1 High precision, high rigidity positioning table

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Kristian Wilkerson
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1 TSHM CTHM

Precision Positioning Table H Ball screw TSH M Ball screw Slide table inear Way Bed inear Points 1 High precision, high rigidity positioning table High precision, high rigidity positioning table

Variation 2 High running accuracy and positioning accuracy High running accuracy and high accuracy positioning are realized by incorporating 2 sets of inear Way in parallel on cast iron slide tables

2 Precision Positioning Table H Ball screw TSH M Ball screw Slide table inear Way Bed inear Points 1 High precision, high rigidity positioning table High precision, high rigidity positioning table configured with high rigidity and vibration damping performance cast iron slide tables and beds. Variation 2 High running accuracy and positioning accuracy High running accuracy and high accuracy positioning are realized by incorporating 2 sets of inear Way in parallel on cast iron slide tables and beds finished by accurate ground and combining with precision ball screws. 3 High rigidity and large carrying mass The structure with large carrying mass, and resistant to moment and complex load since 2 sets of inear Way are optimally positioned on the high rigidity bed. Shape Table width Y-table () () CTH M 32 () () () 32 X-table 42 () 42 Major product specifications Accuracy Driving method Precision ball screw Positioning repeatability ±.2 inear motion rolling guide inear Wayball type Positioning accuracy.1.3 Built-in lubrication part ubrication part "C-ube" is built-in ost motion Material of table and bed Cast iron Parallelism in table motion A.1.3 Sensor Provided as standard Parallelism in table motion B Attitude accuracy Straightness..2 Backlash

3 Identification Number Identification Number and Specification Example of an Identification Number (Single-axis specification) TSH M - 3 / AT31 1 J R 1 2 Model Size TSHM: Precision Positioning Table H (single-axis specification) Size indicates table width. Select a size from the list of Table 1. 3 Select a stroke length from the list of Table 1. 1 Model Page - As for a table with bellows, available stroke length is somewhat shorter, so please see the dimension table Size Designation of motor attachment Ball screw lead Designation of bellow Surface treatment Page - Page - Page - Page - Page - Page - Table 1 Sizes, table width dimensions, and stroke lengths Table width, 1, 2, 2, , 2, 2, 3, 4, , 4, 6, 8, 1 42, 6, 81 Remark: If the stroke length shown in is needed, please contact. 4 6 Designation of motor attachment Ball screw lead Designation of bellow As for a motor attachment, select it from the list of Table 3. Motor should be prepared by customer. Please specify motor attachment applicable to motor for use. A coupling shown in Table 4 is mounted on the main body before shipment. However, the final position adjustment should be made by customer since it is only temporarily fixed. When specifying an AC servomotor attachment, an origin sensor is not provided. : ead 1: ead 1 No symbol : Without bellows J : With bellows As for a table with bellows, available stroke length is somewhat shorter, so please see the dimension table. Surface treatment No symbol : Black chrome surface treatment R : Black chrome surface treatment 1 : Black chrome surface treatment 2 Black chrome surface treatment: This treatment is performed on main parts excluding inear Way, ball screw, and ball bearing. Black chrome surface treatment 1: In addition to the above black chrome surface treatment, this treatment is performed even on the surface of inear Way. Black chrome surface treatment 2: In addition to the above black chrome surface treatment 1, this treatment is performed even on the surface of ball screw. The black chrome surface treatment improves the corrosion resistance by forming black permeable film on the surface. For the upper and lower surfaces of the main body and the reference surfaces of respective parts, surface treatment is excluded. 119

4 Identification Number Example of an Identification Number (Two-axis specification) Model Size X-axis stroke length Y-axis stroke length Designation of motor attachment Ball screw lead Designation of bellow Surface treatment Designation of combination direction Page -122 Page -122 Page -122 Page -122 Page -122 Page -122 Page -122 Page -122 Page CTH M / AT31 1 J R C Identification Number and Specification CTHM: Precision Positioning Table H (two-axis specification) Size indicates table width. Select a size from the list of Table 2. Tables of different sizes can also be combined. Select a stroke length from the list of Table 2. Table 2 Sizes, table width dimensions, and stroke lengths 6 8 Model Size X-axis stroke length Y-axis stroke length Table width CTHM CTH22M 22 CTH32M 32 Designation of motor attachment Ball screw lead Designation of bellow Surface treatment s of respective axes are displayed in cm. Please note that allowable lengths for X- and Y-axes vary. As for a table with bellows, available stroke length is somewhat shorter, so please see the dimension table. As for a motor attachment, select it from the list of Table 3. Motor should be prepared by customer. Please specify motor attachment applicable to motor for use. A coupling shown in Table 4 is mounted on the main body before shipment. However, the final position adjustment should be made by customer since it is only temporarily fixed. When specifying an AC servomotor attachment, an origin sensor is not provided. : ead 1: ead 1 X-axis No symbol : Without bellows J : With bellows As for a table with bellows, available stroke length is somewhat shorter, so please see the dimension table. No symbol : Black chrome surface treatment R : Black chrome surface treatment 1 : Black chrome surface treatment 2 Y-axis Black chrome surface treatment: This treatment is performed on main parts excluding inear Way, ball screw, and ball bearing. Black chrome surface treatment 1: In addition to the above black chrome surface treatment, this treatment is performed even on the surface of inear Way. Black chrome surface treatment 2: In addition to the above black chrome surface treatment 1, this treatment is performed even on the surface of ball screw. The black chrome surface treatment improves the corrosion resistance by forming black permeable film on the surface. For the upper and lower surfaces of the main body and the reference surfaces of respective parts, surface treatment is excluded. 9 Designation of combination direction No symbol : Standard configuration C : Reverse configuration Standard configuration: A direction under the condition where X-axis motor side is placed at the front and Y-axis motor side is placed on the right side respectively. Reverse configuration: A direction under the condition where X-axis motor side is placed at the front and Y-axis motor side is placed on the left side respectively

5 Identification Number and Specification Table 3 Application of motor attachment Models of motor to be used Type Manufacturer Series Model AC servo motor Stepper motor YASKAWA EECTRIC CORPORATION Mitsubishi Electric Corporation Panasonic Corporation ORIENTA MOTOR Co., td. - J3 MINAS A step RK CRK Rated output W Flange size CTHM Motor attachment CTH22M CTH32M SGMJV-1 AT31 4 SGMAV-1 AT31 SGMJV-2 AT32 AT33 AT34 2 SGMAV-2 AT32 AT33 AT34 6 SGMJV-4 AT33 AT34 4 SGMAV-4 AT33 AT34 SGMJV-8 AT3 AT36 8 SGMAV-8 AT3 AT36 HF-MP13 AT31 4 HF-KP13 AT31 HF-MP23 AT32 AT33 AT34 2 HF-KP23 AT32 AT33 AT34 6 HF-MP43 AT33 AT34 4 HF-KP43 AT33 AT34 HF-MP3 AT3 AT36 8 HF-KP3 AT3 AT36 MSMD1 AT3 4 MSME1 AT3 MSMD2 AT38 AT39 AT311 2 MSME2 AT38 AT39 AT311 6 MSMD4 AT31 AT312 4 MSME4 AT31 AT312 MSME8 AT313 AT314 8 MSME8 AT313 AT314 AR66 AT31 6 AR69 AT31 AR98 AT31 AT318 8 AR911 AT31 AT318 AS66 AT316 6 AS69 AT316 AS98 AT31 AT318 8 AS911 AT31 AT318 RK6CRK6 1 6 AT316 RK9 8 AT31 AT318 Note 1 Applicable to the outer diameter 8 of motor output shaft. Remark: For detailed motor specifications, please see respective motor manufacturer's catalog. Table 4 Coupling models Motor attachment Coupling models Manufacturer Coupling inertia J C 1 - m 2 AT31 UA-2C- 8 8 Sakai Manufacturing Co., td.29 AT32 UA-3C- 814 Sakai Manufacturing Co., td.63 AT33 UA-3C-1214 Sakai Manufacturing Co., td 1.34 AT34 UA-3C-141 Sakai Manufacturing Co., td 1.34 AT3 UA-4C-119 Sakai Manufacturing Co., td 2.61 AT36 UA-4C-119 Sakai Manufacturing Co., td 2.61 AT3 UA-2C- 8 8 Sakai Manufacturing Co., td.29 AT38 UA-3C- 811 Sakai Manufacturing Co., td.63 AT39 UA-3C-1112 Sakai Manufacturing Co., td 1.34 AT31 UA-3C-1214 Sakai Manufacturing Co., td 1.34 AT311 UA-3C-111 Sakai Manufacturing Co., td 1.34 AT312 UA-3C-141 Sakai Manufacturing Co., td 1.34 AT313 UA-4C-119 Sakai Manufacturing Co., td 2.61 AT314 UA-4C-119 Sakai Manufacturing Co., td 2.61 AT31 MSTS-2C- 81 Nabeya Bi-tech Kaisha.1 AT316 MSTS-2C- 8 8 Nabeya Bi-tech Kaisha.1 AT31 MSTS-32C-1214 Nabeya Bi-tech Kaisha 2. AT318 MSTS-4C-141 Nabeya Bi-tech Kaisha 9. Remark: For detailed coupling specifications, please see respective manufacturer's catalog. Specifications Table Accuracy Single-axis specification Two-axis specification CTHM CTH22M CTH32M X-axis Table 6 Maximum speed Motor type AC servo motor Stepper motor Y-axis Positioning repeatability Positioning accuracy Parallelism in table motion A Straightness Squareness of XY motion Backlash Maximum speed /s Single-axis specification Two-axis specification ead ead 1 CTHM CTH22M 2 CTH32M CTHM CTH22M 1 3 CTH32M Remark: To measure the practical maximum speed, it is required to consider operation patterns based on the motor to be used and load conditions

6 Specifications Table Maximum carrying mass Table 8 Specifications of linear motion rolling guide /2 /2 Slide unit 2 /2 Ball screw lead Y /2 Slide unit 1 Slide unit 4 Slide unit 3 Horizontal X Maximum carrying mass Vertical Table 9.1 Specifications of ball screw 1 ead Table 9.2 Specifications of ball screw 2 Shaft dia. Axial clearance Basic dynamic load rating C N Basic static load rating C N Shaft dia. Overall length Z Z Driving positiony d, Z d X Y Basic dynamic load rating 1 C N Basic static load rating 1 C N r Arrangement Note 1 Represent the value per slide unit. Y d Z d

7 Specifications Table 1 Table inertia and starting torque Single-axis specification Two-axis specification CTHM CTH22M CTH32M Table inertia J T 1 - m 2 Starting torque T S Nm X-axis Y-axis ead ead 1 ead ead Remark: As for tables of two-axis specification, the figures represent values in X-axis. For values in Y-axis, see the figures for single-axis specification. Sensor Specification Table 11.1 Sensor timing chart (without bellows) Ball screw lead OFF E CW A B C D E F Remarks 1. For the specifications of respective sensors, please see the section of sensor specification in General Explanation. 2. The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. CCW B C D ON F A OFF OFF Origin Pre-origin CCW limit CW limit Mechanical stopper

8 Sensor Specification Table 11.2 Sensor timing chart (with bellows) Dimensions of Motor Attachment, CTHM, CTH32M M4 Depth 8 PCD46, Evenly distributed at M Depth 1 PCD, Evenly distributed at 9 CW CCW AT AT A Throughmachined on motor attachment 4-M Throughmachined on motor bracket PCD, Evenly distributed at M6 Depth 11 PCD9, Evenly distributed at 9 Ball screw lead OFF E A B C D E F -/J /J /J /J /J /J /J /J /J /J /J /J /J /J /J /J Remarks 1. For the specifications of respective sensors, please see the section of sensor specification in General Explanation. 2. The values of respective axes in tables of two-axis specification are the same as those of tables of single-axis specification. B C ON D F OFF OFF Origin Pre-origin CCW limit CW limit Mechanical stopper AT32 AT3 AT38 AT31 AT316 Indicates the extent of coupling insertion in the case of with origin sensor. Motor bracket Motor attachment Motor bracket Motor attachment, CTH22M AT33 AT39 AT31 Indicates the extent of coupling insertion in the case of with origin sensor M3 Depth 6 PCD4, Evenly distributed at Throughmachined on motor attachment 4-M4 Depth 8machined on motor bracket PCD, Evenly distributed at 9 4-M4 Depth 8 4-M Depth 1 PCD, Evenly distributed at M4 Depth 8 PCD, Evenly distributed at M6 Through AT3 AT311 AT312 AT313 AT318, CTH42M AT36 AT314 Indicates the extent of coupling insertion in the case of with origin sensor Motor attachment Motor bracket Motor attachment Motor bracket Motor attachment Motor bracket Motor attachment 1 Motor bracket M6 Through PCD9, Evenly distributed at Throughmachined on motor attachment 4-M Depth 1machined on motor bracket PCD9, Evenly distributed at M4 Depth 8 PCD, Evenly distributed at Depth machined on motor attachment 4-M Throughmachined on motor bracket PCD9, Evenly distributed at M6 Through AT

9 Precision Positioning Table H M Depth M Depth M8 Depth 16 4-M Depth S/2 13 S/ S/2 22 S/ A A 12. S Overall length Mounting holes of bed A MassRef Note 1 When selecting AT32 or AT38, 21 is applied Hole for 8-M 2 A 18 A 2 S Overall length Mounting holes of bed A (the number of holespitch) n MassRef Remark: If you are interested in a product of identification number shown in, please contact Hole for n-m

10 Precision Positioning Table H 4-M1 Depth M8 Depth 16 4-M1 Depth M1 Depth S/2 32 S/ S/2 42 S/ A 28 A Hole for n-m1 3 A 38 A S Overall length Mounting holes of bed A (the number of holespitch) n MassRef Note 1 When selecting AT3, 26 is applied. When selecting AT313, 2 is applied. Remark: If you are interested in a product of identification number shown in, please contact. S Overall length Mounting holes of bed A (the number of holespitch) n Hole for n-m1 MassRef Note 1 They represent the dimensions of motor bracket only. When selecting AT36, 2 is applied. When selecting AT314, 23 is applied. Remark: If you are interested in a product of identification number shown in, please contact

11 CTHM Precision Positioning Table H CTH22M 1 1 Y M Depth 1 Y M Depth 1 18 Hole for 8-M 4-M Depth 1 For n-m8 hole 4-M8 Depth A A A 18 A 2 X 1 1 X 1 S Overall length Mounting holes of bed X-axis Y-axis X Y A MassRef. CTHM CTHM CTHM CTHM CTHM Note 1 When selecting AT32 or AT38, 21 is applied. Remark: As a combination of stroke length other than listed above and a table of different size is possible, please contact. S Overall length Mounting holes of bed X-axis Y-axis X Y A (the number of holespitch) n MassRef. CTH22M CTH22M CTH22M CTH22M CTH22M Remark: As a combination of stroke length other than listed above and a table of different size is possible, please contact

12 CTH32M Precision Positioning Table H /J Table with bellows 4-M Depth 1 1 Y M8 Depth E S/2 13 S/2 E Hole for 8-M1 4-M1 Depth 2 S Overall length E MassRef. -/J /J /J /J /J Notes 1 Too deep insertion depth of the mounting bolt may affect the running performance of the moving table, so never insert a bolt longer than the depth of the through hole. 2 When selecting AT32 or AT38, 21 is applied. Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. For bed mounting dimensions, see the dimension table for A 28 A 2 X 1 1 S Overall length Mounting holes of bed X-axis Y-axis X Y A MassRef. CTH32M CTH32M CTH32M CTH32M CTH32M Note 1 When selecting AT3, 26 is applied. When selecting AT313, 2 is applied. Remark: As a combination of stroke length other than listed above and a table of different size is possible, please consult

13 Precision Positioning Table H /J, /J, /J Table with bellows CTHM/J Table with bellows W t S Overall length - 1/J 11 4 W H E t MassRef. - 2/J /J /J /J /J /J /J /J /J /J /J /J /J E S/2 W S/2 E 3.2-6/J /J /J Note 1 When selecting AT3, 26 is applied. When selecting AT313, 2 is applied. Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. If you are interested in a product of identification number shown in, please contact. 3. For mounting dimensions, see the dimension tables for,, and W H Y S Overall length of bed MassRef. X-axis Y-axis X Y CTHM-11/J CTHM-21/J CTHM-22/J CTHM-32/J CTHM-33/J Note 1 When selecting AT32 or AT38, 21 is applied. Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. For mounting dimensions, see the dimension table for. X 13 4-M Depth

14 Precision Positioning Table H CTH22M/J Table with bellows CTH32M/J Table with bellows Y X Y X S Overall length of bed MassRef. X-axis Y-axis X Y CTH22M-22/J CTH22M-32/J CTH22M-33/J CTH22M-43/J CTH22M-44/J Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. For mounting dimensions, see the dimension table for. S Overall length of bed MassRef. X-axis Y-axis X Y CTH32M-33/J CTH32M-43/J CTH32M-44/J CTH32M-4/J CTH32M-/J Note 1 When selecting AT3, 26 is applied. When selecting AT313, 2 is applied. Remarks 1. For the usage in vertical axis, the dimension of the bellows is different, so please contact. 2. For mounting dimensions, see the dimension table for

Ball screw. Linear. Coupling cover. 1Positioning table of a structure with enhanced sealing property. 3 High corrosion resistance

Ball screw. Linear. Coupling cover. 1Positioning table of a structure with enhanced sealing property. 3 High corrosion resistance Cleanroom Precision Positioning Table TC Ball screw TC EB Slide table inear Way Side cover Stainless sheet Motor bracket inear Coupling cover Pipe threads for suction connector Points ight weight, low