNING INTERFEROMETRY Pt 1. Bscs, Cto Austt Sus K. Rsy PD Mc 2013 OUTLINE No cotct suc sut systs Coc sc tot Sts ISO, ASME Pt sts Vto tst Cto, ustt pocus Octv ocus optzto Scc stts w sut stts D.I. Mv E : sussy@.co 1
QUESTIONS? Pott 3 D Msut Istuts A Topopy Sss Z(X,Y) o Z(X) s ucto o Y Pos Sp & ccucy Tuto Fst Moé Itot Cooc Mcoscop Ps St Itot Vtc Sc (Wt Lt) Itot Lotoy Cotct Styus Cotc Lt Ato Cooc Mcoscopy SEM Stoscopy Sc Tu Mcoscopy Atoc Foc Mcoscopy Optc Dc Po A Rsov SEM 2
Tuto Wo pcp o tuto po s o Scpu s pcp B-cto ctc stuto o 1. F Ju Sou, M X Lu, Dvopt o ov sctt tuto s po wt sx c coup vcs, Optcs Lss E, 47 (2009) 7 18 2. St o: Lt Rcto Mos o wst ttp://www.pcs.co.u/sc/ou/o.t, s o 05/05/2010 Moé Itot 3
Cotc Lt Ato Cooc Mcoscopy Top Botto 4
Cooc Mcoscopy 1.2 1.0 F 3 20X CCD LED Lt souc 480 Focus ucto 0.8 0.6 0.4 0.2 Itsty Gt PBS Mcospy 0.0-20 -10 0 10 20 z xs (cots) Octv Toy o Lt Lt s cops o wvts o y Wvs o Lt T t ts t coo o t Wvt Wt t ( coto o t wvts) povs sut. 5
Toy o Itc Itc s t poo cus y supposto o two ctotc wvs W ts two wvs ps t t sut s t ty out o ps t sut wou Mttc Rpstto : Costuctv Itc s t tc t. Dstuctv Itc (φ 2 φ 1 ) s t ps c tw two wvs. Toy o Itc 6
Sp Sucs t ptts WLI.U t oo 7
Dt wys to t p Fo s to 3D suc p Itc Fs 8
Coc Sc Itot c o p Lt souc (o / LED) Dcoc o Ls souc (opto) Optcs Aptu stop F stop 45 Mo B sptt Itotc octv Rc o Msu suc Sc (PZT / Stpp oto) Zoo / cto tu stup B sptt Poz (Opto) Dtcto 2 (Opto) Poz Dtcto 1 (CCD / CMOS) Coc Sc Itot c o p Lt souc (o / LED) Dcoc o Ls souc (opto) Optcs Aptu stop F stop 45 Mo B sptt Itotc octv Rc o Msu suc Sc (PZT / Stpp oto) Zoo / cto tu stup B sptt Poz (Opto) Dtcto 2 (Opto) Poz Dtcto 1 (CCD / CMOS) 9
Coc Sc Itot c o p Lt souc (o / LED) Dcoc o Ls souc (opto) Optcs Aptu stop F stop 45 Mo B sptt Itotc octv Rc o Msu suc Sc (PZT / Stpp oto) Zoo / cto tu stup B sptt Poz (Opto) Dtcto 2 (Opto) Poz Dtcto 1 (CCD / CMOS) Coc Sc Itot c o p Lt souc (o / LED) Dcoc o Ls souc (opto) Optcs Aptu stop F stop 45 Mo B sptt Itotc octv Rc o Msu suc Sc (PZT / Stpp oto) Zoo / cto tu stup B sptt Poz (Opto) Dtcto 2 (Opto) Poz Dtcto 1 (CCD / CMOS) 10
Coc Sc Itot c o p Lt souc (o / LED) Dcoc o Ls souc (opto) Optcs Aptu stop F stop 45 Mo B sptt Itotc octv Rc o Msu suc Sc (PZT / Stpp oto) Zoo / cto tu stup B sptt Poz (Opto) Dtcto 2 (Opto) Poz Dtcto 1 (CCD / CMOS) Coc Sc Itot p o c c o p Lt souc (o / LED) Dcoc o Ls souc (opto) Optcs Aptu stop F stop 45 Mo B sptt Itotc octv Rc o Msu suc Sc (PZT / Stpp oto) Zoo / cto tu stup B sptt Poz (Opto) Dtcto 2 (Opto) Poz Dtcto 1 (CCD / CMOS) 11
Exps o CSI systs NT8000 (Vco) CCI (Tyo Hoso) NV6300 (Zyo) Coutos 12
ISO Sts ISO / TC 213 / WG16 25178 No Cctstcs 602 Cooc cotc po 603 Ps st totc coscopy 604 Coc sc totc coscopy 605 Pot uto ocus po 606 Focus vto 607 I cooc coscopy Cto 702 Cooc cotc po 703 Itotc coscopy NPL GPGs Goo Pctc Gu No. 108: Gu to t Msut o Soot Suc Topopy us Coc Sc Itoty Goo Pctc Gu No. 116: Gu to t Msut o Rou Suc Topopy us Coc Sc Itoty Gusc CL, Lc RK, Cto o t tooc cctstcs o suc topopy su stuts, Pocs o t 2 Itto Coc o Suc Mtooy 2010, WPI, USA pp. 145 153. 13
Rc Ft St Sco C Suc Su Asto v tss Us to sts st cs sut cpty Stp Ht St Cou cot o tc Qutz suc NIST Tc Cto ustt o Z xs suts 14
Lt Cto St Ptu cot o tc Sco ox suc NIST Tc Stt cto TRC Optc Dso St Co o ss potos NPL Tc 15
Suc Rouss Spcs ISO 5436 1:2000 Typ C (Spc sut sts) Typ D (Rouss sut sts) NIST Tc ITF Aot pcs c Coss scto pos o () o suc () suso suc (c) su wv suc. Ss St ITF Aot pcs Wc t, Pctc ot vuto o t souto o co ot sut tcus, Msut Scc Tcooy, 20 (2009) 065103 (8pp) 16
Vtos () Msuts t u vot () u vto vs, s s pps o ss t. Vtos 300 Msut o (1 S ) 250 200 150 100 50 y = 0.6255x + 2.3434 R 2 = 0.9951 0 0 100 200 300 400 500 P to p os v () 17
Cto Z xs Systs wt c s Systs wtout c s Stp t tct s us cto XY xs Pst cto Us tu cto Lt cto st s us cto Spcc o c octv zoo tu stt L os t cu wp os Z xs Cto 18
Lt Cto Lt Cto stps 19
TRC Stup I o o co o Lt cto st us o ost tw t ctos Rc Mo Ftss Eo Rc o suc o p o cos cto (octv zoo tu coto) 20
Octv Focus Optzto 140 120 100 P () 80 60 40 20 0 Pt 1 Pt 2 Pt 3 Pt 4 Pt 5 Pt 6 Low (< 40 ) Mu (41-80 ) H (81-120 ) At 50x Focus P () At Docus P () At Rocus P () Ect o ocus o ouss o sct sps wt vy ouss vus 21