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1 F U T U R E O F E M B E D D I N G A N D F A N - O U T T E C H N O L O G I E S R a o T u m m a l a, P h. D ; V e n k y S u n d a r a m, P h. D ; P u l u g u r t h a M. R a j, P h. D ; V a n e s s a S m e t, P h. D. 3 D S y s t e m s P a c k a g i n g R e s e a r c h C e n t e r G e o r g i a I n s t i t u t e o f T e c h n o l o g y A t l a n t a, G A, U S A r a o. t u m m a l e c e. g a t e c h. e d u A B S T R A C T E m b e d d i n g i s t h e m o s t i m p o r t a n t s t r a t e g i c t e c h n o l o g y t h a t i s a p p l i c a b l e f o r a l l d i g i t a l, RP a n d p o w e r a p p l i c a t i o n s. W h e n c o m b i n e d w i t h f a n - o u t a t c h i p - a n d b o a r d - l e v e l s, i t e n a b l e s h i g h e r a p p l i c a t i o n s. E m b e d d e d w a f e r f a n - o u t ( e W F O ) i s f a b r i c a t e d i n e i t h e r w a f e r f a b s u s i n g B E O L t o o l s, m a t e r i a l s a n d p r o c e s s e s, o r O S A T ' s b u i l t - u p f a b s a n d t o o l s. T h e e W F O fr o m m m w a f e r f a b s i s c a p a b l e o f t h e u l t i m a t e d e n s i t y b u t a t h i g h c o s t. T h e e W F O s fr o m O S A T s a r e c a p a b l e o f h a n d l i n g h i g h 1 I 0 s fr o m t h e i r m m f a b s a n d t h e t e c h n o l o g y i s e x t e n d a b l e t o p a n e l s. T h i s t e c h n o l o g y i s s u i t a b l e f o r s m a l l d e v i c e s s u c h a s RP. E m b e d d i n g w i t h o r w i t h o u t f a n - o u t i s m o s t s u i t a b l e f o r p o w e r d e v i c e s. T h e y d o n ' t r e q u i r e h i g h 1 I 0 s, b u t t h e y n e e d t o b e m a n u f a c t u r e d a t v e r y l o w c o s t. U l t r a - l a r g e p a n e l s s u c h a s b o a r d s fr o m P W B i n d u s t r y o r L e D i n d u s t r y, a r e b e s t s u i t e d t o e m b e d t h e s e d e v i c e s. T h e r e i s a n e e d t o c o u p l e u l t r a - h i g h d e n s i t y o f i n t e r c o n n e c t i o n s s u c h a s fr o m w a f e r - b a s e d f o u n d r i e s w i t h h i g h - t h r o u g h p u t p a n e l m a n u f a c t u r i n g s o a s t o e n d u p w i t h h i g h e s t p e r f o r m a n c e a t l o w e s t c o s t, e v e n f o r l a r g e r l e s a n d p a c k a g e s a n d w i t h v e r y h i g h d e n s i t y. T w o s o l u t i o n s a r e e m e r g i n g : 1 ) p a n e l - b a s e d e m b e d d i n g a n d f a n - o u t m a n u f a c t u r i n g i n fr a s t r u c t u r e, a n d 2 ) i n o r g a n i c p a n e l f a n - o u t s u c h a s g l a s s f a n - o u t. e l e c t r i c a l l y. B u t i t i s l i m i t e d t o s m a l l l e s a n d t o s m a l l p a c k a g e s, t y p i c a l l y b e l o w 5 m m. A s s u c h, i t i s l i m i t e d i n e x t e rn a l 1 I 0 s t o c o n n e c t t o t h e b o a r d, t y p i c a l l y a t m i c r o n s i n p i t c h. W a f e r - l e v e l P a c k a g e E m b e d d e d P a c k a g e ( c ) F a n - o u t P a c k a g e K e y w o r d s : e m b e d d i n g f a n - o u t, e m b e d d i n g p o w e r, e m b e d d i n g RP, e m b e d d i n g d i g i t a l, e m b e d d i n g m i l l i m e t e r w a v e, w a f e r - l e v e l p a c k a g i n g, w a f e r f a n - o u t, p a n e l f a n - o u t, b o a r d f a n - o u t, g l a s s f a n - o u t, i n t e g r a t e d v o l t a g e r e g u l a t o r W H A T I S E M B E D D I N G A N D F A N - O U T E m b e d d i n g a n d f a n - o u t a r e t w o d i ff e r e n t t e c h n o l o g i e s b u t t h e y c a n b e c o m b i n e d i n t o o n e a t e i t h e r w a f e r l e v e l, p a n e l o r b o a r d l e v e l. A l l t h e p a c k a g i n g t e c h n o l o g i e s c a n b e c l a s s i fi e d i n t o f o u r t y p e s a s s h o w n i n F i g u r e 1 : w a f e r - l e v e l p a c k a g i n g, e m b e d d e d p a c k a g i n g, ( c ) f a n - o u t p a c k a g i n g, a n d ( d ) e m b e d d e d a n d f a n - o u t p a c k a g i n g. W a f e r - b a s e d p a c k a g i n g ( W L P ) i s e m e r g i n g a s a s t r a t e g i c a n d d o m i n a n t p a c k a g i n g t e c h n o l o g y b e c a u s e o f i t s m a n y b e n e fi t s. I t s t a r t e d a s a w a f e r - l e v e l p a c k a g i n g b y s i m p l y r e d i s t r i b u t i n g t h e B E O L w i r i n g o n w a f e r s i n t h e w a f e r f a b a n d p l a c i n g s o l d e r b u m p s o n t h e e n t i r e w a f e r a n d t h e n s i n g u l a t i n g t h e p a c k a g e d l e s, r e a d y f o r b o a r d a s s e m b l y. T h i s W L P i s a s i n g l e u n i t w i t h a c o n t i n u u m o f i n t e r c o n n e c t i o n s fr o m t r a n s i s t o r s t o B E O L t o R D L a n d t o s o l d e r b u m p s. A l l W L P s a r e c h i p - s c a l e p a c k a g e s w i t h c h i p a n d p a c k a g e s i z e s n e a r l y t h e s a m e. T h i s i s t h e b e s t p a c k a g e ( d ) E m b e d d e d a n d F a n - o u t P a c k a g e F i g u r e 1. F o u r t y p e s o f p a c k a g e s : w a f e r - l e v e l p a c k a g e ( W L P ), e m b e d d e d p a c k a g e, ( c ) f a n - o u t p a c k a g e, a n d ( d ) e m b e d d e d a n d f a n - o u t p a c k a g e. T o e l i m i n a t e t h i s b o a r d - l e v e l l i m i t a t i o n o f W L P s, w a f e r f a n - o u t t e c h n o l o g y w a s d e v e l o p e d. T h e f a n - o u t m e a n s f a n n i n g o u t o f 1 I 0 s b e y o n d t h e f o o t p r i n t o f t h e l e i n t h e p a c k a g e. F a n - o u t t e c h n o l o g y, b y i t s e l f, i s n o t n e w ; i n f a c t, m o s t o f b i l l i o n s o f p a c k a g e s, s i n c e t h e s, a r e m a n u f a c t u r e d a n n u a l l y a s f a n - o u t p a c k a g e s. F i g u r e l ( c ), a B G A p a c k a g e, o n e o f t h e m o r e r e c e n t p a c k a g e s, i s a n e x a m p l e o f f a n - o u t p a c k a g e s. B u t t h e s e a r e m a n u f a c t u r e d, n o t a s r o u n d w a f e r s i n t h e w a f e r f a b s b u t a s s t r i p s, p a n e l s o r b o a r d s, i n p a c k a g e a n d b o a r d f o u n d r i e s. T h e " E m b e d d i n g " t e c h n o l o g y, a s s h o w n i n F i g u r e I, b e g a n t o e m e r g e a s a n o t h e r p a r a d i g m i n p a c k a g i n g. I n t h i s t e c h n o l o g y, R D L w i r i n g i s d i r e c t l y d e p o s i t e d o n r e - c o n s t i t u t e d l e s i n t o o r m m r o u n d w a f e r s b y m o l d i n g t h e m w i t h e p o x y - b a s e d m o l d i n g c o m p o u n d s. E m b e d d i n g m e a n s, t h e c h i p i s

2 e m b e d d e d o r b u r i e d i n s i d e t h e p a c k a g e o r b o a r d a n d t h e i n t e r c o n n e c t i o n s a r e m a d e t o a n d fr o m t h e s e b u r i e d I C s u s i n g e i t h e r w a f e r B E O L t o o l s o r p a c k a g e t o o l s. T h e n e w t r e n d, o ft e n r e f e r r e d t o a s w a f e r f a n - o u t ( W F O ), i n c l u d e s b o t h t h e s e t w o t e c h n o l o g i e s a t w a f e r - l e v e l. I t s h o u l d r e a l l y b e c a l l e d e m b e d d e d w a f e r f a n - o u t ( e W F O ) a s i s d o n e i n t h i s a r t i c l e. S u c h a c o n c e p t o f a c o m b i n e d f a n - o u t a n d e m b e d d i n g, a s s h o w n i n F i g u r e l e d ) w a s o r i g i n a l l y d e v e l o p e d i n t h e l s b y G E f o r m i l i t a r y a p p l i c a t i o n s, f o l l o w e d b y m a n y o t h e r s i n c l u d i n g I n t e l a s B B U L, F r e e s c a l e a s R C P a n d m o r e r e c e n t l y fu r t h e r d e v e l o p e d b y I n fi n e o n a s e - W L P a n d m a n u f a c t u r e d b y S T A T S C h i p P A C, N a n i u m a n d o t h e r s. E m b e d d i n g s t a r t e d w i t h l o w t e m p e r a t u r e c o - fi r e d c e r a m i c ( L T C C ) s u b s tr a t e s. RF c o m p o n e n t s s u c h a s c a p a c i t o r s, i n d u c t o r s, fi l t e r s, d i p l e x e r s a n d i m p e d a n c e m a t c h i n g n e t w o r k s h a v e b e e n e m b e d d e d i n t o c e r a m i c s u b s t r a t e s. E P C O S d e m o n s t r a t e d d u a l - b a n d W L A N f r o n t - e n d m o d u l e s i n L T C C s u b s t r a t e s, a s s h o w n i n F i g u r e 2, w i t h s u b s t r a t e e m b e d d e d r e c e i v e r ( Rx ) a n d tr a n s m i t t e r ( T x ) d i p l e x e r s. T h e s i n g l e - p o l e d o u b l e - t h r o u g h ( S P D T ) s w i t c h i n t h i s m o d u l e w a s a s s e m b l e d o n t o p o f L T C C s u b s t r a t e s t o r e d u c e p a c k a g e s i z e, i m p r o v e l o s s w i t h h i g h r e j e c t i o n a t t r i b u t e s [ 1 ]. B u t t h i s e W F O t e c h n o l o g y i s n o t w a f e r - l e v e l p a c k a g i n g, a s d e s c r i b e d a b o v e. I t i s p a c k a g i n g o f s i n g u l a t e d I C s t h a t a r e r e c o n s t i t u t e d b a c k i n t o m m w a f e r s. I t a d d r e s s e s t h e l i m i t a t i o n o f W L P s a t b o a r d l e v e l, h o w e v e r. I t i s a l s o a n e m b e d d e d p a c k a g i n g t e c h n o l o g y w i t h m o r e b e n e fi t s t h a n s i m p l y f a n - o u t, s u c h a s r e d u c e d p a c k a g e t h i c k n e s s a n d n o t r e q u i r i n g a s s e m b l y, s i n c e t h e w i r i n g i s d e p o s i t e d d i r e c t l y o n t h e s u r f a c e b o n d p a d s o f I C s. I t h a s h i g h d e n s i t y a t c h i p l e v e l, s h o r t e s t i n t e r c o n n e c t i o n s b e t w e e n I C a n d t h e R D L w i r i n g a n d i s a n u l t r a - t h i n p a c k a g e. E P C O S ' s e m b e d d e d c e r a m i c s u b s t r a t e s e W F O, h o w e v e r, h a s m a n y c h a l l e n g e s i n a p p l y i n g i t t o t h e n e x t g e n e r a t i o n n e e d s, a s s u m m a r i z e d b e l o w : og D i e p l a c e m e n t a c c u r a c y i n d i e s h i ft a n d d i e p a d c o p l a n a r i t y og M o l d i n g c o m p o u n d s h r i n k a g e a n d w a f e r w a r p a g e d u e t o m o l d i n g c o m p o u n d s oog L i m i t e d R D L s c a l i n g i n c o n tr a s t t o t h e p o t e n t i a l o f B E O L s c a l i n g a n d p i t c h oog H i g h e l e c t r i c a l l o s s o f E M C a n d R D L d i e l e c t r i c l o s s oog O u t g a s s i n g o f R D L p o l y m e r s d u r i n g s p u t t e r i n g og B o a r d - l e v e l r e l i a b i l i t y oog L i m i t e d t o s m a l l - t o - m e d i u m s i z e I C s a n d p a c k a g e s oog D i ffi c u l t y i n I C r e m o v a l a n d r e p a i r a b i l i t y o f h i g h v a l u e s i n g l e c h i p s o r m u l t i - c h i p s oog H i g h c o s t f o r l a r g e p a c k a g e s b e y o n d 2 0 m m i n s i z e T D K ' s S E S U B i n p a n e l l a m i n a t e ( c ) G e o r g i a T e c h ' s e m b e d d e d a c t i v e a n d p a s s i v e i n p a n e l l a m i n a t e F i g u r e 2. L T C C W L A N M o d u l e ( E P C O S ), e m b e d d e d a c t i v e s i n T D K ' s S E S U B, a n d ( c ) G e o r g i a T e c h ' s e m b e d d e d c h i p - l a s t a c t i v e s a n d p a s s i v e s ( E M A P ) i n o r g a n i c p a c k a g e. T h e c o n c e p t s o f e m b e d d i n g a n d f a n - o u t h a v e m a n y a p p l i c a t i o n s, a s d e s c r i b e d b e l o w. A l l a p p l i c a t i o n s b e n e fi t fr o m e m b e d d i n g w h i l e f a n - o u t b e n e fi t s m o s t l y h i g h e r a p p l i c a t i o n s s u c h a s p a c k a g i n g o f p r o c e s s o r s a n d o t h e r l o g i c d e v i c e s. I n d e p e n d e n t o f e W F O, p a n e l - a n d b o a r d - b a s e d e m b e d d i n g i s e m e r g i n g a s a v e r y h i g h t h r o u g h p u t a n d l o w e r c o s t t e c h n o l o g y t h a t i s b o u n d t o m o v e u p t o h i g h e r f a n o u t c a p a b i l i t i e s, a s d e s c r i b e d i n t h i s a r t i c l e. E M B E D D I N G A N D F A N - O U T O F R F A N D M I L L I M E T E R W A V E M O D U L E S T h e p r i m a r y m o t i v a t i o n f o r e m b e d d i n g, f a n - o u t, o r b o t h f o r RF p a c k a g i n g, i s t o r e d u c e t h e p a c k a g e f o o tp r i n t, t h i c k n e s s, a n d s h o r t e n t h e i n t e r c o n n e c t i o n l e n g t h f o r i m p r o v e d e l e c t r i c a l p e r f o r m a n c e. T h e s e c o n d g e n e r a t i o n o f e m b e d d i n g i s w i t h o r g a n i c l a m i n a t e s. T D K d e v e l o p e d a l e a d i n g - e d g e m o d u l e t e c h n o l o g y c a l l e d S E S U B o r " s e m i c o n d u c t o r e m b e d d e d i n s u b s t r a t e ", e n a b l i n g m u l t i - fu n c t i o n a l a n d m i n i a t u r i z e d s o l u t i o n s f o r RF a p p l i c a t i o n s [ 2 ], a s s h o w n i n F i g u r e 2. M u l t i p l e s e m i c o n d u c t o r c h i p s a r e e m b e d d e d s i d e - b y - s i d e i n a fu l l y - m o l d e d l a m i n a t e b u t w i t h b a c k s i d e d e v i c e s u r f a c e s a c c e s s i b l e f o r c o o l i n g. T h e s u b s t r a t e s, w i t h e m b e d d e d 5 0 l l m t h i n I C s, a r e a s t h i n a s l l m o r l e s s, o n t o p o f w h i c h d i s c r e t e c o m p o n e n t s a r e a s s e m b l e d. G e o r g i a T e c h a d v a n c e d t h i s c o n c e p t a s s h o w n i n F i g u r e 2 ( c ) f u r t h e r w i t h c h i p - l a s t e m b e d d e d a n d f a n - o u t p o w e r a n d RF m o d u l e s. I n t h i s a p p r o a c h, t h e c o r e a n d b u i l d - u p l a y e r s o f t h e s u b s t r a t e s a r e a l s o u s e d t o e m b e d t h i n fi l m p a s s i v e s s u c h a s fi l t e r s, a l o n g w i t h r e d i s t r i b u t i o n l a y e r s ( R D L s ) a n d tr a n s m i s s i o n l i n e s.

3 B u i l d - u p l a y e r s w i t h l a s e r - a b l a t e d c a v I t I e s a r e l a m i n a t e d o n t o t h e s e c o r e l a y e r s. I C s w e r e a s s e m b l e d i n t o t h e s e c a v i t i e s w i t h l o w - t e m p e r a t u r e C u - t o - C u b o n d i n g a t a t e m p e r a t u r e o f C w i t h u l t r a - s h o r t c o p p e r b u m p s «1 0 f.! m ). T h i s i s o n e o f t h e fi r s t l o w - t e m p e r a t u r e C u - C u i n t e r c o n n e c t i o n s a n d a s s e m b l y i n t h e i n d u s t r y [ 3 ] T h e L N A, P A a n d s w i t c h w e r e e m b e d d e d i n s i d e p r e - f a b r i c a t e d c a v i t i e s i n o r g a n i c s u b s t r a t e s [ 4 ] t o f o r m RF m o d u l e s, a n d p o w e r m o d u l e s w i t h e m b e d d e d p o w e r m a n a g e m e n t I C s ( P M I C ), b e n e fi t i n g fr o m t h e h i g h c u rr e n t - h a n d l i n g o f c o p p e r i n t e r c o n n e c t i o n s, w i t h o u t s o l d e r. G e o r g i a T e c h ' s e m b e d d e d a c t i v e a n d p a s s i v e ( E M A P ) c o n c e p t o f s u c h a n e m b e d d e d RF m o d u l e i s s h o w n i n F i g u r e 2 ( c ). o n e o f t h e m o s t l e a d i n g - e d g e a n d t h i n n e s t 5 G a n d m m - w a v e p a c k a g e s i n t h e i n d u s t r y. U Mo.. - I aoaogl a s sogo1orog 10oG m m - wa v e M i l l i m e t e r W a v e A p p l i c a t i o n s P e r f o r m a n c e r e q u i r e m e n t s a n d a s s o c i a t e d s u b s t r a t e d e s i g n c h a l l e n g e s a r e m o r e s t r i n g e n t f o r m m - w a v e t h a n f o r RF a p p l i c a t i o n s. T h e p r i m a r y r e a s o n f o r t h i s i s t h e s e n s i t i v i t y o f m m - w a v e p e r f o r m a n c e t o d i e l e c t r i c l o s s, c i r c u i t p r e c i s i o n, a n d s u b s t r a t e p a r a s i t i c s. T h i s l e d t o t h e s h i ft f r o m t r a d i t i o n a l o r g a n i c p a c k a g e s t o e W F O b a l l g r i d a r r a y p a c k a g e s t o l o w e r t h e i n t e r c o n n e c t i o n l e n g t h a n d e n h a n c e t h e p e r f o r m a n c e [ 5 ]. O n e s u c h e x a m p l e i s I n f m e o n ' s, t h e t r a n s c e i v e r b a r e d i e f o r G H z a u t o m o t i v e r a d a r a p p l i c a t i o n [ 6 ] a s s h o w n i n F i g u r e 3 [ 5 ]. S l I i c o n - M M I C F i g u r e 4. G e o r g i a T e c h ' s a p p r o a c h t o e m b e d d i n g a n d f a n o u t w i t h g l a s s f a n - o u t ( G F O ) a t w a f e r o r p a n e l l e v e l. D I G I T A L A P P L I C A T I O N S D i g i t a l a p p l i c a t i o n s a r e d r i v i n g a d v a n c e s i n b o t h e m b e d d i n g a n d f a n - o u t t o b e n e fi t f r o m u l t r a - s h o r t i n t e r c o n n e c t i o n s b y e m b e d d i n g a n d h i g h e s t d e n s i t y, fr o m f a n - o u t a t c h i p l e v e l, u s i n g B E O L R D L t o o l s. A l t h o u g h t h e fi r s t e m b e d d e d p a c k a g e s w e r e d e v e l o p e d b y G E i n t h e s f o r m i l i t a r y a n d I n t e l i n t h e e a r l y s f o r h i g h p e r f o r m a n c e c o m p u t i n g a p p l i c a t i o n s, t h e fi r s t h i g h v o l u m e o f e m b e d d e d f a n - o u t p a c k a g e s ( W F O ) w a s n o t p r o d u c e d u n t i l T S M C f o r A p p l e i P h o n e 7 i n , u s i n g i n t e g r a t e d f a n - o u t ( I n F O ), a s s h o w n i n F i g u r e 5. F i g u r e 3. I n fi n e o n ' s e W F O f o r G H z a u t o m o t i v e r a d a r. G e o r g i a T e c h i s d e v e l o p i n g t h e n e x t g e n e r a t i o n o f R a d a r w i t h a d v a n c e s i n b o t h S i G e d e v i c e s, b y i n c l u d i n g L N A t o i m p r o v e l i n e a r i t y, a n d i n e m b e d d e d f a n - o u t b y p i o n e e r i n g i n o r g a n i c f a n - o u t u s i n g u l t r a - t h i n g l a s s. G l a s s f a n - o u t ( G F O ) a p p r o a c h, h a s m a n y s u p e r i o r a t t r i b u t e s o v e r c u r r e n t e W F O t e c h n o l o g i e s d e s c r i b e d a b o v e. A s c h e m a t i c o f G F O m m w a v e p a c k a g e, s h o w n i n F i g u r e 4, i s a h e rm e t i c g l a s s - o n g l a s s s t r u c t u r e w i t h o u t m o l d i n g c o m p o u n d a n d i t s p r o b l e m s, l i s t e d a b o v e. I t a c h i e v e s B E O L - l i k e p r e c i s i o n R D L g r o u n d r u l e s, c u rr e n t l y a t 2 m i c r o n s l i t h o g r a p h y. F i g u r e 4 s h o w s o t h e r b e n e fi t s o f G F O t h a t i n c l u d e e x c e l l e n t T C E m a t c h t h r o u g h o u t t h e s t r u c t u r e, a n d h e n c e h i g h r e l i a b i l i t y e v e n w i t h l a r g e I C s, l o w e l e c t r i c a l l o s s a n d d i r e c t l y a t t a c h a b l e t o b o a r d, w i t h o u t a B G A p a c k a g e. G e o r g i a T e c h d e m o n s tr a t e d t h e i n d u s t r y ' s fi r s t 2 0 f.! m p i t c h a s s e m b l y a t p a n e l l e v e l w i t h G F O. S i n c e t h e R D L i n G F O i s m a d e u p o f u l t r a - l o w l o s s d i e l e c t r i c s, a l o n g w i t h t h r o u g h - v i a s, u n i q u e l o w - l o s s t r a n s m i s s i o n l i n e s a n d e m b e d d e d p a s s i v e s, G F O b e c o m e s F i g u r e 5. T S M C I n F O p a c k a g e f o r p r o c e s s o r p a c k a g i n g, a n d T S M C P r o c e s s o r - m e m o r y s t a c k i n g ( S y s t e m P l u s a n d Y o l e ). e W F O p a c k a g e s h a v e a d v a n t a g e s o v e r a fl i p - c h i p B G A p a c k a g e s d u e t o t h e e l i m i n a t i o n o f t h e s u b s t r a t e a n d t h e s o l d e r - b a s e d a s s e m b l y p r o c e s s e s. B y e l i m i n a t i n g t h e h i g h t e m p e r a t u r e s u b s tr a t e p r o c e s s i n g a n d h i g h - t e m p e r a t u r e a s s e m b l y p r o c e s s e s, t h e o v e r a l l w a rp a g e o f t h e e W F O p a c k a g e i s r e d u c e d fr o m o v e r f.! m t o l e s s t h a n 6 0 f.! m. E l i m i n a t i o n o f t h e s u b s t r a t e a l s o r e d u c e s t h e p a c k a g e h e i g h t t o l e s s t h a n O. 4 m m. T h e P O P p a c k a g e s c a n b e r e d u c e d t o 0. 8 m m i n t h i c k n e s s. A m a j o r c o n c e rn o f e W F O w i t h c h i p - fi r s t e m b e d d i n g o f h i g h v a l u e - a d d a n d h i g h C P U s a n d G P U s i s t h e y i e l d l o s s o f I C s d u r i n g R D L f a b r i c a t i o n. T h e s a m e c o n c e rn

4 a p p l i e s t o h i g h - v a l u e m u l t i - c h i p m o d u l e s t h a t c a n ' t b e t h r o w n a w a y, i f n o t y i e l d e d. G e o r g i a T e c h a n d A m k o r a d d r e s s e d t h i s c o n c e rn b y c h i p - l a s t a p p r o a c h e s b u t w i t h e W F O b e n e fi t s. A m k o r d e v e l o p e d S i l i c o n W a f e r I n t e g r a t e d F a n - o u t T e c h n o l o g y ( S W I F T ) [ 7 ], a s s h o w n i n F i g u r e 6, b y fi r s t d e p o s i t i n g R D L s o n s i l i c o n w a f e r s, f o l l o w e d b y I C a s s e m b l y a t fi n e p i t c h, f o l l o w e d b y m o l d i n g t h e e n t i r e a s s e m b l e d w a f e r a n d r e l e a s i n g t h e s i l i c o n c a r r i e r t o f o n n t h e [ m a l t h i n e m b e d d e d f a n - o u t s tr u c t u r e. T h i s m e t h o d h a s b e e n d e m o n s t r a t e d w i t h R D L l i n e s t o 2 1 l m. F i S..oG P Io. g AoG V..o i i a MoG I So..:os l a n S.l! lo.og F a n - I ToG R D MoG ( a rog P a PoG I So. e r 0 a ed..og M IouoG ro1 Pono-oG 0 a rog ' I..oG I So... r f a S S e log = ::; ;; ;; ; ;; ;;d,a l{t t_i i. ti 2 I u t '5E _ -- -=: =og -!:S --! ofog F i g u r e 7. P o w e r e m b e d d i n g o f a c t i v e s i n l a m i n a t e p a n e l s : T I M i c r o S i P D C - D C c o n v e r t e r p a c k a g e w i t h A T & S ' E C P i n - P W B e m b e d d i n g p r o c e s s [ 1 1, 1 2 ], b ) G a N S y s t e m s a n d A T & S 6 S 0 V A G a N - o n - S i H E M T t r a n s i s t o r s p a c k a g e [ 1 3 ], a n d ( c ) T D K ' s S E S U B [ 1 4 ]. F i g u r e 6. P r o c e s s f o r S i l i c o n W a f e r I n t e g r a t e d F a n - o u t T e c h n o l o g y ( S W I F T ) b y A m k o r. I n t h e G e o r g i a T e c h ' s g l a s s f a n - o u t ( G F O ) p a c k a g e s, i n b o t h c h i p - l a s t a n d c h i p - fi r s t c o n fi g u r a t i o n s, S O l l m t h i c k g l a s s w i t h u p t o s i x R D L l a y e r s w i t h 2 1 l m l i n e s a n d S l l m v i a s a t 2 0 l l m b u m p p i t c h a r e d e m o n s t r a t e d w i t h a b o u t 4 x r e d u c t i o n i n w a rp a g e, c o m p a r e d t o l o w C T E o r g a n i c l a m i n a t e s u b s t r a t e s. L O W - A N D H I G H - P O W E R A P P L I C A T I O N S E m b e d d i n g o f a c t i v e s a n d p a s s i v e s b e c a m e v e r y i m p o r t a n t i n p o w e r a p p l i c a t i o n s t o i n c r e a s e p o w e r d e n s i t y a n d e ffi c i e n c y a l o n g w i t h m i n i a t u r i z a t i o n o f p o w e r m o d u l e s u s i n g S i d e v i c e s f o r l o w p o w e r a n d w i d e b a n d g a p G a N a n d S i C d e v i c e s f o r h i g h p o w e r. A m o n g o t h e r b e n e fi t s, e m b e d d i n g o f t h e s e d e v i c e s p r o v i d e s l o w e s t - i n d u c t a n c e b y e l i m i n a t i o n o f b o n d w i r e s [ 8 ]. I n t e g r a t e d V o l t a g e R e g u l a t o r s ( l V R s ) a r e a n o t h e r e x a m p l e i l l u s t r a t i n g t h e b e n e fi t s o f e m b e d d i n g i n h i g h - p e r f o r m a n c e p r o c e s s o r s f o r i m p r o v e d e ffi c i e n c y, h i g h e r s w i t c h i n g fr e q u e n c y, l o w e r p o w e r l o s s e s, i n c r e a s e d r e l i a b i l i t y a n d e v e n l o w e r c o s t. F i g u r e 8 s h o w s h o w e m b e d d i n g e v o l v e d t o f o r m I V R s f r o m d i s c r e t e c o m p o n e n t s t o e m b e d d e d p a s s i v e s a n d t o e m b e d d e d p a s s i v e s a n d a c t i v e s. I n I V R s, t h e f o c u s i s o n e m b e d d i n g o f s w i t c h e s, m i c r o c o n t r o l l e r s a n d p a s s i v e c o m p o n e n t s f o r p o w e r c o n v e r s i o n i n s i d e t h e p r o c e s s o r p a c k a g e, a s i l l u s t r a t e d i n F i g u r e 8. T h i s l e a d s t o b e t t e r p o w e r c o n v e r s i o n e ffi c i e n c y a n d m i n i a t u r i z a t i o n. I n t e l u t i l i z e d I V R s i n i t s H a s w e l l m i c r o p r o c e s s o r s w h e r e a i r c o r e i n d u c t o r s a r e e m b e d d e d i n t h e p a c k a g e [ I S ]. S i m i l a r l y, f e r r i t e i n d u c t o r - e m b e d d e d p o w e r m o d u l e s a r e b e i n g d e v e l o p e d [ 1 6 ]. T h e c o n c e p t o f d i e e m b e d d i n g i n t o l a m i n a t e s w a s fi r s t e x p l o r e d i n t h e " H E R M E S " E U p r o j e c t f o r p o w e r a p p l i c a t i o n s. T e x a s I n s t r u m e n t s ( T I ) w a s t h e fi r s t t o u s e t h i s t e c h n o l o g y i n h i g h v o l u m e i n t h e i r M i c r o S i p T M D C - D C c o n v e r t e r p a c k a g e, s h o w n i n F i g u r e 7. I n t h i s a p p r o a c h, b o t h p o w e r I C s w i t c h a n d m i c r o c o n t r o l l e r I C a r e e m b e d d e d i n u l t r a - l a r g e b o a r d s a n d t h e n s i n g u l a t e d i n t o B G A p a c k a g e s [ 9 ], [ 1 0 ] u s i n g t h e E m b e d d e d C o m p o n e n t P a c k a g i n g ( E C P ) p r o c e s s d e v e l o p e d b y A T & S. T h e A T & S E C P p r o c e s s h a s a l s o b e e n a p p l i e d r e c e n t l y b y G a N S y s t e m s t o p a c k a g e t h e i r n e w 6 S 0 V / 3 0 A G a N - o n - S i H E M T t r a n s i s t o r s, a s s h o w n i n F i g u r e 7. I n t h i s p r o c e s s, G a N d e v i c e s w e r e e m b e d d e d i n l a m i n a t e b o a r d s t o e l i m i n a t e b o n d w i r e s t o c r e a t e a n e a r c h i p - s c a l e p a c k a g e w i t h r e d u c e d i n d u c t a n c e a n d e n h a n c e d h e a t d i s s i p a t i o n. L og..... T D K ' s S E S U B i n F i g u r e 7 ( c ) i s a n o t h e r p a n e l b a s e d e m b e d d e d I C - i n - I a m i n a t e t e c h n o l o g y r e s u l t i n g i n u l t r a - t h i n p a c k a g e s w i t h S M D p a s s i v e c o m p o n e n t s o n t h e t o p l a y e r s a n d w i t h m o l d i n g a n d s h i e l d i n g [ 8 ]. ( c ) F i g u r e 8. E v o l u t i o n o f I V R s fr o m d i s c r e t e c o m p o n e n t s t o e m b e d d e d L, a n d t o ( c ) I V R s w i t h e m b e d d e d I C s a n d p a s s i v e s.

5 V i r g i n i a T e c h r e c e n t l y p r o p o s e d a n e w a p p r o a c h t o e m b e d d i n g o f p o w e r i n d u c t o r s i n p o i n t - o f - l o a d ( P O L ) c o n v e r t e r s u s i n g a n i n n o v a t i v e L T C C p r o c e s s. T h i s n e w a p p r o a c h c o m b i n e s G a N d e v i c e s f o r h i g h e r s w i t c h i n g fr e q u e n c i e s a n d t o i n c r e a s e p o w e r d e n s i t y u p t o W / i n 3 a s c o m p a r e d t o t h e t y p i c a l < W / i n 3 a c h i e v e d f o r 2 0 A c o n v e r t e r s [ 1 7 ]. G e o r g i a T e c h, i n c o l l a b o r a t i o n w i t h i t s i n d u s t r y p a r t n e r s, i s d e v e l o p i n g I V R s u s i n g m a g n e t i c c o m p o s i t e m a t e r i a l s f o r h i g h e r p o w e r h a n d l i n g a t h i g h e ffi c i e n c y u s i n g p a n e l - b a s e d e m b e d d i n g f o r l o w c o s t. A n e w c l a s s o f l a y e r e d m a g n e t i c c o m p o s i t e fi l m s w i t h h i g h p e r m e a b i l i t y o f u p t o 9 0 0, l o w c o e r c i v i t y < 1 O e, h i g h, s a t u r a t i o n m a g n e t i z a t i o n > 1 T e s l a, a n d h i g h fr e q u e n c y s t a b i l i t i e s o f u p t o M H z a r e b e i n g d e v e l o p e d. A n e x a m p l e o f i n t e g r a t e d i n d u c t o r w i t h s u c h fi l m s i s s h o w n i n F i g u r e 9 [ 1 8 ]. T h e s e t h i n fi l m i n d u c t o r s a r e n o w b e i n g c o - p a c k a g e d w i t h h i g h - d e n s i t y c a p a c i t o r s u s i n g a 3 D p a c k a g e a r c h i t e c t u r e b e i n g p i o n e e r e d b y G e o r g i a T e c h. A n e x a m p l e o f s u c h h i g h d e n s i t y c a p a c i t o r fi l m o n a s i l i c o n s u b s t r a t e i s s h o w n i n F i g u r e 9 [ 1 9 ]. S u c h i n d u c t o r s a n d c a p a c i t o r s a r e p r o j e c t e d t o r e s u l t i n m o d u l e s w i t h e ffi c i e n c y > 9 0 % a n d p o w e r h a n d l i n g a b o v e 2 A / m m 2. p r o c e s s u s i n g p a n e l l a m i n a t e s o f 1 8 " x 2 4 " s i z e f o r l o w t o m e d i u m p o w e r, a n d 5 " x 7 " f o r h i g h p o w e r w h e r e t h e b a s e s u b s t r a t e i s a D B C. T h i s p r o c e s s w a s a p p l i e d t o s i n g l e - c h i p p o w e r M O S F E T p a c k a g e s, s y s t e m - i n - p a c k a g e s w i t h M O S F E T a n d d r i v e r c o - i n t e g r a t i o n, a n d I G B T h i g h - p o w e r m o d u l e s u s i n g m u l t i - l e v e l w i r i n g t o i n t e r c o n n e c t p o w e r, c o n tr o l a n d d r i v e r. S c h w e i z e r E l e c t r o n i c s a l s o p i o n e e r e d a n i n n o v a t i v e p o w e r e m b e d d i n g c o n c e p t u s i n g l a r g e b o a r d - l i k e p a n e l e m b e d d i n g i n v o l v i n g d i ff e r e n t s u b s t r a t e t e c h n o l o g i e s f o r D C - D C a n d A C - D C c o n v e r t e r s i n t h e k W r a n g e. I n t h i s a p p r o a c h, t h e p o w e r d i e s a r e fi r s t a s s e m b l e d o n e l e c t r i c a l l y - i n s u l a t e d b a s e p l a t e s, a n d a r e t h e n e m b e d d e d i n c a v i t i e s. A t h r e e - l a y e r b u i l d - u p i s t h e n c r e a t e d u s i n g s t a n d a r d P W B p r o c e s s i n g t o i n t e r c o n n e c t t h e p o w e r d e v i c e s w h e r e b o n d w i r e s a r e r e p l a c e d b y d i r e c t g a l v a n i c c o n t a c t s w i t h C u - fi l l e d v i a s t o m i n i m i z e t h e p a c k a g e i n d u c t a n c e. T h i s s u b s t r a t e i s t h e n fu r t h e r e m b e d d e d i n t o P W B s o f m m x m m i n s i z e f o r d i r e c t i n t e g r a t i o n o f d r i v e r s a n d c o n tr o l s y s t e m s. S c h w e i z e r ' s p 2 P a c k p o w e r m o d u l e i s o n e o f t h e f u s t p a c k a g e s t o e n a b l e c o - i n t e g r a t i o n o f p o w e r, c o n tr o l a n d d r i v e r I C s i n a s i n g l e p a c k a g e i n a t h i c k n e s s o f l e s s t h a n l A m m. T h e p 2 P a c k t e c h n o l o g y a s w e l l a s i t s i m p l e m e n t a t i o n i n a 4 0 k W e - m o t o r w i t h e m b e d d e d I G B T s a n d d i o d e s i s i l l u s t r a t e d i n F i g u r e 1 0. O t h e r c o m m e r c i a l p o w e r e m b e d d i n g t e c h n o l o g i e s i n c l u d e I n fi n e o n ' s D r B l a d e, S i e m e n s ' S i P L I T, S c h w e i z e r ' s i 2 B o a r d, a n d G e n e r a l E l e c t r i c ' s P o w e r O v e r l a y t e c h n o l o g y. C a Ro-oi a MoG a n d dom Fo3.onoG P W BoG. J JoG 3 - l aob --olog b u i ld - u p 0 aoedog 2 a lo2 a S F dog G no...os e a S n.. eo. G a nog a 0oGor ao;; -ogog u F -o)og L e a d f r a m e s w i t h c a v i t i e s f o r. P n. d ' F S 3oG a 0oGol aoa..onog d i e s E l.. eo--oo F e a l locog i n s u l a t e d l ao-.ol M ao--.og = D. :;. E. F. ::l ' G H _ G a l \l a n jc i n t e r c o n n e c t i ro en p l a c i n g E le c t r j ci IY a {I "" "'- b o n d o. Fof -o,og ( 3 - l aoc.olog lo0 F l & -o0oi )og F So-o01 M ao-. &og := == == = og E P i e d -- og ol ao= eolog d eo3 F e eog b a s e p l a t e F i g u r e 9. E x a m p l e s o f e m b e d d e d p o w e r i n d u c t o r s [ 1 8 ], a n d e m b e d d e d T a c a p a c i t o r o n s i l i c o n s u b s t r a t e s [ 1 9 ]. L a r g e b o a r d - l i k e, p a n e l e m b e d d i n g h a s g a i n e d m o m e n t u m i n m i d - t o h i g h - p o w e r e l e c t r o n i c s t o m i n i m i z e t h e p a c k a g e i n d u c t a n c e a n d e n a b l e h i g h e r s w i t c h i n g fr e q u e n c i e s a t l o w c o s t. H i g h - p o w e r m o d u l e s a r e t r a d i t i o n a l l y p a c k a g e d b y i n t e g r a t i n g a l l p o w e r s w i t c h e s o n i n s u l a t e d m e t a l - c e r a m i c s u b s t r a t e s s u c h a s d i r e c t b o n d i n g t o c e r a m i c ( D B C ), w h i l e c o n t r o l a n d d r i v e s y s t e m s a r e g e n e r a l l y a s s e m b l e d s e p a r a t e l y o n s t a n d a r d P W B s a n d c o n n e c t e d t o t h e p o w e r m o d u l e u s i n g p r e s s c o n t a c t s [ 2 0 ]. F r a u n h o f e r I Z M h a s r e c e n t l y d e v e l o p e d a p a n e l - b a s e d p o w e r d i e e m b e d d i n g ( c ) F i g u r e 1 0. S c h w e i z e r E l e c t r o n i c s p 2 P a c k p o w e r e m b e d d i n g t e c h n o l o g y : p r o c e s s, c r o s s - s e c t i o n o f e m b e d d e d p o w e r d i e, a n d ( c ) e x a m p l e o f a p p l i c a t i o n i n a 4 0 k W e - m o t o r w i t h e m b e d d e d I G B T s a n d d i o d e s. D e v e l o p m e n t o f p o w e r e m b e d d i n g t e c h n o l o g i e s a t > 5 0 k W i s e x p e c t e d, w i t h a d v a n c e s i n S i C - b a s e d p o w e r m o d u l e s. To f u l l y b e n e fi t fr o m t h e p e r f o rm a n c e of S i C d e v i c e s, o p e r a t i n g t e m p e r a t u r e s o f C a r e h i g h l y d e s i r a b l e t o m i n i m i z e t h e s i z e o f t h e c o o l i n g s y s t e m s. G e o r g i a T e c h i s d e v e l o p i n g

6 m a n y n e w t e c h n o l o g i e s t h a t i n c l u d e : I ) D C - D C c o n v e r t e r s w i t h G a N, 2 ) h i g h - t e m p e r a t u r e h y b r i d o r g a n i c - i n o r g a n i c d i e l e c t r i c s a n d m o l d i n g c o m p o u n d s ; a n d 3 ) l o w - C T E, h i g h e l e c t r i c a l a n d t h e r m a l c o n d u c t i v i t y - c o n d u c t o r s f o r H i - R e i C T E - m a t c h e d p a c k a g i n g. F U T U R E O F E M B E D D I N G T E C H N O L O G I E S F o u r F u t u r e D i r e c t i o n s A N D F A N - O U T F i g u r e 1 1 s h o w s t h e e v o l u t i o n o f e m b e d d i n g a n d f a n - o u t t e c h n o l o g i e s, s t a r t i n g w i t h W L P t h a t l e d t o w a f e r - b a s e d e m b e d d i n g a n d f a n - o u t t e c h n o l o g i e s c a l l e d e W F O. I n t h i s p r o c e s s, e m b e d d i n g b y i t s e l f b e c a m e a h i g h l y s t r a t e g i c t e c h n o l o g y, e v e n w h e n f a n - o u t a n d h i g h 1 I 0 s a r e n o t n e e d e d. I t i s n o w b e c o m i n g c l e a r t h a t t h e r e a r e f o u r s t r a t e g i c d i r e c t i o n s f o r e m b e d d i n g a n d f a n - o u t t e c h n o l o g i e s ; t w o a t w a f e r l e v e l a n d t w o a t p a n e l l e v e l. A l l f o u r r e q u i r e e m b e d d i n g. Ao-o-od D Lo.l!o- -o(og So.. lo' toa a t -og C 9 Co og Ao'o', O o LoAoG C = Eol. l -o10 - MoG 1 / 0oG P Eo- a AoG L )og &og P a P J.oG S ioc -og Poe a so/ ao- E a PoG S CoC (og N o W L PoG " e t:.t. 9 : S u b s t r a t e ) P F OoD.oG / 0oG 9 01oG I I P _oa 1 a O aog M o l d i n g C o m p o u n d L a m i n a t e G l ao(o(,ogp a lob - S i.og M e t a l N W P '"og N W P (og N _ P (og N W P (og L ao9og L ao:. - M - s Eo0 OoG M e t Fo0 P - L aoe g eog L aoe g -og S O a l log M ) o Co.. NoG S O a ll-m ed io0 mog M ed io0m - L aoe 1 -og 8 8 U p l o I 60 0 m m I I U p t o 5O O m m l F i g u r e 1 1. E v o l u t i o n o f e m b e d d i n g a n d f a n - o u t p a c k a g i n g fr o m 1 s t g e n e r a t i o n W L P i n s t o 4 t h g e n e r a t i o n i n o r g a n i c P F O i n O S A T s h a v e b e e n, a n d c o n t i n u e t o b e u s e d f o r e m b e d d i n g a n d f a n - o u t b y i n t e r c o n n e c t i n g m e d i u m d e n s i t y a n d s m a l l - s i z e I C s. T h e s e m m f a c i l i t i e s a r e a p p r o p r i a t e f o r p a c k a g i n g s m a l l RF, 5 G a n d m i l l i m e t e r d e v i c e s. e P F O f o r L o w I / O s a n d S m a l l - t o - I a r g e P a c k a g e s : P o w e r D e v i c e s P a n e l - b a s e d e m b e d d i n g h a s b e g u n t o e m e r g e i n b i g w a y f o r a n a l o g p r o d u c t s, s t a r t i n g w i t h l o w p o w e r, t h e n h i g h p o w e r a n d i n fu t u r e m a n y o t h e r s t h a t i n c l u d e i n t e g r a t i o n o f m a n y d e v i c e s. T h e s e p a n e l s d o n ' t r e q u i r e B E O L t o o l s, m a t e r i a l s a n d p r o c e s s e s. T h e p a n e l s c a n b e a n y a n d a l l t h a t a r e n o t r o u n d w a f e r s a n d m a n u f a c t u r e d o u t s i d e t h e I C f o u n d r y. E m b e d d i n g b y A T & S f o r l o w p o w e r a n d b y S c h w e i z e r a n d F r a u n h o f e r f o r h i g h p o w e r, b o t h i n b o a r d - l i k e l a r g e p a n e l s a r e e x a m p l e s o f e P F O. T h i s i s r e f e r r e d t o a s E m b e d d e d P a n e l F a n - o u t ( e P F O - o r g a n i c ) t e c h n o l o g y i n F i g u r e 1 1. F i g u r e 1 2 s h o w s t h r e e d i f f e r e n t m a n u f a c t u r i n g i n fr a s t r u c t u r e s t o a d d r e s s t h i s m a r k e t : 1 ) t h e t r a d i t i o n a l P W B s s u c h a s u s e d b y A T & S, 2 ) t h e n e w L C D - b a s e d u l t r a l a r g e p a n e l p r o c e s s s u c h a s b y S a m s u n g, a n d 3 ) b u i l t - u p R D L m a n u f a c t u r i n g i n fr a s t r u c t u r e b y O S A T s. A l l t h e s e m a n u f a c t u r i n g i n fr a s t r u c t u r e s e x i s t t o d a y a n d w i t h a p p r o p r i a t e m o d i fi c a t i o n s, t h e y a r e c a p a b l e o f h a n d l i n g h i g h v o l u m e m a n u f a c t u r i n g o f a l l e m b e d d e d a n d l o w - t o - m e d i u m p r o d u c t s o t h e r t h a n t h o s e t h a t r e q u i r e B E O L i n fr a s t r u c t u r e f o r u l t r a - h i g h d e n s i t y. e P F OoG M a n u f a ao- u r F R 10oG I n f r ao)o- ro0 do-o0oe eo)og e W F O f o r H i g h e s t I / O D e n s i t y a n d S m a l l I C s : D i g i t a l D e v i c e s O n e s t r a t e g i c d i r e c t i o n f o r e W F O i s f o r h i g h c h i p - l e v e l d e n s i t y t o p a c k a g e l o g i c d e v i c e s s u c h a s p r o c e s s o r s. T h i s i s b e s t a c h i e v e d w i t h w a f e r B E O L t o o l s, m a t e r i a l s a n d p r o c e s s e s. S o e W F O i s b e s t f o r p a c k a g i n g d i g i t a l d e v i c e s s u c h a s p r o c e s s o r a n d s e r v e r I C s a n d f o r l o g i c - t o m e m o r y i n t e r c o n n e c t i o n s w i t h h i g h e s t 1 I 0 s t h a t c a n ' t b e p r o d u c e d i n a n y o t h e r w a y. T S M C ' s I N F O i s a n e x c e l l e n t e x a m p l e. B u t a c h i e v i n g s c a l i n g a n d h i g h d e n s i t y b y e W F O i s l i m i t e d b y t h e p r o c e s s f o r e W F O w i t h m o l d i n g c o m p o u n d s a n d o t h e r s. T h e e W F O i s a l s o l i m i t e d t o s m a l l e r t o m e d i u m s i z e I C s a n d p a c k a g e s b e c a u s e o f t h e h i g h c o s t o f p r o d u c i n g s m a l l n u m b e r o f l a r g e r f a n - o u t p a c k a g e s fr o m m m w a f e r s. A p p l i c a t i o n o f e W F O f o r m u l t i - c h i p p a c k a g i n g p r e s e n t s a n o t h e r m a j o r c h a l l e n g e, s i n c e t h i s t e c h n o l o g y d o e s n ' t p r o v i d e a p a t h f o r r e p a i r a b i l i t y o r r e w o r k a b i l i t y. G e o r g i a T e c h i s a d d r e s s i n g t h i s c h a l l e n g e b y i t s i n o r g a n i c, m o l d c o m p o u n d - fr e e G F O i n l a r g e p a n e l f o r m t h a t i s c a p a b l e o f S i - l i k e B E O L d i m e n s i o n s, a s d e s c r i b e d b e l o w. T h i s i s i n d e v e l o p m e n t a n d n o t m a n u f a c t u r i n g r e a d y. I O r -od a 'o(og 1 M BoG A T & S 'o&og E C PoG S P :.o5 - CoC -oaog Foa ao.. P ;; _ 0 -oaog S P I L ' sog P F OoG P T I 'o'og P F OoG S a Oo'o.: P 1 'o'"og P F OoG J - D -o1 D a - s W F O PoG 'og A S E 'o'og C. Doo - L ao'o-og T D KoG F i g u r e 1 2. T h r e e t y p e s o f m a n u f a c t u r i n g i n fr a s t r u c t u r e s f o r p a n e l e m b e d d i n g. I n o r g a n i c P a n e l E m b e d d i n g f o r V e r y h i g h I / O s a n d L a r g e P a c k a g e s G e o r g i a T e c h a n d i t s 5 0 i n d u s t r y p a r t n e r s a r e d e v e l o p i n g t h e 4 t h g e n e r a t i o n o f e m b e d d i n g a n d f a n - o u t t e c h n o l o g y, a s s h o w n i n F i g u r e 4, F i g u r e 1 1, a n d F i g u r e 1 3 i s u l t r a - t h i n, v e r y h i g h e l e c t r i c a l p e r f o r m a n c e, v e r y h i g h d e n s i t y a n d h i g h - r e l i a b i l i t y i n b o t h c h i p - fi r s t a n d c h i p - l a s t s c e n a r i o s u s i n g u l t r a - t h i n a n d l a r g e p a n e l s o f g l a s s f o r l o w c o s t. I n c o n tr a s t t o t h e w a f e r f a n - o u t t h a t i s l i m i t e d b y m o l d i n g c o m p o u n d s, a n d l a m i n a t e - e m b e d d i n g t h a t i s l i m i t e d i n d e n s i t y, r e l i a b i l i t y, a n d t h e rm a l s t a b i l i t y, t h e G e o r g i a T e c h a p p r o a c h r e f e rr e d t o a s E m b e d d e d G l a s s F a n - O u t ( e G F O ) h a s m a n y a t t r i b u t e s l i s t e d b e l o w. F i g u r e 1 3 s h o w s S i - l i k e, s a m e v i a a n d l i n e d i m e n s i o n s f o r t h e fi r s t t i m e i n t h e p a c k a g i n g w o r l d. e W F O f o r M e d i u m I / O D e n s i t y a n d S m a l l I C s : R F a n d M i l l i m e t e r W a v e D e v i c e s I n c o n t r a s t t o t h e u s e o f e x p e n s i v e B E O L t e c h n o l o g i e s f o r h i g h e s t d e n s i t y o f 1 I 0 s, n o n - w a f e r f a b f a c i l i t i e s s u c h a s b y og S i - l i k e B E O L t o c l o s e i n t e r c o n n e c t g a p og U l t r a - m i n i a t u r i z e d og H i g h - t e m p e r a t u r e s t a b i l i t y og H e rm e t i c r e l i a b i l i t y

7 og U l t r a - l o w l o s s a n d u l t r a - h i g h r e s i s t i v i t y og M i n i m u m w a rp a g e og E x c e l l e n t s u r f a c e s m o o t h n e s s og H i g h m o i s t u r e r e s i s t a n c e og L a r g e p a n e l s u p t o 5 1 O m m i n s i z e G l a s s 1 0 j m v i a s V i a O v e r L i n e p a n e l s, f o r t h e fi r s t t i m e, w i t h l e s s t h a n 2 /l m c r i t i c a l d i m e n s i o n s ( C D ) f o r h i g h - d e n s i t y f a n - o u t a p p l i c a t i o n s. G e o r g i a T e c h t e a m i s d e v e l o p i n g G F O u s i n g d a i s y c h a i n t e s t d i e s fr o m I n t e l, t o e m u l a t e a n e m b e d d e d d e v i c e o f m m x m m s i z e i n 7 5 /l m t h i c k n e s s w i t h a p a d p i t c h o f 6 5 /l m. G F O w a s f a b r i c a t e d w i t h t h e s e d e v i c e s u s i n g 7 0 /l m t h i c k g l a s s p a n e l s w i t h t h r o u g h g l a s s c a v i t i e s f a b r i c a t e d w i t h d i m e n s i o n a l a c c u r a c y b e l o w + _ 5 /l m. T h i s c a v i t y - c o n t a i n i n g p a n e l i s t h e n b o n d e d w i t h a n a d h e s i v e t o a 5 0 /l m t h i c k g l a s s p a n e l a n d t h e t e s t d i e s w e r e t h e n p l a c e d i n t h e s e c a v i t i e s u s i n g a h i g h - s p e e d p l a c e m e n t t o o l fr o m K u l i c k e a n d S o ff a. T h e R D L p o l y m e r s w e r e t h e n l a m i n a t e d a n d c u r e d o n b o t h s i d e s t o m i n i m i z e t h e w a rp a g e o f t h e u l t r a - t h i n p a c k a g e. A s u r f a c e p l a n a r t o o l b y D i s c o w a s u s e d t o p l a n a r i z e t h e s u r f a c e o f t h e p a n e l t o e x p o s e t h e c o p p e r m i c r o - b u m p s o n t h e d i e, f o l l o w e d b y a s t a n d a r d s e m i - a d d i t i v e p r o c e s s ( S A P ) f o r t h e f a n - o u t R D L l a y e r. T h e d i e s h i ft a n d w a r p a g e w e r e c h a r a c t e r i z e d s y s t e m a t i c a l l y. I n i t i a l m o d e l i n g a n d m e a s u r e d r e s u l t s i n d i c a t e d l e s s t h a n 5 /l m d i e s h i ft a n d l e s s t h a n 1 5 /l m w a rp a g e a c r o s s a m m p a n e l i n t h e G e o r g i a T e c h p i l o t l i n e. T h e fi r s t d e m o n s t r a t i o n o f a fu l l y i n t e g r a t e d G F O p a c k a g e, t h e t h i n n e s t p a c k a g e a t h i g h e s t p i t c h t o - d a t e o f 2 0 /l m, i s s h o w n i n F i g u r e 1 5. F i g u r e 1 3. c o n c e p t o f v i a o n l i n e w i t h n e a r l y t h e s a m e d i m e n s i o n s, a n d a c t u a l V i a o n l i n e e n a b l e d b y G F O. T h e G F O a p p r o a c h a d d r e s s e s t h e l i m i t a t i o n s o f c u rr e n t e m b e d d i n g a n d f a n - o u t t e c h n o l o g i e s. I t b e g i n s t o a d d r e s s t h e i n t e r c o n n e c t g a p t h a t e x i s t s b e t w e e n c u rr e n t f a n - o u t a n d S i B E O L l i t h o g r a p h i c d i m e n s i o n s, a s s h o w n i n F i g u r e 1 4. P a N J a 01 'og F Vo.. P no&og W a / 'opog F Uo.. P no og 2 0 0oG E.:;.l!oG g ii: L Co- 4 W 1oP ao 5oAoG 1 0 F i g u r e 1 4. I n t e r c o n n e c t g a p w i t h c u r r e n t e W F O s. T h e s i l i c o n - l i k e d i m e n s i o n a l oG s t a b i l i t y o f g l a s s i n l a r g e - p a n e l m a n u f a c t u r i n g e n a b l e s a n u n p a r a l l e l e d c o m b i n a t i o n o f u l t r a h i g h d e n s i t y, h i g h e l e c t r i c a l p e r f o r m a n c e, h i g h r e l i a b i l i t y a n d l o w c o s t, n o t p o s s i b l e i n m o l d i n g c o m p o u n d - b a s e d w a f e r o r l a m i n a t e - b a s e d f a n - o u t t e c h n o l o g i e s. U n l i k e h i g h d e n s i t y f a n - o u t p a c k a g e s t h a t r e q u i r e a n o t h e r p a c k a g e s u c h a s o r g a n i c B G A p a c k a g e t o c o n n e c t t o b o a r d s f o r l a r g e p a c k a g e s i z e s, G F O p a c k a g e s a r e d e s i g n e d t o b e d i r e c t l y S M T a t t a c h a b l e t o t h e b o a r d. L a s t l y, t h e u l t r a - s m o o t h s u r f a c e a n d h i g h - d i m e n s i o n a l s t a b i l i t y o f g l a s s e n a b l e s s i l i c o n - l i k e R D L w i r i n g a n d B E O L - l i k e 1 I 0 s b u t o n l a r g e F i g u r e 1 5. U l t r a - t h i n G l a s s f a n - o u t ( G F O ) p a c k a g e f o r h i g h d i g i t a l a p p l i c a t i o n s, a n d b ) 2 0 /l m p i t c h a s s e m b l y o n g l a s s s u b s t r a t e. I n s u m m a r y, e m b e d d i n g i s t h e m o s t i m p o r t a n t s tr a t e g i c t e c h n o l o g y t h a t i s a p p l i c a b l e f o r a l l d i g i t a l, RF a n d p o w e r a p p l i c a t i o n s. W h e n c o m b i n e d w i t h f a n - o u t a t c h i p a n d b o a r d l e v e l s, i t e n a b l e s h i g h e r a p p l i c a t i o n s. E m b e d d e d w a f e r f a n - o u t ( e W F O ) c a n b e f a b r i c a t e d i n e i t h e r w a f e r f a b s u s i n g B E O L t o o l s, m a t e r i a l s a n d p r o c e s s e s, o r O S A T ' s b u i l t - u p f a b s a n d t o o l s. T h e e W F O f r o m m m w a f e r f a b s i s c a p a b l e o f t h e u l t i m a t e d e n s i t y b u t a t h i g h c o s t f o r l a r g e I C s r e q u i r i n g l a r g e e W F O p a c k a g e s. T h i s t e c h n o l o g y i s b e s t s u i t e d f o r h i g h - v a l u e l o g i c d e v i c e s r e q u i r i n g v e r y h i g h 1 1 0

8 d e n s i t y. I t i s c u r r e n t l y l i m i t e d b y m o l d i n g c o m p o u n d s a n d o t h e r s, i n m a n y w a y s. T h e e W F O s fr o m O S A T s a r e c a p a b l e o f h a n d l i n g h i g h 1 I 0 s f r o m t h e i r m m f a b s a n d t h e t e c h n o l o g y i s e x t e n d a b l e t o p a n e l s. T h i s t e c h n o l o g y i s s u i t a b l e f o r s m a l l d e v i c e s s u c h a s RF a n d s o m e l o g i c d e v i c e s b u t a s t h e d e v i c e s i z e g o e s u p, t h e c o s t o f p a c k a g i n g t h i s d e v i c e g o e s u p. E m b e d d i n g w i t h o r w i t h o u t f a n - o u t i s m o s t s u i t a b l e f o r p o w e r d e v i c e s. T h e y d o n ' t r e q u i r e h i g h 1 I 0 s, b u t t h e y n e e d t o b e m a n u f a c t u r e d a t v e r y l o w c o s t. U l t r a - l a r g e p a n e l s s u c h a s b o a r d s fr o m P W B i n d u s t r y o r L C D i n d u s t r y a r e b e s t s u i t e d t o e m b e d t h e s e d e v i c e s. T h e r e i s a n e e d t o c o u p l e u l t r a - h i g h d e n s i t y o f i n t e r c o n n e c t i o n s s u c h a s f r o m w a f e r - b a s e d f o u n d r i e s w i t h h i g h - t h r o u g h p u t p a n e l m a n u f a c t u r i n g s o a s t o e n d u p w i t h h i g h e s t p e r f o r m a n c e a t l o w e s t c o s t, e v e n f o r l a r g e r I C s a n d p a c k a g e s a n d w i t h v e r y h i g h d e n s i t y. T h e r e a r e t w o s o l u t i o n s t h a t a r e e m e r g i n g : 1 ) p a n e l - b a s e d e m b e d d e d a n d f a n - o u t m a n u f a c t u r i n g i n fr a s t r u c t u r e i s e m e r g i n g, a s d e s c r i b e d i n t h i s a r t i c l e a n d w i t h a d v a n c e s i n l i t h o g r a p h i c g r o u n d r u l e s b y n e w a d v a n c e d l a r g e - a r e a l i t h o g r a p h i c t o o l s ; a n d i n a d v a n c e d l a m i n a t e s, p a n e l - b a s e d e m b e d d e d f a n - o u t i s b o u n d t o e v o l v e t o s e r v e n o t o n l y p o w e r b u t a l s o RF a n d m m - w a v e m a r k e t. T h e s e c o n d p a t h t h a t i s e m e r g i n g i s t o d o w i t h g l a s s f a n - o u t s u c h a s b y G e o r g i a T e c h w i t h i t s G F O, w i t h S i - l i k e g r o u n d r u l e s t o 2 f.! m a n d b e l o w i n l i t h o g r a p h y, l e a d i n g t o 2 0 f.! m b u m p p i t c h a n d b e l o w i n i n t e r c o n n e c t i o n s a n d a s s e m b l y o n l a r g e p a n e l s. T h i s t e c h n o l o g y i s c a p a b l e o f c l o s i n g t h e i n t e r c o n n e c t i o n s g a p b e t w e e n B O L a n d p a c k a g e f o u n d r y, a s s h o w n i n F i g u r e 1 4. F i g u r e 1 6 s h o w s t h e r e l a t i v e r e g i m e s o f e m b e d d i n g a n d f a n o u t a t w a f e r, p a n e l a n d b o a r d l e v e l s f o r d i g i t a l, RF a n d p o w e r a p p l i c a t i o n s a s a f u n c t i o n o f r e l a t i v e s i z e a n d c o s t. " c CD ofog Q. _ - - e P a P ' JoG :..og ( 4 0 0oG.:oG M M )og! h O L 0 Ao.. log. M T A L 'og \.V V" " ml i of ofofof ofog b f g L Bo- 3 o 0oI a a 3 B IoG GoN oo.. P mog Ro.. l 'og (of N )og U Ko-otoD L To3oG F i g u r e 1 6. S u m m a r y o f w a f e r, p a n e l a n d b o a r d e m b e d d i n g a n d f a n - o u t t e c h n o l o g i e s a s a fu n c t i o n a p p l i c a t i o n s a n d l i t h o g r a p h i c g r o u n d r u l e s. R E F E R E N C E S [ 1 ] S. S a k h n e n k o, D. O r l e n k o, B. V o r o t n i k o v, O. A l e k s i e i e v, P. K o m a k h a, P. H e i d e, e t a I., " U l t r a - L o w - P r o fi l e S m a l l - S i z e L T C C F r o n t - E n d M o d u l e ( F E M ) f o r W L A N A p p l i c a t i o n s b a s e d o n a N o v e l D i p l e x e r D e s i g n A p p r o a c h, " I E E E I M T T - S I n t e r n a t i o n a l M i c r o w a v e S y m p o s i u m, V o l s 1-3, p p , L Uo4oG d n c [ 2 ] S E S U B ( s e m i c o n d u c t o r e m b e d d e d i n s u b s t r a t e ) m o d u l e t e c h n o l o g y A v a i l a b l e : h t tp s : / l e n. t d k. e u l t d k - e n l O B l t e c h - l i b r a ry l a r t i c i e s lp ro d u c t s - - t e c h n o l o g i e s lp ro d u c t s t e c h n o l o g i e s l v e ry - s m a l l - a n d e x t r e m e l y - j l a t I [ 3 ] N. K u m b h a t, A. C h o u d h u r y, G. M e h r o t r a, P. M. R a j, V. S u n d a r a m, a n d R. T u m m a l a, " H i g h l y R e l i a b l e a n d M a n u f a c t u r a b l e U l t r a fi n e P i t c h C u - C u I n t e r c o n n e c t i o n s f o r C h i p - L a s t E m b e d d i n g W i t h C h i p - F i r s t B e n e fi t s, " I E E E T r a n s a c t i o n s o n C o m p o n e n t s, P a c k a g i n g a n d M a n u f a c t u r i n g T e c h n o l o gy, v o l. 2, p p , [ 4 ] S. S i t a r a m a n, Y. S u z u k i, C. W h i t e, V. N a i r, T. K a m g a i n g, F. J u s k e y, e t a I., " M o d e l i n g, D e s i g n a n d D e m o n s t r a t i o n o f M u l t i - D i e E m b e d d e d W L A N RF F r o n t E n d M o d u l e w i t h U l t r a - m i n i a t u r i z e d a n d H i g h - p e r f o n n a n c e P a s s i v e s, " I E E E 6 4 t h E l e c t ro n i c C o m p o n e n t s a n d T e c h n o l o gy C o n f e r e n c e ( E C T C ), p p , [ 5 ] 1. B o c k a n d R. L a c h n e r, " S i G e B i C M O S a n d e W L B p a c k a g i n g t e c h n o l o g i e s f o r a u t o m o t i v e r a d a r s o l u t i o n s, " i n M i c r o w a v e s f o r I n t e l l i g e n t M o b i l i t y ( l C M I M ), I E E E M T T - S I n t e rn a t i o n a l C o n f e r e n c e o n, , p p [ 6 ] G. H a u b n e r, W. H a r t n e r, S. P a h l k e, a n d M. N i e s s n e r, " 7 7 G H z a u t o m o t i v e R A D A R i n e W L B p a c k a g e : F r o m c o n s u m e r t o a u t o m o t i v e p a c k a g i n g, " M i c ro e l e c t ro n i c s R e l i a b i l i ty, v o l. 6 4, p p , S e p [ 7 ] R. H u e m o e l l e r a n d C. Z w e n g e r, " S i l i c o n w a f e r i n t e g r a t e d f a n - o u t t e c h n o l o g y, " C h i p S c a l e R e v i e w, v o l. 1 9, p p , [ 8 ] E. P a r k e r, B. N a r v e s o n, A. A l d e r m a n, a n d L. B u r g y a n, " E m b e d d i n g A c t i v e a n d P a s s i v e C o m p o n e n t s i n P C B s a n d I n o r g a n i c S u b s tr a t e s f o r P o w e r E l e c t r o n i c s, " I E E E I n t e rn a t i o n a l W o r k s h o p o n I n t e g r a t e d P o w e r P a c k a g i n g ( I W I P P ), p p , [ 9 ] 1. M o s s, U. C h a u d h r y, S. K o1 e r l, a n d C. D e V r i e s, " I n c r e a s e P o w e r D e n s i t y a n d S i m p l i fy D e s i g n s w i t h 3 D S i P M o d u l e s, " I n t e rn a t i o n a l S y m p o s i u m o n 3 d P o w e r E l e c t ro n i c s I n t e g r a t i o n a n d M a n u f a c t u r i n g ( 3 D P E I M ), [ 1 0 ] L. J. S m i t h, " 3 D S i P w i t h e m b e d d e d c h i p p r o v i d i n g i n t e g r a t i o n s o l u t i o n s f o r p o w e r a p p l i c a t i o n s, " i n 3 D P o w e r E l e c t r o n i c s I n t e g r a t i o n a n d M a n u f a c t u r i n g ( 3 D - P E I M ), I n t e r n a t i o n a l S y m p o s i u m o n, , p p [ 1 1 ] T I M i c r o s i p. A v a i l a b l e : h t t p s : / I w w w. g o o g l e. c o m l s e a r c h? q = TI + M i c r o S i P % E 2 % B 4 % A 2 + P a c k a g e & e s p v = 2 & b i w = & b i h = 6 4 B & s o u r c e = l n m s & t b m = i s c h & s a = X & v e d = O a h U KE w i t B t c w K z R A h W M O C Y KH Vk q A O B Q _ A UI B y g C # t b m = i s c h & q = T I + M i c ro S i p & i m g r c = L w e t b D n Z V e M % 3 A [ 1 2 ] T i M i c r o s i p c r o s s s e c t i o n. A v a i l a b l e : h t tp : / / w w w. s y s t e m p l u s f rl w p c o n t e n t l u p l o a d s I I M i c ro n e w s _ _ 0 3 _ N _ s y s t e m p l u s p d f [ 1 3 ] G a N S y s t e m s a n d A T & S G a N P a c k a g e. A v a i l a b l e : h t t p : / / w w w. a p e c - c o n f o r g l w p - c o n t e n t l u p l o a d s I I S - B. 5 - M a x i m i z i n g - G a N - P o w e r - T r a n s i s t o r - P e r f o r m a n c e - w i t h - E m b e d d e d - P a c k a g i n g p d f a n d h t tp : / / w w w. p s m a. c o m l s i t e s l d e f a u l t lfl l e s l u p l o a d s l t e c h -

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