Vibration Control. ! Reducing Vibrations within the Building (EEU)! Reducing Vibrations at the Instrument (HA) Internal Isolation External Isolation

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1 Vibration Control, Sc.D., PE Acentech Incorporated, PE Colin Gordon & Associates Vibration Control - Outline! How Vibrations are Characterized (EEU)! The Role of the Advanced Technology Bldg. (EEU)! Vibration Measurements (HA)! Effects of Vibrations on Instruments (HA) Example Microscope Generic Vibration Criteria! Reducing Vibrations within the Building (EEU)! Reducing Vibrations at the Instrument (HA) Internal Isolation External Isolation 1

2 How Vibrations are Characterized The Role of the Advanced Technology Bldg., Sc.D., PE Acentech Incorporated Vibration Definitions! Vibration: Back-and and-forth motion about an equilibrium position! Most Important in Buildings Vertical Due to interior and nearby disturbances Horizontal Due to seismic activity and wind! Ground motions often reported in Peak Particle Velocity (PPV) PPV = Greatest value of 3-D 3 D (triaxial( triaxial) ) vector amplitude in some observation period Generally we need more detail 2

3 Sinusoidal Vibrations: Amplitudes! Conceptually simplest vibration is sinusoidal or simple harmonic y = Y sin( ω t + φ ) Y = Amplitude (Zero-to-Peak) 2Y = Double Amplitude (Peak-to-Peak) T = Period [sec] Sinusoidal Vibrations: root-mean-square f = frequency [cycles/sec = Hz] = 1/T ω = radian frequency [radians/sec] = 2πf Root-mean-square (rms) value = y 1 / 2 t 0 + T 2 rms y ( t ) dt = 1 = T t 0 Y 2 3

4 Vibration metrics: displacement, velocity, acceleration If y(t) is a displacement, y ( t ) = Y sin( ω t + φ ) Velocity: v( t) = dy / dt = Yω cos( ωt + φ) = V cos( ωt + φ) Acceleration: a = dv/ dt = Vω sin( ωt + φ) = Asin( ωt + φ) Amplitude relations: V = Y ω 2 A = Vω = Yω where: ω = 2 π f Periodic Vibrations! Practical vibrations are rarely simply sinusoidal! Fourier analysis: sum of sinusoidal components y = n = 1 Y n sin( ω t n + φ ) n ; ω n = nω 1! If motion repeats after each interval T (the Period ) it is called periodic ; otherwise it is called complex 4

5 Random Vibrations! Vibration is deterministic if value at any future time can be predicted from past history! Vibration is random if it is unpredictable, except statistically. Random vibrations are stationary if the statistics do not change with time.! In Buildings: Machinery: Background: Activities: deterministic, often periodic, usually complex random, stationary in some intervals transient pulses Vibration Spectra! Spectrum = Frequency distribution of amplitudes! For spectrum of periodic motion, use Fourier analysis 5

6 Vibration Spectrum Random Motion! For spectrum of random motion Assume that the motion observed during a recording interval T R repeats continually, and apply Fourier analysis to that interval 1 TR Yn = y( t)sin nω1 2T TR R t dt ω = πf = 2 /T π Amplitudes Y n depend on record length T R. We need specify it or equivalent information, such as the analysis bandwidth R f=f 1 /(number of spectrum lines ); f 1 =1/T R Note: if T R is doubled, we get twice as many components. Old Y n s then are half as large. Power Spectral Density (PSD)! Power spectral density normalizes spectra in relation to bandwidth PSD ( f j ( y ) = f 2 ) avg, f f j = center frequency of band f j j j Mean square velocity in band is independent of bandwidth T 2 1 R 2 ( y ) avg = y ( t) dt = 2T R T Units of PSD: m 2 /Hz or (in/sec) 2 /Hz,, etc. Root(PSD) has units of m/ Hz or (in/sec)/ Hz R Y 2 n 6

7 Vibration Statistics! Stationary random vibrations may also be characterized in terms of probability distributions:! Probability magnitudes for levels are often stated in terms of percentile levels, e.g., L =Level that is exceeded % of the time Levels and Decibels! Sound = Vibration of Air Pressure May cause internal vibrations in sensitive equipment! Levels and Decibels (db) Vibration Velocity Level = L v Sound Pressure Level (SPL) = L p 2 2 [ v v ] 20 [ v v ] Lv ( db) = log rms = log ref L p = 20 log [ p p ] rms ref rms ref >> The reference values v ref and p ref must be stated 7

8 Vibration Basics - Summary! Sinusoidal vibrations Displacement, velocity, acceleration relations Amplitudes, root-mean mean-square! Periodic vibrations: Spectra! Random Vibrations Spectra and Power Spectral Density (PSD) Probability distributions! Levels and Decibels! NEXT: Relevance to Buildings Typical Vibration Sources in a Building 8

9 Vibration Sources! Vibrations of sensitive instruments may be caused by! Locally induced floor vibrations! Vibrations transmitted from elsewhere! Air pressure fluctuations (acting on an instrument or on floor)! Sound (acting on instrument or on floor) External Sources! Traffic Street, Subway, Rail! Nearby Machinery Can include items in nearby buildings! Construction Activities! Sound Can include aircraft! Ambient Wind and waves 9

10 A Major External Source Internal Sources! People Walking, Footfalls! Carts and dollies, fork lifts! Doors opening and closing: Impacts and Pressure Changes! Noise! Maintenance and Installation Work! Other Research or Production Equipment

11 Typical Vibrations in Buildings 0,000 footfall-induced vibrations typical stiff building building environmental vibration sources street subway freight traffic train Vibration Velocity (µin/sec),000 1, ambeint - quiet urban /3 Octave Band Center Frequency (Hz) Building Services Equipment! HVAC:! Exhaust:! Electrical Eqpt:! Pumps:! Plumbing:! Ducting: Vibration, Noise, Pressure Fluctuations Fans in hoods or other service fans Emergency generators, transformers Water, Vacuum Turbulence, Pulsations Turbulence, Noise 11

12 Questions?.... Vibration Measurements Effects of Vibrations on Instruments, PE Colin Gordon & Associates 12

13 Vibration Measurements! Measurement Process Instrumentation! Sensor accelerometer or velocity sensor! Amplifier! Signal processing system Attachment Data capture! Data Reduction Download to computer Process! Convert from format of signal processing to that needed for presentation! Data Presentation Purpose determines format Documentation Time or Frequency Domain? Velocity, µin/sec FFT rms Velocity, µin/s 00 0 Preferred Frequency, Hz Time, Seconds Amick, H., and Bui, S. K., A Review of Several Methods for Processing Vibration Data, Proceedings of SPIE Conference on Vibration Control and Metrology, pp , San Jose, CA (November 1991) 13

14 Relevant Spectrum Formats (i.e., appropriate for steady-state state environments with significant random content)! Constant Bandwidth Fast Fourier Transform (FFT)! Proportional Bandwidth One-third octave band (bandwidth = 0.23f c )! Power Spectral Density (PSD) Acceleration 2 / Hz Preferences! Frequency domain Majority of practitioners use FFT for diagnostics and 1/3 octave band for assessment Also used: FFT alone, PSD Response spectra not used (but being considered by ISO committee)! Energy Average statistics; RMS amplitude! We use velocity (With spectra, the actual metric isn t critical as long as it is defined.) 14

15 Example Typical Site Vibration Measurements rms Velocity, microinch/sec rms Velocity, microinch/sec a) Narrowband (Bandwidth = Hz) Frequency, Hz b) One-Third-Octave Bands 1 0 Frequency, Hz rms Velocity Level, db rms Velocity Level, db! Measure data live, obtaining spectrum directly with analyzer! Measure in constant bandwidth (FFT)! Convert to one- third octave bands Effects of Vibrations on Instruments! What do Vibrations do?! Determining Vibration Sensitivity Concept Example Optical Microscope Manufacturers Specifications! Generic Vibration Criteria Manufacturers Specifications Velocity Bound 15

16 Typical Effects of Vibrations! Optical Devices Jiggle or blurring of images Impairment of visual observation! Electron Beam Devices Straight lines become wavy Assessment errors, measurement errors! Probe-Type Devices Vibratory forces in sensor misinterpreted! Long-beam beam-path Devices Beams deflected,, often causing energy loss or misalignment Reasons for Vibration Sensitivity! Vibrations (and sometimes sound) cause internal deformations Instrument is more responsive at its resonances! Floor vibrations are a mixture of random and 00 single-frequency vibrations. 0 What if excitation matches resonance? ! Perform vibration sensitivity tests to develop criteria Identify resonances Find threshold amplitude at which vibration s effects become a problem rms Velocity, µin/s Frequency, Hz 16

17 Example Nikon Microscope! Shake microscope base at a fixed frequency! Increase amplitude of motion until effect of vibration becomes visible! Plot! Repeat at new frequency! Dips in curve associated with internal resonances rms Velocity Amplitude, µin/s * * Nikon Microscope 00x Perception Threshold side-to-side Frequency, Hz * = Resonances Amick, H., and Bui, S. K., A Review of Several Methods for Processing Vibration Data, Proceedings of SPIE Conference on Vibration Control and Metrology, pp , San Jose, CA (November 1991) Example Nikon Microscope 2! Perform test in three directions! Plot points representing threshold of perception! Fit appropriate lower- bound curves Shown is lower bound of \ - Constant Acceleration _ - Constant Velocity / - Constant Displacement! Note what happens at lower frequencies rms Velocity, µm/s Vertical Front-to-Back Side-to-Side Lower Bound 1 0 Frequency, Hz & Michael Stead, Vibration Sensitivity of a Laboratory Bench Microscope, Presented at the First Pan-American/Iberian Meeting on Acoustics; 144 th Meeting of the Acoustical Society of America, 2-6 December 2002, Cancun, Mexico 17

18 Example Nikon Microscope Criteria as functions of frequency and magnification 000 Velocity criteria as function of magnification rms Velocity, µm/s x 0x 400x 00x 40x 0x 400x 00x Vertical Floor Amplitude, µm/s 00 0 VC A B C Frequency, Hz Magnification, times & Michael Stead, Vibration Sensitivity of a Laboratory Bench Microscope, Presented at the First Pan-American/Iberian Meeting on Acoustics; 144 th Meeting of the Acoustical Society of America, 2-6 December 2002, Cancun, Mexico Typical Manufacturer s Spec (TEM) rms Velocity, µin/s 00 0 III II I rms Velocity, µin/s 00 0 III II I a) Vertical b) Horizontal 1 0 Frequency, Hz 1 0 Frequency, Hz 18

19 One Popular Family of Generic Vibration Criteria 1/3 O.B. Amplitude, µm/s (µin/s)( Old BBN designation IEST designation ASHRAE designation Typical Application* 0 (4000) Curve F Surgical suites 50 (2000) BBN-A VC-A Curve E Generic lab 25 (00) BBN-B VC-B Curve D Non-Photo Semiconductor 12.5 (500) BBN-C VC-C Curve C 6.3 (250) BBN-D VC-D Curve B Semiconductor Photolithography 3.1 (125) BBN-E VC-E Curve A Nanotechnology * See references cited at end for detailed recommendations Compare Relevant Generic Vibration Criteria 00 rms Velocity, µm/s 0 1 Office VC-A VC-B VC-D VC-E NIST-A NIST-A Frequency, Hz 19

20 Summary! Vibration Measurements Equipment and data processing Typical data! Determining Vibration Sensitivity Example: Microscope Example of good manufacturer s specification! Generic Vibration Criteria Original BBN criteria by Ungar and Gordon Modification proposed by Ungar et al Criteria from NIST AML project! Compared Generic Criteria with some Manufacturers Specs Questions?

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