DEVELOPMENT OF HIGH-STRAIN LOW-HYSTERESIS ACTUATORS USING ELECTROSTRICTIVE LEAD MAGNESIUM NIOBATE (PMN)

Similar documents
BIASED PZT MATERIALS FOR ACOUSTIC TRANSDUCERS

ONR Grant No. N C Fabrication of Electrostrictive Ceramic Rings for Navy Sonar Transducers

AN X-RAY DIFFRACTION STUDY OF PMN PT CERAMICS IN THE REGION OF THE RELAXOR TRANSITION

Temperature Dependence of the Dielectric, Elastic and Piezoelectric Material Constants of Lead Zirconate Titanate Ceramics

Piezoelectric Resonators ME 2082

Non-linear Properties of Piezoelectric Ceramics

IMECE SINGLE CRYSTAL PIEZOELECTRIC ACTUATORS FOR ADVANCED DEFORMABLE MIRRORS

Transduction Based on Changes in the Energy Stored in an Electrical Field

Dielectric Properties of Two-Stage Sintered PMN-PT Ceramics Prepared by Corundum Route

Ferroelectric Ceramic Technology for Sensors. Jim McIntosh Ceramic Operations Manager PCB Piezotronics

PIEZOELECTRIC TECHNOLOGY PRIMER

DAMPING CONTROL OF A PZT MULTILAYER VIBRATION USING NEGATIVE IMPEDANCE CIRCUIT

Dielectric, piezoelectric and pyroelectric properties of PMN-PT (68:32) system

APPLICATION OF PIEZOELECTRICS TO SMART STRUCTURES

Advanced Piezoelectric Single Crystal Based Actuators

Piezo Theory: Chapter 1 - Physics & Design

Piezo materials. Actuators Sensors Generators Transducers. Piezoelectric materials may be used to produce e.g.: Piezo materials Ver1404

Epitaxial piezoelectric heterostructures for ultrasound micro-transducers

Supporting Information

Ferroelectricity. Phase transition. Material properties. 4/12/2011 Physics 403 Spring

The electric field induced strain behavior of single. PZT piezoelectric ceramic fiber

Ferroelectricity. Phase transition. Material properties

ACOUSTIC EMISSION MEASUREMENTS ON PIEZOELECTRIC/ FERROELECTRIC MATERIALS

The strain response of silicone dielectric elastomer actuators

Effect of grain size on the electrical properties of Ba,Ca Zr,Ti O 3 relaxor ferroelectric ceramics

Micro-Brilouin scattering study of field cooling effects on ferroelectric relaxor PZN-9%PT single crystals

Laser Interferometric Displacement Measurements of Multi-Layer Actuators and PZT Ceramics

Classification of Dielectrics & Applications

INTRODUCTION TO PIEZO TRANSDUCERS

Processing and characterization of ferroelectric thin films obtained by pulsed laser deposition

1990. Temperature dependence of soft-doped / hard-doped PZT material properties under large signal excitation and impact on the design choice

Addition 1. Shear Stack Piezoelectric Elements and Shear Effect Basics

Depolarization of a piezoelectric film under an alternating current field

Ferroelectric materials contain one or more polar axes along which a spontaneous

INVESTIGATION OF TEMPERATURE DEPENDENCES OF ELECTROMECHANICAL PROPERTIES OF PLZT CERAMICS

Advanced. piezoelectric. materials. Science and technology. Edited by. Kenji Uchino WOODHEAD PUBLISHING. Oxford Cambridge Philadelphia New Delhi

INF5490 RF MEMS. LN03: Modeling, design and analysis. Spring 2008, Oddvar Søråsen Department of Informatics, UoO

crystals ISSN

Relaxor characteristics of ferroelectric BaZr 0.2 Ti 0.8 O 3 ceramics

Piezoelectric Composites as Bender Actuators

Lecture 19. Measurement of Solid-Mechanical Quantities (Chapter 8) Measuring Strain Measuring Displacement Measuring Linear Velocity

Piezoelectric Materials and Devices

MCE603: Interfacing and Control of Mechatronic Systems

Available online at ScienceDirect. Physics Procedia 70 (2015 )

Microstructure, Ferroelectric and Piezoelectric Properties of PZT-PMnSbN Ceramics

Improving the dielectric and piezoelectric properties of screen-printed Low temperature PZT/polymer composite using cold isostatic pressing

Naval Undersea Warfare Center Division Newport, Rhode Island

The dynamic method of determination of the piezoelectric hydrostatic coefficients

Ferroelectrics. Disordered Ferroelectrics Relaxors.

The below identified patent application is available for licensing. Requests for information should be addressed to:

COURSE OUTLINE. Introduction Signals and Noise Filtering Sensors: Piezoelectric Force Sensors. Sensors, Signals and Noise 1

Lecture 20. Measuring Pressure and Temperature (Chapter 9) Measuring Pressure Measuring Temperature MECH 373. Instrumentation and Measurements

Highly piezoelectric, thermal stable ferroelectrets from cyclic olefin copolymer. Yan Li, Hui Wang, Changchun Zeng ANTEC 2015, Orlando

Domain switching and electromechanical properties of pulse poled Pb Zn 1Õ3 Nb 2Õ3 O 3 PbTiO 3 crystals

THERMAL DEGRADATION AND AGING OF HIGH TEMPERATURE PIEZOELECTRIC CERAMICS

Title. Author(s)H. H. PAN; C.K. CHIANG; R.H. YANG; Y.H. WU; C.S. CHA. Issue Date Doc URL. Type. Note. File Information CONTAINING SLAG

Optimisation of interdigitated electrodes for piezoelectric actuators and active fibre composites

Piezoelectric transducers

PERFORMANCE OF HYDROTHERMAL PZT FILM ON HIGH INTENSITY OPERATION

Design and analysis of ultrasonic horn for USDC (Ultrasonic/Sonic Driller/Corer)

DIELECTRIC AND TUNABLE BEHAVIOR OF LEAD STRONTIUM TITANATE CERAMICS AND COMPOSITES

Smart elastomers a touch of robotics

High speed and quick response precise linear stage system using V-shape transducer ultrasonic motors

Pre-stressed Curved Actuators: Characterization and Modeling of their Piezoelectric Behavior

CHARACTERIZATION OF PIEZOELECTRIC ACTUATORS USED FOR SRF CAVITIES ACTIVE TUNING AT LOW TEMPERATURE

Dielectric Properties of Solids

Effect of Domain Wall Motion and Phase Transformations on Nonlinear Hysteretic Constitutive Behavior in Ferroelectric Materials

I. INTRODUCTION II. SAMPLE PREPARATION JOURNAL OF APPLIED PHYSICS VOLUME 92, NUMBER 5 1 SEPTEMBER

THICK-FILM THERMALLY EXCITED RESONATOR FOR MASS FLOW MEASUREMENT. D. Crescini, D. Marioli and A. Taroni

Degradation of Piezoelectric Materials for Energy Harvesting Applications

Investigations of properties of ceramic materials with perovskite structure in chosen electronic applications

Panadda Sittiketkorn, Sarawut Thountom and Theerachai Bongkarn*

7. CONCLUSIONS & SCOPE

Theerachai Bongkarn 1, Naratip Vittayakorn 2 and Gobwute Rujijanagul 3. Phitsanulok 65000, Thailand. Chiang Mai Thailand

«Modelling of piezoelectric actuators : an EMR approach»

Validation of High Displacement Piezoelectric Actuator Finite Element Models

DEVELOPMENT OF A BAR-SHAPED ULTRASONIC MOTOR FOR MULTI-DEGREES OF FREEDOM MOTION

Lead Magnesium Niobate

Thin Film Bi-based Perovskites for High Energy Density Capacitor Applications

User s Manual. STUDY OF DIELECTRIC CONSTANT Model: DEC-01

VIBRATION CONTROL OF RECTANGULAR CROSS-PLY FRP PLATES USING PZT MATERIALS

Ocean World sampling and data communication through significant ice depths

DEVELOPMENT OF DROP WEIGHT IMPACT TEST MACHINE

ME 515 Mechatronics. Overview of Computer based Control System

Time temperature profiles of multi-layer actuators

Piezo Engineering Primer

THICK FILM DIELECTRICS

Non-Linear Finite Element Modeling of THUNDER Piezoelectric Actuators

REPORT DOCUMENTATION PAGE

7.Piezoelectric, Accelerometer and Laser Sensors

Piezoelectric sensing and actuation CEE575

File Name: Supplementary Movie 1 Description: An electronic watch is powered and a capacitor is charged quickly while a TENG works in high vacuum.

Final Program Report

Ferroelectric Materials and Their Applications

Principles of Active Vibration Control: Piezoelectric materials

BENCHMARKING OF PIEZOCERAMIC MATERIALS FOR GENERATOR APPLICATION

Electric Field- and Temperature-Induced Phase Transitions in High-Strain Relaxor- Based Ferroelectric Pb(Mg1 /3Nb2/3)1 - xtixo3 Single Crystals

Thermal deformation compensation of a composite beam using piezoelectric actuators

Fabrication and performance of d 33 -mode lead-zirconate-titanate (PZT) MEMS accelerometers

Performance of tonpilz transducers with segmented piezoelectric stacks using materials with high electromechanical coupling coefficient

Transcription:

Proc. 3 rd CanSmart Workshop on Smart Materials and Structures, 28-29 Sep. (2) p.31 DEVELOPMENT OF HIGH-STRAIN LOW-HYSTERESIS ACTUATORS USING ELECTROSTRICTIVE LEAD MAGNESIUM NIOBATE (PMN) D.F. Waechter, D. Liufu, M. Camirand, R. Blacow and S.E. Prasad Sensor Technology Limited P.O. Box 97 Collingwood, Ontario Canada L9Y 3Z4 ABSTRACT This paper describes the development of high-strain, low-hysteresis actuators using the lead magnesium niobate composition.9pmn-.1pt. The material was fabricated using an economical direct synthesis technique, similar to that used for conventional PZT ceramics. In.9PMN-.1PT a large electrostrictive effect occurs near the broad maxima of the dielectric permittivity. The samples reported here exhibited a strain of over.12% at a field of 3.5 MV/m and the maximum dielectric constant at 38 o C and 1 Hz was over 3,. The maximum field-dependent d 33 occurred near.4 MV/m and had a value of 1776 pc/n. The PMN material is suitable for smart structure applications that require precision actuation with low hysteresis. PMN samples have been fabricated in a variety of configurations including disks, plates, tubes and multi-layer stacks. This paper presents electrical, piezoelectric and mechanical data for single-layer samples and for a multi-layer stack. INTRODUCTION For the last several years, actuators for smart structure systems have been primarily based on piezoelectric ceramics using lead zirconate titanate (PZT). While this material is readily available in a variety of formulations that can be tailored to particular applications, there are certain gaps in the material property space that may be better filled by other materials. In particular, it is well known that hard PZTs have small hysteresis and small d 33, while the softer formulations have higher hysteresis and higher d 33. The choice between these formulations typically depends on whether high precision or high displacement is the primary concern, although other considerations such as Currie temperature and dissipation factor often come into play. There currently exists a need for an actuation material that simultaneously achieves both high strain and low hysteresis. Electrostrictive PMN is a leading candidate to fill this need.

PMN is a relaxor perovskite that achieves high strain and low hysteresis near a diffuse Currie transition (ferroelectric to paraelectric). In recent years PMN materials have been extensively studied for sonar applications where a tenfold increase in field-limited energy density compared to similar PZT-based transducers can be achieved (Lindberg, 1996). PMN ceramics are usually combined with a small quantity of ferroelectric lead titanate which determines the temperature, T m, at which the real part of the dielectric permittivity is a maximum. Sensor Technology Limited recently introduced its BM6 material which consists of.9pmn +.1 PT and has a T m value of 38 o C. This material is the focus of the present work, although other formulations with lower and higher T m are also being developed by the company. Dielectric and piezoelectric properties of the material as well as strain and hysteresis curves for a single layer disk and a multi-layer stack are presented. EXPERIMENT.9PMN +.1 PT ceramic pieces were fabricated in a 25-kg batch using conventional ceramic fabrication techniques. The precursor oxides were combined in powder form and then underwent standard operations of milling and calcining. This was followed by further milling, pressing, bisquing and firing. Surface machining was then performed and silver metallization was applied by screen printing and firing. Unlike piezoelectric ceramics, the electrostrictive PMN does not require poling. The direct synthesis approach described above is a considerable simplification over the commonly used columbite process developed by the Materials Research Laboratory of the Pennsylvania State University (Swartz, 1984). In the latter process MgO and Nb 2 O 5 reagents are pre-reacted to form an intermediate MgNb 2 O 6 phase having the columbite structure. This is then further reacted with PbO to form PMN. The resulting material should have very low concentrations of the undesired pyrochlore since the columbite structure is closer to that of a perovskite than a pyrochlore. However the process is considerably more complex and expensive than the direct synthesis approach used here. Samples for strain and dielectric property characterization were disk shaped with 1 mm diameter and 1 mm thickness. The samples for biased resonance tests were designed to isolate a particular resonance from competing modes. These included disks with 2 mm diameter and 1 mm thickness, 12x3x1 mm plates and.8x.8x3 mm bars. A stack actuator was fabricated using square elements with 25 x 25 mm 2 surface area and.5 mm thickness. 4 such elements were assembled into a 2 mm tall stack using SensorTech s proprietary integrated actuator driver (IAD) technology (Jones et. al., 2). The dielectric constant and dissipation factor were measured as a function of temperature and frequency using a Stanford Research Systems Model SR715 LCR meter. The biased resonance technique (Sherrit et. al., 1999) was used to determine the dynamic coupling coefficients. Strain vs. field curves for a disk sample were measured using a linear variable differential transformer (LVDT) coupled to a computer and voltage supply as shown in fig. 1a. A similar arrangement was used to measure displacement vs. voltage curves for the stack actuator in both the direction parallel to the electric field, as shown in fig. 1b, and perpendicular to the field, as shown in fig 1c.

RESULTS Dielectric Measurements The dielectric constant and dissipation factor as a function of temperature are shown for three different frequencies in fig. 2. At 1 Hz the dielectric constant reaches a peak of over 3, at 38 o C. The dielectric constant decreases slightly with increasing frequency in the low temperature region but is frequency independent at higher temperatures. The dissipation factor shows considerable variation with temperature and decreases with decreasing frequency. The low frequency dissipation factor near T m is similar to a soft PZT (~2%) but lower and higher values occur for higher and lower temperatures respectively. Quasi-Static Strain Measurements A quasi-static strain vs. field curve measured for a 1 mm thick disk sample is shown in fig. 3. The maximum strain at 3.5 MV/m was over.12% and the linear hysteresis at half the maximum field was only ~ 1%. By differentiating the strain curve it is possible to deduce a field-dependent d 33. The resulting curve is shown in fig. 4 and has a peak value of 1776 pc/n. Displacement vs. voltage curves for the PMN stack actuator are shown in fig. 5. The upper curve shows the voltage induced expansion that occurs in the direction of the electric field as measured using the configuration of fig. 1b, while the lower curve shows the voltage induced contraction that occurs in the direction perpendicular to the electric field as measured using the configuration of fig. 1c. The maximum deflection in the parallel case is 1 :m at ±2 V. The ratio of the perpendicular contraction to the parallel expansion is.46 and the linear hysteresis of both curves is somewhat greater than that observed in fig. 3. It should be noted however that the maximum voltage for the stack corresponds to a field of only.4 MV/m and the results are consistent with a general observation in these materials that the linear hysteresis is larger for smaller peak fields. The maximum strain parallel to the field is.5% which is consistent with the fig. 3 results at.4mv/m. By comparison, a stack having the same geometry but using a soft PZT material with d 33 = 58 pc/n would be expected to have a deflection at 2 V of 4.6 :m (deflection = N@d 33 @V, where N = number of layers), which is less than half of the PMN result. In an additional experiment, the stack was loaded with a 3 N restraining force. The resulting expansion curve was statistically indistinguishable from the unloaded curve of fig. 5. The upper limit of the force drive capability could not be tested with the present apparatus and is likely at least two orders of magnitude larger. Dynamic Coupling Coefficients The dynamic coupling coefficients measured at 38 o C using the biased resonance technique are summarized in table 1. The k 33 values are over.5, although all of the results are a bit lower than those found in typical PZT formulations of both the hard and soft variety.

Table 1. Dynamic Coupling Coefficients @ 38 o C. Maximum Values Values @ Peak d 33 k 33 @ 6kV/cm.55 k 33.53 k 31 @ 5kV/cm.25 k 31.25 k p @ 5kV/cm.41 k p.38 k t @ 6 kv/cm.47 k t.42 CONCLUSIONS The.9PMN+.1PT composition provides a range of properties that cannot be achieved with conventional PZT materials and may find applications in a variety of smart structure applications, particularly those requiring large displacement and low hysteresis. When fabricated by the non-columbite direct synthesis approach the material cost is similar to PZT. ACKNOWLEDGMENTS The authors thank Drs. B.K. Mukherjee and G. Yang of the Physics Department of the Royal Military College of Canada (Kingston, ON) for their assistance with the biased resonance measurements and Drs. T. Wheat and A. Ahmad of the Canada Centre for Mineral and Energy Technology (Ottawa, ON) for their assistance with the high field strain measurements. Partial funding of this research was provided by the U.S. Office of Naval Research and the Canadian Department of National Defense under the Dual Use of Science and Technology (DUST) program. REFERENCES Jones, D.F. and Prasad, S.E., Integrated Actuator Drivers for Sonar Transducers, Presented at the 2 U.S. Navy Workshop on Acoustic Transduction Materials and Devices, State College, Pa, 2. Lindberg, J.F., Application of High Energy Density Transducer Materials to Smart Systems, Materials for Smart Systems II: MRS Symp. Proc. vol. 459, p. 59, 1996. Sherrit, S., Catoiu,G. and Mukherjee, B.K., The Characterization and Modelling of Electrostrictive Ceramics for Transducers, Ferroelectrics, vol. 228, p. 167, 1999. Swartz, S.L., Shrout, T.R., Schulze, W.A. and Cross, L.E., J. Amer. Ceram. Soc., vol. 67, p. 311, 1984.

FIGURES Computer LVDT LVDT LVDT PMN disk Power Supply PMN Stack PMN Stack a) b) c) Figure 1. Strain measurement apparatus for a) disk sample, b) stack actuator with strain measured parallel to field, and c) stack actuator with strain measured perpendicular to field. Dielectric Constant 35 3 25 2 1 Hz 1 khz 1 khz 15 1 5. 2. 4. 6. 8. 1. Temperature (C) a) b) Dissipation Factor.12.1.8 1 khz.6 1 Hz 1 khz.4.2 2 4 6 8 1 Temperature (C) Figure 2. Dielectric properties as a function of temperature for PMN disk sample at three different frequencies; a) dielectric constant and b) dissipation factor..14.12.1 Strain, %.8.6.4.2-4 -3-2 -1 1 2 3 4 Field, MV/m Figure 3. Strain vs. field for PMN disk sample at 25 o C.

d 33, pc/n 2 15 1 5 Max d 33 = 1776 pc/n @ ~.4MV/m 1 2 3 4 Field, MV/m Figure 4. Field dependent d 33 obtained by differentiation of the fig. 3 curve. Displacement (microns) 12 1 8 6 Parallel to Field 4 2-2 -4 Perpendicular to Field -6-2 -1 1 2 Voltage (V) Figure 5. Displacement vs. voltage parallel and perpendicular to the electric field for PMN stack actuator.