CVS Calibration System Short Instruction Manual System Configuration Description of the Equipment State: 11/21/2005
Table of contents 1. Documentation and Appropriate Usage 2. EC Conformity Declaration 3. Technical Data Sheet 4. Device Setup 5. Basics of Operation 6. Measurement Ranges and Program Change 7. Integrated Sensors and Flow-Elements 8. Configuration of the Controller S320 9. Electrical Wiring Scheme 10. Measurement Uncertainty
1. Documentation and Appropriate Usage Structure of the Documentation: Partl Denomination Content A _man_e Short Instruction Manual for CVS Calibration System: system configuration and device description. B LMF_man_e Reference Manual for LMF LAMINARMASTER Flow-System LMF: parameter systematics, basics of the measurement procedure. C References and Denomination see _man_e Chapter Sensors and Flow- Elements in this manual Documentation and Manuals for the used sensors and flow elements D CVS_appendix_e Device Specific Documentation for CVS- KAL: sensor and flow element data, calibration and test certificates Appropriate Usage: The CVS Calibration System CVS_KAL is member of the system family of the series Laminar Master Flow LMF. The instruments of the series LAMINARMASTER are exclusively made for measurement and control of air volume flow and mass-flow and the correlating sensor values. Used as measuring instrument in complex devices, in a machine compound, in a production line or production station, the signal outputs may be used only to inform a superior control system, e.g. a PLC. Used as a stand-alone laboratory measuring device with control function, pay attention to the rules and hints for emergency shut-down and return of the power supply after a power failure. For basic security guidelines see the reference manual LMF LaminarMasterFlow. Other applications than mentioned above are not appropriate. Damages caused by impropriate usage TetraTec Instruments GmbH is not liable for. Appropriate usage also implies: to follow all instructions from the operating manual. to do the inspection and maintenance work.
2. EC Conformity Declaration Herewith we declare that the devices delivered by us, concerning design and construction as well as the model put into circulation, comply with the EC-Directives listed below. This declaration is no longer valid, if the delivered device is modified without our agreement. Appropriate EC-Directives: EC-Machinary Directive (98 / 37 / EC)* EC-Low Voltage Directive (73 / 23 / EEC)* EC-Electromagnetic Compatibility Directive (89 / 336 / EEC) Applied harmonized standards, especially: DIN EN ISO 12100-1, 12100-2 Basic Concepts* DIN EN 294, DIN EN 811 Safety Distances* DIN EN 983 Fluid Power Systems - Pneumatics* DIN EN 61010-1 (VDE 0411-1) Safety Requirements* DIN EN 55011 (VDE 0875-11) Emission Interference Immunity DIN EN 61000-6-2 (VDE 0839-6-2) Interference Immunity Applied national standards and technical specifications, especiallly: BGV A1 Principles of Prevention* BGV A2 Electrical Plants and Equipment * BGV B6 Gases* (German) Pressure Vessels Ordinance* *as appropriate with the particular design of the device. Place, Date: Steinenbronn, 2006-01-12 Signature: W. Höhn, Manager of the Company
3. Technical Data Sheet Power Supply: Gas Type: Flow range of measurement section: Ambient conditions during operation: 230VAC, 50/60Hz Air: dust-free (5 µ m filtered), oil-free, non-condensing Standard volume See flow:* Docu Part D Actual volume flow: See Docu Part D Temperature: 0...40 C Pressure: atmospheric pressure Humidity: 0...90%, noncondensing Operating conditions for measurement section: Absolute pressure: Differential pressure: Temperature: 0,8-1,2 bar abs 0...50 mbar 10...40 C Overload strength: * Standard operations: Pressure: 2 bar abs. Temperature: -10... 60 C pressure: 1013,25 mbar Temperature: 0 C Rel. humidity: 0 %
4. Device Setup Front View: Rear View Flow Element
5. Basics of Operation Switch-On Press POWER key. The POWER key is illuminated. The LMF starts with a self test. Measuring There are two modes of measurement. After power-on the device is in continuous measuring mode. In this mode the current measurement values are regularly displayed. In addition there is an averaging measurement mode. This is composed of two phases controlled by the keys START and STOP. In the first phase data is collected and written to a buffer. In the second phase the mean values are displayed. Press START key. Starts an averaging measurement. Data collection takes the time defined in parameter Px701 but can be terminated sooner pressing the STOP key. Afterwards the results (mean values) are displayed. Press the F1 key repeatedly to browse the results. The results are stepped through with each keypress. The last page is followed by the first page again (infinite loop). Press STOP key. 1. During an averaging measurement: stops the averaging measurement. The device displays the mean values. 2. If the results of an averaging measurement are displayed: the device returns to the continuous measuring mode. Note: The results are only valid, if a sufficient leak tightness of the system is ensured regularly and the zero adjustment of the gauge and differential pressure sensors is performed regularly. To do this follow the instructions described below.
Performing the Zero Adjustment of the Pressure Sensors The zero point of differential and gauge pressure sensors changes with time. Especially after big pressure changes there can be an offset. The zero adjustment is applied to all analogue and serial sensor inputs, that are indicated as zero adjustable with the parameters S2x32 and S3x32. (value 0: zero adjustment not applicable, value 1: zero adjustment applicable, value 2: zero adjustment applicable but results in an error message, if the difference exceeds 5%) Note: The Operator is responsible to ensure the pressure balance. If the pressure sensors are zero adjusted with pressure differences applied, faulty measurements are the consequence! Press Zero key until it is illuminated. As soon as the key is no longer illuminated, the zero adjustment has finished. If pressure sensors have to be adjusted, that are cannot be adjusted with the Zero key (e. g. gauge pressure sensors), this can be done using the test menu, provided they are displayed there (see LMF operating manual). Pay attention to the necessary pressure balance with the ambient air. Absolute pressure sensors, temperature sensors and sensors for relative humidity must not be zero adjusted and cannot be zero adjusted. Switch-Off Press POWER key.
6. Measurement Ranges and Program Change The device supports depending on the firmware up to 3 measurement sections at the same time. The measurement sections are numbered from 0 to 2. To the measurement sections configurations can be assigned which are stored in 10 available programs. The programs are numbered from 0 to 9. In the following special settings for the device were described. Assignment of the Programs to the Measurement Sections Number of available measurement sections: 1 The programs are assigned as follows to the measurement sections and configured /assigned: Section -Number Program -Number Configuration / Assignment 0 0 Assignement see Device Specific Appendix _appendix_e 0 1 Assignement see Device Specific Appendix _appendix_e 0 2 Assignement see Device Specific Appendix _appendix_e 0 3 Assignement see Device Specific Appendix _appendix_e 0 4 Assignement see Device Specific Appendix _appendix_e 0 5 Assignement see Device Specific Appendix _appendix_e 0 6 Assignement see Device Specific Appendix _appendix_e 0 7 Assignement see Device Specific Appendix _appendix_e 0 8 Assignement see Device Specific Appendix _appendix_e 0 9 Assignement see Device Specific Appendix _appendix_e Switching of Programs: The program switching can be done via front panel key pad as follows: - Hold F2 function key for 3 seconds - The measurement section and program menu appears: Upper line: Maximum possible program number for the measurement section Middle line: Active Program number for the measurement section Lower line: Minimum possible program number for the measurement section - Upon need toggle by pressing the F1 function key to reach the next section - Press right arrow -key to increase the program number - Press left arrow -key to lower the program number - Hold F2 function key for 3 seconds to store a program change - Hold F1 and F3 function key for 3 seconds to leave the menu without any changes. The same can be achieved by pressing the Stop button if available.
7. Integrated Sensors and Flow-Elements Sensors: Type: Differential Pressure- Connection Type: Sensor Article-No.: 1500-DN0020 Measurement Range: 0..50 mbar Signal: RS485 Sensor Data Set No.: 0 Display-Name: Pdiff Plug connector name: RS485-Bus Device Documentation: 1500_man_d Type: Absolute Pressure- Connection Type: Sensor Article-No.: 1500-AI0900 Measurement Range: 0...1200 mbar Signal: RS485 Sensor Data Set No.: 1 Display-Name: Pabs Plug connector name: RS485-Bus Device Documentation: 1500_man_d Type: Temperature-Sensor Connection Type: Article-No.: WIT-PT-11-2-100-G Connection S320 (Slot): 0 Measurement Range: 10...75 C Connection Port: 0 Signal: Pt100 Sensor Data Set No.: 2 Display-Name: Temp Plug connector name: X10 Device Documentation: WIT-PT-11_man_d Type: Relativ Humidity Connection Type: Sensor Article-No.: HUM-50U-MS Connection S320 (Slot): 0 Measurement Range: 0...100% Connection Port: 1 Signal: 0...1V Sensor Data Set No.: 3 Display-Name: Hum Plug connector name: X11 Device Documentation: HUM_man_d Flow Elements Example of a Standard Flow-Element: Type: Laminar Flow Element Connection Type: (LFE) Article-No.: 50MC02-06-F Connection Pdiff: ¼ NPT Measurement Range: 0...28300L/min Connection Flow: 6 Pdiff: 0...20mbar Flow Data Set No.: 0 Device Documentation: 50M_operation_man_e Available Flow-Elements and Program Assignement: See Device Specific Appendix _appendix_e
8. Configuration of the Controller S320 General description: Supply: 110-230VAC 50/60Hz 24V DC 12V DC Cabinet Design: 19 rack 280mm NT table 19 rack 380mm NT table IP54 cabinet IP54 compact S320 OEM, encod. connector Special cabinet: 84TE/3HE/280mm depth Connector Options: RS 232 + link in front PLC connection: 40-pin Special connector Cable length: 2,5m Software: Software: Flow Version: OS-version: s320a501 Documentation: english Standard evaluations: LFE calculation classical LFE calculation universal ACCUTUBE calculation ORIFICE calculation Gas counter evaluation Sonic nozzle evaluation Mass flow sensor evaluation CONTROLLER S320: S/No: see appendix 512 kb RAM 2048 kb RAM SLOT 0: type: 100 port0: Temp0 supply: 1mA range: Pt100 disp. span: - 10 60 C port 1: Hum0 supply: 24V range: 0..1 V disp. span: 0 100% SLOT 1: type: port0: supply: range: disp. span: port 1: supply: range: disp. span: Special features: see section "options" Integrated Digital Inputs Used SLOT 2: type: port0: supply: range: disp. span: port1: supply: range: disp. span: SLOT 3: type: port0: supply: range: disp. span: port 1: supply: range: disp. span: SLOT 4: type: port0: supply: range: disp. span: port 1: supply: range: disp. span Yes Options: Single section Double section Triple section Leak check Test pressure limit control Pressure control Flow control PLC-mode No Integrated Digital Outputs Used Yes No Assignment of integrated digital signals see section 0. Digital Expansion Modules Yes No If yes: Internal supply (pin 24V not connected)
Integrated Digital Interface, Push Button Assignement Digital Input ID Function Remark DI0 Start Key 0, Label START DI1 Stop Key 1, Label STOP DI2 Leak Test Key 2, Label LEAK TEST DI3 DI4 DI5 DI6 DI7 Digital Output Name Function Remark DO0 Start LED Key 0, Label START DO1 Stop LED Key 1, Label STOP DO2 Leak Test LED Key 2, Label LEAK TEST DO3 DO4 DO5 DO6 DO7
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10. Measurement Uncertainty Basic considerations Qv, Qm, ρ(p, T, xv) The determination of the actual volume flow Q v of the unit under test (uut) is generally done by measurement of the actual volume flow of the calibration-standard (master) and conversion with the density ratio (density ρ) to the conditions of the unit under test. Q v,uut = Q v,master * ρ Master / ρ uut The measured quantity mass flow (Q m ) is calculated as the product of the actual volume flow and the density and has the same value at each point of the measuring system. Q m,uut = Q m,master = Q v,master * ρ Master The effect of error propagation of the relative uncertainty of measurement from the different measured quantities is determined according to ISO/TR 5168 as the standard deviation. u ges = u, std i 2 i The extended uncertainty of measurement u ges, resulting from the relative standard uncertainty of measurement u ges,std by multiplication with the extension factor k = 2, corresponds to the interval in which the measurement value lies with a probability of 95%. The smallest assignable extended uncertainty of measurement of the reference measurement (calibration) is identical with this extended standard uncertainty of measurement. In the standard uncertainty of measurement of the unit under test, another contribution has to be taken into account which describes the spread of the unit under test resp. the calibration results. Decisive point for the uncertainty of measurement of the reference measurement is the uncertainty of the determination of the actual volume flow through the calibration standard. Furthermore there s an uncertainty when determining the density ratio between master and the unit under test (for quantity actual volume flow), resp. in the determination of the density of the calibration standard (for quantity mass flow) from the measurement quantities like humidity, pressure and temperature of the calibration standard resp. the unit under test. Measurement uncertainty caused by leakages in the measurement section In the run-up of any reference measurement, one has to make sure by a leak test of the system (pressure-drop method) that the maximum error by leaks will stay below a fixed value. Let the volume of the measurement section be V, the operating pressure for leak test p and the smallest flow to be calibrated Q min, so the maximum pressure drop allowed in the measurement section for an uncertainty u L is dp/dt u L. Q min. p / V
Uncertainty of measurement during calibration with Laminar Flow Elements: The extended standard uncertainty of measurement of the reference standards is fixed by the calibration within a continuous measurement chain related to the PTB Physikalisch- Technische Bundesanstalt. The calculation of the actual volume flow at the unit under test with reference measurement by Laminar Flow Elements is done according to the following relation (Hagen-Poiseuille Equation and conservation of mass / continuity equation): Q vol,uut = Q cal,lfe (dp). η cal /η uut. ρ LFE /ρ uut The uncertainty of measurement for calibration with Laminar Flow Elements consists of the following factors: uncertainty of measurement u cal of the reference standard calibration, typically u Kal = 0,325%v.M. (Half of the extended measurement uncertainty of typically 0,65%) uncertainty of measurement u dp for measurement of the differential pressure at the LFE For measurement of the differential pressure of the LFE, at works-calibration as well as at external reference measurement, the same differential pressure sensor is used, so that not the absolute precision of the sensor is relevant but only the repeatability of the measurement values. In addition the thermal and long-time drift of the sensor has to be taken into account. Typical values in the dp-interval 2 25 hpa: relative measurement uncertainty u dp = 0,15%v.M. thermal uncertainty: u L = 0,02% v.m./ C. zero point of the sensor: u N = 0,05% v.e. uncertainty of measurement u η for the viscosity ratio by calculation from calibration conditions to actual conditions during reference measurement, typically u η = 0,056% uncertainty of measurement u ρ for the density ratio. Mainly the accuracy of the measurement of temperature and pressure as well as for air the humidity is significant for the conversion from conditions of the calibration standard to conditions of the unit under test, typically u ρ = 0,14% for mass flow u ρ = 0,12% for volume flow uncertainty of measurement u LFE for reference measurement with Laminar Flow Elements. This part of uncertainty includes the standard deviation of the calibration points in regard to polynomial linearisation, as well as an estimation of the short- and long-time drift behaviour between reference measurements. The value in first instance is fixed and will later be adjusted by historical data. u LFE = 0,15% For the extended uncertainty of measurement it follows: u ges = 2. ( u Kal 2 + u dp 2 + u η 2 + u ρ 2 + u L 2 + u LFE 2 ) 1/2 + 2. u N For the example volume flow follows: u ges = 2. ( 0,325 2 + 0,15 2 + 0,056 2 + 0,12 2 +0,02 2 + 0,15 2 ) 1/2 = 0,82%v.M. + 0,1% v.e. and finally the worst case for the mass flow of humid air is: u ges = 2. ( 0,325 2 + 0,15 2 + 0,056 2 + 0,14 2 +0,02 2 + 0,15 2 ) 1/2 = 0,84%v.M. + 0,1% v.e.
Uncertainty of measurement during calibration with Orifices: The extended standard uncertainty of measurement of the reference standards is fixed by the calibration within a continuous measurement chain related to the PTB Physikalisch- Technische Bundesanstalt. The calculation of the actual volume flow at the unit under test with reference measurement by Orifices is done according to the following relation (Bernoulli Equation and conservation of mass / continuity equation): Q vol,uut = (dp. ρ uut ) 0,5. C cal (Re). /ρ uut The uncertainty of measurement for calibration with orifices consists of the following factors: uncertainty of measurement u cal of the reference standard calibration, typically u Cal = 0,325%v.M. (Half of the extended measurement uncertainty of typically 0,65%) uncertainty of measurement u dp for measurement of the differential pressure at the orifices. For measurement of the differential pressure of the orifices, at works-calibration as well as at external reference measurement, the same differential pressure sensor is used, so that not the absolute precision of the sensor is relevant but only the repeatability of the measurement values. In addition the thermal and long-time drift of the sensor has to be taken into account. Typical values in the dp-interval 2 25 hpa: relative measurement uncertainty u dp = 0,15%v.M. thermal uncertainty: u L = 0,02% v.m./ C. zero point of the sensor: u N = 0,05% v.e. uncertainty of measurement u Re for the Reynolds number influence by calculation of the flow coefficient C cal (Re), typically u Re = 0,06% uncertainty of measurement u ρ for the density ratio. Mainly the accuracy of the measurement of temperature and pressure as well as for air the humidity is significant for the conversion from conditions of the calibration standard to conditions of the unit under test, typically u ρ = 0,14% for mass and volume flow uncertainty of measurement u OR for reference measurement with orifices. This part of uncertainty includes the standard deviation of the calibration points in regard to polynomial linearisation, as well as an estimation of the short- and long-time drift behaviour between reference measurements. The value in first instance is fixed and will later be adjusted by historical data. u OR = 0,15% For the extended uncertainty of measurement it follows: u ges = 2. ( u Kal 2 + 0,5. u dp 2 + u Re 2 +0,5. u ρ 2 + u L 2 + u OR 2 ) 1/2 + 2. u N For the mass and volume flow follows: u ges = 2. ( 0,325 2. + 0,5 = 0,76%v.M. + 0,1% v.e. 0,15 2 + 0,06 2 + 0,5. 0,14 2 +0,02 2 + 0,15 2 ) 1/2
Uncertainty of measurement during calibration with critical nozzles: The extended standard uncertainty of measurement of the reference standards is fixed by the calibration within a continuous measurement chain related to the PTB Physikalisch- Technische Bundesanstalt. The calculation of the actual volume flow at the unit under test with reference measurement by critical nozzles / critical flow orifices (CFO) is done according to the following relation (equation for the velocity of sound and conservation of mass / continuity equation): Q vol,uut = Q vol,cfo. ρ CFO /ρ uut = F(c(T)). ρ CFO /ρ Prüfling The uncertainty of measurement for calibration with critical nozzles consists of the following factors: uncertainty of measurement u cal of the reference standard calibration, typically u Kal = 0,325%v.M. (Half of the extended measurement uncertainty of typically 0,65%) uncertainty of measurement u c for the dependence of the sonic velocity on temperature typically u c = 0,06% uncertainty of measurement u ρ of density ratio. Mainly the accuracies of pressure and temperature measurement, and furthermore for air the humidity is significant for conversion from conditions at the reference standard to conditions at the unit under test, typically u ρ = 0,14% for mass-flow u ρ = 0,12% for volume-flow uncertainty of measurement u CFO for reference measurement with Laminar Flow Elements. This part of uncertainty includes the standard deviation of the calibration points in regard to polynomial linearisation, as well as an estimation of the short- and long-time drift behaviour between reference measurements. The value in first instance is fixed and will later be adjusted by historical data. u CFO = 0,15% For the extended measurement uncertainty for an orifice follows: u ges = 2. ( u Kal 2 + u c 2 + u ρ 2 + u CFO 2 ) 1/2 For the example volume flow follows: u ges = 2. ( 0,325 2 + 0,06 2 + 0,12 2 + 0,15 2 ) 1/2 = 0,77%v.M. and finally the worst case for the mass flow of humid air is: u ges = 2. ( 0,325 2 + 0,06 2 + 0,14 2 + 0,15 2 ) 1/2 = 0,78%v.M.