Characterization of MEMS Devices

Size: px
Start display at page:

Download "Characterization of MEMS Devices"

Transcription

1 MEMS: Characterization Characterization of MEMS Devices Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay,

2 Recap Fabrication of MEMS Conventional VLSI fabrication Nonconventional methods Design and analysis of MEMS Characterization of MEMS

3 Today s Class Why characterization?? Why optics?? Principles of optics useful in characterization Tools for optical characterization Profilometer Microscope Methods for characterization of mechanical properties SPM based tools: STM and AFM

4 Why Characterization? Material properties change at micro-scale, different from bulk properties due to grain boundary effect Successful design/manufacturing of MEMS devices need reliable knowledge of MEMS material properties Verification of design and validation of models proposed Calibration of devices and signals Electronic analysis: noise vs signal Research various new effects: example Biosensor devices

5 Why Optics for Characterization? Noninvasive technique Does not disturb sensitive MEMS device Very high resolutions possible Higher measurement range possible Several optical phenomenon can be made use of

6 Principles of Optics Wave nature of light Interference Wave division Amplitude division Diffraction + Diffr. grating Moire interference Holography

7 Principles of Optics Interference Wave division Amplitude division Beam splitter Young s double slit Reference mirror Michaelsons Interferometer Analysis??

8 Principles of Optics Interference Test device Mach-Zehnder Interferometer Used for laser-doppler vibrometer

9 Polarization Concept of polarization of light

10 Principles of Optics Interference Source Partially Reflecting Lens Mirrors Febry-Parot Interferometer Screen Another method for interference

11 Principles of Optics Diffraction grating Source Diffraction Fringes Diffraction Grating Diffraction Grating Fringes

12 Principles of Optics Moire Fringes Specimen Grating Fringes Master Grating Rotational Mismatch Translational Mismatch

13 Profilometer Profilometer principle A B D C Laser-photodetector combination As the scanning of sample is done the laser spot moves on the photodetector (PSD) because of bending of cantilever over asperities The movement results in differential voltage output from the PSD

14 Profilometer Another technology Sensor Spot size [µm] 1,5 Camera Integrated in-axis camera Vertical resolution [µm] 0,020 Field of view [mm] 0,6x0, 8 Measurement frequency [Hz] 10,000 copyright Solarius Development Inc Stand off [mm] Linearity [%] 2 or 5 <0,08 Laser diode Wavelength [nm] Class I 630

15 Profilometer Another technology Sensor Camera copyright Solarius Development Inc Spot size [µm] Vertical resolution [µm] 2 0,1 Integrated off-axis camera Magnification 200x Home Technology Products Applications Customer Support Company Contact All contents copyright Solarius Development Inc Measurement frequency [Hz] Stand off [mm] Linearity [%] ±0.5 Laser Wavelength [nm] Class II 670

16 Microscope for Measurement of Dimensions Grating used in CD ROM Taking image on CCD camera and processing with precalibration for measurement of MEMS device dimensions Various types of microscopes

17 Limitations of Microscope Q: is it possible to increase the magnification of microscope indefinitely and expect improved resolution?? Minimum resolution possible is comparable with wavelength of light

18 SPM: STM and AFM STM invented in early 80s by Binnig and Rohrer. Real limitations: only used to image conducting materials. Cannot distinguish between atoms of different elements within a compound material.

19 Atomic Force Microscope

20 AFM Image Kriptan- polymer surface characteristics using AFM

21 Conclusions Various optical principles Characterization tools Microscope Ellipsometer Profilometer Various methods of characterization of mechanical properties

22 Grating used in CD ROM Fundamentals of Ellipsometry

23 Fundamentals of Ellipsometry Change in polarization properties after reflection

24 Ellipsometer Laser Detector P Q θ Surface A An ellipsometer measures the changes in the polarization state of light when it is reflected from a sample. If the sample undergoes a change, for example a thin film on the surface changes its thickness, then its reflection properties will also change. Measuring these changes in the reflection properties can allow us to deduce the actual change in the film's thickness.

25 Ellipsometer: Advantages Non destructive character, High sensitivity due to the measurement of the phase of the reflected light, Large measurement range (from fractions of monolayers to micrometers ), The possibilities to control in real time complex processes.

26 Next class AFM technique and details of measurment

27 Next class Polytec Laser Doppler Vibrometer [2]

28 Application of techniques Characterization of Mechanical Properties Properties: E, ν, internal stress etc. Various Techniques Bending test Cantilever Beam Bulge test Resonance method M-Test Nanoindentation

29 Bending Test Cantilever k = 3 Ebt 4 l ( 1 ν 2 ) 3 k is the stiffness, E is the elastic modulus, b is the cantilever width, v is Poisson s ratio, t is thickness, and l is the length of cantilever at the point of contact,

30 Bending Test Fixed-fixed Beam = F = k bending z + k stress z + k stretching z 3 4 Ewπ t 6L 3 3 z bending, stress, and stretching components: Small loads: - bending and stress Large loads: - Stretching 2 wσ 0π t + z + 2L 4 Ewπ t z 3 8L E is the elastic modulus, b is the cantilever width, v is Poisson s ratio, t is thickness, and l is the length of cantilever at the point of contact, 3

31 Bulge Test Pressure on circular membrane p = 4tσ r 2 0 h + 8t 3r 4 E h 1 ν 3

32 Resonance method Vibrating cantilever f 0i = 2 λi t 4πl 2 E 3ρ Where E, ρ, l and t are the Young s modulus, density, length and thickness of the cantilever. λi is the eigen value, where i is an integer that describes the resonance mode number; for the first mode λ =

33 Profilometer Profilometer principle A B D C Laser-photodetector combination As the scanning of sample is done the laser spot moves on the photodetector (PSD) The movement results in differential voltage output from the PSD

Characterization of MEMS Devices

Characterization of MEMS Devices MEMS: Characterization Characterization of MEMS Devices Prasanna S. Gandhi Assistant Professor, Department of Mechanical Engineering, Indian Institute of Technology, Bombay, Recap Characterization of MEMS

More information

MEMS Metrology. Prof. Tianhong Cui ME 8254

MEMS Metrology. Prof. Tianhong Cui ME 8254 MEMS Metrology Prof. Tianhong Cui ME 8254 What is metrology? Metrology It is the science of weights and measures Refers primarily to the measurements of length, weight, time, etc. Mensuration- A branch

More information

Chapter 10. Nanometrology. Oxford University Press All rights reserved.

Chapter 10. Nanometrology. Oxford University Press All rights reserved. Chapter 10 Nanometrology Oxford University Press 2013. All rights reserved. 1 Introduction Nanometrology is the science of measurement at the nanoscale level. Figure illustrates where nanoscale stands

More information

Optics.

Optics. Optics www.optics.rochester.edu/classes/opt100/opt100page.html Course outline Light is a Ray (Geometrical Optics) 1. Nature of light 2. Production and measurement of light 3. Geometrical optics 4. Matrix

More information

Optical Systems Program of Studies Version 1.0 April 2012

Optical Systems Program of Studies Version 1.0 April 2012 Optical Systems Program of Studies Version 1.0 April 2012 Standard1 Essential Understand Optical experimental methodology, data analysis, interpretation, and presentation strategies Essential Understandings:

More information

PS210 - Optical Techniques. Section VI

PS210 - Optical Techniques. Section VI PS210 - Optical Techniques Section VI Section I Light as Waves, Rays and Photons Section II Geometrical Optics & Optical Instrumentation Section III Periodic and Non-Periodic (Aperiodic) Waves Section

More information

Imaging Methods: Scanning Force Microscopy (SFM / AFM)

Imaging Methods: Scanning Force Microscopy (SFM / AFM) Imaging Methods: Scanning Force Microscopy (SFM / AFM) The atomic force microscope (AFM) probes the surface of a sample with a sharp tip, a couple of microns long and often less than 100 Å in diameter.

More information

Strain Analysis by Digital Shearography on an Aluminium Plate with a Geometric Defect under Thermal Loading

Strain Analysis by Digital Shearography on an Aluminium Plate with a Geometric Defect under Thermal Loading Journal of Stress Analysis Vol. 1, No. 1, Spring Summer 2016 Strain Analysis by Digital Shearography on an Aluminium Plate with a Geometric Defect under Thermal Loading R. Moharrami, M. Taghiloo, A. Darud

More information

Chapter 12. Nanometrology. Oxford University Press All rights reserved.

Chapter 12. Nanometrology. Oxford University Press All rights reserved. Chapter 12 Nanometrology Introduction Nanometrology is the science of measurement at the nanoscale level. Figure illustrates where nanoscale stands in relation to a meter and sub divisions of meter. Nanometrology

More information

Piezoelectric Actuator for Micro Robot Used in Nanosatellite

Piezoelectric Actuator for Micro Robot Used in Nanosatellite Piezoelectric Actuator for Micro Robot Used in Nanosatellite R Bansevicius, S Navickaite, V Jurenas and A Bubulis PIEZOELECTRIC ACTUATOR FOR MICRO ROBOT USED IN NANOSATELLITE. R Bansevicius 1, S Navickaite,

More information

Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System Design

Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System Design Tamkang Journal of Science and Engineering, Vol. 12, No. 4, pp. 399 407 (2009) 399 Integrating MEMS Electro-Static Driven Micro-Probe and Laser Doppler Vibrometer for Non-Contact Vibration Mode SPM System

More information

DEVELOPMENT OF MEASURING SYSTEM FOR STRESS BY MEANS OF IMAGE PLATE FOR LABORATORY X-RAY EXPERIMENT

DEVELOPMENT OF MEASURING SYSTEM FOR STRESS BY MEANS OF IMAGE PLATE FOR LABORATORY X-RAY EXPERIMENT Copyright JCPDS - International Centre for Diffraction Data 003, Advances in X-ray Analysis, Volume 46. 6 DEVELOPMENT OF MEASURING SYSTEM FOR STRESS BY MEANS OF IMAGE PLATE FOR LABORATORY X-RAY EXPERIMENT

More information

Contents. What is AFM? History Basic principles and devices Operating modes Application areas Advantages and disadvantages

Contents. What is AFM? History Basic principles and devices Operating modes Application areas Advantages and disadvantages Contents What is AFM? History Basic principles and devices Operating modes Application areas Advantages and disadvantages Figure1: 2004 Seth Copen Goldstein What is AFM? A type of Scanning Probe Microscopy

More information

Mechanical characterization of single crystal BaTiO 3 film and insitu. XRD observation of microstructure change due to

Mechanical characterization of single crystal BaTiO 3 film and insitu. XRD observation of microstructure change due to 76 Chapter 4 Mechanical characterization of single crystal BaTiO 3 film and insitu XRD observation of microstructure change due to mechanical loading 4.1 Introduction Ferroelectric materials have many

More information

EE 527 MICROFABRICATION. Lecture 5 Tai-Chang Chen University of Washington

EE 527 MICROFABRICATION. Lecture 5 Tai-Chang Chen University of Washington EE 527 MICROFABRICATION Lecture 5 Tai-Chang Chen University of Washington MICROSCOPY AND VISUALIZATION Electron microscope, transmission electron microscope Resolution: atomic imaging Use: lattice spacing.

More information

Ecole Franco-Roumaine : Magnétisme des systèmes nanoscopiques et structures hybrides - Brasov, Modern Analytical Microscopic Tools

Ecole Franco-Roumaine : Magnétisme des systèmes nanoscopiques et structures hybrides - Brasov, Modern Analytical Microscopic Tools 1. Introduction Solid Surfaces Analysis Group, Institute of Physics, Chemnitz University of Technology, Germany 2. Limitations of Conventional Optical Microscopy 3. Electron Microscopies Transmission Electron

More information

MS482 Materials Characterization ( 재료분석 ) Lecture Note 11: Scanning Probe Microscopy. Byungha Shin Dept. of MSE, KAIST

MS482 Materials Characterization ( 재료분석 ) Lecture Note 11: Scanning Probe Microscopy. Byungha Shin Dept. of MSE, KAIST 2015 Fall Semester MS482 Materials Characterization ( 재료분석 ) Lecture Note 11: Scanning Probe Microscopy Byungha Shin Dept. of MSE, KAIST 1 Course Information Syllabus 1. Overview of various characterization

More information

Michelson Interferometer. crucial role in Einstein s development of the Special Theory of Relativity.

Michelson Interferometer. crucial role in Einstein s development of the Special Theory of Relativity. Michelson Interferometer The interferometer Michelson experiment Interferometer of Michelson and Morley played 0 a crucial role in Einstein s development of the Special Theory of Relativity. Michelson

More information

Scanning Probe Microscopy. Amanda MacMillan, Emmy Gebremichael, & John Shamblin Chem 243: Instrumental Analysis Dr. Robert Corn March 10, 2010

Scanning Probe Microscopy. Amanda MacMillan, Emmy Gebremichael, & John Shamblin Chem 243: Instrumental Analysis Dr. Robert Corn March 10, 2010 Scanning Probe Microscopy Amanda MacMillan, Emmy Gebremichael, & John Shamblin Chem 243: Instrumental Analysis Dr. Robert Corn March 10, 2010 Scanning Probe Microscopy High-Resolution Surface Analysis

More information

CHAPTER 4 DESIGN AND ANALYSIS OF CANTILEVER BEAM ELECTROSTATIC ACTUATORS

CHAPTER 4 DESIGN AND ANALYSIS OF CANTILEVER BEAM ELECTROSTATIC ACTUATORS 61 CHAPTER 4 DESIGN AND ANALYSIS OF CANTILEVER BEAM ELECTROSTATIC ACTUATORS 4.1 INTRODUCTION The analysis of cantilever beams of small dimensions taking into the effect of fringing fields is studied and

More information

Instrumentation and Operation

Instrumentation and Operation Instrumentation and Operation 1 STM Instrumentation COMPONENTS sharp metal tip scanning system and control electronics feedback electronics (keeps tunneling current constant) image processing system data

More information

MSE 321 Structural Characterization

MSE 321 Structural Characterization Auger Spectroscopy Auger Electron Spectroscopy (AES) Scanning Auger Microscopy (SAM) Incident Electron Ejected Electron Auger Electron Initial State Intermediate State Final State Physical Electronics

More information

Electricity & Optics

Electricity & Optics Physics 24100 Electricity & Optics Lecture 26 Chapter 33 sec. 1-4 Fall 2017 Semester Professor Koltick Interference of Light Interference phenomena are a consequence of the wave-like nature of light Electric

More information

Lecture 9: Introduction to Diffraction of Light

Lecture 9: Introduction to Diffraction of Light Lecture 9: Introduction to Diffraction of Light Lecture aims to explain: 1. Diffraction of waves in everyday life and applications 2. Interference of two one dimensional electromagnetic waves 3. Typical

More information

Measurements in Optics for Civil Engineers

Measurements in Optics for Civil Engineers Measurements in Optics for Civil Engineers I. FOCAL LENGTH OF LENSES The behavior of simplest optical devices can be described by the method of geometrical optics. For convex or converging and concave

More information

And Manipulation by Scanning Probe Microscope

And Manipulation by Scanning Probe Microscope Basic 15 Nanometer Scale Measurement And Manipulation by Scanning Probe Microscope Prof. K. Fukuzawa Dept. of Micro/Nano Systems Engineering Nagoya University I. Basics of scanning probe microscope Basic

More information

STM: Scanning Tunneling Microscope

STM: Scanning Tunneling Microscope STM: Scanning Tunneling Microscope Basic idea STM working principle Schematic representation of the sample-tip tunnel barrier Assume tip and sample described by two infinite plate electrodes Φ t +Φ s =

More information

Determining the Elastic Modulus and Hardness of an Ultrathin Film on a Substrate Using Nanoindentation

Determining the Elastic Modulus and Hardness of an Ultrathin Film on a Substrate Using Nanoindentation Determining the Elastic Modulus and Hardness of an Ultrathin Film on a Substrate Using Nanoindentation The Harvard community has made this article openly available. Please share how this access benefits

More information

Wave Nature of Matter

Wave Nature of Matter Wave Nature of Matter Wave-Particle Duality de Broglie proposed that particles with momentum could have an associated wavelength (converse of photons having momentum) de Broglie wavelength h λ = p or p

More information

Gratings in Electrooptic Polymer Devices

Gratings in Electrooptic Polymer Devices Gratings in Electrooptic Polymer Devices Venkata N.P.Sivashankar 1, Edward M. McKenna 2 and Alan R.Mickelson 3 Department of Electrical and Computer Engineering, University of Colorado at Boulder, Boulder,

More information

The aims of this experiment were to obtain values for Young s modulus and Poisson s ratio for

The aims of this experiment were to obtain values for Young s modulus and Poisson s ratio for The Cornu Method Nikki Truss 09369481 Abstract: The aims of this experiment were to obtain values for Young s modulus and Poisson s ratio for Perspex using the Cornu Method. A value of was found for Young

More information

Chapter 3. Experimental Techniques. 3.1 Optical bending beam method

Chapter 3. Experimental Techniques. 3.1 Optical bending beam method Chapter 3 Experimental Techniques Stress measurements using optical bending beam method can be applied for UHV system as well as in air. However, the magnetic properties of ultra thin films are better

More information

Lecture 11: Introduction to diffraction of light

Lecture 11: Introduction to diffraction of light Lecture 11: Introduction to diffraction of light Diffraction of waves in everyday life and applications Diffraction in everyday life Diffraction in applications Spectroscopy: physics, chemistry, medicine,

More information

Chapter 10. Interference of Light

Chapter 10. Interference of Light Chapter 10. Interference of Light Last Lecture Wave equations Maxwell equations and EM waves Superposition of waves This Lecture Two-Beam Interference Young s Double Slit Experiment Virtual Sources Newton

More information

Particle-Wave Duality and Which-Way Information

Particle-Wave Duality and Which-Way Information Particle-Wave Duality and Which-Way Information Graham Jensen and Samantha To University of Rochester, Rochester, NY 14627, U.S. September 25, 2013 Abstract Samantha To This experiment aimed to support

More information

SOLID STATE PHYSICS PHY F341. Dr. Manjuladevi.V Associate Professor Department of Physics BITS Pilani

SOLID STATE PHYSICS PHY F341. Dr. Manjuladevi.V Associate Professor Department of Physics BITS Pilani SOLID STATE PHYSICS PHY F341 Dr. Manjuladevi.V Associate Professor Department of Physics BITS Pilani 333031 manjula@bits-pilani.ac.in Characterization techniques SEM AFM STM BAM Outline What can we use

More information

Outline. 4 Mechanical Sensors Introduction General Mechanical properties Piezoresistivity Piezoresistive Sensors Capacitive sensors Applications

Outline. 4 Mechanical Sensors Introduction General Mechanical properties Piezoresistivity Piezoresistive Sensors Capacitive sensors Applications Sensor devices Outline 4 Mechanical Sensors Introduction General Mechanical properties Piezoresistivity Piezoresistive Sensors Capacitive sensors Applications Introduction Two Major classes of mechanical

More information

Physics 30: Chapter 5 Exam Wave Nature of Light

Physics 30: Chapter 5 Exam Wave Nature of Light Physics 30: Chapter 5 Exam Wave Nature of Light Name: Date: Mark: /33 Numeric Response. Place your answers to the numeric response questions, with units, in the blanks at the side of the page. (1 mark

More information

Design and Analysis of Various Microcantilever Shapes for MEMS Based Sensing

Design and Analysis of Various Microcantilever Shapes for MEMS Based Sensing ScieTech 014 Journal of Physics: Conference Series 495 (014) 01045 doi:10.1088/174-6596/495/1/01045 Design and Analysis of Various Microcantilever Shapes for MEMS Based Sensing H. F. Hawari, Y. Wahab,

More information

CHARACTERIZATION of NANOMATERIALS KHP

CHARACTERIZATION of NANOMATERIALS KHP CHARACTERIZATION of NANOMATERIALS Overview of the most common nanocharacterization techniques MAIN CHARACTERIZATION TECHNIQUES: 1.Transmission Electron Microscope (TEM) 2. Scanning Electron Microscope

More information

Edward S. Rogers Sr. Department of Electrical and Computer Engineering. ECE426F Optical Engineering. Final Exam. Dec. 17, 2003.

Edward S. Rogers Sr. Department of Electrical and Computer Engineering. ECE426F Optical Engineering. Final Exam. Dec. 17, 2003. Edward S. Rogers Sr. Department of Electrical and Computer Engineering ECE426F Optical Engineering Final Exam Dec. 17, 2003 Exam Type: D (Close-book + one 2-sided aid sheet + a non-programmable calculator)

More information

Waves Part III Electromagnetic waves

Waves Part III Electromagnetic waves Waves Part III Electromagnetic waves Electromagnetic (light) waves Transverse waves Transport energy (and momentum) Can travel through vacuum (!) and certain solids, liquids and gases Do not transport

More information

A beam of coherent monochromatic light from a distant galaxy is used in an optics experiment on Earth.

A beam of coherent monochromatic light from a distant galaxy is used in an optics experiment on Earth. Waves_P2 [152 marks] A beam of coherent monochromatic light from a distant galaxy is used in an optics experiment on Earth. The beam is incident normally on a double slit. The distance between the slits

More information

Mechanical Characterization of Released Thin Films by Contact

Mechanical Characterization of Released Thin Films by Contact 15 Chapter 2 Mechanical Characterization of Released Thin Films by Contact Loading 2.1 Introduction The design of reliable and functional micro/nano electro mechanical systems (MEMS/NEMS) relies on the

More information

Exam 3--PHYS 202--S10

Exam 3--PHYS 202--S10 ame: Exam 3--PHYS 202--S0 Multiple Choice Identify the choice that best completes the statement or answers the question A person uses a convex lens that has a focal length of 25 cm to inspect a gem The

More information

OPTI510R: Photonics. Khanh Kieu College of Optical Sciences, University of Arizona Meinel building R.626

OPTI510R: Photonics. Khanh Kieu College of Optical Sciences, University of Arizona Meinel building R.626 OPTI510R: Photonics Khanh Kieu College of Optical Sciences, University of Arizona kkieu@optics.arizona.edu Meinel building R.626 Important announcements Homework #1 is due. Homework #2 is assigned, due

More information

Fourier transform infrared spectroscopy (FTIR) is a method used to obtain an infrared

Fourier transform infrared spectroscopy (FTIR) is a method used to obtain an infrared Fourier Transform Infrared Spectroscopy: Low Density Polyethylene, High Density Polyethylene, Polypropylene and Polystyrene Eman Mousa Alhajji North Carolina State University Department of Materials Science

More information

PRINCIPLES OF PHYSICAL OPTICS

PRINCIPLES OF PHYSICAL OPTICS PRINCIPLES OF PHYSICAL OPTICS C. A. Bennett University of North Carolina At Asheville WILEY- INTERSCIENCE A JOHN WILEY & SONS, INC., PUBLICATION CONTENTS Preface 1 The Physics of Waves 1 1.1 Introduction

More information

Transmission Electron Microscopy

Transmission Electron Microscopy L. Reimer H. Kohl Transmission Electron Microscopy Physics of Image Formation Fifth Edition el Springer Contents 1 Introduction... 1 1.1 Transmission Electron Microscopy... 1 1.1.1 Conventional Transmission

More information

Cantilever enhanced tunable diode laser photoacoustic spectroscopy in gas purity measurement case study: acetylene in ethylene

Cantilever enhanced tunable diode laser photoacoustic spectroscopy in gas purity measurement case study: acetylene in ethylene Cantilever enhanced tunable diode laser photoacoustic spectroscopy in gas purity measurement case study: acetylene in ethylene Juho Uotila, Jussi Raittila, Ismo Kauppinen ¹Gasera Ltd., Tykistökatu 4, 20520

More information

Nanomechanics Measurements and Standards at NIST

Nanomechanics Measurements and Standards at NIST Nanomechanics Measurements and Standards at NIST Robert F. Cook Deputy Chief, Ceramics Division Leader, Nanomechanical Properties Group robert.cook@nist.gov NIST Mission Promote U.S. innovation and industrial

More information

Introduction to Microeletromechanical Systems (MEMS) Lecture 9 Topics. MEMS Overview

Introduction to Microeletromechanical Systems (MEMS) Lecture 9 Topics. MEMS Overview Introduction to Microeletromechanical Systems (MEMS) Lecture 9 Topics MicroOptoElectroMechanical Systems (MOEMS) Grating Light Valves Corner Cube Reflector (CCR) MEMS Light Modulator Optical Switch Micromirrors

More information

Chapter 2 Correlation Force Spectroscopy

Chapter 2 Correlation Force Spectroscopy Chapter 2 Correlation Force Spectroscopy Correlation Force Spectroscopy: Rationale In principle, the main advantage of correlation force spectroscopy (CFS) over onecantilever atomic force microscopy (AFM)

More information

Supplementary Information for. Effect of Ag nanoparticle concentration on the electrical and

Supplementary Information for. Effect of Ag nanoparticle concentration on the electrical and Supplementary Information for Effect of Ag nanoparticle concentration on the electrical and ferroelectric properties of Ag/P(VDF-TrFE) composite films Haemin Paik 1,2, Yoon-Young Choi 3, Seungbum Hong

More information

Introduction to Scanning Probe Microscopy Zhe Fei

Introduction to Scanning Probe Microscopy Zhe Fei Introduction to Scanning Probe Microscopy Zhe Fei Phys 590B, Apr. 2019 1 Outline Part 1 SPM Overview Part 2 Scanning tunneling microscopy Part 3 Atomic force microscopy Part 4 Electric & Magnetic force

More information

High Temperature Strain Measurements Using Fiber Optic Sensors

High Temperature Strain Measurements Using Fiber Optic Sensors High Temperature Strain Measurements Using Fiber Optic Sensors Paul J. Gloeckner, Ph.D. Cummins, Inc. 1900 McKinley Ave. Columbus, IN 47201 ABSTRACT Strain gage measurements at elevated temperatures (>

More information

Optics, Light and Lasers

Optics, Light and Lasers Dieter Meschede Optics, Light and Lasers The Practical Approach to Modern Aspects of Photonics and Laser Physics Second, Revised and Enlarged Edition BICENTENNIAL.... n 4 '':- t' 1 8 0 7 $W1LEY 2007 tri

More information

How Does a Microcantilever Work?

How Does a Microcantilever Work? How Does a Cantilever Work? Participant Guide Description and Estimated Time to Complete The microcantilever is a widely used component in microsystems devices or microelectromechanical systems (MEMS).

More information

Dept. of Electrical & Computer Engineering, Dept. of Mechanical Engineering University of Bridgeport, Bridgeport, CT /08/2015

Dept. of Electrical & Computer Engineering, Dept. of Mechanical Engineering University of Bridgeport, Bridgeport, CT /08/2015 Design and Analysis of Three DOF Piezoelectric Vibration Energy Harvester Ravi Teja Purra Reddy, Xingguo Xiong, Junling Hu Dept. of Electrical & Computer Engineering, Dept. of Mechanical Engineering University

More information

Physics 104 Exam 3 April 24, Name ID # Section # TA Name

Physics 104 Exam 3 April 24, Name ID # Section # TA Name Physics 104 Exam 3 April 24, 2003 Name ID # Section # TA Name Fill in your name, student ID # (not your social security #), and section # (under ABC of special codes) on the Scantron sheet. Fill in the

More information

3/9/2011. Outline Chapter 7 Waves Water Waves Water Waves. Water waves are really circular. They are an example of Mechanical waves.

3/9/2011. Outline Chapter 7 Waves Water Waves Water Waves. Water waves are really circular. They are an example of Mechanical waves. Outline Chapter 7 Waves 7-1. Water Waves 7-2. Transverse and Longitudinal Waves 7-3. Describing Waves 7-4. Standing Waves 7-5. Sound 7-6. Doppler Effect 7-7. Musical Sounds 7-8. Electromagnetic Waves 7-9.

More information

GRATING CLASSIFICATION

GRATING CLASSIFICATION GRATING CLASSIFICATION SURFACE-RELIEF GRATING TYPES GRATING CLASSIFICATION Transmission or Reflection Classification based on Regime DIFFRACTION BY GRATINGS Acousto-Optics Diffractive Optics Integrated

More information

Module 26: Atomic Force Microscopy. Lecture 40: Atomic Force Microscopy 3: Additional Modes of AFM

Module 26: Atomic Force Microscopy. Lecture 40: Atomic Force Microscopy 3: Additional Modes of AFM Module 26: Atomic Force Microscopy Lecture 40: Atomic Force Microscopy 3: Additional Modes of AFM 1 The AFM apart from generating the information about the topography of the sample features can be used

More information

TOPIC: LIGHT, ELECTROMAGNETIC WAVES, 2D AND 3D WAVEFRONTS

TOPIC: LIGHT, ELECTROMAGNETIC WAVES, 2D AND 3D WAVEFRONTS TOPIC: LIGHT, ELECTROMAGNETIC WAVES, 2D AND 3D WAVEFRONTS Learner Note: You need to know your definitions very well. You need to know the difference between refraction, reflection and diffraction. These

More information

PHYSICS PRACTICALS MANUAL GE6163 PHYSICS LABORATORY I

PHYSICS PRACTICALS MANUAL GE6163 PHYSICS LABORATORY I PHYSICS PRACTICALS MANUAL GE6163 PHYSICS LABORATORY I (First semester B.E/B.Tech. students for the Academic Year 2016-2017) CONTENTS S. No EXPERIMENTS PAGE NO. 1 a) Determination of wavelength and particle

More information

Infrastructure of Thin Films Laboratory in Institute of Molecular Physics Polish Academy of Sciences

Infrastructure of Thin Films Laboratory in Institute of Molecular Physics Polish Academy of Sciences Infrastructure of Thin Films Laboratory in Institute of Molecular Physics Polish Academy of Sciences Outline Sample preparation Magnetron sputtering Ion-beam sputtering Pulsed laser deposition Electron-beam

More information

Outline of College Physics OpenStax Book

Outline of College Physics OpenStax Book Outline of College Physics OpenStax Book Taken from the online version of the book Dec. 27, 2017 18. Electric Charge and Electric Field 18.1. Static Electricity and Charge: Conservation of Charge Define

More information

2008 International ANSYS Conference

2008 International ANSYS Conference 2008 International ANSYS Conference Nonlinear Piezoelectric Analysis with ANSYS-MATLAB/Simulink coupling Masahiro Matsumoto Cybernet Systems Co., Ltd 2008 ANSYS, Inc. All rights reserved. 1 ANSYS, Inc.

More information

Kavli Workshop for Journalists. June 13th, CNF Cleanroom Activities

Kavli Workshop for Journalists. June 13th, CNF Cleanroom Activities Kavli Workshop for Journalists June 13th, 2007 CNF Cleanroom Activities Seeing nm-sized Objects with an SEM Lab experience: Scanning Electron Microscopy Equipment: Zeiss Supra 55VP Scanning electron microscopes

More information

Design And Analysis of Microcantilevers With Various Shapes Using COMSOL Multiphysics Software

Design And Analysis of Microcantilevers With Various Shapes Using COMSOL Multiphysics Software Design And Analysis of Microcantilevers With Various Shapes Using COMSOL Multiphysics Software V. Mounika Reddy 1, G.V.Sunil Kumar 2 1,2 Department of Electronics and Instrumentation Engineering, Sree

More information

Experiment 6: Interferometers

Experiment 6: Interferometers Experiment 6: Interferometers Nate Saffold nas2173@columbia.edu Office Hour: Mondays, 5:30PM-6:30PM @ Pupin 1216 INTRO TO EXPERIMENTAL PHYS-LAB 1493/1494/2699 NOTE: No labs and no lecture next week! Outline

More information

Metrology and Sensing

Metrology and Sensing Metrology and Sensing Lecture 5: Interferometry I 06--09 Herbert Gross Winter term 06 www.iap.uni-jena.de Preliminary Schedule No Date Subject Detailed Content 8.0. Introduction Introduction, optical measurements,

More information

Lecture 4 Scanning Probe Microscopy (SPM)

Lecture 4 Scanning Probe Microscopy (SPM) Lecture 4 Scanning Probe Microscopy (SPM) General components of SPM; Tip --- the probe; Cantilever --- the indicator of the tip; Tip-sample interaction --- the feedback system; Scanner --- piezoelectric

More information

Interference- Michelson Interferometer. Interference lecture by Dr. T.Vishwam

Interference- Michelson Interferometer. Interference lecture by Dr. T.Vishwam Interference- Michelson Interferometer Interference lecture by Dr. T.Vishwam * Measurement of the coherence length of a spectral line * Measurement of thickness of thin transparent flakes * Measurement

More information

From nanophysics research labs to cell phones. Dr. András Halbritter Department of Physics associate professor

From nanophysics research labs to cell phones. Dr. András Halbritter Department of Physics associate professor From nanophysics research labs to cell phones Dr. András Halbritter Department of Physics associate professor Curriculum Vitae Birth: 1976. High-school graduation: 1994. Master degree: 1999. PhD: 2003.

More information

Chapter 10: Wave Properties of Particles

Chapter 10: Wave Properties of Particles Chapter 10: Wave Properties of Particles Particles such as electrons may demonstrate wave properties under certain conditions. The electron microscope uses these properties to produce magnified images

More information

Chemistry Instrumental Analysis Lecture 15. Chem 4631

Chemistry Instrumental Analysis Lecture 15. Chem 4631 Chemistry 4631 Instrumental Analysis Lecture 15 IR Instruments Types of Instrumentation Dispersive Spectrophotometers (gratings) Fourier transform spectrometers (interferometer) Single beam Double beam

More information

Michelson Interferometer

Michelson Interferometer Michelson Interferometer Objective Determination of the wave length of the light of the helium-neon laser by means of Michelson interferometer subsectionprinciple and Task Light is made to produce interference

More information

Application of electrostatic force microscopy in nanosystem diagnostics

Application of electrostatic force microscopy in nanosystem diagnostics Materials Science, Vol., No. 3, 003 Application of electrostatic force microscopy in nanosystem diagnostics TEODOR P. GOTSZALK *, PIOTR GRABIEC, IVO W. RANGELOW 3 Fulty of Microsystem Electronics and Photonics,

More information

Lab 2: Single Photon Interference

Lab 2: Single Photon Interference Lab 2: Single Photon Interference Joshua S. Geller Dept. of Physics and Astronomy, University of Rochester, Rochester, NY 14627 Abstract In this lab we exhibit the wave-particle duality of light in the

More information

Part 1 - Basic Interferometers for Optical Testing

Part 1 - Basic Interferometers for Optical Testing Part 1 - Basic Interferometers for Optical Testing Two Beam Interference Fizeau and Twyman-Green interferometers Basic techniques for testing flat and spherical surfaces Mach-Zehnder Zehnder,, Scatterplate

More information

Metrology and Sensing

Metrology and Sensing Metrology and Sensing Lecture 5: Interferometry I 08--6 Herbert Gross Winter term 08 www.iap.uni-jena.de Schedule Optical Metrology and Sensing 08 No Date Subject Detailed Content 6.0. Introduction Introduction,

More information

Combining High Resolution Optical and Scanning Probe Microscopy

Combining High Resolution Optical and Scanning Probe Microscopy Combining High Resolution Optical and Scanning Probe Microscopy Fernando Vargas WITec, Ulm, Germany www.witec.de Company Background Foundation 1997 by O. Hollricher, J. Koenen, K. Weishaupt WITec = Wissenschaftliche

More information

PH 222-3A Spring 2010

PH 222-3A Spring 2010 PH -3A Spring 010 Interference Lecture 6-7 Chapter 35 (Halliday/Resnick/Walker, Fundamentals of Physics 8 th edition) 1 Chapter 35 Interference The concept of optical interference is critical to understanding

More information

Exam tomorrow on Chapter 15, 16, and 17 (Oscilla;ons and Waves 1 &2)

Exam tomorrow on Chapter 15, 16, and 17 (Oscilla;ons and Waves 1 &2) Exam tomorrow on Chapter 15, 16, and 17 (Oscilla;ons and Waves 1 &2) What to study: Quiz 6 Homework problems for Chapters 15 & 16 Material indicated in the following review slides Other Specific things:

More information

1106. Numerical investigation of dynamical properties of vibroactive pad during hot imprint process

1106. Numerical investigation of dynamical properties of vibroactive pad during hot imprint process 1106. Numerical investigation of dynamical properties of vibroactive pad during hot imprint process B. Narijauskaitė 1, A. Palevičius 2, G. Janušas 3, R. Šakalys 4 International Studies Centre, Kaunas

More information

LC circuit: Energy stored. This lecture reviews some but not all of the material that will be on the final exam that covers in Chapters

LC circuit: Energy stored. This lecture reviews some but not all of the material that will be on the final exam that covers in Chapters Disclaimer: Chapter 29 Alternating-Current Circuits (1) This lecture reviews some but not all of the material that will be on the final exam that covers in Chapters 29-33. LC circuit: Energy stored LC

More information

New concept of a 3D-probing system for micro-components

New concept of a 3D-probing system for micro-components Research Collection Journal Article New concept of a 3D-probing system for micro-components Author(s): Liebrich, Thomas; Kanpp, W. Publication Date: 2010 Permanent Link: https://doi.org/10.3929/ethz-a-006071031

More information

Nano-Lithography. Edited by Stefan Landis

Nano-Lithography. Edited by Stefan Landis Nano-Lithography Edited by Stefan Landis IST^ m WILEY Table of Contents Foreword Jörge DE SOUSA NORONHA Introduction Michel BRILLOUET xi xvii Chapter 1. X-ray Lithography: Fundamentals and Applications

More information

The EYE. Physics 1502: Lecture 32 Today s Agenda. Lecture 4. Announcements: Optics. Midterm 2: graded after Thanks Giving

The EYE. Physics 1502: Lecture 32 Today s Agenda. Lecture 4. Announcements: Optics. Midterm 2: graded after Thanks Giving Physics 1502: Lecture 32 Today s Agenda Announcements: Midterm 2: graded after Thanks Giving Homework 09: Friday December 4 Optics Eye interference The EYE ~f o objective I 2 L I 1 ~f e eyepiece 1 2 Compound

More information

1. Waves and Particles 2. Interference of Waves 3. Wave Nature of Light

1. Waves and Particles 2. Interference of Waves 3. Wave Nature of Light 1. Waves and Particles 2. Interference of Waves 3. Wave Nature of Light 1. Double-Slit Eperiment reading: Chapter 22 2. Single-Slit Diffraction reading: Chapter 22 3. Diffraction Grating reading: Chapter

More information

Downloaded from

Downloaded from Question 10.1: Monochromatic light of wavelength 589 nm is incident from air on a water surface. What are the wavelength, frequency and speed of (a) reflected, and (b) refracted light? Refractive index

More information

iprom Optical Interferometry Prof. Dr. -Ing. Rainer Tutsch Institut für Produktionsmesstechnik IPROM Technische Universität Braunschweig

iprom Optical Interferometry Prof. Dr. -Ing. Rainer Tutsch Institut für Produktionsmesstechnik IPROM Technische Universität Braunschweig Optical Interferometry Prof. Dr. -Ing. Rainer Tutsch Institut für Produktionsmesstechnik IPROM Technische Universität Braunschweig Frontiers of Metrology April 1, 01 I P NSTITUT FÜR RODUKTIONSMESSTECHNIK

More information

CHM 424 EXAM 2 - COVER PAGE FALL

CHM 424 EXAM 2 - COVER PAGE FALL CHM 44 EXAM - COVER PAGE FALL 006 There are seven numbered pages with five questions. Answer the questions on the exam. Exams done in ink are eligible for regrade, those done in pencil will not be regraded.

More information

Scanning Tunneling Microscopy

Scanning Tunneling Microscopy Scanning Tunneling Microscopy References: 1. G. Binnig, H. Rohrer, C. Gerber, and Weibel, Phys. Rev. Lett. 49, 57 (1982); and ibid 50, 120 (1983). 2. J. Chen, Introduction to Scanning Tunneling Microscopy,

More information

INDIAN INSTITUTE OF TECHNOLOGY ROORKEE NPTEL NPTEL ONLINE CERTIFICATION COURSE. Biomedical Nanotechnology. Lec-05 Characterisation of Nanoparticles

INDIAN INSTITUTE OF TECHNOLOGY ROORKEE NPTEL NPTEL ONLINE CERTIFICATION COURSE. Biomedical Nanotechnology. Lec-05 Characterisation of Nanoparticles INDIAN INSTITUTE OF TECHNOLOGY ROORKEE NPTEL NPTEL ONLINE CERTIFICATION COURSE Biomedical Nanotechnology Lec-05 Characterisation of Nanoparticles Dr. P. Gopinath Department of Biotechnology Indian Institute

More information

Spectroscopic Instruments

Spectroscopic Instruments Spectroscopic Instruments 95 Spectroscopic Instruments by division of amplitude Mach-Zehnder (division of amplitude) Michelson Fringe localisation LIGO Fabry-Perot (FPI) Multi-layer coatings 96 Mach-Zehnder

More information

CHAPTER 5 FIXED GUIDED BEAM ANALYSIS

CHAPTER 5 FIXED GUIDED BEAM ANALYSIS 77 CHAPTER 5 FIXED GUIDED BEAM ANALYSIS 5.1 INTRODUCTION Fixed guided clamped and cantilever beams have been designed and analyzed using ANSYS and their performance were calculated. Maximum deflection

More information

Some properties of waves: Huygens principle Superposition Coherence Interference Young s double-slit experiment Thin-film interference

Some properties of waves: Huygens principle Superposition Coherence Interference Young s double-slit experiment Thin-film interference Some properties of waves: Huygens principle Superposition Coherence Interference Young s double-slit experiment Thin-film interference Phys 2435: Chap. 35, Pg 1 Geometrical Optics Assumption: the dimensions

More information

SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]

SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM] G01Q SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM] Scanning probes, i.e. devices having at least a tip of nanometre sized dimensions

More information