International Workshop on Extreme Optics and Sensors
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1 International Workshop on Extreme Optics and Sensors Multi-axis utting Shin-ya MORIT Materials Fabrication Laboratory, the Institute of Physical and hemical Research (RIKEN), 2-1 Hirosawa, Wako, Saitama, JPN morishin@riken.go.jp utaka MGT Materials Fabrication Laboratory, RIKEN, 2-1 Hirosawa, Wako, Saitama, JPN yamagata@riken.go.jp Hitoshi OHMORI Materials Fabrication Laboratory, RIKEN, 2-1 Hirosawa, Wako, Saitama, JPN tuelid@myad.jp bstract This research aims to develop a new manufacturing method that enables to obtain high precision molds of sub-micrometer blazed diffraction gratings, aspherical lenses, holographic optical elements, micro lens-arrays and so on. The method is based on fine cutting technology using a single crystalline diamond cutting tool and a multi-axis ultrahigh precision driving system. Fine grooves, which are less than 1-micrometer pitch and asymmetric triangular shape, are fabricated by rotating diamond tool on copper or electroless-plated nickel substrates. Moreover, other multi-axis ultrahigh precision driving systems developed for the research described in this article. 1. Development of machine tools In this section, three different types of ultra precision machine tools developed for a research of multi-axis cutting are introduced. Table.1 describes specification of aero-static guided machine tool and fig.1 shows its overview. The machine tool has a 5-axis simultaneous control unit, three straight axes with 1nm resolution and two rotational axes with 1/100,000 degree resolution. ll axes are supported by full aero-static slide with narrow gap and
2 PSM5 large diameter aero-static feed screw. Table 1. Specifications of aero-static guided machine tool 5-axis simultaneous control (,,,, ) Scale resolution: 1nm (,, ), 1/100,000 deg.(, ) earing: Full aero-static slide with narrow gap and large diameter aero-static feed screw Stroke: 280x20x150mm Straightness: 0.2μm/280mm,0.2μm/150mm N-unit: FNU 15i Fig. 1. Overviews of aero-static guided machine tool Table.2 describes specification of oil hydrostatic guided machine tool and fig.2 shows its overview. The machine tool has a 6-axis simultaneous control unit, three straight axes with 1.4nm resolution and three rotational axes with 1/10,000 degree or 1/1,000 degree resolution. Oil hydrostatic slides and oil hydrostatic feed screws are used for all straight axes.. Table 2. Specifications of oil hydrostatic guided machine tool 6-axis simultaneous control (,,,,, ) Scale resolution: 1.4nm (,, ), 1/10,000 deg.(), 1/1,000 deg.() earing: oil hydrostatic slide and oil hydrostatic feed screw (,,) aero-static bearing() Stroke: 400x200x250mm Straightness: <0.1µm/100mm(,, ) ELID-unit
3 International Workshop on Extreme Optics and Sensors Workpiece utting tool Fig. 2. Overviews of oil hydrostatic guided machine tool Table.3 describes specification of precision V-V roller guided machine tool and fig.3 shows its overview. The machine tool has a 6-axis simultaneous control unit, three straight axes with 1nm resolution and three rotational axes with 1/10,000 degree or 1/1,000 degree resolution. Oil hydrostatic slides and oil hydrostatic feed screws are used for all straight axes.. Table 3. Specifications of precision V-V roller guided machine 6-axis simultaneous control (,,,,, ) Scale resolution: 1nm (,, ), 1/10,000 deg.(,), 1/1,000 deg.() earing: Precision V-V Roller slide (,,) aero-static bearing(,) Stroke: 300x75x150mm Straightness: <0.1µm/300mm ELID-unit utting tool Workpiece Fig. 3. Overviews of precision V-V roller guided machine
4 PSM5 2. Experiment of multi-cutting In this section, some examples of experiments of multi-cutting are represented Microlens array Micro lens (Fig. 3) array has been fabricated using precise V-V roller guided machine tool with 4-axis simultaneous control (Fig. 4). Each of lenses is formed into axis symmetrical aspherical shape. Single crystalline diamond cutting tool with small radius is used. Fig. 5 shows form accuracy of fabricated lenses. 1.5mm SR 2mm O d O' x 0 r Fig. 3. Fabricated microlens array O O' x α = α ross secitonal view from Front View the top Fig axis simultaneous control for microlens array R = R cos + x tr sin = Rsin = r d r 2 d 2 + tr cos tr
5 International Workshop on Extreme Optics and Sensors Error (µm) Horizontal Position (mm) O D E F ray Holographic optical element Fig. 5. Form accuracy of fabricated lenses n -ray Holographic optical element (fig. 6) has been fabricated by 5-axis simultaneous control. This is a kind of blazed gratings on free-curved surface with 2.7 micron pitch microgrooves. x = SR cos sin ϕ y = SR sin = SR (1 cos cos ϕ ) mm φ O Sub-micrometer pitch grooves Fig. 6. -ray Holographic optical element V grooves with sub-micrometer pitch has been fabricated by diamond cutting tool using aero-static guided machine tool. The material of workpiece was electroless-plated nickel. Using the workpiece, an experiment of polymer replica-
6 PSM5 tion has been performed. Fig. 6 shows the result. Metal Master Polymer Replica Fig. 6. Sub-micrometer pitch grooves 3. onclusion Three type of ultrahigh precision machine tools, areo-static machine, oil hydrostatic machine and precise V-V roller machine have been developed for a research of multi-axis cutting and their performance have been confirmed by several experiments.
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