An Introduction to Surface-Micromachining

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1 An Introduction to Surface-Micromachining

2 An Introduction to S urface-micromachining by Robert W. Johnstone M. Parameswaran Engineering Science Simon Fraser University Kluwer Academic Publishers Boston/DordrechtiLondon

3 Distributors for North, Central and South America: Kluwer Academic Publishers 101 Philip Drive Assinippi Park Norwell, Massachusetts USA Telephone (781) Fax (781) Distributors for all other countries: Kluwer Academic Publishers Group Post Office Box AH Dordrecht, THE NETHERLANDS Telephone Fax ~ " Electronic Services < Library of Congress Cataloging-in-Publication Title: An Introduction to surface-micromachining Author (s): Robert W. Johnstone & M. Parameswaran ISBN ISBN (ebook) DOI / Softcover reprint ofthe hardcover 1 st edition 2004 Copyright 2004 by Kluwer Academic Publishers All rights reserved. No part of this publication may be reproduced, stored in a retrieval system or transmitted in any form or by any means, electronic, mechanical, photo-copying, microfilming, recording, or otherwise, without the prior written permission ofthe publisher, with the exception of any material supplied specifically for the purpose ofbeing entered and executed on a computer system, for exclusive use by the purchaser of the work. Permissions for books published in the USA: permissions@wkap. com Permissions for books published in Europe: permissions@wkap.nl Printed on acid-free paper.

4 This book is dedicated to all things flat and small.

5 Contents Dedication Preface Acknow ledgments v xi xiii 1. INTRODUCTION Why miniaturize? Why surface-micromachining? History 4 5 Part I Fabrication 2. MICROFABRICATION PROCESSES Photolithography Thermal Growth Deposition Etching Doping Chemical Mechanical Polishing (CMP) Wafer Bonding Release Wire Bonding 25 28

6 Vlll AN INTRODUCTlON TO SURFACE-MICROMACHINING 3. MICROMACHINING TECHNOLOGIES 3.1 Bulk Micromachining 3.2 LIGA 3.3 Surface-Micromachining Part 11 Design 4. MICROSCALE PHYSICS 4.1 Scaling Laws 4.2 Casimir Force 4.3 Surface Forces 4.4 Friction 4.5 Continuum Mechanics Approximation 5. MECHANICS 5.1 Beam Equations 5.2 Torsion 5.3 Cantilevers 5.4 Euler-columns 5.5 Pseudo-rigid body Modelling DESIGN RULES 6.1 Minimum Geometry Rules 6.2 Maximum Geometry Rules 6.3 Minimum Enclosure Rules 6.4 Minimum Overlap Rules 6.5 Design Rule Checks (DRC) NON-IDEAL PROCESSES 7.1 Topography 7.2 Dimensional Tolerances 7.3 Thin-film Stresses

7 Contents IX 8. DESIGN TECHNIQUES Ground Planes Double Thickness Parts Conducting Paths Tethers Dimpies Process Variations Part III Devices 9. ELECTRICAL COMPONENTS Bonding Pads Resistors Capacitors Inductors MECHANICAL COMPONENTS Compliant Devices Springs Suspensions Flexure Joints Levers ELECTROSTATIC ACTUATORS Parallel-Plate Actuators Interdigitated Comb Actuators Curved Electrode Actuators Scratch-drive Actuators ELECTRO-THERMAL-COMPLIANT ACTUATORS Thermal Bimorph Actuators Guckel Actuators Bent-beam Actuators 159

8 x AN INTRODUCTION TO SURFACE-MICROMACHINING 12.4 Topological Optimization 13. RAISED STRUCTURES 13.1 Hinges 13.2 Assembly Part IV Processes 14. POLYMUMPS PROCESS 14.1 Design Rules 14.2 Photo Gallery 15. SUMMIT PROCESS 15.1 Design Rules 15.2 Photo Gallery 16. MUSIC PROCESS 16.1 Design Rules 16.2 Photo Gallery Index

9 Preface In the process ofteaching several courses on surface-micromachining, it has become apparent that there is a severe gap in the existing literature. In articles and in books, authors approach the subject from one of two directions: processing knowledge or device knowledge. These two approaches neglect an important bridge between the fabrication process and actual device implementation. A large set of skills exists that is required to design surface-micromachined devices. Knowledge of a specific micromachining process is not enough. Theory specific to a particular device is not enough. Designers must connect the manufacturing process, microscale phenomena, and design data to physical form and function. Intuition, developed by experience with macroscale systems, will not help with microscale systems. These are the basic ideas that designers must understand if they are to successfully implement any device design. We hope that this book, while it cannot be complete, will provide a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, this book will discuss surface-micromachining design in general, and it will finish with the theory and design of concrete components.

10 Acknowledgments We would like to thank the following people for their help in the writing of this book: Sunjaya Djaja, Linnea Duke, lan Foulds, and Bonnie Gray. We would also like to thank all the students who took the surface-micromachining course at Simon Fraser University, their successful and less than successful experiments played a role in shaping this text.

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