EECS143 Microfabrication Technology

Transcription

1 EECS143 Microfabrication Technology Professor Ali Javey Introduction to Materials Lecture 1

2 Evolution of Devices Yesterday s Transistor (1947) Today s Transistor (2006)

3 Why Semiconductors? Conductors e.g Metals Insulators e.g. Sand (SiO 2 ) Semiconductors conductivity between conductors and insulators Generally crystalline in structure In recent years, non-crystalline semiconductors have become commercially very important Polycrystalline amorphous crystalline

4 What are semiconductors Elements: Si, Ge, C Binary: GaAs, InSb, SiC, CdSe, etc. Ternary+: AlGaAs, InGaAs, etc.

5 Electrons and Holes in Semiconductors Silicon Crystal Structure Unit cell of silicon crystal is cubic. Each Si atom has 4 nearest neighbors Å

6 Silicon Wafers and Crystal Planes z z z y y y x (100) x x (011) (111) The standard notation for crystal planes is based on the cubic unit cell. (011) flat (100) plane Si (111) plane Silicon wafers are usually cut along the (100) plane with a flat or notch to help orient the wafer during IC fabrication.

7 Bond Model of Electrons and Holes (Intrinsic Si) Si Si Si Si Si Si Si Si Si Silicon crystal in a two-dimensional representation. Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si Si When an electron breaks loose and becomes a conduction electron, a hole is also created.

8 Dopants in Silicon Si Si Si Si Si Si Si As Si Si B Si Si Si Si N-type Si Si Si Si P-type Si As (Arsenic), a Group V element, introduces conduction electrons and creates N-type silicon, and is called a donor. B (Boron), a Group III element, introduces holes and creates P-type silicon, and is called an acceptor. Donors and acceptors are known as dopants.

9 Types of charges in semiconductors Hole Electron Mobile Charge Carriers they contribute to current flow with electric field is applied. Ionized Donor Ionized Acceptor Immobile Charges they DO NOT contribute to current flow with electric field is applied. However, they affect the local electric field EE143 Vivek Subramanian Slide 1-9

10 Doped Si and Charge What is the net charge of your Si when it is electron and hole doped?

11 GaAs, III-V Compound Semiconductors, and Their Dopants Ga As Ga Ga As Ga As As Ga As Ga GaAs has the same crystal structure as Si. GaAs, GaP, GaN are III-V compound semiconductors, important for optoelectronics. Which group of elements are candidates for donors? acceptors?

12 From Atoms to Crystals p conduction band Energy s valence band isolated atoms Decreasing atomic separation lattice spacing Energy states of Si atom (a) expand into energy bands of Si crystal (b). The lower bands are filled and higher bands are empty in a semiconductor. The highest filled band is the valence band. The lowest empty band is the conduction band.

13 Energy Band Diagram Conduction band E c E g Band gap E v Valence band Energy band diagram shows the bottom edge of conduction band, E c, and top edge of valence band, E v. E c and E v are separated by the band gap energy, E g.

14 Measuring the Band Gap Energy by Light Absorption electron photons photon energy: h v > E g E g E c E v hole E g can be determined from the minimum energy (hν) of photons that are absorbed by the semiconductor. Bandgap energies of selected semiconductors Material PbTe Ge Si GaAs GaP Diamond E g (ev)

15 Semiconductors, Insulators, and Conductors E c E g=1.1 ev E c Ev E g= 9 ev E v Top of conduction band empty filled E c Si (Semiconductor) SiO 2 (Insulator) Conductor Totally filled bands and totally empty bands do not allow current flow. (Just as there is no motion of liquid in a totally filled or. totally empty bottle.) Metal conduction band is half-filled. Semiconductors have lower E g 's than insulators and can be doped.

16 Donor and Acceptor Levels in the Band Model Conduction Band Donor Level E c E d Donor ionization energy Acceptor Level Valence Band Acceptor ionization energy E a E v Ionization energy of selected donors and acceptors in silicon Donors Acceptors Dopant Sb P As B Al In Ionization energy, E c E d or E a E v (mev) m 0 q 4 Hydrogen: E ion = = 13.6 ev 8ε 02 h 2

17 Dopants and Free Carriers Donors n-type Acceptors p-type Dopant ionization energy ~50meV (very low).

18 General Effects of Doping on n and p Charge neutrality: N _ a N + d n + N a _ p N + d : number of ionized acceptors /cm3 : number of ionized donors /cm3 = 0 Assuming total ionization of acceptors and donors: N a N d n + N p = 0 a N d : number of acceptors /cm3 : number of donors /cm3

19 Density of States E E c ΔΕ E c g c g(e) E v E v g v g c ( E) g g c v number of states in ΔE ΔE volume 1 ev cm 3 * * mn 2mn ( E) 2 3 π h * * mp 2mp ( E) 2 3 π h ( E E ) c ( E E) v

20 Thermal Equilibrium

21 Thermal Equilibrium An Analogy for Thermal Equilibrium Sand particles Dish Vibrating Table There is a certain probability for the electrons in the conduction band to occupy high-energy states under the agitation of thermal energy (vibrating atoms, etc.)

22 At E=E F, f(e)=1/2

23 Effect of T on f(e) T=0K

24 Question If f(e) is the probability of a state being occupied by an electron, what is the probability of a state being occupied by a hole?

25 N c is called the effective density of states (of the conduction band).

26 N v is called the effective density of states of the valence band.

27 Intrinsic Semiconductor Extremely pure semiconductor sample containing an insignificant amount of impurity atoms. n = p = n i E f lies in the middle of the band gap Material Ge Si GaAs E g (ev) n i (1/cm 3 ) 2 x x x 10 6