Points. Precision Positioning Table TU. Variation. Major product specifications With flange

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Precision Positioning Table Ball screw inear Points lide table with high accuracy and high rigidity in a single structure lide table Compact and slim type positioning table with an original U-shaped track rail 1 Precision Positioning Table is a compact and slim type positioning table with a slide table assembled inside a U-shaped track rail. lso, by adopting a U-shaped track rail, the rigidity of the track rail under moment load and torsion is greatly increased. The track rail can be used as a structure beam of the machine and equipment. Therefore, freedom of design is expanded for user. The slide table is an integral part of a linear motion rolling guide mechanism, in which large diameter steel balls are arranged in two rows and make four-point contact with the raceways. High accuracy and high rigidity positioning can thus be obtained even in applications where fluctuating load or complex load is applied. The optimal table specification can be selected from a variety of options Page - Ball screw The optimal positioning table for each specific application can be configured easily by only indicating required functions and performance from our substantial size variations and a variety of options by the identification number. Track rail inear Way Variation hape Track rail width 0 0 0 0 10 tandard hort table C tandard table ong table G Major product specifications ccuracy With flange hort table Driving method Precision ball screw and rolled ball screw Positioning repeatability ±0.00.00 FC inear motion rolling guide Built-in lubrication part Material of table and bed ensor inear Wayball type No built-in The identification number is provided for your selection to attach lubrication part "C-ube" or not High carbon steel elect by identification number Positioning accuracy ost motion Parallelism in table motion Parallelism in table motion B ttitude accuracy traightness 0.00.00 0.000.00 tandard table ong table F FG Backlash 0.000.00 1 1N=0.f=0.lbs. 1=0.097inch

Precision Positioning Table pecial specifications that can be specified by the identification number hape and length of the slide table Motor folding back specification The shape can be selected from two types, The motor folding back specification table "standard" type and "with flange" type, and can realize space saving by reducing the three types with different length with same overall length of the table. section, i.e. short, standard, and long are listed on lineup. bridge cover and XY bracket can be attached to the "with flange" type. tandard hort (C), standard (no symbol), long (G) With flange hort (FC), standard (F), long (FG) With bridge cover Number of slide tables bridge cover can be attached to the "With flange" type. Two slide tables can be mounted on the track rail depending on the applied load and the moment. Table with bellows series of tables with bellows is available for preventing foreign matter from intruding into Type and lead of ball screw the table by covering the linear motion rolling guide and drive section with bellows. Rolled ball screws and precision ball screws can be selected according to required accuracy. Ball screw lead is also selectable. The specification without ball screw can be used as a driven side linear motion rolling guide in biaxial parallel arrangement. Black chrome surface treatment Designation of sensor Black permeable film is applied on the surface of slide table and ball screw to improve the corrosion resistance. Mounting of various sensors such as limit sensors and origin sensors can be designed. Table with C-ube XY bracket Maintenance works such as relubricating XY table can be configured easily since a XY bracket with grease for ball screws and linear motion series of XY bracket is available. rolling guides can be reduced significantly by attaching lubrication part "C-ube" impregnated with lubricant. X-axis Y-axis

Identification Number Identification Number and pecification Example of an Identification Number 1 7 9 11 1 1 : Precision Positioning Table FG 9 / T G 0 0 R Q ize ize indicates bed width. elect a size from the list of Table 1. 1 ize Page - Page - hape of slide table C hort table tandard table G ong table FC Flange type short table F Flange type standard table FG Flange type long table hape of slide table Page - Table 1 pplication of shape of slide table and size code C G FC F FG ength Designation of motor attachment Page - Page -7 0 0 0 0 10 Ball screw type Page -7 ength From the [Identification] length shown in Table.1 and., select your desired one. 7 9 Ball screw lead Number of slide table Cover specification pecification of sensor Page -7 Page -7 Page - Page - Table.1 ength (motor inline specification) and size [Identification] of the length and dimensions of the track rail 1 10 1 1 0 0 1 10 1 10 0 00 0 0 1 10 0 0 00 0 0 00 0 0 70 700 9 90 9 90 9 90 9 90 9 90 79 790 99 9901191 190 9 90 9 90 9 90 79 790 9 90 99 99091 0901191 190191 90191 90 0 11 0111 1111 11 10 11 0111 1111 11 111 Remark: For stroke lengths, please see the dimension tables shown in pages of or later. 11 pecification of surface treatment 1 pecification of C-ube Page - Page - Table. ength (motor folding back specification) and size [Identification] of the length and dimensions of the track rail 0 1 10 0 0 0 1 10 0 0 00 0 7 7 7 7 9 9 1 0 111 1 Remark: For stroke length, please see the dimension tables shown in pages of 7 or later. 1N=0.f=0.lbs. 1=0.097inch

Identification Number and pecification Designation of motor attachment T0 Motor inline specification Without motor attachment T1 to T1 Motor inline specification With motor attachment R0 Motor folding back specification Without motor attachment R1 to R1 Motor folding back specification With motor attachment pplication of motor folding back specification is shown in Table. To specify the motor attachment, select it from the list of Table.1 and Table.. Motor should be prepared by customer. Please specify motor folding back specification and motor attachment applicable to motor for use. If motor inline specification with motor attachment is specified, the main body is shipped with a coupling indicated in the Table 7 mounted. However, the final position adjustment should be made by customer since it is only temporarily fixed. For a product without motor attachment (T0), no coupling is attached. If motor folding back specification with motor attachment is specified, "housing applicable to the specified motor, pulley (on motor side and ball screw side), cover, motor bracket, belt and bolts necessary for assembly" are supplied. Motor mounting bolts should be prepared by customer. 9 Cover specification pecification of sensor 0 : Without cover C : With bridge cover (applied to FC, F, and FG) J : With bellows (applied to and ) When specifying "With bellows (J)", select 1 piece (by specifying ) for the entry of section. "With bellows" type is not provided for with track rail lengths of 990 and 1,190 and with track rail lengths of 1,90 and 1,90. "With bridge cover" type is not provided for with track rail lengths of 1,190 and with track rail lengths of 1,90. 0: Without a sensor, without a sensor rail : Two sensors (limit), with a sensor rail : Three sensors (limit and pre-origin), with a sensor rail : Four sensors (limit, pre-origin, and origin), with a sensor rail 9: Without a sensor, with a sensor rail Table pplication of motor folding back specification and size C servomotor With motor attachment tepper motor Without motor attachment 0 0 0 0 10 Ball screw type No symbol : Rolled screw G : Ground screw N : Without ball screw From among various types of ball screws shown in Table, select your desired one. When specifying N For the entry of section, specify T0 or R0, and for the entry of section 7, specify "No symbol". For the entry of section, select "Without sensor" (by specifying 0). In the entry of section 9, you cannot specify "With bellows". 11 pecification of surface treatment 1 pecification of C-ube No symbol : Not treated R : Black chrome surface treatment 1 Black chrome surface treatment is applied on the surfaces of a slide table and track rail. : Black chrome surface treatment In addition to the black chrome surface treatment 1, this treatment is applied on the ball screw shaft and nut. No symbol : No C-ube Q : Table with C-ube C-ube is mounted on the slide table and the end face of a nut of ball screw. The C-ube is a lubrication part with much lubricant oil impregnated in the consecutive porous resin. liding or moving along a smooth surface with contact on the track rail and the raceway surface of the ball screw causes the lubricant oil within the plate to continue to seep on the raceway surface, thus reducing the number of hours for maintenance caused by the extension of lubrication interval. This is an effective countermeasure for the attrition of grease at the location difficult to be lubricated. When specifying Q, for the entry of section, select ground screw (by specifying G) or without ball screw (by specifying N). 7 Ball screw lead Table pplication of ball screw lead and size Ball screw type Ball screw lead Ground screw 0 Ground screw 0 Rolled screw Ground screw 0 Rolled screw Ground screw Rolled screw Ground screw 1 1 1 Rolled screw Ground screw 0 Ground screw 10 Ground screw Notes 1 This is not applied to track rail lengths of 990 and 1,190. This is not applied to track rail lengths of 1,90 and 1,90. From among ball screw leads applicable to the sizes shown in Table, select your desired one. Table pplication of C-ube and size Rolled screw Ground screw Without ball screw 0 0 0 1 0 10 Note 1 For the track rail lengths of 1,90 and 1,90 in, please contact. Number of slide table : One unit C: Two units 7 1N=0.f=0.lbs. 1=0.097inch

Identification Number and pecification Table.1 pplication of motor attachment (motor inline specification) s of motor to be used Type Manufacturer eries C servomotor tepper motor YKW EECTRIC CORPORTION Mitsubishi Electric Corporation Panasonic Corporation ORIENT MOTOR Co., td. - J-Jr J MIN step RK CRK Rated output W Flange size Motor attachment 0 0 0 0 10 GMMV- T1 T1 GMMV- 0 T1 T1 GMJV- T T 0 GMV- T T GMJV-01 0 T T T 0 GMV-01 T T T GMV-C 10 T GMJV-0 T T 0 GMV-0 T T GMJV-0 T T7 00 GMV-0 T T7 GMV-0 0 T T7 GMJV-0 T 70 0 GMV-0 T HC-Q0 T9 T9 HC-Q0 0 T9 T9 HF-MP0 T T 0 HF-KP0 T T 0 HF-MP1 T T T 0 HF-KP1 T T T HF-MP T T 0 HF-KP T T HF-MP T T7 00 HF-KP T T7 HF-MP7 T 70 0 HF-KP7 T MMD T1 T1 0 MME T1 T1 MMD01 T1 T1 T111 0 MME01 T1 T1 T111 MMD0 T11 T11 0 MME0 T11 T11 MMD0 T11 T11 00 MME0 T11 T11 MMD0 T11 70 0 MME0 T11 R T117 T117 R T11 T119 R9 T11 T119 R9 T1 T11 R911 T1 T11 T1 T1 T1 T1 9 T1 T1 9 T1 T11 911 T1 T11 CRK T1 T1 RKCRK T1 T1 RKCRK 1 T1 T1 RK9 T1 T11 Note 1 pplicable to the outer diameter of motor output shaft. Remark: For detailed motor specifications, please see respective motor manufacturer's catalog. Table. pplication of motor attachment (motor folding back specification) s of motor to be used Type Manufacturer eries Rated output W Flange size Motor attachment 0 0 GMJV- R1 R1 0 GMV- R1 R1 YKW GMJV-01 0 R1 R1 R 0 EECTRIC - GMV-01 R1 R1 R CORPORTION GMV-C 10 R GMJV-0 R R 0 GMV-0 R R HF-MP0 R1 R1 0 HF-KP0 R1 R1 C servo Mitsubishi 0 HF-MP1 R1 R1 R motor Electric J 0 HF-KP1 R1 R1 R Corporation HF-MP R R 0 HF-KP R R MMD R R 0 MME R R Panasonic MMD01 R R R MIN 0 Corporation MME01 R R R MMD0 R7 R 0 MME0 R7 R ORIENT R R9 R9 tepper step MOTOR R1 R1 motor Co., td. RKCRK RKCRK R1 R1 Remark: For detailed motor specifications, please see respective motor manufacturers' catalog. Table 7 Coupling models (motor inline specification) Motor attachment Coupling models Manufacturer Coupling inertia J C - m T1 U-1C- akai Manufacturing Co., td 0.0 T U-C- akai Manufacturing Co., td 0.0 T U-C- akai Manufacturing Co., td 0.9 T U-0C- 1 akai Manufacturing Co., td 0. T U-0C- 1 akai Manufacturing Co., td 0. T U-C- 1 akai Manufacturing Co., td 1. T7 U-0C-11 akai Manufacturing Co., td.1 T U-0C-119 akai Manufacturing Co., td.1 T9 U-1C- akai Manufacturing Co., td 0.0 T1 U-C- akai Manufacturing Co., td 0.0 T111 U-C- akai Manufacturing Co., td 0.9 T11 U-0C- 11 akai Manufacturing Co., td 0. T11 U-0C- 11 akai Manufacturing Co., td 0. T11 U-C- 1 akai Manufacturing Co., td 1. T11 U-0C-11 akai Manufacturing Co., td.1 T11 U-0C-119 akai Manufacturing Co., td.1 T117 MT-1C- Nabeya Bi-tech Kaisha 0.090 T11 MT-C- Nabeya Bi-tech Kaisha 0.7 T119 MT-C- Nabeya Bi-tech Kaisha 0.7 T1 MT-0C-11 Nabeya Bi-tech Kaisha 9.0 T11 MT-0C-11 Nabeya Bi-tech Kaisha 9.0 T1 MT-1C- Nabeya Bi-tech Kaisha 0.090 T1 MT-C- Nabeya Bi-tech Kaisha 0.7 T1 MT-C- Nabeya Bi-tech Kaisha 0.7 T1 MT-1C- Nabeya Bi-tech Kaisha 0.0 Remark: For detailed coupling specification, please see respective manufacturer's catalog. 9 1N=0.f=0.lbs. 1=0.097inch 0

pecifications Table.1 accuracy (rolled screw) Table. accuracy (ground screw) ength Positioning repeatability Positioning accuracy 1 Parallelism in table motion B bove bove ength Below Below hort table tandard table ong table Positioning repeatability hort table tandard table ong table Parallelism in table motion B 00 0.01 0.0 00 00 0.0 0.00 00 1 0 0.0 hort table 00 0 00 0 00 00 0.00 0.0 0.01 00 00 0 0 0.0 0.0 0 0 700 700 0.0 700 700 00 00 00 00 900 900 0.00 0.00 0.00 0.00 900 900 1 0001 000 1 0001 000 1 01 0 0.0 0.0 0.0 0.0 0.0 1 01 0 1 0 0.00 0.00 1 0 1 00 1 00 1 00 0.0 1 00 1 0.00 tandard table ong table 0.00 0.0 0.01 0.01 0.01 0.00 Backlash 1 Note 1 This does not apply to table of motor folding back specification. Remark: The positioning repeatability values in are reference values provided that the timing belt tension is properly adjusted in motor folding back specification table. Backlash 1 Note 1 This does not apply to table of motor folding back specification. Remark: The positioning repeatability values in are reference values provided that the timing belt tension is properly adjusted in motor folding back specification table. 1 0.00 0.00 Table 9.1 Maximum speed (C servomotor) Motor type C servo motor Table 9. Maximum speed (stepper motor) Motor type tepper motor and size and size ength ength Number of revolutions of motor min -1 Maximum speed /s 0 or less 00 0 0 or less 00 0 00 00 90 790 0 0 10 Remark 1. The value in Maximum speed /s 1N=0.f=0.lbs. 1=0.097inch 0 or less 1 00 1 0 0 or less 1 00 10 0 1 00 1 0 0 1 00 10 00 790 or less 1 00 0 990 or less 1 00 10 00 1 190 1 90 1 990 or less 1 00 00 0 1 090 1 770 9 90 1 190 1 7 1 90 1 7 1 90 1 0 00 1 1 or less 1 00 0 0 1 1 70 9 1 1 00 7 1 or less 1 00 70 10 1 1 7 717 1 1 90 79 Remark: To measure the practical maximum speed, it is required to consider operation patterns based on the motor to be used and load conditions. 0 or less 00 1 000 90 70 70 70 0 7 700 0 0 90 or less 70 90 0 1 90 0 70 0 1 790 70 0 1 170 990 1 0 1 190 1 90 or less 70 1 0 0 1 00 790 700 1 0 1 00 90 0 1 0 0 1 00 990 0 0 1 090 0 70 0 70 1 190 70 0 70 0 1 90 0 1 90 90 1 0 1 1 1 1 990 1 70 1 1 0 1 1 1 1 1 1 1 1 1 1 90 1 70 is applicable to rolled screws.. To measure the practical maximum speed, it is required to consider operation patterns based on the motor to be used and load conditions.

pecifications Table Maximum carrying mass and size Ball screw type Ball screw lead ength of slide table Maximum carrying mass Horizontal Vertical Ground screw tandard 11. 0 Ground screw tandard 1 hort 11 tandard 9 11 Ground screw ong 9 11 hort 7 tandard 9 7 0 ong 7 hort tandard 9 Rolled screw ong 9 hort tandard. ong 7 hort 1 tandard 1 Ground screw ong 0 1 hort tandard 0 ong hort 11 tandard 11 Rolled screw ong 0 11 hort 9 tandard 7 ong 7 hort 1 tandard 1 ong 1 1 hort 11 Ground screw tandard ong hort 9 tandard 9 ong 9 hort 1 tandard 1 Rolled screw ong 1 1 hort tandard ong 7 hort 97 9 tandard 1 Ground screw ong 1 7 hort 9 7 tandard 7 ong 7 hort 97 tandard 1 Rolled screw ong 1 1 hort 9 1 tandard 7 1 ong 7 1 0 Ground screw tandard 1 7 10 Ground screw tandard 9 Remark: The value is for one slide table. Table 11 oad rating of linear motion rolling guide and size ength of slide table Basic dynamic load rating C N Basic static load rating C 0 N tatic moment rating 1 Nm T 0 T X T Y tandard 1 770 0. 0..1.7..0 0 tandard 0.9 9. 1.9 7. 1. 7. hort 00 1. 17.. 1. 1 0 tandard 9 70 1.0 1.0 1 ong 11 0 1 700 1 0 11 9 11 9 hort 90 00 1 1 9. 1 9. 1 0 tandard 1 00 1 00 0 11 711 11 711 ong 1 00 0 7 1 1 hort 1 00 1 000 7.7.7 tandard 1 00 1 0 0 11 1 10 11 1 10 ong 00 900 70 1 1 7 70 7 70 hort 0 00 77 1 1 1 0 1 1 0 tandard 1 00 1 00 1 70 90 7 1 7 1 ong 9 900 7 00 1 9 0 1 70 90 1 70 90 0 tandard 0 00 0 1 1 10 tandard 70 00 00 9 7 0 1 0 9 1 0 9 T 0 T X T Y Note 1 In directions indicated in the above figures, the value in is for two slide 1N=0.f=0.lbs. 1=0.097inch

pecifications Table 1.1 pecifications of ball screw 1 and size Ball screw type haft dia. xial clearance Basic dynamic load rating C N Basic static load rating C 0 N Ground screw 0.00 or less 90 1 0 Ground screw 0.00 or less 1 00 1 0 Rolled screw 1 0 00 0.0 or less 1 000 1 0 Ground screw 90 7 0.00 or less 1 0 1 0 Rolled screw 00 00 0.0 or less 1 0 0 Ground screw 70 0.00 or less 1 7 7 Rolled screw 00 000 1 0.0 or less 1 00 0 0 Ground screw 1 1 0.00 or less 00 9 00 9 Rolled screw 900 9 0 1 0.0 or less 900 00 00 1 00 Ground screw 1 0.00 or less 7 0 Ground screw 0.00 or less 1 0 0 Ground screw 0.00 or less 1 0 10 Ground screw 0.00 or less 9 700 19 0 Notes 1 This is not applied to track rail lengths of 990 and 1,190. This is not applied to track rail lengths of 1,90 and 1,90. This applies to track rail lengths of 1,90 and 1,90. Table 1. pecifications of ball screw and size ength Ball screw type haft dia. Overall length 10 Ground 1 1 Ground 11 0 Ground 1 10 Ground 1 10 Ground 19 0 Ground Ground 7 00 Ground 1 0 Ground 10 Ground Rolled 1 0 Ground Rolled 1 00 Ground Rolled 7 Ground Rolled 0 Ground Rolled 9 10 Ground Rolled 1 0 Ground Rolled 1 Ground Rolled 7 Ground Rolled 0 Ground Rolled 9 Ground Rolled 19 00 Ground Rolled 7 0 Ground Rolled Ground Rolled 0 Ground Rolled 1 Ground Rolled 9 0 700 Ground Rolled 7 10 Ground Rolled 19 Ground Rolled 7 0 Ground Rolled Ground Rolled 00 Ground Rolled 1 0 Ground Rolled 9 Ground Rolled 7 90 Ground Rolled 90 Ground Rolled 90 Ground Rolled 90 Ground Rolled 90 Ground Rolled 790 Ground Rolled 7 990 Rolled 9 1 1 190 Rolled 1 1 Ground Rolled Ground Rolled Ground Rolled Ground Rolled Ground Rolled 7 Ground Rolled 7 90 Ground Rolled 1 90 Ground Rolled 1 90 Ground Rolled 1 790 Ground Rolled 71 1 90 Ground Rolled 1 990 Ground Rolled 91 1 090 Ground Rolled 1 01 1 190 Ground Rolled 1 11 1 90 Ground 1 1 1 90 Ground 1 1 Ground Rolled 1 Ground Rolled 1 Ground Rolled 1 7 Ground Rolled 71 1 Ground Rolled 1 9 Ground Rolled 91 1 0 Ground Rolled 1 01 1 1 Ground Rolled 1 11 1 0 Ground 97 0 1 1 Ground 1 1 1 Ground 1 7 1 Ground 1 1 0 Ground 97 1 1 Ground 1 1 10 1 Ground 1 7 1 Ground 1 1 Ground 1 7 1N=0.f=0.lbs. 1=0.097inch

pecifications Table 1 Moment of inertia of sectional area s Table 1.1 Table inertia and starting torque Y-axis X-axis and size ength Table inertia J T - m tandard table 10 0.01 1 0.01 0 0.0 tarting torque T Nm Ground screw 0.01 e Moment of inertia of sectional area Center of gravity and size e I X I Y.7 7.. 0 9. 1.7. 0 1.0.. 0. 1.7.7...9. 1. 1. 0.9. 1. 10 1...0 Deflection m 0 0 oad and size 0 and size 0 and size ength Table inertia J T - m tandard table 10 0.07 10 0.09 0.0 0.09 00 0.7 0 0.1 ength 1 Table inertia J T - m hort table tandard table ong table 1010 0.0 0.07 0.0 0.09 00 0.07 0.09 0.0 0.11 0.0 0.1 00 0.09 0.11 0. 0.1 0. 0.1 0.11 0.1 0.1 0.1 0.1 0.1 0 0.1 0.1 0.1 0.1 0.1 0.1 ength 1 Table inertia J T - m hort table tandard table ong table tarting torque T Nm Ground screw 0.01 tarting torque T Nm Rolled screw 0.0 0.0 Ground screw 0.0 0.0 tarting torque T Nm Rolled screw 0.0 0.0 Ground screw 0 00 00 00 oad N Fig. 1 Deflection vs. Downward load 0 10 0.17 0.1 0.1 0.7 00 0. 0. 0. 0. 0. 0.0 00 0.9 0. 0.0 0.9 0. 0. 0. 0.0 0. 0. 0. 0. 000 0.1 0. 0. 0.1 0. 0.9 0 0.7 0. 0.9 0.7 0.1 0. 700 0. 0. 0. 0. 0.7 0.71 0.0 0.0 0.0 0.0 0.0 0.0 and size ength 1 Table inertia J T - m hort table tandard table ong table tarting torque T Nm Rolled screw Ground screw 90 0. 0. 1.0 0.7 0.1 1. 0.9 0.71 1.9 90 0. 0.9 1.19 0. 0.77 1.9 0. 0.7. 90 0.7 0. 1. 0.7 0.9 1.7 0.1 1.0. 0.0 0. 0.0 90 0.9 1.0 1.0 0.9 1.1 1.90 0.97 1..1 0.09 0.1 90 1.1 1. 1. 1.1 1..0 1.1 1..7 7907 1. 1. 1. 1. 1.. 1. 1..7 990 1. 1.7 1. 1.7 1. 1. 1 190 1.9.0 1.9.1 1.9. 0. Notes 1 The value in represents track rail length of motor folding back specification. When two units of slide table are used, it is about 1. times as long as that of one unit, and when table of motor folding back specification is used, it is about twice. The value in represents starting torque of C-ube specification. For motor folding back specification, please add the following value to the value in the table. 0 and 0: 0.17 - m, : 0. - m 7 1N=0.f=0.lbs. 1=0.097inch

pecifications Motor Folding Back pecification Table 1. Table inertia and starting torque and size ength 1 Table inertia J T - m hort table tandard table ong table 90.1.9..9.. 90...7... 90...1...1 790 7..0..0.. 90...9..0.9 990 9.0..... 1 0901 0......7 1 1901 1...0..1 7.1 1 90 1 19 19 1 90 1 tarting torque T Nm Rolled screw 0. 0.1 Ground screw 0. 0.1 0.1 0.1 0.0 Motor folding back specification is available for Precision Positioning Table, space can be saved by folding back the motor and reducing the overall length of the table. For dimensions of motor folding back specification, please refer to respective dimension table. For motor folding back specification, assembly should be made by customer since "housing applicable to the specified motor, pulley (on motor side and ball screw side), cover, motor bracket, belt and bolts necessary for assembly" are supplied. However, motor mounting bolts should be prepared by customer. Motor folding back unit can be mounted in directions as indicated in the following figure. Motor folding back upward Motor folding back to left and size 0 ength Table inertia J T - m tandard table 1 0 1 1 1 17 1 19 1 tarting torque T Nm Ground screw 0. 0. Motor folding back downward Motor folding back to right and size ength Table inertia J T - m tandard table tarting torque T Nm Ground screw 1 0 9 10 1 1 0.0 1 0.0 1 1 7 Notes 1 The value in represents track rail length of motor folding back specification. When two units of slide table are used, it is about 1. times as long as that of one unit, and when table of motor folding back specification is used, it is about twice. The value in represents starting torque of C-ube specification. For motor folding back specification, please add the following value to the value in the table. : 0. - m Cover pecification bridge cover and bellows are available for Precision Positioning Table as a measure for protection against dust. For the dimensions of table with bellows, please see dimension tables shown in pages of to. Table with bridge cover Table with bellows 9 1N=0.f=0.lbs. 1=0.097inch 0

Two lide Table pecification Two slide table specification is available for Precision Positioning Table. Ball screw nuts are mounted on slide table at the motor side, and it can be driven by the motor (driving table). Ball screw nuts are not mounted on slide table at the opposite motor side, and it is free condition (driven table). It is possible to make the structure resistant to moment load by using two slide tables in combination (Table 11). When combining slide tables, allow more clearance than "minimum center distance between two slide tables in close contact" described in the dimension table shown in pages to 9 (Enlarging the span will shorten the stroke.). ensor pecification Table 1.1 ensor timing chart (motor inline specification) CW CCW Minimum center distance between two slide tables in close contact B ON OFF Origin Pre-origin C OFF CCW limit OFF troke length CW limit Mechanical stopper D E Driven table Driving table and size ength of slide table Ball screw lead B C D 1 E tandard 0. 0 tandard 0.9. hort 7... 0 tandard.. ong. 7. hort 7 7... 0 tandard 7. 7. ong 7.. 1 1.19. hort 7. 10 1 9.1. 0 tandard 7 9. 9. 1 0 ong 7 9. 1 hort 7 1 1 11 1 1 1 tandard 7 1 1 1 1 1 11 ong 7 1 1 1 1 1 11 0 tandard 10 1 19 10 tandard 1 1 1 Notes 1 The value in ( ) indicates the dimension for two slide tables. fter pre-origin signal is turned off, CCW limit is turned on before turned off. In case lengths of 1,90 and 1,90, this length is 1. In case lengths of 1,90 and 1,90, this length is 7 9. Remarks 1. Mounting a sensor is specified using the corresponding identification number.. For the specifications of respective sensors, please see the section of sensor specification in General Explanation.. For tables with bellows, the values in the table are not applied.. For tables with C-ube plate, please see Table 1.. 1 1N=0.f=0.lbs. 1=0.097inch

ensor pecification Table 1. ensor timing chart (motor folding back specification) Table 1. ensor timing chart (motor inline specification, with C-ube) CW CCW CCW CW B ON OFF Origin Pre-origin C OFF CCW limit ON Origin OFF troke length CW limit B OFF Pre-origin Mechanical stopper * In a table of motor folding back specification, the movements of CW direction and CCW direction in a slide table become reversed. ize 0 0 ength of slide table hort tandard ong hort tandard ong hort tandard ong hort tandard ong OFF Ball screw lead D troke length B C D 1 E 7 7 7 7 7...... 7. 7.... 7... 1.19. 1 9.1. 9 7 9. 9. 1 9 7 9. 1 7 1 1 11 1 1 1 7 1 1 1 1 1 11 7 1 1 1 1 1 11 Notes 1 The value in ( ) indicates the dimension for two slide tables. fter pre-origin signal is turned off, CCW limit is turned on before turned off. Remarks 1. Mounting a sensor is specified using the corresponding identification number.. For the specifications of respective sensors, please see the section of sensor specification in General Explanation.. For tables with bellows, the values in the table are not applied.. For tables with C-ube plate, please see Table 1.. C E OFF CW limit CCW limit Mechanical stopper. and size 0 0 ength of slide table hort tandard ong hort tandard ong hort tandard ong hort tandard ong D Ball screw lead B C D 1 E 0 0 0 0 7 0 7 0 7 1 7 10 1 0 7 7.. 9.. 9 9. 7. 9 7... 7. 9.. 9. 9... 9. 11 1 9... 0 7 9 1 7 1 19 10 1 7 1 9 7 1 9 1 1 9 7 9 1 7 9 0 tandard 10 1 17 1 10 tandard 1 1 1 Notes 1 The value in ( ) indicates the dimension for two slide tables. fter pre-origin signal is turned off, CCW limit is turned on before turned off. Remarks 1. Mounting a sensor is specified using the corresponding identification number.. For the specifications of respective sensors, please see the section of sensor specification in General Explanation.. For tables with bellows, the values in the table are not applied. E 11 11 1N=0.f=0.lbs. 1=0.097inch

ensor pecification Table 1. ensor timing chart (motor folding back specification, with C-ube) Dimensions of Motor ttachment Motor inline specification 0 T0 (without attachment) 0.0 0.0 1 -.9 Through 17 1. T0 (without attachment) 0.0 1 0.0 0 -.9 Through 17 1. CCW CW 17 17 17 17 ON Origin T1 1 0.0 0.0 -. Through PCD. T1 1 0.0 0.0 -. Through PCD. B OFF Pre-origin C OFF CW limit 0 0 OFF troke length CCW limit Mechanical stopper T9 1 0.0 0.0 T9 1 0.0 0.0 D E * In a table of motor folding back specification, the movements of CW direction and CCW direction in a slide table becomes reversed. -M. Through PCD -M. Through PCD and size 0 0 ength of slide table hort tandard ong hort tandard ong hort tandard ong hort tandard ong Ball screw lead B C D 1 E 7 7 7 7 7 7.. 9.. 9 9.7. 9 7...7. 9..... 9 1 9.9.. 7.. 9 9 1 9... 7 9 9 1 7 90 1 9 1 7 1 9 9 7 1 9 Notes 1 The dimension in ( ) represents dimensions for two slide tables. fter pre-origin signal is turned off, CCW limit is turned on before turned off. Remarks 1. Mounting a sensor is specified using the corresponding identification number.. For the specifications of respective sensors, please see the section of sensor specification in General Explanation.. For tables with bellows, the values in the table are not applied. T1 0 T0 (without attachment) T T1 T117 T1. 1 0.0 0.0 0 0 - Through 0 -M Through 9 9 0.0 0.0 0.0 0 0.0 0.0 0 0.0 0 0±0.1 0 0±0.1 9 1 0.0 0.0 0 -M Through PCD, Evenly distributed at 90 -. Through. Counterbore depth. -M Through PCD, Evenly distributed at 90 -. Through. Counterbore depth. -. Through. Counterbore depth. 1 9 T1 0 T0 (without attachment) T T1 T117 T1. 1 0.0 0.0 0.0 0.0 9 9 0.0 0 0.0 0.0 0 0.0 0 0 0 0 0±0.1 0 0±0.1 9 1 0.0 0.0 - Through -M Through 0 -M Through PCD, Evenly distributed at 90 -. Through. Counterbore depth. -M Through PCD, Evenly distributed at 90 -. Through. Counterbore depth. -. Through. Counterbore depth. 1 9 0 -. Through 0 -. Through 1N=0.f=0.lbs. 1=0.097inch

Dimensions of Motor ttachment 0 10 T0 (without attachment) 1 0.0 0.0 0 -M Depth 9. T111 7 0.0 0 0.0 0 -M Through PCD, Evenly distributed at 90 T0 (without attachment) 1 0.0 9 0.0 9 7 -M Through 0 70 T0 (without attachment) 1 0.0 9 0.0 1 7 -M Depth 0 70 -M Through -. Through Counterbore depth. T 11 7. 0.0 0 0.0 0 0 -M Through PCD, Evenly distributed at 90 -. Through Counterbore depth. -M Through PCD70, Evenly distributed at 90 T11 11. 0.0 0 0.0 0 0 -M Through PCD70, Evenly distributed at 90 -. Through Counterbore depth 7. -M Through T7 T11 7 7 0.0 0 0.0 7 7 0.0 0 0.0 0 70 -. Through -M Through PCD70, Evenly distributed at 90 0 70 -. Through T T11 17 1 0.0 70 0.0 0.0 70 0.0 7 -M Through PCD90, Evenly distributed at 90 0 0 -. Through 9. Counterbore depth -M Through PCD90, Evenly distributed at 90 0 0 T 0.0 0 0.0 T11 T1 7 0.0 0.0 -M Through PCD70, Evenly distributed at 90 7 -. Through 9. Counterbore depth. -. Through Counterbore depth 7. 0 -. Through Counterbore depth. 70 -M Depth 1 70 -M Depth 1 1 7 0 -M Through 1 0 -M Depth PCD70, Evenly distributed at 90 T1 0.0 0.0 7 0 -. Through 9. Counterbore depth 1 T11 0.0 0.0 7 0 -. Through 9. Counterbore depth 1 T0 (without attachment) 0.0 9 0.0 9. T11 0.0 0 0.0 -. Through Counterbore depth 7. 1 1 0 -M Depth PCD70, Evenly distributed at 90 0 -M Depth PCD70, Evenly distributed at 90 T 0.0 0 0.0 T11 9 0.0 0 0.0 -. Through Counterbore depth 7. -. Through Counterbore depth 7. 1 0 -M Through PCD70, Evenly distributed at 90 -M Through 0 T 9 0.0 0 0.0 T119 T1 0.0 0.0 -. Through Counterbore depth 7. 0 -. Through Counterbore depth. 7 1N=0.f=0.lbs. 1=0.097inch

Dimensions of Motor ttachment Motor folding back specification 0 0 R0 (without attachment) R R0 (without attachment) R0 (without attachment) 1 1 -M Depth -M Through PCD, Evenly distributed at 90 1 1 0 -M Depth 1 0 -M Depth 0 0.. 0 0 Housing Pulley hole dia. Cover Motor bracket.. R R 0, 0 R1 R -M Through PCD70, Evenly distributed at 90 1 -M Through PCD, Evenly distributed at 90 1 -M Through PCD, Evenly distributed at 90 7 11. -M Through PCD, Evenly distributed at 90 7 11. Pulley hole dia. 1.. Pulley hole dia... Cover Cover Housing Motor bracket Housing Motor bracket R7 Housing Motor bracket Cover Pulley hole dia. Housing Motor bracket Cover Pulley hole dia. 1 -M Through PCD70, Evenly distributed at 90.. R9 R1 7 7 11 11 -. Through 1. -. Through 1. Housing Motor bracket Cover Pulley hole dia. 11 Housing Motor bracket Cover Pulley hole dia. Housing Motor bracket Cover Pulley hole dia. R0 (without attachment) R 1 1 -M Depth -M Through PCD70, Evenly distributed at 90 1 9. 0 9. Pulley hole dia. 1.. Cover Housing Motor bracket R -M Through PCD70, Evenly distributed at 90 1 Pulley hole dia. 11.. Housing Motor bracket Cover 9 1N=0.f=0.lbs. 1=0.097inch

Example of Combination In Precision Positioning Table, using XY bracket enables you to configure various two-axis combination. ight aluminum alloy-made XY bracket can be mounted to a flange type standard table. Table 1 shows various XY bracket models. If you are interested, please specify the model number of your desired model from the table. Table 17.1 Dimensions of XY bracket -M 1 Helisert D Table 1 Configuration of two-axis combination and XY bracket models Combination by use of XY bracket Combination possible without the bracket W W number W W 1 W W W H H 1 H H H H M 1 d 1 d h 1 TE01-BR 90 17. 1 7 1 11 7 0 7 1 1 M.. TE01-BR 90 1. 1 7 1 11 7 0 1 9 17 9 1 M.. TE01-BR 90 1. 0 77 9. 1. 7 0 7 9 1 M.. Table 17. Dimensions of XY bracket -M 1 Helisert D H -d 1 Through H H XY bracket Y-axis d Counterbore depth h 1 H 1 H H 1 X-axis W 1 W W X-axis Y-axis Y-axis number of XY bracket X-axis Y-axis number of XY bracket F Not required 0F 0 Not required 0F 0 TE01-BR 0F 0 TE01-BR 0F 0 TE01-BR F 0 TE01-BR F TE009-BR F TE0-BR F Not required F TE011-BR F Not required 10F 0 Not required X-axis W W H -d 1 Through d Counterbore depth h 1 H H 1 H H H H 7 W 1 W W number W W 1 W W W H H 1 H H H H H 7 M 1 d 1 d h 1 TE01-BR 11 7 0 17 70. 1. 1. 1. 1. 19. 1 1. M. 9.. TE009-BR 11 7 0 7 0 1 1. 1. 1. 19. 1 1. M. 9.. TE0-BR 11 0 7 0 7 0 1 1 70 1 1 M. 11. TE011-BR 11 0 7 0 7 0 1 91 7 1. 1... M. 11. 1 1N=0.f=0.lbs. 1=0.097inch

Precision Positioning Table 0 1minimum center distance between two slide tables in close contact - ectional dimension 9minimum center distance between two slide tables in close contact - ectional dimension 1 1 7 1 1 7 -M Depth n 1 -.9 Through. Counterbore depth 1. for cross-recessed pan head screw for precision devices M. 1. 1. 9.9.7 n 1 -.9 Through Counterbore depth.7 1 -M Depth. 1. 1.9 9 1 9.9 0.7 0 0 9 1..7 0 -M Depth -M. Depth 1..7 -M Depth -M. Depth -M. Depth 1 Both surfaces 0 1. 9.9 F. -M. Depth 1 Both surfaces 0 1.9 9 1 9.9 0F.. 1 1 1 9. n 1-1 0. 1 With sensor n 1-1 With sensor Note ( 1 ) No thread hole is prepared for F. Dimensions and size F ength Overall length troke length 1 10 1 0 n 1 Mass of slide table Mass 1 0 0.0 0. 0 00 0. 10 1 0 1 0 0.07 0. 0 00 0.0 Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in The value shows the mass of the entire table with one slide table. Remark: The material and casing is stainless steel. 0.1 0. represents dimension for two slide Note ( 1 ) No thread hole is prepared for 0F. Dimensions and size 0 0F ength Overall length troke length 1 10 17 0 n 1 Mass of slide table Mass 10 1 70 0. 1 0. 0.09 9 101 0.70 00 1901 7 0.77 0 7 0 0. 10 17 0 10 1 70 0.9 1 0. 0.1 9 101 0.7 00 1901 7 0.0 0 7 0 0.7 Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in The value shows the mass of the entire table with one slide table. Remark: The material and casing is stainless steel. 0.9 0. represents dimension for two slide 1N=0.f=0.lbs. 1=0.097inch

Precision Positioning Table 0 Dimensions of slide table and size 7 n n Mass minimum center distance between two slide tables in close contact n -M Depth 0C 19. 0.1 0 1 1. 0. 0G 1 7. 7 71 0. n -M Depth 1 0F 1 1. 0. Dimensions n 1 -. Through. Counterbore depth.1 ength Overall length troke length 1 Mass n 1 0 0C 0G 0C 0 0G 0F 0F 10 1 0 0.9 1.0 1.1 -M Depth 1 Both surfaces 7 0 70 90 0 0 1.1 1. 1. 1. 00 0 110 0 1. 1. 1. 1. 190 1 010 1. 1. 1. 1. 7 70 190 1. 1.7 1. 1. 9... Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in The value shows the mass of the entire table with one slide table. represents dimension for two slide 7 0 n 1-1 0 - ectional dimension 1.9 19 1.9 19 1 0 1 11 1 11 1 1 0 0 0C, 0, 0G 0F With sensor Note ( 1 ) No thread hole is prepared for 0F. 1N=0.f=0.lbs. 1=0.097inch

0 Precision Positioning Table minimum center distance between two slide tables in close contact 1 n -M Depth Dimensions of slide table and size 7 n Mass 0C. 1 0. 0. 7 70 0. 0G. 0 9 0.7 0F. 7 70 0. n 1 -. Through Counterbore depth.1 7 -M Depth 1 Both surfaces Dimensions ength Overall length troke length 1 Mass n 1 0 0C 0G 0C 0 0G 0F 0F 0 1. 1. 1.9 00 0 111 1 1.9.1.. 0 019 1 01.... 7 00 0190.7.9..0 0 7 00 01 70.1... 0 9 00..7.9. 700 70 9 1 07 0..0..1 Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in The value shows the mass of the entire table with one slide table. represents dimension for two slide 9. 7 0 n 1-1 0 0 - ectional dimension 7 1 1.9 1.9 1 0 1 1. 1. 71 0 0 0C, 0, 0G 0F With sensor Note ( 1 ) No thread hole is prepared for 0F. 7 1N=0.f=0.lbs. 1=0.097inch

Precision Positioning Table minimum center distance between two slide tables in close contact n -M Depth E 1 70 Ball screw lead, Dimensions of slide table and size 7 n E E 1 Mass C 7. 17. 90 1 0.. 1 90 0 0. G 1. 11 0 1.0 FC 7. 90 1 0. F. 90 0 0. FG 1. 11 0 1. Dimensions n 1 -. Through 9. Counterbore depth. ength Overall length troke length 1 Mass n 1 C G C G FC F FG FC F FG 90 9 1 0 0 70.0...1..9 M Depth 1 Both surfaces E M Depth 1 Both surfaces 90 9 10 01 170.7.0....7 90 9 00 701...1..9. 90 9 0 00 70.....7.1 90 9 7 0 00 70.0...1..9 790 79 0 70.7 7.0 7.. 7. 7. 990 99 70 007 770.. 9.0..7 9.1 9. 1190 119 1 1 090 1 0009 970 9..1. 9.9.. Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in represents dimension for two slide The value shows the mass of the entire table with one slide table. n 1-1 0 7 Ball screw lead Dimensions of slide table and size 7 n E E 1 Mass C 7. 17. 1 1 0.. 1 90 1 0. - ectional dimension G 1. 11 1 1.0 FC 7. 1 1 0. F. 90 1 0. 7 FG 1. 11 1 1.. 0 1 1 C,, G F With sensor Notes ( 1 ) No thread hole is prepared for FC, F, FG. ( ) C is depth. 0 1. 0 0 0 Dimensions ength Overall length troke length 1 Mass n 1 C G C G FC F FG FC F FG 90 9 9 9.1..7...0 90 9 191 1911 1..1..9.. 90 9 9 91 1..9..7.0. 90 9 9 91...9... 90 9 7 9 91.1..7.. 7.0 790 79 9 91. 7.1 7..9 7. 7.7 Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in represents dimension for two slide The value shows the mass of the entire table with one slide table. 9 1N=0.f=0.lbs. 1=0.097inch 70

Precision Positioning Table minimum center distance between two slide tables in close contact n -M Depth 1 1 n -M Depth 1 7 Dimensions of slide table and size 7 n n Mass C 0 90 0 0.7 9 10 10 1.7 G 7 11 1 1. FC 90 0 1.1 F 9 10 10. FG 7 11 1 1.0 Dimensions ength Overall length troke length 1 Mass n 1 C G C G FC F FG FC F FG 90 9 00 1 70 9.9.9 11.. 11. 1. 90 9 00 0 170. 11.7 1. 11. 1. 1.0 90 9 7 00 0 70 1. 1. 1. 1.7 1.9 1. n 1-7 Through 11 Counterbore depth 7 790 79 0 0 70 1. 1.7 1. 1. 1. 1.1 90 9 9 700 70 1.0 1.9 1. 1. 1. 17. M Depth Both surfaces M Depth Both surfaces 990 99 00 7 70 7 70 1. 17. 17.9 1.9 1.1 1.7 90 1 09 11 900 0 7 70 1.0 1.9 19. 1. 19.. 1190 1 19 1 1 000 9 90 9 770 19.. 1.0 19.9 1.1 1. 190 1 9 1 1 01 1 1 101 0 1 1 970...9.9.0.7 190 1 9 1 1 001 1 01 1 1 170 7..7 9.. 9. 0.0 9. 9. 7 7. Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in The value shows the mass of the entire table with one slide table. represents dimension for two slide 7 n 1-1 0 - ectional dimension 11. 0 70 0 C,, G F With sensor Notes ( 1 ) F is M depth 1. ( ) No thread hole is prepared for FC, F, FG. ( ) C is depth. ( ) If the track rail length for C and FC is 1,90 or 1,90, the height is 90. 71 1N=0.f=0.lbs. 1=0.097inch 7

0 Precision Positioning Table 10 1minimum center distance between two slide tables in close contact -M Depth 1 0 10minimum center distance between two slide tables in close contact -M Depth 1 n 1-9 Through 1 Counterbore depth 9 n 1-11 Through 17. Counterbore depth. 111 10 -M Depth 1 Both surfaces -M Depth 1 Both surfaces 1 10 79. 9 99. 7. 7. n 1-1 10 1. n 1-1 10 17 - ectional dimension - ectional dimension. 0 1 11 70 1 10 1. 0 0. 0 90 11 1. 9. 0 9. 1 7. 9. 9. 99. 99. 0 0F With sensor 0 70 0 70 10 10 10 10 10F With sensor Notes ( 1 ) No thread hole is prepared for 0F. ( ) 0F is M depth 1. Remark: M1 female threads for hanging bolt are provided on the track rail. Dimensions and size 0 0F ength Overall length troke length 1 1 0 1 0 90 0 7 n 1 table Mass of slide Mass 1 1 1 170 0 700 1. 0. 1 1 990 0 9.1 1 1 70 1 101 000. 1 0 1 0 90 0 7 1 1 1 170 0 700.7.7 1 1 990 0 9. 1 1 70 1 101 000 9.9 Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in The value shows the mass of the entire table with one slide table..0 9.1 represents dimension for two slide Notes ( 1 ) No thread hole is prepared for 10F. ( ) 10F is M depth 1. Remark: M1 female threads for hanging bolt are provided on the track rail. Dimensions and size 10 10F ength Overall length troke length 1 1 0 1 0 90 7 n 1 Mass of slide table Mass 1 1 1 170 0. 1 1 9 790 9 70.. 1 1 70 1 1 90 1. 1 1 1 1 090 11 7. 1 0 1 0 90 7 1 1 1 170.0 1 1 9 790 9 0 7.. 1 1 70 1 1 90. 1 1 1 1 090 11 9.7 Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in The value shows the mass of the entire table with one slide table.. 7. represents dimension for two slide 7 1N=0.f=0.lbs. 1=0.097inch 7

Precision Positioning Table 0 Motor folding back specification minimum center distance between two slide tables in close contact n -M Depth Dimensions of slide table and size 7 n n Mass 0C 19. 0.1 0 1 1. 0. 0G 1 7. 7 71 0. 0F 1 1. 0. n -M Depth 7 Dimensions ength Overall length troke length 1 Mass n 1 0 0C 0G 0C 0 0G 0F 0F 10 1 0 1.0 1.1 1. 0 70 90 0 0 1. 1. 1. 1. 110 0 1. 1. 1. 1. n 1 -. Through. Counterbore depth.1 1 1 190 1 010 1. 1.7 1. 1. 0 70 190 1. 1.9.0.0 Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in The value shows the mass of the entire table with one slide table. represents dimension for two slide -M Depth 1 Both surfaces 9. 7.. 0. 0 n 1-1 0 - ectional dimension 1.9 19 0 1.9 19 1 1 11 1 11 1 1 0 0 0C, 0, 0G 0F With sensor Note ( 1 ) No thread hole is prepared for 0F. Remark: Parts for motor attachment are appended. This figure indicates a finished state after the motor attachment is assembled by the customer. 7 1N=0.f=0.lbs. 1=0.097inch 7

Precision Positioning Table 0 Motor folding back specification minimum center distance between two slide tables in close contact 7 Dimensions of slide table and size 7 n Mass 0C. 1 0. 0. 7 70 0. 0G. 0 9 0.7 0F. 7 70 0. n -M Depth n 1 -. Through Counterbore depth.1 1 1 Dimensions ength Overall length troke length 1 Mass n 1 0 0C 0G 0C 0 0G 0F 0F 10 1 0 1. 1. 1.9 111 1 1.9.1.. 0 019 1 01.... 7 00 0190.7.9..0 00 0 00 01 70.1... 0 7 0 9 00..7.9. 1 07 0..0..1 Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in The value shows the mass of the entire table with one slide table. represents dimension for two slide -M Depth 1 Both surfaces 9. 0 7 0 n 1-1 0 70 - ectional dimension 7 1 1.9 1.9 1 0 1 1. 1. 71 0 0 0C, 0, 0G 0F With sensor Note ( 1 ) No thread hole is prepared for 0F. Remark: Parts for motor attachment are appended. This figure indicates a finished state after the motor attachment is assembled by the customer. 77 1N=0.f=0.lbs. 1=0.097inch 7

Precision Positioning Table Motor folding back specification n 1 -. Through 9. Counterbore depth. minimum center distance between two slide tables in close contact 1 9 n -M Depth E 07 7 0 171 Ball screw lead, Dimensions of slide table and size 7 n E C 7. 17. 0.. 1 90 9 0. G 1. 11 9 1.0 FC 7. 0. F. 90 9 0. FG 1. 11 9 1. Dimensions ength Overall length Mass troke length 1 Mass n 1 C G C G FC F FG FC F FG 1 0 9..9.7.1 10 1911 1...0... 91 1.1..7...0 0 91..1..9..7 0 91.. 7..7 7.0 7. 7 7 7 91 7. 7. 7.9 7. 7.. Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in represents dimension for two slide The value shows the mass of the entire table with one slide table. 9. M Depth 1 Both surfaces M Depth 1 Both surfaces 7 77. Ball screw lead Dimensions of slide table and size 7 n E C 7. 17. 0. Mass n 1-1 0 7 9 1.. 1 90 9 0. G 1. 11 9 1.0 FC 7. 0. F. 90 9 0. - ectional dimension FG 1. 11 9 1. 7 0. 0 1. 0 1 0 C,, G FC, F, FG With sensor 0 Dimensions ength Overall length troke length 1 Mass n 1 C G C G FC F FG FC F FG 9 9.7.0.. 191 1911 1..7.1..9. 9 91 1......1 9 91.9...0.. 9 91.7.9 7.. 7.1 7. 7 7 7 9 91 7. 7.7.0 7.7 7.9. Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in represents dimension for two slide The value shows the mass of the entire table with one slide table. Notes ( 1 ) No thread hole is prepared for FC, F, FG. ( ) C is depth. ( ) The dimension in ( ) is applied to motor attachment codes R and R7. Remark: Parts for motor attachment are appended. This figure indicates a finished state after the motor attachment is assembled by the customer. 79 1N=0.f=0.lbs. 1=0.097inch 0

Precision Positioning Table Motor folding back specification Dimensions of slide table and size 7 n n Mass minimum center distance between two slide tables in close contact n -M Depth 1 C 0 90 0 0.7 9 10 10 1.7 G 7 11 1 1. 1 FC 90 0 1.1 n -M Depth 1 1 F 9 10 10. n 1-7 Through 11 Counterbore depth 7 7 0 1 FG 7 11 1 1.0 Dimensions ength Overall length troke length 1 Mass n 1 C G C G FC F FG FC F FG 0 91 11. 11. 11..7 11.9 1. 0 91 1 1 11. 1.1 1. 11. 1. 1. 91 1 1.7 1. 1. 1.1 1. 1.0 7 7 70 7 91 1 1. 1.1 1.7 1. 1. 1. 0 91 1 1. 1. 1. 1. 17.0 17. 9 90 9 7971 71 7 1.9 17. 1. 17. 1. 19.1 1 00 91 71 1. 19. 19. 1..0. M Depth Both surfaces M Depth Both surfaces 11 1 10 11 9991 91 97 19.9. 1.. 1.. Notes 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in represents dimension for two slide The value shows the mass of the entire table with one slide table. 9. 7 9. 1 7 n 1-1 0 7 - ectional dimension 11. 0 70 0 C,, G FC, F, FG With sensor Notes ( 1 ) F is M depth 1. ( ) No thread hole is prepared for FC, F, FG. ( ) C is depth. Remark: Parts for motor attachment are appended. This figure indicates a finished state after the motor attachment is assembled by the customer. 1 1N=0.f=0.lbs. 1=0.097inch

Precision Positioning Table Table with bellows Table with bellows 1. 1. F 1 /. 1 / G F 1 / 7 1 / G 1 0 -M Depth -M Depth 0 7 M- Depth 70 ength Overall length imit stroke length 1 1 troke length 90 99.. 7.. 9 9 9 90 99.. 17.1. 101 7 7 90 99.. 19.1. 1 79 90 99.. 9.. 0 99 99 1 9 90 99.. 9.. 07 99 99 1 9 790 7 799.7... 0 1111 17 Notes 1 The value indicates the limit value of stroke with which the slide table can move. The value indicates the allowable stroke length when limit sensors are mounted. Remarks 1. The values in are applied to table with bellows of motor folding back specification.. For the track rail mounting dimensions, please see the dimension table for.. pplicable to tables with C-ube. F G ength Overall length imit stroke length 1 1 troke length 90 99. 1. 19 19190 7 7 90 99. 1. 770 1 79 90 99. 1. 9 0 99 99 1 9 790 7 799. 71. 11 0 1111 19 90 99. 1. 11 0 1111 19 990 9 999. 91. 9 07 1717 11 1 0901 0 1 099.1 01. 7 1010 171 1 1901 1 1 199.1 11. 797 707 11 19017 Notes 1 The value indicates the limit value of stroke with which the slide table can move. The value indicates the allowable stroke length when limit sensors are mounted. Remarks 1. The values in are applied to table with bellows of motor folding back specification.. For the track rail mounting dimensions, please see the dimension table for.. pplicable to tables with C-ube. F G 1N=0.f=0.lbs. 1=0.097inch

Precision Positioning Table 0, 0 Table with C-ube and size ength Overall length troke length 1 E 7 minimum center distance between two slide tables in close contact 0C 00 0 1 90 0 170 0 90. 0 0 700 70 90 00 0 1 0 0 0F 0 10 0 90 90. 70 700 70 0 00 0 0 E 0G 0 10 0 1 0 00 90. 1 700 70 0000 Note 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in Remark: For dimensions of the slide table and track rail, please see the dimension table for each size. represents dimension for two slide 7 and size 0C 0 0F 0G ength Overall length troke length 1 10 1 0 0 90 0 00 0 1 70 0 0 00 0 01 19 0 00 0 1 10 01 E 7 90 19. 90 1. 70 7 90 7. 1N=0.f=0.lbs. 1=0.097inch

,, 0, 10 Table with C-ube and size C FC F G FG Precision Positioning Table ength Overall length troke length 1 90 9 90 0 70 90 9 19010 1701 90 9 900 70 90 9 900 70 90 9 900 70 790 79 900 70 90 9 90 70 90 9 1901 1700 90 9 90 700 90 9 90 7000 90 9 90 7000 790 79 90 7000 90 9 90 9 1 0 1 90 9 10 10 90 9 90 9 0 0 790 79 0 0 minimum center distance between two slide tables in close contact E 7 7 0 1 7. 7 70 0 9. 0 9 0 10 1 E and size C FC F G FG 0 0F 10 10F ength Overall length troke length 1 90 9 190 90 9 90 90 9 90 790 79 90 90 9 90 990 99 7 90 1 090 1 09 790 1 190 1 19 9 90 90 9 0 1 90 9 0 90 9 0 790 79 0 90 9 990 99 70 1 090 1 09 0 7 1 190 1 19 90 90 9 70 90 9 170 90 9 70 790 79 70 90 9 70 990 99 7 70 1 090 1 09 70 1 190 1 19 9 770 1 0 1 0 70 0 1 1 1 170 90 1 1 970 0 1 1 70 1 1 990 1 0 1 0 0 1 1 1 170 70 1 1 90 70 1 1 70 1 00 90 1 1 1 01 00 Note 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in Remark: For dimensions of the slide table and track rail, please see the dimension table for each size. E 7 1 9 9 9 1 1 11 170 17 10 111 170 1 10 1 19 190 represents dimension for two slide 7 1N=0.f=0.lbs. 1=0.097inch

Precision Positioning Table 0, 0 Table with C-ube (Motor folding back specification) minimum center distance between two slide tables in close contact E and size 0C 0 0F 0G ength Overall length troke length 1 10 1 1 90 0 170 0 00 0 0 0 90 10 1 1 0 0 10 00 0 90 0 70 0 0 0 10 0 1 00 0 00 0 0000 E 7 0. 0. 0. 1 Note 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in represents dimension for two slide Remarks 1. Parts for motor attachment are appended. This figure indicates a finished state after the motor attachment is assembled by the customer.. For dimensions of the slide table and track rail, please see the dimension table for each size. 7 and size 0C 0 0F 0G ength Overall length troke length 1 10 1 0 0 90 0 1 0 70 0 0 01 0 19 0 1 10 0 01 E 7 0 19. 0 1. 70 7 0 7. 9 1N=0.f=0.lbs. 1=0.097inch 90

Precision Positioning Table, Table with C-ube (Motor folding back specification) minimum center distance between two slide tables in close contact 7 E and size C FC F G FG ength Overall length troke length 1 0 190 0 090 090 7 70 090 0 90 9 90 7090 1 0 1 00 0790 1 1 1 10 9090 0 01 0 0 0 7 70 0 0 9 90 70 1 0 1 00 07 1 1 1 10 90 0 70 0 170 70 7 70 70 0 70 9 90 770 1 0 1 00 70 E 7 70 9 9 0 9 1 1 0 11 170 17 1 1 1 10 9770 Note 1 The value indicates the allowable stroke length when limit sensors are mounted. The value in represents dimension for two slide Remarks 1. Parts for motor attachment are appended. This figure indicates a finished state after the motor attachment is assembled by the customer.. For dimensions of the slide table and track rail, please see the dimension table for each size. and size C FC F G FG ength Overall length troke length 1 90 0 70 19010 1701 900 70 900 70 900 70 7 7 900 70 0 70 101 1700 0 700 0 7000 0 7000 7 7 0 7000 0 10 0 1 10 10 0 00 0 7 7 00 0 E 7 7 7. 7 70 0 9. 0 9 0 9 10 1 91 1N=0.f=0.lbs. 1=0.097inch 9