Comb Resonator Design (2)

Similar documents
Comb resonator design (2)

MECHANICS OF MATERIALS

MECHANICS OF MATERIALS

Mechanical Design in Optical Engineering

3. BEAMS: STRAIN, STRESS, DEFLECTIONS

Consider an elastic spring as shown in the Fig.2.4. When the spring is slowly

Stress and Strain ( , 3.14) MAE 316 Strength of Mechanical Components NC State University Department of Mechanical & Aerospace Engineering

Lecture 15 Strain and stress in beams

Chapter 5: Torsion. 1. Torsional Deformation of a Circular Shaft 2. The Torsion Formula 3. Power Transmission 4. Angle of Twist CHAPTER OBJECTIVES

4. SHAFTS. A shaft is an element used to transmit power and torque, and it can support

Mechanics of Materials II. Chapter III. A review of the fundamental formulation of stress, strain, and deflection

7.4 The Elementary Beam Theory

EMA 3702 Mechanics & Materials Science (Mechanics of Materials) Chapter 4 Pure Bending

2. Rigid bar ABC supports a weight of W = 50 kn. Bar ABC is pinned at A and supported at B by rod (1). What is the axial force in rod (1)?

Chapter 5 Elastic Strain, Deflection, and Stability 1. Elastic Stress-Strain Relationship

MECHANICS OF MATERIALS

Advanced Structural Analysis EGF Section Properties and Bending

Mechanical Design in Optical Engineering

MECH 401 Mechanical Design Applications

Outline. Organization. Stresses in Beams

Longitudinal buckling of slender pressurised tubes

twenty one concrete construction: shear & deflection ARCHITECTURAL STRUCTURES: FORM, BEHAVIOR, AND DESIGN DR. ANNE NICHOLS SUMMER 2014 lecture

Lecture Slides. Chapter 4. Deflection and Stiffness. The McGraw-Hill Companies 2012

[8] Bending and Shear Loading of Beams

CHAPTER 6: Shearing Stresses in Beams

March 24, Chapter 4. Deflection and Stiffness. Dr. Mohammad Suliman Abuhaiba, PE

ENG2000 Chapter 7 Beams. ENG2000: R.I. Hornsey Beam: 1

PES Institute of Technology

Chapter 4 Deflection and Stiffness

Solution: The strain in the bar is: ANS: E =6.37 GPa Poison s ration for the material is:

BEAM DEFLECTION THE ELASTIC CURVE

MECHANICS OF MATERIALS REVIEW

Example 3.7 Consider the undeformed configuration of a solid as shown in Figure 3.60.

Theories of Straight Beams

EE C245 ME C218 Introduction to MEMS Design Fall 2010

ε t increases from the compressioncontrolled Figure 9.15: Adjusted interaction diagram

Mechanics in Energy Resources Engineering - Chapter 5 Stresses in Beams (Basic topics)

Mechanical Engineering Ph.D. Preliminary Qualifying Examination Solid Mechanics February 25, 2002

EMA 3702 Mechanics & Materials Science (Mechanics of Materials) Chapter 10 Columns

Comb Resonator Design (1)

MECHANICS OF MATERIALS

Stresses in Curved Beam

University of Pretoria Department of Mechanical & Aeronautical Engineering MOW 227, 2 nd Semester 2014

Module 2 Stresses in machine elements

Symmetric Bending of Beams

Mechanics of Materials Primer

Name (Print) ME Mechanics of Materials Exam # 1 Date: October 5, 2016 Time: 8:00 10:00 PM

SERVICEABILITY OF BEAMS AND ONE-WAY SLABS

ESE TOPICWISE OBJECTIVE SOLVED PAPER I

MECHANICS OF MATERIALS

Beams. Beams are structural members that offer resistance to bending due to applied load

Stress Analysis Lecture 3 ME 276 Spring Dr./ Ahmed Mohamed Nagib Elmekawy

Strength of Materials Prof S. K. Bhattacharya Department of Civil Engineering Indian Institute of Technology, Kharagpur Lecture - 18 Torsion - I

6. Bending CHAPTER OBJECTIVES

MECHANICS OF MATERIALS

Structures. Carol Livermore Massachusetts Institute of Technology

Chapter 3. Load and Stress Analysis

COURSE TITLE : APPLIED MECHANICS & STRENGTH OF MATERIALS COURSE CODE : 4017 COURSE CATEGORY : A PERIODS/WEEK : 6 PERIODS/ SEMESTER : 108 CREDITS : 5

4.5 The framework element stiffness matrix

STRESS STRAIN AND DEFORMATION OF SOLIDS, STATES OF STRESS

MECHANICS OF MATERIALS Sample Problem 4.2

LECTURE 13 Strength of a Bar in Pure Bending

FINAL EXAMINATION. (CE130-2 Mechanics of Materials)

Unit 18 Other Issues In Buckling/Structural Instability

Chapter 8 Structural Design and Analysis. Strength and stiffness 5 types of load: Tension Compression Shear Bending Torsion

Aircraft Structures Structural & Loading Discontinuities

INTRODUCTION TO STRAIN

Chapter 5 Structural Elements: The truss & beam elements

Stress Analysis Lecture 4 ME 276 Spring Dr./ Ahmed Mohamed Nagib Elmekawy

Cover sheet and Problem 1

External Work. When a force F undergoes a displacement dx in the same direction i as the force, the work done is

Solution ME 323 EXAM #2 FALL SEMESTER :00 PM 9:30 PM Nov. 2, 2010

Chapter 5 Torsion STRUCTURAL MECHANICS: CE203. Notes are based on Mechanics of Materials: by R. C. Hibbeler, 7th Edition, Pearson

MECHANICS OF MATERIALS

Members Subjected to Torsional Loads

Unit 13 Review of Simple Beam Theory

D : SOLID MECHANICS. Q. 1 Q. 9 carry one mark each. Q.1 Find the force (in kn) in the member BH of the truss shown.

Analysis of Thick Cantilever Beam Using New Hyperbolic Shear Deformation Theory

MTE 119 STATICS LECTURE MATERIALS FINAL REVIEW PAGE NAME & ID DATE. Example Problem F.1: (Beer & Johnston Example 9-11)

Use Hooke s Law (as it applies in the uniaxial direction),

(48) CHAPTER 3: TORSION

Materials: engineering, science, processing and design, 2nd edition Copyright (c)2010 Michael Ashby, Hugh Shercliff, David Cebon.

MECHANICS OF MATERIALS

CHAPTER OBJECTIVES Use various methods to determine the deflection and slope at specific pts on beams and shafts: 2. Discontinuity functions

needed to buckle an ideal column. Analyze the buckling with bending of a column. Discuss methods used to design concentric and eccentric columns.

five Mechanics of Materials 1 ARCHITECTURAL STRUCTURES: FORM, BEHAVIOR, AND DESIGN DR. ANNE NICHOLS SUMMER 2017 lecture

REVIEW FOR EXAM II. Dr. Ibrahim A. Assakkaf SPRING 2002

: APPLIED MECHANICS & STRENGTH OF MATERIALS COURSE CODE : 4021 COURSE CATEGORY : A PERIODS/ WEEK : 5 PERIODS/ SEMESTER : 75 CREDIT : 5 TIME SCHEDULE

Jeff Brown Hope College, Department of Engineering, 27 Graves Pl., Holland, Michigan, USA UNESCO EOLSS

ME Final Exam. PROBLEM NO. 4 Part A (2 points max.) M (x) y. z (neutral axis) beam cross-sec+on. 20 kip ft. 0.2 ft. 10 ft. 0.1 ft.

Strain Measurements. Isaac Choutapalli

QUESTION BANK SEMESTER: III SUBJECT NAME: MECHANICS OF SOLIDS

UNIT 1 STRESS STRAIN AND DEFORMATION OF SOLIDS, STATES OF STRESS 1. Define stress. When an external force acts on a body, it undergoes deformation.

CE6306 STRENGTH OF MATERIALS TWO MARK QUESTIONS WITH ANSWERS ACADEMIC YEAR

EE C245 ME C218 Introduction to MEMS Design

Problem d d d B C E D. 0.8d. Additional lecturebook examples 29 ME 323

M. Vable Mechanics of Materials: Chapter 5. Torsion of Shafts

Bioen MIDTERM. Covers: Weeks 1-4, FBD, stress/strain, stress analysis, rods and beams (not deflections).

ME 2570 MECHANICS OF MATERIALS

Strength of Materials Prof. S.K.Bhattacharya Dept. of Civil Engineering, I.I.T., Kharagpur Lecture No.26 Stresses in Beams-I

Transcription:

Lecture 6: Comb Resonator Design () -Intro. to Mechanics of Materials Sh School of felectrical ti lengineering i and dcomputer Science, Si Seoul National University Nano/Micro Systems & Controls Laboratory Email: dicho@snu.ac.kr URL: http://nml.snu.ac.kr

Stress Normal Stress: force applied to surface σ F / A measured in N/m or Pa, compressive or tensile Shear Stress: force applied parallel to surface τ F / A measured in N/m or Pa Young s Modulus: E σ / ε Hooke s Law: K F/ Δ l EA/ l usage and possession is in violation of copyright laws

Strain Strain: ratio of deformation to length γ Δll / l Shear Modulus G τ / γ Relation among: G, E, and ν G E (1 + +ν ) usage and possession is in violation of copyright laws

Poisson s Ratio Tensile stress in direction results in compressive stress in y and z direction (object becomes longer and thinner) Poisson s Ratio: ε ε ν y ε z ε transverse strain longitudinal strain Metals : ν 0. Rubbers : ν 05 0.5 Cork : ν 0 usage and possession is in violation of copyright laws 4

State of Stress The combination of forces generated by the stresses must satisfy the conditions for equilibrium: F F F y z y z 0 M M M Consider the moments about the z ais: 0 ( τ ) ( τ ) M 0 ΔA a ΔA a z y y τ τ, τ τ and τ τ y y yz zy yz zy Only 6 components of stress are required to define the complete state t of stress. usage and possession is in violation of copyright laws 5

Ductile Materials Stress and Strain Diagram usage and possession is in violation of copyright laws 6

Stress and Strain Diagram (cont d) Brittle Materials Stress-strain diagram for a typical brittle material usage and possession is in violation of copyright laws 7

Deformations Under Aial Loading From Hooke s Law: σ P σ Eε ε E AE From the definition of strain: ε δ L Equating and solving for the deformation: PL δ AE With variations in loading, cross-section or material properties: PL i i δ A E i i i usage and possession is in violation of copyright laws 8

Stress Concentration: Fillet σ ma K σ σ ave usage and possession is in violation of copyright laws 9

Symmetric Member in Pure Bending Pure Bending: Prismatic members subjected to equal and opposite couples acting in the same longitudinal plane Internal forces in any cross section are equivalent to a couple. The moment of the couple is the section bending moment F y σ da 0 M zσ da 0 M y σ da M z usage and possession is in violation of copyright laws 10

Strain Due to Bending Consider a beam segment of length L. After deformation, the length of the neutral surface remains L. At other sections, ( ρ y) θ ( ) L δ L L ρ y θ ρθ yθ ε ε ε m δ yθ ρθ y L ρ (strain varies linearly) c c or ρ ρ εm y ε m c usage and possession is in violation of copyright laws 11

For a linearly elastic material, Stress Due to Bending y σ Eε Eεm c y σ m (stress varies linearly) c For static equilibrium, y F 0 σ da σ m da c σ m 0 yda c First moment with respect to neutral plane is zero. Therefore, the neutral surface must pass through the section centroid. usage and possession is in violation of copyright laws 1

Stress Due to Bending (cont d) For static equilibrium, Bending Momentum M t M df( h) h ( σ ( h) da) h A t w t h h σ ma σ ma M ( σ ma da) h h da I t t t w t w t h ( ) ( ) h ( ) Mt sma EI t where σ ma : magnitude of stress I : moment of inertia of the cross-section h : height of a beam t : thickness of a beam s ma : maimum longitudinal strain usage and possession is in violation of copyright laws 1

Deformations in a Transverse Cross Section Deformation due to bending moment M is quantified by the curvature of the neutral surface 1 ε σ 1 ρ c Ec Ec I m m Mc M EI Although cross sectional planes remain planar when subjected to bending moments, in-plane deformations are nonzero, ν y ν y εy νε ε z νε ρ ρ usage and possession is in violation of copyright laws 14

Bending of Beams Reaction Forces and Moments - For equilibrium F 0 F F 0, therefore F F R R M0 0 MR + FL 0, therefore MR FL usage and possession is in violation of copyright laws 15

Bending of Beams (cont d) Shear Forces and Moments (at any point in the beam) At every point along the beam equilibrium requires that, F 0 and M 0 F 0 F + V( ) 0 V F M 0 M( ) + F( L ) 0 M( ) F( L ) L usage and possession is in violation of copyright laws 16

Bending of Beams Differential Element Equilibrium of a fully loaded differential element: For equilibrium, F 0 and M 0 ( V + dv ) V dv F 0 qd + ( V + dv) V 0 q - d d d M 0 ( M + dm ) M ( V + dv ) d qd 0 ( M + dm) M dm V (neglecting q( d ) terms). d d usage and possession is in violation of copyright laws 17

Bending of Beams Differential Element (cont d) Approimation for radius of curvature: An increment of beam length d is related to ds via d cos( θ), for small θ d ds ds The slope of the beam at any point is given by dw d tan( θ), for small θ θ dw d For a given radius of curvature, ds is related to dθ via 1 ds d, so for small d θ ρ θ θ d w d ρ d usage and possession is in violation of copyright laws 18

Bending of Beams Differential Element (cont d) Basic Differential Equations for Beam Bending: d w 1 For small θ d ρ Now that we have a relationship between w( ) and ρ. We can epress the moment and shear forces as a function of w ( ). d w dm Moments: M EI, now recall V d d dw dv Shear: V EI, now recall q d d 4 d w Uniform Load: q EI d 4 usage and possession is in violation of copyright laws 19

Analysis of Cantilever Beam Cantilever Beam with Point Load: M ( ) F ( L ) d w M F ( L ) d EI EI Integrating the above equation twice, we have FL F w( ) A + B + EI 6EI Boundary conditions: w(0) 0 dw 0 d 0 usage and possession is in violation of copyright laws 0

Analysis of Cantilever Beam (cont d) Cantilever Beam with Point Load (cont d): Using the boundary conditions, we obtain the beam deflection equation, FL w( ) (1 ) EI L Maimum deflection : w( ) FL EI Spring constant : k EI L EWH 4L usage and possession is in violation of copyright laws 1

Stress Concentration: Fillet σ ma K σ σ ave usage and possession is in violation of copyright laws

Simple Beam Equations Relation between Load and deflection (1)- concentrated load Cantilever Guided-end Fied-fied (a) Cantilever beam Elongation y Deflection F L Ehw 4 y FL Ehw (b) Guided-end end beam z 4F FL z Ewh y z F L Ehw FL y Ehw FL z Ewh y z FL 4Ehw 1 16 FL y Ehw 1 FL z Ewh 1 16 L : length of beam h : height of beam w : width of beam (c) () Fied-fied beam usage and possession is in violation of copyright laws

Simple Beam Equations (cont d) Relation between Load and deflection ()-Distributed load Cantilever Guided-end Fied-fied (a) Cantilever beam Elongation f L E f L E f L 4 E (b) Guided-end beam y f L y 4 Ehw y 1 f L y 4 Ehw y 1 f L y 4 Ehw Deflection 4 fl z z Ewh z 4 1 fl z Ewh z 4 1 fl z Ewh (c) Fied-fied beam L : length of beam h : height of beam w : width of beam usage and possession is in violation of copyright laws 4

Stability of Structures In the design of columns, cross-sectional area is selected such that - Allowable stress is not eceeded P σ σ A all - Deformation falls within specifications PL δ δ AE spec After these design calculations, may discover that the column is unstable under loading and that it suddenly becomes sharply curved or buckles. usage and possession is in violation of copyright laws 5

Stability of Structures (cont d) Consider model with two rods and torsional spring. After a small perturbation, ( ΔθΔ θ ) K restoring moment L L P sin Δ θ P Δθ destabilizing moment Column is stable (tends to return to aligned orientation) if P L ( θ ) Δ θ < K Δ P < P cr 4K L usage and possession is in violation of copyright laws 6

Stability of Structures (cont d) Assume that a load P is applied. After a perturbation, the system settles to a new equilibrium configuration at a finite deflection angle. P L ( θ ) sinθ K PL P θ 4K P sinθ cr Noting that sinθ < θ, the assumed configuration is only possible if P > P cr. usage and possession is in violation of copyright laws 7

Euler s Formula for Pin-Ended Beams for Buckling Consider an aially loaded beam. After a small perturbation, the system reaches an equilibrium configuration such that dy M P dy P y + y 0 d EI EI d EI Solution with assumed configuration can only be obtained if π EI P > Pcr L E P π ( Ar ) π E σ > σcr A L A Lr where r I/A ( ) usage and possession is in violation of copyright laws 8

Etension of Euler s Formula A column with one fied and one free end, will behave as the upper-half of a pin-connected column. The critical loading is calculated l from Euler s formula, P cr π EI L e π E σ cr L r L e ( ) e L equivalent length usage and possession is in violation of copyright laws 9

Net Torque Due to Internal Stresses Net of the internal shearing stresses is an internal torque, equal and opposite to the applied torque: ( ) T ρ df ρ τ da Unlike the normal stress due to aial loads, the distribution of shearing stresses due to torsional loads can not be assumed uniform. usage and possession is in violation of copyright laws 0

Shaft Deformations From observation, the angle of twist of the shaft is proportional p to the applied torque and to the shaft length: φ T φ L Cross-sections of noncircular (non- aisymmetric) shafts are distorted when subjected to torsion. Cross-sections for hollow and solid circular shafts remain plain and undistorted because a circular shaft is aisymmetric. usage and possession is in violation of copyright laws 1

Shearing Strain Since the ends of the element remain planar, the shear strain is equal to angle of twist: ρφ L γ ρφ or γ L Shear strain is proportional to twist and radius cφ ρ γ ma and γ γ L c ma usage and possession is in violation of copyright laws

Stresses in Elastic Range Multiplying the previous equation by the shear modulus, ρ Gγ Gγ c ma From Hooke s Law, ρ τ τma c τ G γ, so The shearing stress varies linearly with the radial position in the section. J 1 4 π c τ ma ma T da da J τ ρτ c ρ Tc τ J ma and T ρ J τ c J 4 4 ( c ) 1 c 1 π usage and possession is in violation of copyright laws

Deformations Under Aial Loading The angle of twist and maimum shearing strain are related: cφ γ ma L The shearing strain and shear are related by Hooke s Law, τma Tc γ ma G JG TL φ JG With variations in the torsional loading and shaft cross-section along the length: φ TL i i J G i i i usage and possession is in violation of copyright laws 4

Torsion of a Rectangular Bar Torsional beam Comb Assume that the torsional beam is isotropic material Torsional stiffness (when, t h >W h ) G 19 wh 1 1 th k thwh 1 π 5 π tanh n, n 1,,5... 5 L h th n n wh [Ref] S. P. Timoshenko and J. N. Goodier, Theory of Elasticity, McGraw-Hill,,pp pp. 09 1, 1970. usage and possession is in violation of copyright laws 5

Reference F. P. Beer, E. R. Johnston, and Jr. J.T. DeWlof, Mechanics of Materials", McGraw-Hill, 00. J. M. Gere and S. P. Timoshenko, Mechanics of Materials, PWS Publishing Company, 1997. S. P. Timoshenko and J. N. Goodier, Theory of Elasticity, McGraw-Hill, 1970. Chang Liu, Foundations of MEMS, Pearson, 006. Nicolae O. Lobontiu, Mechanical design of microresonators, McGraw-Hill, 006. usage and possession is in violation of copyright laws 6