RESEARCHES FOR THE DECREASE OF THE FRICTIONS IN MECHATRONIC MICROSYSTEMS. GRANT IDEI: ID_607 Contract 381/

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1 RESEARCHES FOR THE DECREASE OF THE FRICTIONS IN MECHATRONIC MICROSYSTEMS GRANT IDEI: ID_607 Contract 381/ Director of the grant: Prof. Dr. Ing. Dumitru N.Olaru Members: Conf. Dr. Ing. Gheorghe Prisacaru Sl. Dr. Ing. Gelu Ianus Ing. Ciprian Stamate Doctorand Ing. Puiu George Constantin - Doctorand

2 MEMS class I- Fixed elements MEMS class II- Mobile elements without contacts and friction MEMS- class III With mobile elements and sticktion phenomena MEMS class IV With mobile elements having direct contacts with friction, adherence. and wear (microtribology problems): micromotors, microgears, microturbines, microguides, etc.

3 The diminution of friction in microsystems has beneficial effects, at least on the following directions: 1. The lowest consume of energy and thus the usage of some autonomous energy microsources with dimensions as little as possible (microbatteries);.the avoidance of blocking at micro interaction level; 3.The decreasing of stick-slip phenomena with the growing work precision in microsystems.

4 OBJECTIVES 007 Objectiv nr.1 Design of the experimental researches to determine the limits of dimensions for adherence and capillary effects. Objectiv nr. Acquisition of the equipments, softs, materials. 008 Objectiv 1. Acquisition of the equipments. Objectiv. Experimental researches to determine the limits of dimensions for adherence and capillary effects. Objectiv 3. Elaboration of the complex analytical models to evaluate the friction forces and moments in sliding and rolling microtribosystems 009 Objectiv 1. Development of the new analytical models for study of the friction processes in the microsystems with microrolling tribosystems ( microbearings, microguides). Objectiv. Aquisition of the materials, equipments, soft. Objectiv 3. Experimental validation of the models 010.Objectiv 1. New solution to reduce the friction in microsystems based on the rolling friction.. Objectiv. Experimental validations.objectiv 3. Realisation of the book: FRICTION IN THE MICROSYSTEMS

5 Most important acquisitions MICROTRIBOMETER CETR - UMT M and accessories, soft Pin on disc friction and wear tests with 3 bidirectional forces sensors: - 0,1-10mN, with sensibility of 1μN; mN, with sensibility of 50μN; - 0, - 10N, with sensibility of 1mN Termo-Higro-Barometer COMETER, model D4141 and accessories, soft Record of the temperature, pressure and humidity with connection on PC by USB; Computer, scanner, soft, printer, silicon wafers, materials.

6 007 CONFERENCES International Conference on Tribology ROTRIB 07 Bucuresti, D.N. Olaru, Gh. Prisăcaru, P. Lorenz, Friction in linear rolling systems for microactuators, RO-084, Proc. of 10th International Conference on Tribology, ROTRIB 07, Nov. 8-10, Bucharest, 007, Ed. Politehnica Press, ISBN ; C. Stamate, D.N. Olaru, Experimental determinations of a water meniscus between a steel ball and a glace surface, RO-078, Proc.of 10th International Conference on Tribology, ROTRIB 07, Nov. 8-10, Bucharest, 007, Ed. Politehnica Press, ISBN ; G. Ianus, D.N. Olaru, P. Lorenz, Adhesion in the microsystems, RO-096, Proc. of 10th International Conference on Tribology,ROTRIB 07, Nov. 8-10, Bucharest, 007, Ed. Politehnica Press, ISBN ; G.V. Puiu, D.N. Olaru,V. Puiu Friction torque and efficiency in ball screw systems, RO-083, Proc. of 10th International Conference on Tribology, ROTRIB 07, Nov. 8-10, Bucharest, 007, Ed. Politehnica Press, ISBN ; th International Colloquium Tribology, Esslingen,Germany, D.N.Olaru, C.Stamate, Gh. Prisacaru, P.Lorenz, The Influence of the Atmospheric Condensed Water on Friction in a Micro Rolling Systems, Proc. of 16th International Colloquium Tribology, January 15-17,008,T.A.Esslingen,Germany, Session B6. 53th International Colloquium IWK, TU Ilmenau, Germany, D.N. Olaru, C. Stamate, Gh. Prisacaru, P. Lorenz: The Influence of the Atmospheric Condensed Water on Friction in Micro Systems, 53th International Colloquium IWK, TU Ilmenau, 8-1 September, 008; 14th International Conference on EHD Lubrication and Traction, VAREHD 14, Suceava, C. Stamate, D. Olaru: A new pin disc microtribometer, International 14th Conference on EHD Lubrication and Traction, VAREHD 14, October 008, Suceava, Romania, ISSN: D. Olaru, C. Stamate: Rolling friction in the mechatronic microsystems, International 14th Conference on EHD Lubrication and Traction, VAREHD 14, October 008, Suceava, Romania, ISSN: ; International Conference WESIC 08, Bucuresti, Rolling Friction in the Mechatronic Microsystems.pdf C. Stamate, D. Olaru, Gh. Prisacaru, Gelu Ianus: Rolling Friction in the Mechatronic Microsystems, International Conference 6 th WORKSHOP ON EUROPEAN SCIENTIFIC AND INDUSTRIAL COLLABORATION ON PROMOTING ADVANCED TECHNOLOGIES IN MANUFACTURING WESIC 08, 5-6 September 008, Bucharest, Romania, pp.95-30, ISSN: ;

7 CONFERENCES rd Vienna International Conference on Nano-Technology D.Olaru, C.Stamate, G.Prisacaru,G.Ianus, New Micro Tribometers for Sliding and Rolling Friction, Proc. of 3 rd Vienna International Conference on Nano-Technology, March 18-0, pp , 009, ISBN , Vienna, Austria nd International Conference ADEMS 09, 4-5 Sept., Cluj Napoca, D. Olaru, C.Stamate, A. Dumitrascu, G.Prisacaru, Experimental Investigations of Rolling Friction in Mechatronics Microsystems,Proc. of nd Int. Conference ADEMS 09, 4-5 Sept., Cluj Napoca, 009 G. C. Puiu,V. Puiu, D. Olaru, Friction in Ball Screw Systems, Proc. of nd Int. Conference ADEMS 09, 4-5 Sept., Cluj Napoca, 009. International Conference on Diagnosis and Prediction in Mechanical Engineering Systems (DIPRE 09), Galati D.N. Olaru, C. Stamate, A. Dumitrascu, G. Ianus, Friction in the Microtribosystems. Influence of the Condensed Water, Acceptată pentru publicare în The Annals of University Dunărea de Jos of Galaţi, Fascicle VIII, Tribology, 009 (XV), ISSN , revistă indexată în baze de date internaţionale,

8 CONFERENCES th INTERNATIONAL CONFERENCE ON EHD LUBRICATION AND TRACTION D.N.Olaru, C.Stamate, A.Dumitrascu, ROLLING FRICTION TORQUE IN MICROSYSTEMS, Proc. of 15th INTERNATIONAL CONFERENCE ON EHD LUBRICATION AND TRACTION, Suceava, May, 6-8, 010

9 PUBLICATIONS ISI Journals 1.Olaru, D. N., Stamate, C., Prisacaru, Gh.: Rolling Friction in a Microtribosystem. Tribology Letters 35, 05-10, (009) Revistă ISI, Impact factor 1.345;. D.Olaru, C.Stamate, A. Dumitrascu, G.Prisacaru, New Micro Tribometer for Rolling Friction, Manuscript Number: TRIL118/009, Tribology Letters, Revistă ISI, Impact factor 1.345;(Revision ) B. International Journals 1. Dodun, O., Olaru, D. (et al.), Experimental study regarding electrostatic spray coating of solid lubricant for gears, International Journal of Material Forming, Springer Paris, 008, vol. 1, no. 1, pp D.N. Olaru, C. Stamate, A. Dumitrascu, G. Ianus, Friction in the Microtribosystems. Influence of the Condensed Water, The Annals of University Dunărea de Jos of Galaţi, Fascicle VIII, Tribology, 009 (XV), ISSN , revistă indexată înbaze de date internaţionale ( ) C. Proposal of inventions 1. INERTIAL MICROTRIBOMETER 3BALLS, authors : D.Olaru, C.Stamate, G.Ianus, Gh. Prisacaru. MICROTRIBOMETER PIN ON DISC, authors: D.Olaru, C.Stamate, Gh. Prisacaru, G.Ianus

10 MOST IMPORTANT RESULTS 1. Dimensional limits for capillary effects and adhesion 14 Friction parameter b Dry conditions Capillary effects Ball diameter, mm 15 M b = r 8 π ρ R 4 r μr 1 M = A r ρ R 4 r A = ( )10-4 s.

11 Friction coefficient rpm 100 rpm 60 rpm 30 rpm Time ( s ) Dry contact, microballs with 1,588mm diameter Condensed water on surfaces, microballs with 1,588mm diameter

12 (Balls diameter mm) (Balls diameter 4,76 mm)

13 . Micro load limits for capillary effects in sliding friction Friction coefficient 0,4 0,35 0,3 0,5 0, 0,15 0,1 0,05 0 Dry conditions Humidity conditions Time, s Normal load G=10mN Friction coefficient 0,4 0,35 0,3 0,5 0, 0,15 0,1 0,05 0 Dry conditions Humidity conditions Time, s Normal load G = 30 mn

14 3. Experimental investigations of the water meniscus developed in micro contacts + = = R R γ x π A p F c c Δ

15 4. New microtribometers 4.1 New microtribometer pin on disc with normal load between (5-50) mn

16 4.. Inertial microtribometer for rolling friction J dω = ΣM f = 3 μ dt r Q r μ r = R dω g r dt R = 14.5mm, G = 8.05 mn Q = 9.4mN. r = 8.4 mm. ball diameters mm. dω dt = d φ dt Maximum contact pressure between balls and disc is about 190MPa

17 5. New methodology to evaluate the friction coefficient in micro rolling contacts φ 1 ( t ) = ω 1 t a φ ( t = e ) + b ln( t ) + c ln( t )

18 μ = J cos( α ) d G r dt φ The variation of the angular positions of the disc for microballs having mm and for angular speed of the disc 1 of: 40, 60, 90 and 10 rpm Variation of the friction coefficient between the balls and the disc, rotational speed of the disc 1: 40,60, 90 and 10 rpm

19 Validation of the methodology: a) Comparison with experimental results obtained in [4] [4] McCarthy, M., Waits, C. M., Ghodssi, R.: Dynamic Friction and Wear in a Planar-Contact Encapsulated Microball Bearing Using an Integrated Microturbine. Journal of Microelectromechanical Systems 18, (009) Experimental values of friction coefficient obtained in [4] are between (for 50 rpm and axial load of 50 mn) şi 0.05 (for 5000 rpm and axial load of 10 mn).

20 b) Using SPIN-DOWN methodology φ t ) = A ( 1 e ) ( B t Friction coefficient Time ( s ) 40 rpm 60 rpm 90 rpm 10 rpm The variation of the angular position for the disc when the disc 1 is stopped from the rotational speed of 40, 60, 90 and 10 rpm, the microballs having mm diameter. The variation of the friction coefficient between the balls having mm diameter and the two discs using the spin - down method, for the rotational speed of 40, 60, 90 and 10 rpm

21 6. Elaboration of a new analytical model to determine the friction coefficient in a micro bearing Friction coefficient in the contact of the disc 1 with the microball μ dω A dt dω B dt 1 = + b J cosα A = r ( G + 3 mb g ) B = 3 m b ( G + 3 m r cosα b g ) Friction coefficient in the contact of the disc with the microball μ = J cosα G r d φ dt

22 THE ACTIVITY OF THE DOCTORAL STUDENTS IN THE PROJECT 1. Stamate Ciprian Title of the Ph.D.Thesis THEORETICAL AND EXPERIMENTAL STUDY OF THE FRICTION IN MECHATRONICS AND BIOLOGICAL MICROSYSTEMS 1. STUDY OF THE RESEARCH REGARDING FRICTION IN MECHATRONICS AND BIOLOGICAL MICROSYSTEMS. ROLLING FRICTION IN MICROSYSTEMS 3. NEW METHODS AND EQUIPMENTS IN THE STUDY OF THE FRICTION IN MICROSYSTEMS 4. WATER INFLUENCE ON THE FRICTION IN MICROSYSTEMS 5. FORCES IN BIOLOGICAL MICROSYSTEMS 6. CONCLUSIONS AND CONTRIBUTIONS. Puiu George Constantin Title of the Ph.D.Thesis THEORETICAL AND EXPERIMENTAL STUDY OF THE FRICTION IN THE BALL SCREW SYSTEMS 1. STUDY OF THE RESEARCHES REGARDING THE FRICTION IN BALL SCREW SYSTEMS. NEW ANALYTICAL MODELS FOR FRICTION IN THE BALL SCREW SYSTEMS 3. NEW EQUIPMENTS AND METHODS FOR STUDY OF THE FRICTION IN BALL SCREW SYSTEMS 4. EXPERIMENTAL VALIDATIONS OF THE MODEL 5. CONCLUSIONS. CONTRIBUTIONS

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