Accurate transit time determination and. transfer current parameter extraction

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Accurate transit time determination and transfer current parameter extraction T. Rosenbaum, A. Pawlak, J. Krause, M. Schröter Chair for Electron Devices and Integrated Circuits (CEDIC) University of Technology Dresden Germany Dept. of Electrical and Computer Engin. University of California at San Diego USA mschroter@ieee.org, rosenbau@iee.et.tu-dresden.de http://www.iee.et.tu-dresden.de/iee/eb/eb_homee.html 12 th HICUM Workshop Newport Beach (USA), 2012 MS 1

Outline 1 Motivation 2 Method overview 3 Intrinsic transistor 4 Fit procedure 5 Results 6 Conclusions MS 2

Motivation HICUM/L2 is a charge-based model Motivation physics-based modeling of charge for accurate description of dynamic transistor behavior charge components are being used also in transfer current formulation via GICCR Observation in more advanced technologies: "classical" determination method of transit time from f T measurement appears to be inaccurate or inconsistent classical τ f determination from f T τ f0 (ps) 0.5 0.45 0.4 0.35 τ f parameter extraction Extracted Data Fit 0.3-1.5-1 -0.5 0 0.5 (V) f T (GHz) 300 250 200 150 100 50 Measurement Model f T model playback = -0.5 V = 0.5 V 0 10-1 10 0 10 1 I C (ma) => inaccurate τ f determination or extraction? MS 3

Motivation About this presentation... Goal: develop reliable method for transit time determination and model parameter extraction (20 parameters) transfer current model parameter extraction (13 parameters) Requirements accurate and consistent include impact of parasitic elements and self-heating allows automation (i.e. avoid manual fine tuning) applicable to all process technology types include new HICUM/L2 v2.31 improvements: Barrier term (essential especially for HBTs) Transfer current formulation Verification IHP HBTs with peak (ft, fmax) = (300, 500) GHz MS 4

Method overview Method overview Transit time is associated with the intrinsic transistor portion External elements alter Y-parameters of intrinsic transistor in addition: self-heating needs to be included for high current region => "De-embedding" of external elements and parasitic effects necessary HICUM/L2 equivalent circuit Intrinsic transistor Series resistances Parasitic capacitances Internal base resistance Self-heating network MS 5

Method overview De-embedding procedure Transistor in common-emitter configuration (small-signal EC) express each element or physically associated set of elements by sub-two-port C BCx1 i B r Bx Z BCx B* Z rbi B Goal: Intrinsic transistor C r Cx i C v BE A rbx C BEpar 1 Z jbep A bi E Y i A rcx C js v CE C BEpar 2 r E Z re for sake of simplicity: two-ports of C BCx1 and Z BCx are not shown in figure => various possibilities, above solution is not unique MS 6

Method overview De-embedding procedure Calculate two-port parameters of each sub-two-port (example below) choose suitable description for easy calculation (e.g. Y, Z or A parameters) r E r Z Z E r E re re = r E r E Determine behaviour of total equivalent circuit by means of two-port analysis only simple matrix operations and two-port parameter conversion (e.g. Y A) are needed Z rbi Z jbep A bi E Y i A tot = A bi y2a( Y i ) => perform step by step operations until two-port is fully reproduced MS 7

Method overview Flowchart... steps depend on two-port arrangement of equivalent circuit Flow Main elements A 1 = A bi *y2a(y i ) Intrinsic transistor r Bi Z 2 = Z re +a2z(a 1 ) add Z BCx r E, C BCx2 A 3 = A rbx *z2a(z 2 ) add C BCx1 r Bx, C BEpar1/2, C BCx1 Y tot = a2y(a 3 *A rcx ) r Cx, C js Rearrange equations to calculate Y i Y tot is known from measurements, parasitic elements are known from beforehand extraction => Intrinsic Y-parameters can be obtained! MS 8

Intrinsic transistor Intrinsic transistor Analysis of the HICUM code shows: complete set of derivatives (small-signal elements) are created due to the implementation in Verilog-A (e.g. d(τ f0 ) / d( ) * I Tf ) Code Network Transit time is included within the capacitance C deb, combining τ f0 I{ y i11 + y i21 } ω = C deb + C jei = τ f g m + I Tf + V B'C' C jei => sum of y i11 and y i21 includes τ f as well as other elements MS 9

Fit procedure Fit procedure re-arrange equation for fit I{ y i11 + y i21 } C τ fit ---------------------------------- τf0 + C jei = = τ g m ω f + -------------------------- g m τ f0 with C τf0 = I Tf and g V m Re{ y i12 + y i21 } B'C' equation contains 21 parameters in total => Least square fit is likely to fail Split transit time by separating the low- and high-current transit time portion depletion capacitance dominates at low bias high-current transit time portion Δτ f dominates at high bias => apply fit to smaller subsets => coupling of subsets is required for final solution MS 10

Results Results Transit frequency (SiGe HBT from 130nm IHP process technology) 300 250 HICUM L2.3 Measurement = -0.5 V f T (GHz) 200 150 100 T = 300 K = 0.5 V 50 0 10-2 10-1 10 0 10 1 I C (ma) New extraction method can provide accuracy similar to a manual procedure High current characteristics is usually even more accurate as self heating is included MS 11

Results Transfer current of high-speed HBT (SiGe HBT from 130nm IHP process technology) 10 1 10 0 HICUM L2.3 Measurement = -0.5 V = 0.5 V I C (ma) 10-1 T = 300 K 10-2 0.75 0.8 0.85 0.9 0.95 1 1.05 V BE (V) Results are similar to a procedure with time consuming manual fine tuning MS 12

Results Transit frequency High-voltage SiGe HBT (IHP) transfer current 30 25 HICUM L2.3 Measurement = -5.0 V 10 1 HICUM L2.3 Measurement = -5.0 V f T (GHz) 20 15 10 T = 300 K I C (m A ) 10 0 T = 300 K = 0.5 V 5 0 = 0.5 V 10-1 10 0 10 1 I C (ma) 0.75 0.8 0.85 0.9 V BE (V) => Extraction also suitable for HV-transistors MS 13

Conclusions Conclusions observed discrepancy between measured and modeled transit frequency is due to inconsistent transit time determination from measurements in standard method => τ f cannot be accessed directly using f T problem can be fixed by careful "de-embedding" of intrinsic transistor Y parameters method was shown to be consistent and very accurate with extraction fully adapted to HICUM/L2 v2.31 method was implemented in automated extraction tool adaption to model changes is easy (exchange of equations or transfer function only) still: lot of settings are required to conduct the extraction Issues accuracy depends on accuracy of information on several parasitic elements especially: handling of internal base resistance is difficult => inaccurate settings might render final results useless implementation needs to be changed with each model (eq. or equivalent circuit) change method is generally useful for extractions from device simulation and model development MS 14