FEATURES Ranges 0...30 to 0...±1000 1 or 0...0. to 0... "H O (0... to 0... mbar).. V,..3.7 V, 4...0 ma output Actual mass flow sensing Low differential pressure sensing SERVICE To be used with dry gases only The AWM series is NOT designed for liquid flow and will be damaged by liquid flow through the sensor SPECIFICATIONS ELECTRICAL CONNECTION Maximum ratings Supply voltage Power consumption AWM3...CR all others 8 to 1 V typ. 10 ±0.01 V typ. 100 mw typ. 0 mw typ. 0 mw, max. 60 mw P 1 P Temperature limits Operating - to 8 C Storage -40 to 90 C Mechanical shock 100 g ( drops, 6 axes) Note: 1 denotes standard cubic centimeters per minute Output voltage is ratiometric to supply voltage 1 3 Pin 1: Vout Pin : +Vs Pin 3: GND June 006 / 8 1/6
FLOW SENSOR CHARACTERISTICS 3 V S = C Part no. Flow range (full scale) Pressure range 4 Output voltage Max. flow change @ trim point AWM3100V AWM310V AWM3300V AWM300CR AWM301CR 00.0 V @ 00 30.0 3.4 V @ " H O.0 V @ " H O 1000.0 V @ 1000 ± 1000.0 ±0.1 V " H O.0 0 ±1 ma @ " H O 0. " H O.0 0 ±1 ma @ 0. " H O PERFORMANCE CHARACTERISTICS VOLTAGE OUTPUT VERSIONS (V S = C) Zero offset Repeatability and hysteresis C haracteristics M in. T yp. Max. AWM3100V 0.9 0 AWM310V 0.90 0 10 0.9 0 8 AWM3300V 0.90 0 10.9 3. 0 3.0 AWM3100V, ±0. ( combined) all others ± 0 Temperature effects Offset Span 6 - to 8 C AWM310V ±100 ±0 all others ± - to C AWM3100V -4. 0 AWM310V ±. 0 4. 0 AWM33... -. 0 to 8 C AWM3100V 4. 0 AWM310V ±. 0 4. 0 - AWM33.... 0 Unit V mv 7 Response time 0 3. 0 ms Common mode pressure psi /6 June 006 / 8
PERFORMANCE CHARACTERISTICS CURRENT OUTPUT VERSIONS (V S = C) Zero offset C haracteristics M in. T yp. Max. AWM300CR 3. 7 4. 0 4. 3 AWM301CR 3. 6 4. 0 4. 4 Repeatability and hysteresis (combined) ±0. Non-linearity Temperature effects Offset Span Unit ma 6 - to 8 C ±. 0 ma - to C AWM300CR 4 AWM301CR 3 to 8 C AWM300CR 31 - AWM301CR 3-7 Response time 60 ms 8 External output load 100 to 300 Ohm GAS CORRECTION FACTORS 9 G as type Correction factor (approx.) Helium (He) Hydrogen (H ) Argon (Ar) Nitrogen (N ) Oxygen (O ) Air Nitric oxide (NO) Carbon monoxide (CO) Methane (CH ) 4 Ammonia (NH ) 3 Nitrous oxide ( N O) Nitrogen dioxide (NO ) Carbon dioxide (CO ) 10 0..7 0.9 1 1 3 3 3 10,11 0 Notes: 3 A micron filter is recommended for all devices. 4 Maximum allowable rate of flow change to prevent damage. Temperature shifts in differential pressure devices are mostly due to the density change of the gas over temperature. 6 Shift is relative to C. 7 Initial warm-up time for signal conditioned circuitry is 1 minute max. 8 Output load connected from Vout to GND (current sinking). 9 Gas correction factors are referenced to nitrogen (N ) as calibration gas type. Approximate gas correction factors are provided as guidelines only. Individual gas types may perform differently at temperature extremes and varying flow rates. 10 When sensing Hydrogen (H ) or Helium (He) it may be necessary to power the mass flow sensor using increased supply voltage: Hydrogen typ. 1 V, Helium typ. 1 V 11 Hydrogen (H ) flow measurement requires the use of a special sensor. These devices provide normal operation when sensing hydrogen flow and are designated with an "H" at the end of the order number. June 006 / 8 3/6
OUTPUT FLOW VS INTERCHANGEABILITY V S = C 1 OUTPUT CURVES 4/6 June 006 / 8
OUTPUT FLOW VS INTERCHANGEABILITY V S = C 1 OUTPUT CURVES June 006 / 8 /6
OUTLINE DRAWING 6.3 (0.).8 (0.11) 7.60 (0.30).9 (0.114) 40 (0.0) 8 (0.07).1 (0.0) 4.4 (.14) 8.4 (0.33) P 1 P Note: Positiv flow direction is defined as proceeding from port 1 (P1) to port (P) and results in positive output. mass: approx. 10.8 g 0.6 (0.0) (0.06) 1 3 3.9 (0.94) 30. (0). (0.10) (0.04) 3 (4) 3.6 (0.93).1 (0.0) 7.3 (0.87) 7 (0.0) (0.61) 4.1 (0.16).8 (0.11) dimensions in mm (inches) ORDERING INFORMATION Flow range Dry gas 0...30 AWM310V 0...00 AWM3100V 0...1000 AWM3300V 0...±1000 Pressure range Voltage output Dry gas Current output 0...0. "H O (0... mbar) --- AWM301CR 0... "H O (0... mbar) AWM300CR Sensortechnics reserves the right to make changes to any products herein. Sensortechnics does not assume any liability arising out of the application or use of any product or circuit described herein, neither does it convey any license under its patent rights nor the rights of others. 6/6 June 006 / 8