Joshua Whittam, 1 Andrew L. Hector, 1 * Christopher Kavanagh, 2 John R. Owen 1 and Gillian Reid 1

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Supporting Information: Combination of Solid State and Electrochemical Impedance Spectroscopy to Explore Effects of Porosity in Sol-Gel Derived BaTiO3 Thin Films Joshua Whittam, 1 Andrew L. Hector, 1 * Christopher Kavanagh, 2 John R. Owen 1 and Gillian Reid 1 1 - University of Southampton, Chemistry, Highfield, SO17 1BJ, Southampton, UK. 2 - Deregallera Ltd, Unit 2 De Clare Court, Pontygwindy Industrial Estate, Caerphilly CF83 3HU, UK S1

Table S1: Literature survey of sol-gel derived BaTiO3 films in which solid state impedance has been used to measure the dielectric constant of the film. Deposition method Film thickness/ μm Dielectric constant Number of coatings Annealing temperature / C Spin Coated 1 0.11 85 4 600 Dip Coating 2 0.25 230 7 650 Spin Coated 3 0.38 370 3 700 Dip Coating 4 0.40 390 3 850 Spin Coated 5 0.40 370 3 700 Dip Coating 6 0.50 800 7 650 Spin Coated 7 0.50 318 5 800 Dip Coating 2 0.58 1000 20 650 Spin Coated 8 2.50 521 12 750 Dip Coating 4 3.00 630 10 850 S2

Table S2 Integration of the EDS map shown in Figure 2c performed on the region of a pinhole in a BaTiO3 film. Element Oxygen Silicon Titanium Barium Platinum Total% Weight% 12.6 5.1 15.5 43.6 22.8 99.6 Atom% 45.0 10.3 18.5 18.1 6.7 98.5 Figure S1 Images of BaTiO3 thin films deposited with a single dip from 1 day aged sols containing (left to right) 2, 4, 8 and 15 ml deionised H2O and annealed at 750 C. S3

Figure S2 Optical microscopy of BaTiO3 thin films deposited with a single dip and annealed at 750 C at 20 (left) and 100 (right) magnification): (a) and (b) 1 ml of H2O, 1 day aged at 250 rpm; (c) and (d) 4 ml of H2O, 1 day aged at 250 rpm; (e) and (f) 4 ml of H2O, 6 days aged at 250 rpm; (g) and (h) 4 ml of H2O, 6 days aged at 1000 rpm. S4

Figure S3 (a) Thin films of BaTiO3 produced from sols containing 4 ml of H2O aged for 1, 2, 3, 4, 5, 6, 7, 8 or 9 days (top left to bottom right) and annealed at 750 C. The equivalent sequence with stirring at 1000 rpm is shown in (b). Figure S4 Cross sectional SEM of BaTiO3 films produced with 1 (top left), 2 (top centre), 3 (top right), 4 (bottom left) or 5 (bottom right) iterations of dip and anneal 750 C. S5

Figure S5 Image of Au contacts evaporated onto a 3 dip and anneal cycle BaTiO3 film with diameters of (a) 0.4 mm, (b) 0.5 mm, and (c) 0.6 mm. S6

Table S3 The capacitances and calculated effective permittivity of a 3 dip and anneal cycle BaTiO3 film extracted by fitting the Nyquist and Bode plots of the impedance data using ZView. Pad Size Diameter / mm Area / mm 2 Capacitance / nf Areal Capacitance / μf cm -2 Effective Permittivity 0.4 mm (1) 0.420 0.139 0.584(11) 0.421 286 0.4 mm (2) 0.420 0.139 0.55(3) 0.398 270 0.4 mm (3) 0.420 0.139 0.582(12) 0.420 285 0.5 mm (1) 0.515 0.208 0.908(17) 0.436 295 0.5 mm (2) 0.515 0.208 0.914(19) 0.439 297 0.5 mm (3) 0.515 0.208 0.914(19) 0.439 297 0.6 mm (1) 0.615 0.297 1.31(17) 0.442 296 0.6 mm (2) 0.615 0.297 1.30(19) 0.436 296 0.6 mm (3) 0.615 0.297 1.25(16) 0.420 285 Figure S6 The change in capacitance (a) and the effective permittivity (b) as a function of frequency. S7

Table S4 The capacitances and calculated effective permittivity of a 3 dip and anneal cycle BaTiO3 film extracted averaging the capacitance across and applied frequency range (SI, Figure S16). Pad Size Diameter / mm Area / mm 2 Capacitance / nf Areal Capacitance / μf cm -2 Effective Permittivity 0.4 mm (1) 0.420 0.139 0.508 0.367 249 0.4 mm (2) 0.420 0.139 0.461 0.333 225 0.4 mm (3) 0.420 0.139 0.457 0.330 223 0.5 mm (1) 0.515 0.208 0.781 0.375 254 0.5 mm (2) 0.515 0.208 0.783 0.376 255 0.5 mm (3) 0.515 0.208 0.781 0.380 258 0.6 mm (1) 0.615 0.297 1.13 0.380 257 0.6 mm (2) 0.615 0.297 1.11 0.374 253 0.6 mm (3) 0.615 0.297 1.07 0.360 244 S8

Figure S7 Fittings to the Nyquist (a) and Bode (b) plots of the solid state impedance data for a BaTiO 3 thin film produced by dipping and annealing at 750 C 3 times: using a 0.4 mm pad diameter. S9

Figure S8 Fittings to the Nyquist (c) and Bode (d) plots of the solid state impedance data for a BaTiO 3 thin film produced by dipping and annealing at 750 C 3 times: using a 0.5 mm pad diameter. S10

Figure S9 Fittings of the Nyquist (e) and Bode (f) plots of the solid state impedance data for a BaTiO 3 thin film produced by dipping and annealing at 750 C 3 times: using a 0.4 mm pad diameter. S11

Figure S10 Cyclic voltammograms of the Si/Pt substrate, with a scan rate of 100 mv s -1, a Pt gauze counter electrode and a Hg/HgSO 4 reference electrode were used with a non- aerated 0.5 mol dm -3 K 2SO 4 electrolyte. Figure S11 Equivalent circuit describing a porous dielectric film on a platinum electrode, where Rs is uncompensated solution resistance, CDL is double layer capacitance, CD is dielectric capacitance, RP is pore resistance and RD is dielectric resistance. S12

Figure S12 Nyquist plots (left) and Bode plots (right) of the electrochemical impedance data for BaTiO3 films on Pt film substrates produced by dipping and annealing at 750 C: (a) and (b) 1 cycle; (c) and (d) 2 cycles; (e) and (f) 3 cycles; (g) and (h) 4 cycles; (i) and (j) 5 cycles. Data were collected in 0.5 mol dm -3 K2SO4 (20 ml) with a Pt gauze counter electrode and a Hg/HgSO4 (sat. K2SO4) reference electrode. A sinusoidal potential with 10 mv amplitude was applied at frequencies from 0.1 MHz to 10 mhz. The area exposed to the electrolyte is indicated, fittings are shown in Figs. S11-S15. S13

Figure S13 Fits to the Nyquist (left) and Bode (right) plots of the electrochemical impedance for BaTiO3 films on Pt film substrates produced by 1 cycle of dipping and annealing at 750 C (SI, Figure S10a S10b). S14

Figure S14 Fits to the Nyquist (left) and Bode (right) plots of the electrochemical impedance for BaTiO3 films on Pt film substrates produced by 2 cycles of dipping and annealing at 750 C (SI, Figure S10c-S10d). S15

Figure S15 Fits to the Nyquist (left) and Bode (right) plots of the electrochemical impedance for BaTiO3 films on Pt film substrates produced by 3 cycles of dipping and annealing at 750 C (Figure S10e S10f). S16

Figure S16 Fits to the Nyquist (left) and Bode (right) plots of the electrochemical impedance for BaTiO3 films on Pt film substrates produced by 4 cycles of dipping and annealing at 750 C (Figure S10g S10h). S17

Figure S17 Fits to the Nyquist (left) and Bode (right) plots of the electrochemical impedance for BaTiO3 films on Pt film substrates produced by 5 cycles of dipping and annealing at 750 C (Figure S10i S10j). S18

Table S5 Fitted parameters from the electrochemical impedance of BaTiO3 films on Pt film substrates produced by dipping and annealing at 750 C 1, 2, 3, 4 or 5 times. Data were collected in 0.5 mol dm -3 K2SO4 (20 ml) with a Pt gauze counter electrode and a Hg/HgSO4 (sat. K2SO4) reference electrode. A sinusoidal potential with 10 mv amplitude was applied at frequencies from 0.1 MHz to 10 mhz. The area exposed to the electrolyte is indicated. Fits are shown in Figs. S11-S15. Number of coating Iterations Area exposed / cm 2 Dielectric resistance / MΩ Solution resistance / Ω Capacitance / μf Areal Capacitance / μf cm -2 1 1.87 0.823(6) 21.020(16) 20.3(3) 10.8 1 1.26 2.028(18) 17.760(16) 11.69(12) 9.28 1 0.70 3.45(4) 16.010(24) 6.88(10) 9.82 2 3.12 0.633(6) 8.220(9) 20.20(3) 6.47 2 2.31 1.232(11) 11.960(10) 14.513(16) 6.28 2 1.80 2.08(3) 13.060(13) 10.887(12) 6.05 3 2.86 0.619(5) 10.950(2) 22.64(3) 7.92 3 2.20 0.980(5) 8.97(10) 18.626(16) 8.47 3 1.45 2.07(2) 11.79(2) 12.092(16) 8.37 4 3.84 0.365(3) 20.92(2) 32.18(6) 8.38 4 2.64 0.868(8) 7.52(9) 23.80(3) 9.02 4 1.90 2.99(8) 9.99(16) 14.88(3) 7.83 5 4.48 0.2371(14) 6.835(6) 36.24(4) 8.09 5 2.16 0.92(14) 11.090(16) 18.49(3) 8.56 5 1.60 1.59(6) 13.12(4) 13.62(5) 8.52 S19

Figure S18 Flowchart describing the production of a BaTiO3 precursor sol. S20

References (1) Huang, L.; Chen, Z.; Wilson, J. D.; Banerjee, S.; Robinson, R. D.; Herman, I. P.; Laibowitz, R.; O Brien, S. Barium Titanate Nanocrystals and Nanocrystal Thin Films: Synthesis, Ferroelectricity, and Dielectric Properties. J. Appl. Phys. 2006, 100 (3), 034316 (10 pages). (2) Hayashi, T.; Oji, N.; Maiwa, H. Film Thickness Dependence of Dielectric Properties of BaTiO3 Thin Films Prepared by Sol-Gel Method. Jpn. J. Appl. Phys. 1994, 33 (Part 1, No. 9B), 5277 5280. (3) Sharma, H. B.; Mansingh, A. Phase Transition in Sol-Gel-Derived Barium Titanate Thin Films. J. Phys. D. Appl. Phys. 1998, 31 (13), 1527 1533. (4) Kumazawa, H.; Masuda, K. Fabrication of Barium Titanate Thin Films with a High Dielectric Constant by a Sol-Gel Technique. Thin Solid Films 1999, 353, 144 148. (5) Sharma, H. B.; Sarma, H. N. K.; Mansingh, A. Ferroelectric and Dielectric Properties of Sol-Gel Processed Barium Titanate Ceramics and Thin Films. J. Mater. Sci. 1999, 34, 1385 1390. (6) Hayashi, T.; Ohji, N.; Hirohara, K.; Fukunaga, T.; Maiwa, H. Preparation and Properties of Ferroelectric BaTiO3 Thin Films by Sol-Gel Process. Jpn. J. Appl. Phys. 1993, 32 (Part 1, No. 9B), 4092 4094. (7) Lee, B.; Zhang, J. Preparation, Structure Evolution and Dielectric Properties of BaTiO3 Thin Films and Powders by an Aqueous Sol gel Process. Thin Solid Films 2001, 388 (1 2), 107 113. (8) Kamalasanan, M. N.; Kumar, N. D.; Chandra, S. Dielectric and Ferroelectric Properties of BaTiO3 Thin Films Grown by the Sol-Gel Process. J. Appl. Phys. 1993, 74 (9), 5679 5686. S21