Basic Semiconductor Physics

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Transcription:

Chihiro Hamaguchi Basic Semiconductor Physics With 177 Figures and 25 Tables Springer

1. Energy Band Structures of Semiconductors 1 1.1 Free-Electron Model 1 1.2 Bloch Theorem 3 1.3 Nearly Free Electron Approximation 4 1.4 Reduced Zone Scheme 8 1.5 Free-Electron Bands (Empty-Lattice Bands) 9 1.6 Pseudopotential Method 12 1.7 k p Perturbation 18 1.8 Density of States 24 2. Cyclotron Resonance and Energy Band Structures 27 2.1 Cyclotron Resonance 27 2.2 Analysis of Valence Bands 35 2.3 Spin-Orbit Interaction 39 2.4 Non-parabolicity of the Conduction Band 48 2.5 Electron Motion in a Magnetic Field and Landau Levels 50 2.5.1 Landau Levels 50 2.5.2 Landau Levels of a Non-parabolic Band 57 2.5.3 Landau Levels of the Valence Bands 61 3. Wannier Function and Effective Mass Approximation 67 3.1 Wannier Function 67 3.2 Effective-mass Approximation 69 3.3 Shallow Impurity Levels 73 3.4 Impurity Levels in Ge and Si 76 3.4.1 Valley-Orbit Interaction 79 3.4.2 Central Cell Correction 81 4. Optical Properties 1 83 4.1 Reflection and Absorption 83 4.2 Direct Transition and Absorption Coefficient 87 4.3 Joint Density of States 89 4.4 Indirect Transition 94 4.5 Exciton 99

4.5.1 Direct Exciton 99 4.5.2 Indirect Exciton 108 4.6 Dielectric Function 110 4.6.1 E 0, E 0 + A 0 Edge 113 4.6.2 Ei and E x + A x Edge 115 4.6.3 E 2 Edge 115 4.6.4 Exciton 116 4.7 Piezobirefringence 118 4.7.1 Phenomenological Theory of Piezobirefringence 118 4.7.2 Deformation Potential Theory 119 4.7.3 Stress-Induced Change in Energy Band Structure 122 Optical Properties 2 127 5.1 Modulation Spectroscopy 127 5.1.1 Electro-optic Effect 127 5.1.2 Franz-Keldysh Effect 128 5.1.3 Modulation Spectroscopy 132 5.1.4 Theory of Electroreflectance and Third-Derivative Form of Aspnes 136 5.2 Raman Scattering 141 5.2.1 Selection Rule of Raman Scattering 146 5.2.2 Quantum Mechanical Theory of Raman Scattering... 151 5.2.3 Resonant Raman Scattering 156 5.3 Brillouin Scattering 160 5.3.1 Scattering Angle 161 5.3.2 Brillouin Scattering Experiments 165 5.3.3 Resonant Brillouin Scattering, 169 5.4 Polaritons 172 5.4.1 Phonon Polaritons 172 5.4.2 Exciton Polaritons 176 5.5 Free-Carrier Absorption and Plasmon 179 Electron Phonon Interaction and Electron Transport 185 6.1 Lattice Vibrations 185 6.1.1 Acoustic Mode and Optical Mode 185 6.1.2 Harmonie Approximation 190 6.2 Boltzmann Transport Equation 198 6.2.1 Collision Term and Relaxation Time 200 6.2.2 Mobility and Electrical Conductivity 203 6.3 Scattering Probability and Transition Matrix Element... 207 6.3.1 Transition Matrix Element 207 6.3.2 Deformation Potential Scattering (Acoustic Phonon Scattering) 210 6.3.3 Ionized Impurity Scattering 212 6.3.4 Piezoelectric Potential Scattering 216

XI 6.3.5 Non-polar Optical Phonon Scattering 219 6.3.6 Polar Optical Phonon Scattering 220 6.3.7 Inter-Valley Phonon Scattering 225 6.3.8 Deformation Potential in Degenerate Bands 225 6.3.9 Theoretical Calculation of Deformation Potentials... 227 6.3.10 Electron-Electron Interaction and Plasmon Scattering 232 6.3.11 Alloy Scattering 239 6.4 Scattering Rate and Relaxation Time 240 6.4.1 Acoustic Phonon Scattering 244 6.4.2 Non-polar Optical Phonon Scattering 247 6.4.3 Polar Optical Phonon Scattering 249 6.4.4 Piezoelectric Potential Scattering 250 6.4.5 Inter-Valley Phonon Scattering 251 6.4.6 Ionized Impurity Scattering 252 6.4.7 Neutral Impurity Scattering 253 6.4.8 Plasmon Scattering 254 6.4.9 Alloy Scattering 254 6.5 Mobility 255 6.5.1 Acoustic Phonon Scattering 256 6.5.2 Non-Polar Optical Phonon Scattering 256 6.5.3 Polar Optical Phonon Scattering 258 6.5.4 Piezoelectric Potential Scattering 259 6.5.5 Inter-Valley Phonon Scattering 259 6.5.6 Ionized Impurity Scattering 260 6.5.7 Neutral Impurity Scattering 261 6.5.8 Alloy Scattering 261 7. Magnetotransport Phenomena 263 7.1 Phenomenological Theory of the Hall Effect 263 7.2 Magnetoresistance Effects 269 7.2.1 Theory of Magnetoresistance 269 7.2.2 General Solutions for a Weak Magnetic Field 270 7.2.3 Case of Scalar Effective Mass 271 7.2.4 Magnetoresistance 273 7.3 Shubnikov-de Haas Effect 277 7.3.1 Theory of Shubnikov-de Haas Effect 277 7.3.2 Longitudinal Magnetoresistance Configuration 281 7.3.3 Transverse Magnetoresistance Configuration 283 7.4 Magnetophonon Resonance 287 7.4.1 Experiments and Theory of Magnetophonon Resonance 287 7.4.2 Various Types of Magnetophonon Resonance 294 7.4.3 Magnetophonon Resonance under High Electric and High Magnetic Fields 299 7.4.4 Polaron Effect 304

XII 8. Quantum Structures 309 8.1 Historical Background 309 8.2 Two-Dimensional Electron Gas Systems 310 8.2.1 Two-Dimensional Electron Gas in MOS Inversion Layer 310 8.2.2 Quantum Wells and HEMT 319 8.3 Transport Phenomena in a Two-Dimensional Electron Gas... 326 8.3.1 Fundamental Equations 326 8.3.2 Scattering Rate 329 8.3.3 Mobility of a Two-Dimensional Electron Gas 354 8.4 Superlattices 361 8.4.1 Kronig-Penney Model 361 8.4.2 Effect of Brillouin Zone Folding 363 8.4.3 Tight Binding Approximation 366 8.4.4 sp 3 s* Tight Binding Approximation 368 8.4.5 Energy Band Calculations for Superlattices 370 8.4.6 Second Nearest-Neighbor sp 3 Tight Binding Approximation 375 8.5 Mesoscopic Phenomena 381 8.5.1 Mesoscopic Region 381 8.5.2 Definition of Mesoscopic Region 385 8.5.3 Landauer Formula and Büttiker-Landauer Formula... 387 8.6 Research in the Mesoscopic Region 392 8.7 Aharonov-Bohm Effect (AB Effect) 392 8.8 Ballistic Electron Transport 393 8.9 Quantum Hall Effect 396 8.10 Coulomb Blockade and Single Electron Transistor 407 Appendices 415 A Delta Function and Fourier Transform 415 A.l Dirac Delta Function 415 A.2 Cyclic Boundary Condition and Delta Function 417 A.3 Fourier Transform 419 B Uniaxial Stress and Strain Components in Cubic Crystals... 421 C Boson Operators 424 D Random Phase Approximation and Lindhard Dielectric Function 428 E Density Matrix 430 References 433 Index 445 About the Author 451