CHARACTERISTICS OF MAGNETICALLY ENHANCED CAPACITIVELY COUPLED DISCHARGES*

Transcription

1 CHARACTERISTICS OF MAGNETICALLY ENHANCED CAPACITIVELY COUPLED DISCHARGES* Alx V. Vasnkov and Mak J. Kushn Unvsty of Illnos 1406 W. Gn St. Ubana, IL Octob 00 * Wok suppotd by Satch, SRC and NSF MJK_GEC0_01

2 AGENDA Intoducton to Magntcally Enhancd Ractv Ion Etchng (MERIE) Plasa Soucs. Dscpton of Modl Scalng of MERIE Popts Concludng Raks MJK_GEC0_0 Unvsty of Illnos Optcal and Dschag Physcs

3 MERIE PLASMA SOURCES Magntcally Enhancd Ractv Ion Etchng plasa soucs us tansvs statc agntc flds n capactvly coupld dschags fo confnnt to ncas plasa dnsty. D. Chng t al, US Patnt 4,84,683 M. u t al, JVST A 16, 1464 (1998) MJK_GEC0_03 Unvsty of Illnos Optcal and Dschag Physcs

4 INVESTIGATIONS OF MERIE SYSTEMS Although MERIEs hav bn usd n ndusty fo any yas th a a supsngly sall nub of publshd woks on th fundantals of ths systs. G. Y. Yo, t al, JAP 65, 385 (1989) [as, potntal asunts] A. P. Paanp, t al, JVSTA 10, 1140 (1991) [Modl] K. E. Davs, t al, JVSTA 11, 75 (1993) [Etch at optzaton] D. Hutchnson, t al, TPS 3, 636 (1995) [PIC Sulaton] S. V. Avtava, t al, JPD 30, 3000 (1997) [Pob, OES] M. J. u, t al, JVSTA 16, 1464 (1998) [Etch unfoty optzaton] S. Rauf, t al, ICOPS (00) [-D Modlng] MJK_GEC0_04 Unvsty of Illnos Optcal and Dschag Physcs

5 SCALING OF MERIE SYSTEMS Gnal scalngs: Mo confnnt du to -fld has gotc and kntcs ffcts. Mo postv bas wth -fld G. Y. Yo, t al JAP 65, 385 (1989) Lag [], T wth -fld S. V. Avtava, t al JPD 30, 3000 (1997) MJK_GEC0_05 Unvsty of Illnos Optcal and Dschag Physcs

6 MODELING OF MERIE Hybd Plasa Equpnt Modl Elcton ngy quaton fo bulk lctons Mont Calo Sulaton fo hgh ngy sconday lctons fo basd sufacs Contnuty, Montu and Engy (tpatu) quatons fo all nutal and on spcs. Posson quaton fo lctostatc potntal Ccut odl fo bas Mont Calo Sulaton fo on tanspot to obtan IEADs MJK_GEC0_06 Unvsty of Illnos Optcal and Dschag Physcs

7 Unvsty of Illnos Optcal and Dschag Physcs ELECTRON ENERGY TRANSPORT S(T ) = Pow dposton fo lctc flds L(T ) = Elcton pow loss du to collsons Φ = Elcton flux κ(t ) = Elcton thal conductvty tnso S E = Pow souc souc fo ba lctons MJK_GECO_07 ( ) ( ) ( ) E n D E qn S T T kt 5 L T T S t kt n 3 Φ = Φ = µ κ / ( ) sotopc A q 1 q A A o z z z z z z z o = = =, / ν ω ν θ θ θ θ θ θ θ All tanspot coffcnts a tnsos:

8 Unvsty of Illnos Optcal and Dschag Physcs PLASMA CHEMISTRY, TRANSPORT AND ELECTROSTATICS Contnuty, ontu and ngy quatons a solvd fo ach spcs (wth up condtons at boundas) MJK_GEC0_ 08 Iplct soluton of Posson s quaton ( ) ( ) = Φ q t - - s N q t t φ ρ ε S N t N = ) v ( ( ) ( ) ( ) ( ) v E N q N v v kn T t N v µ = 1 ( ) v v N N ν ( ) ) ( ) U ( U Q E N q N P t N ω ν ν ε ε = ± s T k R N N T T k R N N E N q 3 ) ( 3 ν

9 MERIE REACTOR Th odl acto s basd on a TEL Dsgn havng a tansvs agntc fld. K. Kubota t al, US Patnt 6,190,495 (001) MJK_GEC0_09 Unvsty of Illnos Optcal and Dschag Physcs

10 MERIE REACTOR: MODEL REPRESENTATION HEIGHT (c) 4 0 Show Had Conductv Waf Powd Substat -Fld Focus Rng Pup RADIUS (c) -D, Cylndcally Sytc Magntc fld s puly adal, an appoxaton valdatd by -D Catsan copasons. MJK_GEC0_10 Unvsty of Illnos Optcal and Dschag Physcs

11 A DENSITY vs MAGNETIC FIELD 0 G, 1.9 x c G, 4.0 x c -3 Puly adal -fld paalll to lctods Incasng -fld shfts plasa towads cnt and ncass dnsty. Plasa s localzd clos to waf. 150 G, 4.7 x c -3 MJK_GEC0_11 A, 40 To, 100 W, 10 MHz Unvsty of Illnos Optcal and Dschag Physcs

12 IONIZATION Y SECONDARY ELECTRONS Th localzaton of plasa dnsty na th powd lctod at lag agntc flds s patly attbutabl to th confnnt of sconday lctons. 1.5 G: 3.7 x c -3 s -1 Ionzaton by sconday lctons s unfo acoss th gap at low - fld; localzd at hgh -fld. 150 G: 1.3 x c -3 s -1 MJK_GEC0_1 A, 40 To, 100 W, 10 MHz Unvsty of Illnos Optcal and Dschag Physcs

13 IONIZATION Y ULK ELECTRONS Sla tnds a sn fo bulk lctons. Th tansvs thal conductvty dcass wth ncasng -fld, poducng o localzd hot lctons. 1.5 G: 4.6 x c -3 s G: 4.9 V 150 G: 9.9 x c -3 s -1 ulk Ionzaton Rat 150 G: 5. V Elcton Tpatu MJK_GEC0_13 A, 40 To, 100 W, 10 MHz Unvsty of Illnos Optcal and Dschag Physcs

14 ION FLUX TO SUSTRATE Th on flux ncass wth ncasng -fld du to low tansvs losss. A Flux (=0) /c -s Fld (G) A Flux at =0 (10 15 c - s -1) A* tanspot, unaffctd by -fld, has o apd losss as souc appoachs substat. Rducton n ffcncy of onzaton by sall ult-stp at lows on flux. A, 40 To, 100 W, 10 MHz MJK_GEC0_14 Unvsty of Illnos Optcal and Dschag Physcs

15 ION FLUX vs RADIUS Ion flux bcos cnt pakd at ntdat -fld; ganng unfoty at lag -fld wth stong confnnt. A, 40 To, 100 W, 10 MHz MJK_GEC0_15 Unvsty of Illnos Optcal and Dschag Physcs

16 dc IAS AND RF VOLTAGE dc as (V) 5 0 as Fld (G) V f V (f) Th dc bas gnally bcos o postv wth ncasng -fld as th plasa s confnd clos to th powd lctod. Constant pow, dcasng on flux, ncasng bas voltag Mo sstv plasa. A, 40 To, 100 W, 10 MHz MJK_GEC0_16 Unvsty of Illnos Optcal and Dschag Physcs

17 A ENERGY AND ANGLE DISTRIUTIONS Th o postv dc bas ducs th shath potntal. Th sultng IEAD s low n ngy and boad. MJK_GEC0_17 A, 40 To, 100 W, 10 MHz Unvsty of Illnos Optcal and Dschag Physcs

18 A DENSITY/FLUX vs POWER 50 W,.3 x c W, 6.0 x c W,.0 x c -3 Pow poducs o than lna ncas n pak [A ] and sub-lna ncas n flux wth dcas n unfoty MJK_GEC0_18 A, 40 To, 100 G, 10 MHz Unvsty of Illnos Optcal and Dschag Physcs

19 CONCLUDING REMARKS Scalng laws fo an ndustal MERIE acto hav bn coputatonally nvstgatd; and ap wll onto xpntal sults. Incasng -fld localzs plasa na powd lctod, sultng n: Incas n [] Mo localzd onzaton soucs Sall but localzd ncas n T Mo postv V dc Lack of spons of A* to -fld ay dcas on fluxs by lowng ultstp pocsss as soucs ov towads sufac. IEADs a snstv to -fld du to scalng of V dc. MJK_GEC0_0 Unvsty of Illnos Optcal and Dschag Physcs