29 4 Vol. 29 No. 4 2009 7 Tribology July, 2009 1, 1, 2 (1., 200240; 2., 730000) : (CNTs), CNTs, (AFM ) ( SEM ), X (XPS), UMT - 2MT : 3 - (MPTS),., 0. 85 0. 10,, : ; ; ; : TH117. 1 : A : 1004-0595 (2009) 04-0319 - 05 (MEMS), [ 1 ]. MEMS,, MEMS [ 2-4 ].,, 1991 NEC Iijima [ 5 ] (CNTs), CNTs, [ 6-7 ]., [ 8-9 ]., CNTs, CNTs, CNTs, CNTs, ( rare earth, RE) ( - 4f 0-14 ) [ 10 ],, CNTs [ 11 ], [ 12-13 ]. CNTs,, GCr15 1 1. 1 : (CVD) ( ) ; AR, ;, 16. 8 M cm.., 1. 2 1. 0 cm 1. 0 cm, : : 2008-09 - 01; : 2008-12 - 08; :, e - mail: xhcheng@ sjtu. edu. cn : (50775139, 50475023). : (1961 - ),,,,
320 29 [V ( ) V ( ) = 3 1 ] 100 0. 5 h, 2 mol/ L 100 2 h, ; 1 2, 0. 3 wt% 20 m in, 120, N, N - (DMF) (100 W ) 12 h, ; 2m in, ; Pirahan (H 2 SO 4 H 2 O 2 = 70 30, V /V ) 30 m in, N 2 ;, 0. 5 mmol/l. /,,, 120 1 h, MPTS (MPTS - SAM s) ; 30% 80 120 m in,, N 2, MPTS - SAM s ;, 24 h,, N 2, OCA - 20 PH I - 5702 X (XPS), Mg - K, 29. 4 ev, 284. 6 ev. Nanoscope - III (AFM ), MPTS - UMT - 2MT, 3 mm GCr15, 5 mm, 500 mn 180 mm /m in. 2 2. 1 1., 1, 31, 66 70. 0,,, 70 31. MPTS - SAM s/cnt 66,, 1 Table 1 W a ter con tact angles on the surfaces of gla ss and m od if ied gla ss Surface Si 1 MPTS - SAM s 31 Oxidized MPTS - SAM s 70 MPTS - SAM s/cnt 66 Contac angle / ( ) 1 MPTS - SAM s MPTS - SAM s MPTS - SAM s/cnt XPS. XPS, 163. 2eV [ 1 ( a) ], MPTS S ( - SH ) [ 14 ], SAM s, 1 ( b) 168. 4 ev Fig. 1 XPS spectra of ( a) S2p ofmpts SAM coated on silicon substrate, ( b) S2p of oxidized MPTS SAM coated on silicon substrate ( c) La3d in Lanthanum - based thin film 1 ( a) S2p ( b) S2p ( c) La3d XPS
4, : 321 S2p, - SO 3 H. 1 ( c), 835. 00 ev, 838. 85 ev, 851. 79 ev 855. 22 ev La3d [ 15 ],. LaCl 3 853. 00 ev 856. 70 ev La3d ( 2),MPTS - SAM s/cnt La3d, - SO 3 H [ 16 ]. Fig. 2 XPS spectrum of La3d in LaCl 3 2 XPS AFM, 3. MPTS - SAM s [ 3 ( a) ], 0. 527 nm.,, 0. 2 nm, - SO 3 H - SH, [ 16 ]. SEM ( 4 ),,,,, 2. 2 UMT - 2MT - MPTS - SAM MPTS - SAM, :,, 80, 0. 85.,, MPTS - SAM 0. 19, 280 MPTS - SAM, 300,,. MPTS - SAM 500. 0. 1, 2 000 0. 23, 4 800, 0. 85,,
322 29 5, MPTs, MPTs,. 5 ( c) SEM,,, MPTS,, MPTS - SAM s. ( - 4 f 0-14 ) 4f, [ 17 ]. MPTS - SAM s, Fig. 5 SEM m icrographs ofmpts ( a), CNT composite film at a low magnification ( b), and CNT composite film at a high magnification ( c) sliding against steel ball after 500 passes 5 ( a) ( b) ( c) SEM,,,,, ; 3 a. AFM SEM, MTPS - SAM s b., : [ 1 ],. [ J ]., 2004, 161 (1) : 87-89. Shang - guan Q Q, Cheng X H. Studies of tribological p roperties of m icro - electro - mechanical system s and its surface lubrication[ J ]. Lubrication Engineering, 2004, 161 ( 1) : 87-89. [ 2 ],,,. - [ J ]., 2000, 20 (4) : 313-316. Hu Y Z, W ang H, Zhou K, et al. Superlubricity, interfacial friction and dissipation - some aspects on fundamental study of friction[ J ]. Tribology, 2000, 20 (4) : 313-316. [ 3 ],,,. / [ J ]., 2005, 25 (3) : 283-288.
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