Table of Contents Preface List of Contributors xix Chapter 1. Microfluidics: Fundamentals and Engineering Concepts 1

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Table of Contents Preface List of Contributors v xix Chapter 1. Microfluidics: Fundamentals and Engineering Concepts 1 1. Introduction 1 2. Essentials of Fluidic Transport Phenomena at Small Scales 3 2.1. Microflow Versus Macroflow 2.2. Nanoflow 3 8 3. Scaling Analysis 14 3.1. Scaling Analysis for Single-Phase Flow 18 3.1.1. Flow Rate 18 3.1.2. Heat Generation 19 3.1.3. Heat Transfer 20 3.1.4. Mass Transfer and Mixing 22 3.1.5. Hydrodynamic Dispersion 23 3.2. Scaling Analysis for Two-Phase Flow 24 3.2.1. Capillary Filling 25 3.2.2. Droplet Formation 26 3.2.3. Blocking of Channels by Bubbles 27 3.2.4. Particle Trapping by Dipole Forces 29 3.3. Summary of Scaling Laws 31 4. System/Engineering Concepts and Design Approaches for Microfluidics 31 4.1. Engineering Concepts for Microfluidic Systems 31 4.1.1. Mixing 32 4.1.2. Separation 33 4.1.3. Sensing and Detection 34 4.1.4. Pumping 35 4.1.5. Valving 35 4.1.6. Manipulation of Bubbles and Slugs 37 4.1.7. Integration and Materials 38 4.2. Design Methods 42 4.2.1. Reduced Order Models for Single-Phase Flow 43 4.2.2. Multiphase and Particulate Flows 45 4.2.3. Optimization and System Design 48 References 49

. x Table of Contents Chapter 2 Electrohydrodynamic and Magnetohydrodynamic Micropumps 59 1. Introduction 59 1.1. Basic Features of Conduction in Liquids 60 1.2. Mechanical Aspects of Micropumps 64 2. Electric Forces in the Bulk: Injection, Conduction, and Induction EHD Pumps 66 2.1. Injection Pump 67 2.1.1. Pump Principle 68 2.1.2. Characteristics 72 2.2. Conduction Pump 74 2.2.1. Pump Principle 75 2.2.2. Characteristics 78 2.3. Induction Pump 80 2.3.1. Pump Principle 81 2.3.2. Characteristics 84 3. Electric Forces in the Diffuse Layer: Electroosmotic and AC/IC Electroosmotic Pumps 85 3.1. Electroosmotic Pump 87 3.1.1. Pump Principle 87 3.1.2. Characteristics 90 3.2. AC/IC Electroosmotic Pump 95 3.2.1. Pump Principle 95 3.2.2. Characteristics 98 4. Magnetic Forces: DC and AC MHD Pumps 99 4.1. DC MHD Micropump 100 4.1.1. Pumping Principle 101 4.1.2. Characteristics 102 4.2. AC MHD Micropump 104 4.2.1. Pump Principle 105 4.2.2. Characteristics 106 5. Comparisons and Conclusions 107 References 111 Chapter 3. Mixing in Microscale 117 1. Introduction 117 2. Mass Transport in Microscale 118 2.1. Transport Effects 118 2.1.1. Diffusive Transport 118 2.1.2. Advective Transport 119 2.1.3. Taylor Aris Dispersion 120 2.1.4. Chaotic Advection 120 2.2. Dimensionless Numbers and Scaling Laws 121

Table of Contents xi 3. Micromixers Based on Molecular Diffusion 125 3.1. Parallel Lamination 125 3.1.1. Mixers Based on Pure Molecular Diffusion 125 3.1.2. Mixers Based on Inertial Instabilities 128 3.2. Sequential Lamination 129 3.3. Sequential Segmentation 130 3.4. Segmentation Based on Injection 133 3.5. Focusing of Mixing Streams 136 4. Micromixers Based on Chaotic Advection 139 4.1. Chaotic Advection in a Continuous Flow 139 4.1.1. Chaotic Advection at High Reynolds Numbers 140 4.1.2. Chaotic Advection at Intermediate Reynolds Numbers 142 4.1.3. Chaotic Advection at Low Reynolds Numbers 142 4.2. Chaotic Advection in Multiphase Flow 5. Active Micromixers 143 146 5.1. Pressure-Driven Disturbance 146 5.2. Electrohydrodynamic Disturbance 147 5.3. Dielectrophoretic Disturbance 147 5.4. Electrokinetic Disturbance 148 5.5. Magnetohydrodynamic Disturbance 148 5.6. Acoustic Disturbance 148 5.7. Thermal Disturbance 149 References 149 Chapter 4. Control of Liquids by Surface Energies 157 1. Introduction 157 2. Capillary Model 159 2.1. Equilibrium Conditions 160 2.2. Contact Line Pinning 162 2.3. Computation of Droplet Shapes 163 3. Plane Substrates with Wettability Patterns 164 3.1. Experimental 165 3.2. Circular Surface Domains 167 3.2.1. Array of Hydrophilic Discs 168 3.2.2. Array of Hydrophobic Discs 170 3.3. Striped Surface Domains 171 3.3.1. Perfectly Wettable Stripe 171 3.3.2. Partially Wettable Stripe 173 3.3.3. Hydrophilic Rings 3.3.4. Liquid Wetting Several Stripes 176 178

xii Table of Contents 4. Wetting of Topographically Patterned Substrates 181 4.1. Substrate Preparation 182 4.2. Basic Topographies: Infinite Wedge and Step 184 4.2.1. Infinite Wedge 184 4.2.2. Tip Shape 185 4.2.3. Topographic Step 186 4.3. Triangular Grooves 187 4.4. Rectangular Grooves 190 4.5. Switching Equilibrium Morphologies 194 5. Summary and Outlook 196 References 197 Chapter 5. Electrowetting: Thermodynamic Foundation and Application to Microdevices 203 1. Introduction 203 2. Theoretical Background 205 2.1. Surface Tension 205 2.2. Surface Thermodynamics 206 2.3. General Concept of Work 208 2.4. Surface Tension in Thermodynamic Consideration 208 2.5. Liquid Liquid and Liquid Solid Interfaces: Young s Equation 209 2.6. Pressure Difference at the Curvilinear Surface 211 2.6.1. Example: Application of the Laplace-Young Equation 213 2.7. Control of Surface Tension 214 2.7.1. Example 1: Chemical Potential Surface Tension System 215 2.7.2. Example 2: Temperature Surface Tension System 217 2.7.3. Example 3: Electric Potential Surface Tension System 218 3. Electrowetting and Its Recent Variations 220 3.1. Electric Double Layer 220 3.2. Electrocapillarity: Lippmann s Experiment 221 3.3. Electrowetting: On Solid Electrode 223 3.4. Electrowetting: On Dielectric 224 4. Microfluidic Device Using Electrowetting 227 4.1. Pumping by Electrowetting on Liquid Electrode: CEW 227 4.2. Pumping by Electrowetting on Solid Electrode 228 4.3. Pumping by Electrowetting on Dielectric-Coated Solid Electrode (EWOD) 229 4.4. Reconfigurable Digital (or Droplet) Microfluidics 234

Table of Contents xiii 5. Summary 236 References 236 Chapter 6. Magnetic Beads in Microfluidic Systems Towards New Analytical Applications 241 1. Introduction 241 2. Types of Magnetic Beads 242 3. Forces on Magnetic Beads 244 4. Magnetic Bead Separation 246 5. Magnetic Bead Transport 250 6. Magnetic Beads as Labels for Detection 253 7. Separation and Mixing Using Magnetic Supraparticle Structures 257 8. Magnetic Beads as Substrates for Bio-assays 258 9. Magnetic Beads in Droplets 262 10. Conclusion 265 References 266 Chapter 7. Manipulation of Microobjects by Optical Tweezers 275 1. Introduction 275 2. Single-Particle Manipulation with a Focused Laser Beam 276 2.1. Trapping of a Micro/nano Particle with a Focused Laser Beam 276 2.2. Trapping of a Metallic Particle 279 2.3. Rotation of a Birefringent Microparticle 281 2.4. Manipulation of a Micromachined Object 283 3. Multiparticle Manipulation Techniques 288 3.1. Single Beam Based Manipulation 288 3.1.1. Time-Divided Laser Scanning for the Manipulation of Multiple Microparticles 288 3.1.2. Continuous Transportation of Multiple Particles 289 3.1.3. Bessel Beam for the Manipulation of Multiple Particles 290 3.2. Holographic Optical Tweezers 292 3.3. Evanescent Waves for the Propulsion of Microparticles 295 4. Optically Driven Microfluidic Components 297 4.1. Particle Sorter Using an Optical Lattice 297 4.2. Optically Driven Micropump and Microvalve with Colloidal Structures 299 4.3. Optically Driven Micropump Produced by Two-Photon Microstereolithography 301 4.4. Optically Controlled Micromanipulators Produced by Two-Photon Microstereolithography 303

xiv Table of Contents 5. Bio-manipulation Based on Optical Tweezers 305 5.1. Cell Stretcher Using Optical Radiation Pressure 305 5.2. Manipulation of Biomolecules with Optically Trapped Micro/nano Particles 306 5.3. Optically Controlled Microtools for Biological Samples 308 6. Conclusions and Outlook 309 References 309 Chapter 8. Dielectrophoretic Microfluidics 315 1. Introduction 315 2. Quantification of Dielectrophoretic Micro-Fluidics 316 2.1. Electric Force Acting on an Individual Particle 316 2.2. Field Driven Phase Transitions 320 2.3. Electro-Hydrodynamic Models 323 2.3.1. Single-Particle Model 323 2.3.2. Model for Collective Phenomena 325 3. Microfluidic Applications of Dielectrophoresis 329 3.1. Primary Flows 330 3.2. Non-uniform Electric Field Generators 331 3.3. Modes of Operation 332 3.4. Depletion and Enhancement 335 3.5. Architectural Considerations 337 3.5.1. Fouling 337 3.5.2. Throughput 338 3.5.3. Concentration Factor 340 3.5.4. Heating 342 3.6. Examples of Architectures 343 3.6.1. Post-Based Devices 343 3.6.2. Facet-Based Devices 344 3.6.3. Corduroy Devices 347 4. Conclusion References 350 351 Chapter 9. Ultrasonic Particle Manipulation 357 1. Introduction 357 2. Theory 358 2.1. Radiation Forces 358 2.1.1. Radiation Forces on Small Compressible and Incompressible Spheres 358 2.1.2. Some Practical Considerations 362 2.1.3. Lateral Forces and Secondary Radiation Forces 363

Table of Contents xv 2.2. Acoustic Streaming 364 2.3. Modelling of Standing Waves for Ultrasonic Force Fields 365 2.4. Field Modelling 365 3. Transduction Techniques 368 3.1. Direct Excitation of Bulk Acoustic Waves 368 3.1.1. Bulk PZT 369 3.1.2. Thick-Film PZT 370 3.2. Magnetostrictive Excitation 371 3.3. Excitation via Leaky Surface Waves and Plate Waves 372 3.4. Sol Gel 372 3.5. Alternative Materials 373 4. Applications of Ultrasonic Particle Manipulation 373 4.1. Cell Viability 374 4.2. Filtration and Concentration 374 4.2.1. Enhanced Sedimentation 374 4.2.2. Flow-Through Filtration 375 4.2.3. Ultrasound Within a Porous Mesh 377 4.3. Particle Trapping 377 4.3.1. Trapping to Enhance Particle Particle Interaction 378 4.3.2. Trapping to Enhance Particle Fluid Interaction 378 4.4. Sensor Enhancement 379 4.5. Particle Washing Exchange of Containing Medium 380 4.6. Particle Fractionation 381 5. The Future of Ultrasonic Particle Manipulation 383 References 383 Chapter 10. Electrophoresis in Microfluidic Systems 393 1. Introduction 393 1.1. Free Solution Electrophoresis 395 1.2. Gel Electrophoresis 395 1.3. Isoelectric Focusing (IEF) 396 1.4. Micellar Electrokinetic Chromatography (MEKC) 396 2. Electrophoresis in Microfabricated Systems 396 2.1. Injection and Separation 398 2.2. Sieving Gels 401 2.3. Detection 402 2.4. Device Construction 404 3. Applications of Microchip Electrophoresis 407 3.1. Advanced Electrophoresis Methods 409 3.2. Integrated Systems 411 4. Summary and Outlook 414 References 415

xvi Table of Contents Chapter 11. Chromatography in Microstructures 439 1. Introduction 439 1.1. Background 439 1.2. Short Overview of Some Variants of Chromatography 441 1.2.1. Gas Chromatography (GC) 441 1.2.2. Pressure-Driven Liquid Chromatography (LC) 441 1.2.3. Electrochromatography (EC) 442 1.2.4. Miscellaneous 442 1.3. Some Theoretical Considerations 443 2. Examples of Chromatography on Microchips 445 2.1. Gas Chromatography (GC) 445 2.2. Pressure-Driven Liquid Chromatography (LC) 449 2.3. Capillary Electrochromatography (CEC) 454 2.4. Other Chromatographic Methods on Microchips 463 3. Conclusions 465 References 466 Chapter 12. Microscale Field-Flow Fractionation: Theory and Practice 471 1. Introduction 471 2. Background and Theory 472 2.1. FFF Operating Modes and SPLITT Fractionation 473 2.2. FFF Retention Theory 475 2.3. Plate Height 477 2.3.1. Nonequilibrium Plate Height 479 2.3.2. Instrumental Plate Height 479 2.4. Resolution 479 3. Miniaturization Effects in FFF 480 3.1. Instrumental Plate Height 480 3.2. Gradient-Based Systems 481 3.2.1. Plate Height Scaling 481 3.2.2. Resolution Scaling 482 3.3. Nongradient-Based Systems 483 3.3.1. Plate Height Scaling 483 4. Microscale Electrical FFF 485 4.1. Theory 486 4.2. Fabrication and Packaging 489 4.3. System Characteristics 490 4.3.1. Retention 491 4.3.2. Separations 492 4.3.3. Effective Field Scaling 493 5. Microscale Cyclical Electrical FFF 494 5.1. Theory 495

Table of Contents xvii 5.1.1. Effective Field Model 496 5.1.2. Steric Effects in CyFFF 497 5.1.3. Particle Diffusion Effects 497 5.2. Experimental Results 498 5.2.1. Comparison of Theory with Experimental Data 498 5.2.2. Separations 499 5.2.3. Effects of Carrier ph and Ionic Strength 500 6. Microscale Dielectrophoretic FFF 501 6.1. Theory 501 6.2. Experimental Results 504 7. Microscale Thermal FFF 505 8. Miniaturized Flow FFF 507 9. Microscale Acoustic FFF 508 10. Other Microscale FFF Efforts 509 10.1. Microscale Split-Flow Thin Fractionation 510 10.2. Microscale Hydrodynamic Chromatography 511 11. Nanoscale FFF 513 12. Conclusion 515 References 516 Chapter 13. Nucleic Acid Amplification in Microsystems 523 1. General Elements of Amplification 523 2. Micro Macro Comparison 526 2.1. Typical Length Scales 526 2.2. Volumetric Effects 527 2.3. Surface Effects 528 2.4. Linear, Timescale and Other Effects 529 3. Microfluidic Realization Methods 530 3.1. Substrates 531 3.2. Types of Setup 532 3.2.1. Amplification in Wells 533 3.2.2. Amplification by Continuous Flow-Through Devices 536 3.2.3. Special Realization Methods 538 3.3. Surface Treatments 543 3.4. Detection of Amplified DNA 546 3.5. Integrated Micro-PCR Systems 547 4. Alternative Protocols to PCR 551 5. Conclusion 554 References 555

xviii Table of Contents Chapter 14. Cytometry on Microfluidic Chips 569 1. Introduction 569 2. Design of Microfluidic Flow Cytometers 572 2.1. Transport and Focusing of Cell Suspensions 572 2.2. The Sorting Unit: Active Microfluidic Switches 574 2.3. Integration of Several Functionalities on Microchips 579 3. Detection Concepts for Ultrasensitive Cytometry 580 3.1. Single Molecule Fluorescence Spectroscopy in Microfluidic Channels 580 3.2. Determination of Flow Velocity by Fluorescence Correlation Spectroscopy (FCS) 586 3.3. Integration of Optical Components into Microfluidic Chips 590 3.4. Other Detection Techniques 590 4. Perspectives for Biotechnology 592 4.1. Sorting of Single Molecules 592 4.2. Cell-Free Protein Expression in Microfluidic Chips 593 4.3. Perspectives of Generating Membrane Vesicles in Microstructures 596 5. Conclusion 598 References 598 Index 607

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