Study on Structure Property of Cantilever Piezoelectric Vibration Generator

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1 Sss & Tsds,. 177, Iss 8, As 14, Sss & Tsds 14 by IFSA Pbsh, S. L. h:// Sdy S Py f C Pz b G 1,* Y Zh, Q, 1 L Jf 1 Mh & E C, A Usy f b, b Bd 711, Ch Sh f Ey Pw d Mh E, Nh Ch E Pw Usy, Bj 16, Ch * T.: * E-m: Rd: 6 A 14 /Ad: 31 Jy 14 /Pbshd: 31 As 14 Abs: F s y f z b wh md m, f f s m y f mh, bmh ss y d bmh y z b yzd by f m md d xm. Th ss d h w fqy wk m, bmh ss y bm wh sm hkss shd b fsy hs f ; bmh bm shd b fd h sm m d s m f w. Cyh 14 IFSA Pbsh, S. L. Kywds: Wss ss wk, M w, Pz b, G y. 1. Id Pz b md MEMS f d sy y f w w d, whh ffy ss h y sy bm d wk d f wss ss wk [1-7]. w, w f z hs s s md s, whh hd ssy wdsd s f h hy, d hw h ffy y f s s ky bms dd b sd y. I ys, sh hs shw h z y my dds m y, s m, bs fqy d mhd. Ek [8] ds z b b b d, d s m s mh fm. W [9] ds dm y z b whh hs hh y dsy, b s fqy f dm y s byd z, d w s w bs s dff s w-fqy m. [1] d hfm db z m s m, d s hs s sm m, mm d d sby, d d ffy s h fqy. B s s sm, s qy f h f d w s sy fw. G f z f z b s b hfm z, s qy f h f d w hd, d dy bm sh hs f my s d h wd. Shd Rdy [11], D Xzh [1], Ch Gm [13]. sy h shd mh md, wkmsh d xm 46 h://

2 Sss & Tsds,. 177, Iss 8, As 14, msm sysm f z, fw sh, hw, h ddssd h qs f mz sh f z s s y. S, hs fm sm yss d xm sh y fy mh md s bsd mh dsb m, d f f s m f z y s sdd, h s m s mzd yss, d sh fd f h y f z wh md m wk m s d. sss s, [s E ] s h sh s m mx fd s. Umh bm. S d Md C z fm by z ms, d, s sbs d fxd s. Pz ms d hy d wh sbs, d d z ms. O d f s fsd s, h d bs fy wh b s. Bs s h d wdh f h hkss, whh bs h wd bm s d ms h ssm f ms E B bm, s f f sh dfm d b d, d sfm d s m d sm md d. Wh sff ss x, z ms h whh m d dfm wh b s, d s d ss s d d ss, sqy, Mh b y s y. S s f h ss z s shw F. 1. F. 1 s shw mh bm s, d F. 1 b s shw bmh ss y bm s, d F. 1 s shw bmh y bm s. Pz bm s h s dd by, wdh s dd by b, hkss s dd by h, ss sbs s d sy s sbs d z y, sbs, bs, b sy s mh, bmh ss y d bmh y bm. Ad zs hy, sf f z bm whh sff s bd dfm w f h. Th sss d fd f zs by z q: T { D} = [ d]{ T} + [ ε ]{ E}, 1 E { S} = [ s ]{ T} + [ d]{ E} wh {D} s h dsm, {E} s h fd sy, [d] s h z s mx, {S} d {T} h s d sss sy, [ε T ] s h f d s mx b Bmh ss y bm Bmh y bm F. 1. Umh bm d bmh bm. Ud z bm sff hm x, wh x fqy s s by - d h fqy, ss f mh, bmh ss y d bmh y sy s xssd s [14, 15]: j j RkF =, + jrc + j ζ + jrk χ 1 bs j j Rk F bs =, bs bs bs + jrc + jζ + jrk χ b j j Rk F, b = b b b 1+ jrc + jζ + jrk χ 3 4 wh R s h d ss, k s h md m, F s h md x f, C s h z, ζ s h mh dm, χ s h mh m. R-d h fqy d s xssd s [14, 15]: YI d = λ 1 ζ, 4 5 m 47

3 Sss & Tsds,. 177, Iss 8, As 14, wh λ s h dms fqy, Y s h s md, I s h mm f, m s h mss f h. 3. Pfm Sm Ayss Sfw f f m yss ANSYS s d md d sm f z, d md s f mh md s fh dd. F b m dfm, hsh bz wh sy mds s sd s sbs m, d PZT-5 s sd s z ms m, d fm m f mh bm s shw Tb 1. F m y f mh, bmh ss y d bmh y sm m, hkss f h f bmh s sm whh s hf wh mh. Tb 1. S d m ms f mh z bm. Pm Pz y PZT-5 Sbs Phsh bz Dsy ρ k/m Es md Y GP Pss's μ Pz s d m/ D s S ε F/m 147ε - 33 Lh mm 5 5 Wdh w mm Thkss h mm.4.4 O m f ssd s wh md 5 µm, d h s s, f w f h, wdh d hkss d h fqy s sy yzd ss 1 9 Ω, whh y s m s d. F h d wdh f z b my ffd by h ss f wk s, s ds f hkss s y m. R f sbs hkss d hkss s dfd s hkss, d sbs hkss s d whh k hkss, d f h fqy, md s. hkss bd by smd yss f md d hm ss, d h ss s wh h d shw F.. Fm F., f mh bm s fsy s, h ds wh h s hkss, d s mxmm hkss.4, s h mm hkss f mh bm s.4; f bmh bm s ds wh h s hkss whh s dff fm mh bm, d h mxmm f bmh ss y bm s b.5 ms hh h mh s. Fm F. b, fs d h fqy f z s s wh h s hkss ; h fqy f mh bm s hh h bmh s f sm hkss. S, bmh ss y bm wh h sm hkss s d m d m h qm f s sh z y 1 1 q 8 f 6 4 h mh h mh sm ss bmh ss h bmh ss sm ss bmh h bmh sm ss hkss O s. hkss mh h mh sm ss bmh h bmh sm ss hkss b Ih fqy s. hkss F.. G fm s. hkss. R bw, h fqy d h f shw F. 3. Ss fm h F. 3, d h fqy f mh d bmh bm dwd wh h s h. 48

4 Sss & Tsds,. 177, Iss 8, As 14, F sm h, f bmh ss y bm s h hhs, whh s b ms hh h bmh y bm s. I s hs h h sh z bm s d b. B w h w mk m f z y ds, whh bs b qy f h d, d wh h sh, z bm s dff k s bs h fqy s f b m b fqy z y 1 1 q 8 f 6 4 h mh h mh sm ss bmh ss h bmh ss sm ss bmh h bmh sm ss hm O s. h mh h mh sm ss bmh h bmh sm ss hm b Ih fqy s. h F. 3. G fm s. h. If f wdh f z d h fqy shw F. 4. Fm F. 4, wdh hs ff d h fqy f mh d bmh bm; f sm wdh, f mh bm s shy bw bmh ss y s whh s ms hh h bmh y s, b h fqy f mh bm s hh h bmh bm s y z 6 55 q f h 35 3 mh h mh sm ss bmh ss h bmh ss sm ss bmh h bmh sm ss wdhm O- s. wdh mh h mh sm ss bmh h bmh sm ss wdhm b Ih fqy s. wdh F. 4. G fm s. wdh. 4. Exm Rsh F s mh md d sm s, xm msm fm f mh d bmh bm s, whh s shw F. 5. Exm s my d h GFG- 819G md s, GF-1 md w mf, ZJY-61 md bsd, BM- md b m d DS-11CD md d s ss. Th wy wks s h hm x s f b fqy s d s GFG- 819G md s whh s mfd by GF-1 md w mf b f b x, s z s dd wh s x s; y, d y d dsm f fxd s f z s msd s b m, d -m msm f f z s k by s ss d w f d ss. 49

5 Sss & Tsds,. 177, Iss 8, As 14, d 1/ =.77 ms k. Ch bw f bmh ss y bm wh mm h d fqy s bd by msm whh s shw F. 7. F. 5. Exm fm f z Msm f Ih Fqy d O C Bs d w mxmz mh h fqy f z bm wh m b fqy, s h sd fqy f s s yzd b h fqy by ms d dff x fqy. I xm, s s x fqy wh 4 µm md s d by b, d h bw f mh d bmh bm wh dff h d fqy s sd, d h fqy s bd, d s s sd wh h d f h md, h ss shw F. 6. Fm F. 6, wh h s h f z bm, fs d h fqy d s d, d h ss d wh h yss, b s s shy f h s bs f dss dsm d f f m f bw z y d m sbs. 4.. Msm f Mh Dm R Dm s h m d f y f z, d dm mh md s sy bd by xm msm. O wh dff fqy s msd mh dm. F bw dm d s fqy s xssd s: 1 ζ =, 6 1 wh s h s fqy, d h sd fqy whh mh h mh xm bmh ss h bmh ss xm bmh h bmh xm hm O- s. h 18 z16 y14 1 q1 f h mh h mh xm bmh h bmh xm hm b Fs d h fqy s. h F. 6. G fm s. h fqyz F. 7. Ts h f mh dm. Fm F. 7, mxmm 9 s bd x fqy 6 z, s s fqy =6 z; d.5.77 ms k whh sd 5

6 Sss & Tsds,. 177, Iss 8, As 14, fqy s sy =61.5 z d =59.7 z, d ζ=.15 s d by s h fm 5. I sm wy, dm f mh d bmh bm wh dff h s d whh s shw Tb. Ss fm h Tb, dm f y s sm, whh s f.. I s y kw h h sm dm, h sh ss h bw fqy d, d h w wk fqy. Thf, dm shd b dsd d wk ds. Tb. Dm f mh d bmh bm wh dff h. Lh mm Dm f mh bm Dm f bmh ss y bm Dm f bmh y bm Msm f O d Pw f Ld Umh bm wh h 3 mm s dd s y, f dff f ss s sdd by s 5 kω, 1 kω, kω, 5 kω, 1 kω, kω, 4 kω, 5 kω d 1 MΩ d ss, h ss shw F. 8. Fm F. 8, f d ss s s wh ss h sm fqy. Bs y f z my dd w s m, s f f d ss w f z bm s sdd. O f d ss s sd xmy, d d fm = /4R w f z bm, d h f bw fqy d w f mh, bmh ss y d bmh y bm s sy dw, h ss shw F. 9, F. 1 d F. 11. Ss y fm h f, w s s wh ss whh s dff fm ; h z bm xss m d, whh mk h hhs w; f h y, h m f ss f mh bm s kω, d h m f ss f bmh bm s 5 kω, h sm m d s m, mxmm w f mh, bmh ss y d bmh y bm s sy 1.8 mw, mw d mw, d w f bmh ss y bm s fdmy h sm s bmh y bm s, whh s shy hh h mh bm s fqyz 1MΩ xm 1MΩ h 5kΩ xm 5kΩ h 4kΩ xm 4kΩ h kω xm kω h 1kΩ xm 1kΩ h 5kΩ xm 5kΩ h kω xm kω h 1kΩ xm 1kΩ h 5kΩ xm 5kΩ h F. 8. O f mh bm wh dff ss W m w MΩ 5kΩ 4kΩ kω 1kΩ 5kΩ kω 1kΩ 5kΩ fqyz F. 9. O w f mh bm wh dff ss..5. W m1.5 w MΩ 5kΩ 4kΩ kω 1kΩ 5kΩ kω 1kΩ 5kΩ fqyz F. 1. O w f bmh ss y bm wh dff ss. 51

7 Sss & Tsds,. 177, Iss 8, As 14, W 1.5 m w MΩ 5kΩ 4kΩ kω 1kΩ 5kΩ kω 1kΩ 5kΩ fqyz F. 11. O w f bmh y bm wh dff ss. I s hs h hh f bmh y bm s -hf f bmh ss y bm, b s h s f hh h bmh ss y bm. S y f bmh y bm s f bmh ss y bm s. 5. Css Ih fqy, d w wh dff f ss sdd fy mh md y whh y ANSYS f m d xm msm fm. Th ss d f bmh ss y bm wh sm hkss s ; m d xss mk w mxmm; w f bmh ss y bm s bsy sm wh bmh ss y bm s, whh s hh h mh s h sm m d s m. Akwdms Th hs wd k kwd h s f P N S Fd f b f Ch G E13469, S Fd f A-sf Rsh h Pb Is G 1316, S d Thy Pjs f Bd f b G 13ZG. Rfs [1]. J. Y. Zh, Z. C, Q. W,, Ms d z s f AN h fms w sss s f h f b y hs, IET M & N Ls,. 7, Iss 1, 1, []. S. C. S, B. A. M. Ows, B. P. M,, m b yss f h bsb z, J f Sd d b,. 331, Iss 15, 1, [3]. J. W. X, Y. B. L, W. W. Sh,, Omz f h- z s xy bms wh dff sffss s f b y hs, Sm Ms & Ss,. 1, Iss 6, 1, [4]. W. L, T. S. L, C. C. s,, A m s z bd wh s bs, Mhs,. 1, Iss 7, 11, [5]. I. M. Dmyd, Y. G, M. T. T,, A sfwd w d IC f z y hs fm sh-d bs, IEEE Tss Cs d Sysms II, Exss Bfs,. 59, Iss 9, 1, [6]. Q, L L, Y Zh,, Md d sm f z b f w wss ss wks, Sss & Tsds,., S Iss, 13, [7]. Y Zh, Q, Pfm yss m f m z b, Pds f h Chs Sy f E E,. 31, N. 3, 11, [8]. M. Ek, D. s, F. Cs,, Ey hs fm b s z mmb, J D Physq I,. 18, 5, [9]. S. W,. L. Kwk, C. L. S,, Ey hs wh z dm sd, Ad Physs Ls,. 9, Iss 11, 7, [1]., G F, X,, Ayss s d fm f w fqy z w hs s s-shd bmh, A Mh Sd S,. 8, Iss 1, 7, [11]. S. Rdy, K. W. R, A z b bsd f wss s, Sm Ms & Ss,. 13, Iss 5, 4, [1]. D Xzh, M z w d by mb b, D Usy f Thy, D, 8. [13]. Ch Gm, P Jzh, T Kh,, Dm f ms sysm f y y f z ms, J f J Usy E d Thy Ed,. 37, N., 7, [14]. A. Ek, D. J. Im, O mh md f d z b y hss, J f I M Sysms d Ss,. 19, Iss 11, 8, [15]. A. Ek, D. J. Im, A dsbd m mh md f d z y hss, J f b d Ass,. 13, Iss 4, 8, Cyh, I Fqy Ss Ass IFSA Pbsh, S. L. A hs sd. h:// 5

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