Characterization of MEMS Devices
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1 MEMS: Characterization Characterization of MEMS Devices Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay,
2 Recap Fabrication of MEMS Conventional VLSI fabrication Nonconventional methods Design and analysis of MEMS Characterization of MEMS
3 Today s Class Why characterization?? Why optics?? Principles of optics useful in characterization Tools for optical characterization Profilometer Microscope Methods for characterization of mechanical properties SPM based tools: STM and AFM
4 Why Characterization? Material properties change at micro-scale, different from bulk properties due to grain boundary effect Successful design/manufacturing of MEMS devices need reliable knowledge of MEMS material properties Verification of design and validation of models proposed Calibration of devices and signals Electronic analysis: noise vs signal Research various new effects: example Biosensor devices
5 Why Optics for Characterization? Noninvasive technique Does not disturb sensitive MEMS device Very high resolutions possible Higher measurement range possible Several optical phenomenon can be made use of
6 Principles of Optics Wave nature of light Interference Wave division Amplitude division Diffraction + Diffr. grating Moire interference Holography
7 Principles of Optics Interference Wave division Amplitude division Beam splitter Young s double slit Reference mirror Michaelsons Interferometer Analysis??
8 Principles of Optics Interference Test device Mach-Zehnder Interferometer Used for laser-doppler vibrometer
9 Polarization Concept of polarization of light
10 Principles of Optics Interference Source Partially Reflecting Lens Mirrors Febry-Parot Interferometer Screen Another method for interference
11 Principles of Optics Diffraction grating Source Diffraction Fringes Diffraction Grating Diffraction Grating Fringes
12 Principles of Optics Moire Fringes Specimen Grating Fringes Master Grating Rotational Mismatch Translational Mismatch
13 Profilometer Profilometer principle A B D C Laser-photodetector combination As the scanning of sample is done the laser spot moves on the photodetector (PSD) because of bending of cantilever over asperities The movement results in differential voltage output from the PSD
14 Profilometer Another technology Sensor Spot size [µm] 1,5 Camera Integrated in-axis camera Vertical resolution [µm] 0,020 Field of view [mm] 0,6x0, 8 Measurement frequency [Hz] 10,000 copyright Solarius Development Inc Stand off [mm] Linearity [%] 2 or 5 <0,08 Laser diode Wavelength [nm] Class I 630
15 Profilometer Another technology Sensor Camera copyright Solarius Development Inc Spot size [µm] Vertical resolution [µm] 2 0,1 Integrated off-axis camera Magnification 200x Home Technology Products Applications Customer Support Company Contact All contents copyright Solarius Development Inc Measurement frequency [Hz] Stand off [mm] Linearity [%] ±0.5 Laser Wavelength [nm] Class II 670
16 Microscope for Measurement of Dimensions Grating used in CD ROM Taking image on CCD camera and processing with precalibration for measurement of MEMS device dimensions Various types of microscopes
17 Limitations of Microscope Q: is it possible to increase the magnification of microscope indefinitely and expect improved resolution?? Minimum resolution possible is comparable with wavelength of light
18 SPM: STM and AFM STM invented in early 80s by Binnig and Rohrer. Real limitations: only used to image conducting materials. Cannot distinguish between atoms of different elements within a compound material.
19 Atomic Force Microscope
20 AFM Image Kriptan- polymer surface characteristics using AFM
21 Conclusions Various optical principles Characterization tools Microscope Ellipsometer Profilometer Various methods of characterization of mechanical properties
22 Grating used in CD ROM Fundamentals of Ellipsometry
23 Fundamentals of Ellipsometry Change in polarization properties after reflection
24 Ellipsometer Laser Detector P Q θ Surface A An ellipsometer measures the changes in the polarization state of light when it is reflected from a sample. If the sample undergoes a change, for example a thin film on the surface changes its thickness, then its reflection properties will also change. Measuring these changes in the reflection properties can allow us to deduce the actual change in the film's thickness.
25 Ellipsometer: Advantages Non destructive character, High sensitivity due to the measurement of the phase of the reflected light, Large measurement range (from fractions of monolayers to micrometers ), The possibilities to control in real time complex processes.
26 Next class AFM technique and details of measurment
27 Next class Polytec Laser Doppler Vibrometer [2]
28 Application of techniques Characterization of Mechanical Properties Properties: E, ν, internal stress etc. Various Techniques Bending test Cantilever Beam Bulge test Resonance method M-Test Nanoindentation
29 Bending Test Cantilever k = 3 Ebt 4 l ( 1 ν 2 ) 3 k is the stiffness, E is the elastic modulus, b is the cantilever width, v is Poisson s ratio, t is thickness, and l is the length of cantilever at the point of contact,
30 Bending Test Fixed-fixed Beam = F = k bending z + k stress z + k stretching z 3 4 Ewπ t 6L 3 3 z bending, stress, and stretching components: Small loads: - bending and stress Large loads: - Stretching 2 wσ 0π t + z + 2L 4 Ewπ t z 3 8L E is the elastic modulus, b is the cantilever width, v is Poisson s ratio, t is thickness, and l is the length of cantilever at the point of contact, 3
31 Bulge Test Pressure on circular membrane p = 4tσ r 2 0 h + 8t 3r 4 E h 1 ν 3
32 Resonance method Vibrating cantilever f 0i = 2 λi t 4πl 2 E 3ρ Where E, ρ, l and t are the Young s modulus, density, length and thickness of the cantilever. λi is the eigen value, where i is an integer that describes the resonance mode number; for the first mode λ =
33 Profilometer Profilometer principle A B D C Laser-photodetector combination As the scanning of sample is done the laser spot moves on the photodetector (PSD) The movement results in differential voltage output from the PSD
Characterization of MEMS Devices
MEMS: Characterization Characterization of MEMS Devices Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay, Recap Characterization of MEMS
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