Theory of Electrical Characterization of Semiconductors

Transcription

1 Theory of Electrical Characterization of Semiconductors P. Stallinga Universidade do Algarve U.C.E.H. A.D.E.E.C. OptoElectronics SELOA Summer School May 2000, Bologna (It)

2 Overview Devices: bulk Schottky barrier pn-junction FETs Techniques: current-voltage (DC) capacitance, conductance (AC) admittance spectroscopy Hall Transient techniques: capacitance transients DLTS TSC Information: conduction model carrier type shallow levels position density deep levels position density dielectric constant carrier mobility barrier height

3 Plastics are conductors?! Every semiconducting polymer has a backbone of undercoordinated carbon atoms example: - CH CH CH CH - 4 th electron is in weak p z -p z bonds. Loosely bound -> metal deformation of backbone: creation of alternating single and double bonds - CH = CH CH = CH - This causes opening of a bandgap -> semiconductor bandgap ±2.5 ev wide bandgap ½con Material SiO 2 C (diamond) GaN Polymers GaAs >10 ev 5.47 ev 3.36 ev 2.5 ev 1.42 ev Si Ge Band gap 1.12 ev 0.66 ev

4 Bulk Samples bar of material with only ohmic contacts Conductivity: σ = e µ p p p ~ T 3/4 exp( E A /kt) acoustic phonons: µ p ~T 3/2 ionized impurities: µ p ~T 3/2 optical phonons: µ p ~T 3/2 I V 4-point probe

5 Schottky Barrier metal and ½con have different Fermi level electrons will flow from metal to ½con build-up of (space) charge Q (uncompensated ionized acceptors) causes electric field and voltage drop (band bending, V bi ) over a range W (depletion width) V bi = χ + V n - φ m

6 Calculation of Depletion Width Poisson s equation: V = ρ(x)/ε dx 2 is integral sign ρ(x) = N A (x<w) 0 (x>w) E(x) = ρ(x)dx= (qn A /ε) (x W) V(x) = (qn A /2ε) (x W) 2 V bi = V(0) W = 2ε(V bi V ext )/qn A Q = N A W

7 Capacitance (Schottky Barrier) Every time the bias is changed a new depletion width is formed More (or less) space charge Q C =dq/dv = A qεn A /2(V bi V) C = Aε/W A Schottky barrier is equivalent to metal plates (area A) at mutual distance W, filled with dielectric ε

8 Capacitance 2 doping density C = A qεn A /2(V bi V) N A C 2 = 2(V bi V)/A 2 qεn A V bi slope reveals N A extrapolation reveals V bi

9 Numerical calculation of C Riemann integration until V = (V bi V ext ) then: C = dq/dv C = (dq/dx) / (dv/dx) x=w or: two-pass calculation: C = Q/ V

10 DC conduction (Schottky barrier) Thermionic-emission: Thermionic emission theory: J = A*T 2 exp( qφ Bp /kt ) [exp(qv/nkt) 1] = J 0 [exp(qv/nkt) 1] From a single scan we can find the rectification ratio (J 0 ) the ideality factor, n the conduction model Repeating with different T: barrier height, φ Bp Diffusion theory:

11 Bulk-limited Current (Schottky barrier) Large bias: bulk resistance dominates This causes a bending of IV Theory for bulk currents can be applied again.

12 Displacement Current (Schottky barrier) Every time the bias is changed the capacitance has to reach the new amount of charge stored This flow of charges is the displacement current, I disp I disp = C (dv/dt) + V (dc/dt) = C dv/dt + V (dc/dv)(dv/dt) So, scan slower!

13 AC: Conductance (schottky barrier) V(t) = V + v sin(ωt) I(t) = I + i sin(ωt) DC: 1/R = I/V, AC: G = i/v Small v: conductance G is the derivative of the IV-curve J = J 0 [exp(qv/nkt) 1] G = G 0 exp(qv/nkt) Frequency independent Loss: L = G/ω Loss-tangent: tanδ = G/ωC

14 Deep levels Increasing bias less band-bending (EF moves down) at V>V x deep level completely above E F. Stops contributing reduced capacitance and increased slope in C 2 -V plot high ω low ω

15 Frequency response C, G/ω tanδ = G/ωC Only shallow levels: Plus deep levels:

16 Interface states Special type of deep states: only present at interface not visible in C, G not visible in C,G increased C and G C 2 -V Log(G)-V G/ω, C - ω

17 Summary of C-Vω and G-Vω C 2 -V Log(G)-V Spectra C, G/ω-ω tanδ-ω shallow homogeneous + deep homogeneous + interface

18 Admittance Spectroscopy Equivalent circuits Admittance spectroscopy: C, G, tanδ as function of ω C = R d2 C d + R b2 C b + ω 2 R d2 R b2 C d C b (C d +C b ) (R d +R b ) 2 + ω 2 R d2 R b2 (C d +C b ) R d +R b + ω 2 R d R b (R d C d2 +R b C b2 ) G = (R d +R b ) 2 + ω 2 R d2 R b2 (C d +C b ) Resembles deep states picture: Hey, that is nice, we can simulate deep states with equivalent circuits! (even if it has no physical meaning) or: τ = RC

19 Admittance Spectroscopy Loss tangent Maximum at 1/ω max = R b C b (C b +C d ) R b ~ exp( E a /kt) (remember from bulk samples?) We can determine the bulk activation energy from the tanδ data

20 Admittance Spectroscopy Cole-Cole Plots C R ω=0 C d R d ω=00 C b R b C b = C geo = εa/d ( metal plates ) Cole-Cole plot is G/ω vs. V yields ε (if we know electrode area and film thickness)

21 Field Effect Transistor I SD = (Z/L)µ p C[(V G V T )V D αv D2 ] If we know the dimensions of the device (A, Z, L, d [C]) we can find the hole mobility µ p symbol L Z d V G V D I SD µ C Meaning Channel length Channel width Oxide thickness Gate voltage Drain voltage Drain current (hole) mobility Oxide capacitance = Aε/d

22 Hall measurements (remember) conductivity: σ = qp µ p σ = (I/V x )(l x /W y d z ) F yb = q B z v x F ye = qe y v x = J x /qp = I x /(W y d z qp) E y = V y /W y qp = B z I x /V y d z µ p = l x V y / B z V x W y In the Hall measurements we can measure the hole mobility µ p

23 Optical effects: LED electrons and holes are injected into the active region here they recombine -> photon color of photon is E g. With polymers blue is possible Limiting mechanisms: unbalanced carrier injection (choice of electrodes) presence of non-radiating-recombination centers

24 Optical Effects: Photo detector/solar cell In photo-detectors / solar cells The opposite process takes place: Energy of photon is absorbed by creation of e-h pair Electric field in active region breaks the e-h pair Individual carriers are swept out of region and contribute to external current

25 Solar Cell Parameters that characterize a solar cell: open-circuit voltage (I=0) V oc short-circuit current (V=0) J sc maximum power output P max

26 Tomorrow: Relaxation processes Time-resolved measurements (Transient techniques)