Mask Aligner #3 OAI 806 MBA

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1 Sta da d Ope ai g P o edu e Mask Aligner #3 OAI 806 MBA OAI Model MBA Mask Alig e is a photolithog aph s ste alig e t a d p o i it / o ta t UV e posu e 10 desig ed fo f o t/ a k side Operation Procedures Che i al- O l IPA p opa ol a e used i lea i g this s ste No a eto e o etha ol is allo ed i a lea i g pu pose i this s ste Espe iall, the i o s i the light sou e ha e opi al oai gs that a e easil e o ed a eto e o etha ol UV e posu e- The UV adiaio f o the light sou e auses haza d to e es Do ot look i to the output ea of the UV la p Wea p ote i e e e ea he looki g at the ask e posu e lo aio du i g UV e posu e Be a a e that a fe se o ds di e t e posu e to the output ea o to the la p itself a ause UV ski u s o u s to the oute la e s of the e es Me u la p e plosio - The s ste is desig ed to d a out a of the e u apo eleased a e ploded la p th ough the UV light sou e e haust pipe a d pose o da ge to ope ato s Ho e e, a i ute a ou t of li uid e u ill e o tai ed ithi the light sou e housi g If ou suspe t the UV e u la p e plosio, e it the oo i ediatel a d oif the lea oo a age Please take a moment to review general lab safety information in section 4 of this document ig i o the Use Log sheet Re o d the sta t i e a d the la p hou ete eadi g digit u e s f o the f o t pa el of the C Illu i aio Co t olle Note a o e ts of the p e ious use s Please i lude the de i al poi t et ee the last t o digits ie f o the photo wwwbuffaloedu/shared-facilities-equip

2 P ess the ta /g ee po e i e o the all to tu o the a uu pu p It ill u fo a hou pe iod a d the shut of You a esta t it at that poi t if eeded P essi g the uto agai ill ot shut it of Tu o the ed po e s it h o the po e st ip at the a k side of the ask alig e This is the ai po e s it h The eate, the t o ideo o ito s ill e o Che k the sei gs o the f o t pa el of the C Illu i aio Co t olle po e suppl of the UV la p The should e set as: POWER fo I te sit /Po e Mete V VOLTAGE fo Mete ele t CI Co sta t I te sit o MODE o t ol CHANNEL A fo UV se so P ess a d hold the ello TART uto o po e suppl # u il ou see eadi gs o the gauges i di ai g the la p has sta ted The elease the s it h ate a se o d o t o o he ou see the eedles o e wwwbuffaloedu/shared-facilities-equip

3 Wait i utes fo the UV la p to a up a d he k the la p po e o the ight side I te sit /Po e Mete The eadi g should e et ee Wa d W ± % W T pi all, the idle po e of the UV la p should e a ou d W IMPORTANT: I the e e t that the UV la p has ee tu ed of, ou eed to ait at least i utes to allo the la p to ool do sui ie tl efo e tu i g it a k o Othe ise, it ill da age the UV la p a d a e e da ge ous E su e that the slide-a lat sil e etal a lo ated o the let ha d side of the ask alig e is pushed to a ds the a k all it does ot eed to e used o o ed IMPORTANT: The UV la p ust al a s e tu ed o efo e the ask alig e s ste po e is s it hed o Othe ise, the ele t i al spike i du ed i the W po e suppl, a da age the LCD o t ol pa el a d the alig e ele t o i s Flip up the po e eake lo ated at the ight ea of the ta le This ill sta t the LCD s ee P ess the INITIATE uto o the LCD o t ol pa el to sta t the i iiaio p o ess The s ee ill auto ai all s it h to the e t Le el ee Re o e the ask holde u s e the o e thu s e s a d pi k up a d lip the ask stage upside do Pla e ou ask o to the holde ith the ask fa e up hi h ill e o e fa e do he etu ed to its pla e P ess the MAIN MENU uto o the LCD s ee a d the p ess the MANUAL TE T uto o the LCD s ee O the e t e u, p ess MA K VACUUM to lo k the ask i pla e Flip the ask holde a k o e, a d s e i the fou thu s e s Pull out the hu k stage fo loadi g the su st ate it slides fo a d ha d Pla e su st ate o to the hu k a d alig it ith the th ee guide pi s P ess the UB TRATE VACUUM uto o the LCD o t ol pa el The su st ate should e su ked o to the hu k lide a k i the hu k stage o pletel At the i al a ge of oio ou ill oi e it lightl lo k i to pla e Fo F o t Side Alig e t: A O the u e t Le el ee, p ess MAIN MENU, a d the PROCE ETTING ele t FRONT i the PROCE MODE odule oto ight o e p essi g up o do a o s P ess LEVEL CREEN top let o e to etu wwwbuffaloedu/shared-facilities-equip

4 B Make su e the toggle s it h is o TOP OPTIC side lo ated at the let f o t side of the ask alig e The t o ILLUMINATION k o s e t to it o t ol the LED a klight illu i aio i te sit of the top t o a e as C The top opi s desig has a X Y jo si k to adjust i X a d Y di e io s, ) Fo usi g a d Mag ii aio Adjust e t k o s o the i os opes, Theta Adjust e t k o at the a k side, a d epa aio Adjust e t s e s fo ha gi g the dista e et ee the t o i os opes Refe to the follo i g Fig Mo e the X Y jo si k to lo ate the ask st u tu es o a ks Fo us the i os opes o the st u tu es the ) Fo usi g k o s wwwbuffaloedu/shared-facilities-equip

5 wwwbuffaloedu/shared-facilities-equip

6 Fo Ba k Side Alig e t: A O the u e t Le el ee, p ess MAIN MENU, a d the PROCE ETTING ele t BACK i the PROCE MODE odule oto ight o e p essi g up o do a o s P ess LEVEL CREEN top let o e to etu B Make su e the toggle s it h is o BOTTOM OPTIC side lo ated at the let f o t side of the ask alig e The t o ILLUMINATION k o s e t to it o t ol the LED a klight illu i aio i te sit of the oto t o a e as C The oto opi s desig has o e set of X a is a d Y a is a ual k o s, a d ) Fo usi g oto ized k o fo the posiio i g of ea h oto a e a o Theta o Mag ii aio Adjust e t Refe to the follo i g Fig Adjust the X a is a d Y a is k o s to lo ate the ask st u tu es o a ks Fo us the oto a e as o the st u tu es the ) Fo usi g oto ized k o s wwwbuffaloedu/shared-facilities-equip

7 O the u e t Le el ee, p ess LEVEL uto This ill o e the hu k up, auto ai all ake the su st ate su fa e pa allel to the ask, a d the o e the hu k do fo e tai alig e t gap Du i g this step, so e f i ge pate s ill e o se ed o the i ages f o the o ito s o e ta il, a d the disappea he the hu k lo e ed do The LCD o t ol pa el ill auto ai all s it h to the e t Ru ee Note that the g ee LED light )e o Gap I di ato Light elo the hu k should e o ate the le eli g p o ess G ee light o, ea s the e is a gap et ee the su st ate su fa e a d the ask Adjust the ) a is Gap K o as sho i Fig ou te lo k ise u il the g ee light tu s of This o es the alig e t gap to ze o Adjust the s ali g dial su ou di g the Gap K o to at h the posiio of the a o o the Gap K o to u The, o the LCD o t ol pa el, p ess )ERO GAP uto It ill sho GAP = u Tu the Gap K o lo k ise to set the alig e t gap to a out u e o e ded The LCD o t ol pa el ill sho GAP = u The eadi g f o the s ali g dial a e slight dife e t If so, adjust the s ali g dial to at h the a o posiio to hat is sho o the s ee u TIPS: The alig e t gap should e sele ted depe di g o the thi k ess of ou sa ple i ludi g a oai gs It a e la ge o s alle tha u wwwbuffaloedu/shared-facilities-equip

8 122 The su st ate alig e t is o t olled th ee i o ete k o s: X a is, Y a is a d Theta Adjust e t Make su e the g ee light is o a gap e ists efo e alig i g the su st ate O the u e t Ru ee, p ess MAIN MENU, a d the PROCE ETTING et ou desi ed e posu e i e i the EXPO URE TIME IN ECOND odule top ight o e P ess LEVEL CREEN top let o e to etu to the Le el ee The, p ess MAIN MENU a d the eate RUN CREEN to etu to the Ru ee IMPORTANT: The 2105C2 Illumination Controller is set for 18 mw/cm2 constant intensity for the UV lamp The UV intensity is fixed for each exposure Different The e a e fou e posu e odes p o i it /gap e posu e ode, sot o ta t ode, ha d o ta t ode a d a uu o ta t ode Va uu o ta t ode p o ides the highest pate i g esoluio, hile p o i it /gap e posu e ode p o ides the lo est Fo p o i it /gap e posu e ode, si pl p ess CYCLE uto Fo sot o ta t ode, p ess MOVE TO CONTACT PO ITION, a d the CYCLE uto Fo ha d o ta t ode, p ess MOVE TO CONTACT PO ITION, the N HARD CONTACT, a d i all CYCLE uto Note that the UB TRATE VAC gauge ill go to ze o i this ode Fo a uu o ta t ode, p ess MOVE TO CONTACT PO ITION, the CONTACT VACUUM, a d i all CYCLE uto Note that the UB TRATE VAC ill go to ze o a d the CONTACT VAC ill ead the applied a uu et ee the su st ate a d the ask If ou sa ple is too f agile to sustai high a uu, adjust the CONTACT VAC ADJU TMENT k o to edu e the applied a uu Du i g the CYCLING step, the UV la p ill o e to the e pose posiio a d tu o the shute fo the desi ed e posu e i e Ate the e posu e, the la p ill etu to the alig posiio a d the hu k ill e lo e ed do u loaded auto ai all U load the Su st ate 1251 Pull out the chuck stage for unloading the substrate 1252 P ess MAIN MENU, a d the LEVEL CREEN O the Le el ee, p ess UB TRATE VACUUM to tu it off 1253 Remove substrate from the chuck 1254 Push the chuck stage completely back into position U load the Mask 1261 lide the top i os opes X Y jo sti k to the a k of the ask holde 1262 Loosen the four thumbscrews on the mask holder and flip it up with the wwwbuffaloedu/shared-facilities-equip patterning results can be achieved by adjusting the exposure time

9 127 Spe ii aio s / Featu es mask face up 1263 P ess MAIN MENU, a d the MANUAL TE T P ess MA K VACUUM to turn it off 1264 Remove the mask from the mask holder 1265 Replace the mask holder onto the system Shutdown the System 1271 Turn off the white circuit breaker at the back side of the aligner to shut down the mask aligner system power 1272 Turn off the POWER circuit breaker to shut down the 2105C2 Illumination Controller and the UV lamp 1273 Turn off the red power switch on the surge protector at the back side of the aligner to shut down the main power 1274 Complete the Autho ized Use Che k I Log a d e o d the e d ti e Report all problems encountered in the comments field E a le to ake oth top a d a k side alig e t the fou - a e a opi al s ste W NUV e u la p ith u ifo ea size up to " dia a d use seta le i te sit le els Fou e posu e odes: sot o ta t, ha d o ta t, a uu o ta t, a d p o i it /gap E posu e i e seta le: se i se i e e ts E posu e esoluio i NUV: o u - i o u de a uu o ta t ode o i o u de sot o ta t ode o i o at i o p o i it /gap ode Mask sizes: a d Mask thi k ess: fo a d fo u st ate:, a d afe s a d s ua e su st ates Use Re ui e e ts 1 Complete Environment, Health & Safety (EH&S) training 2 Complete initial orientation and training for the Davis Hall EE Cleanroom 3 Receive training on this piece of equipment from lab personnel 4 Schedule equipment time using the calendar wwwbuffaloedu/shared-facilities-equip The Mask Aligner OAI 806 MBA must be used by authorized personnel only All authorized users are expected to read and understand this SOP and follow the operation instructions carefully No unauthorized personnel may use this equipment All users must wear appropriate personal protective equipment To become an authorized user, one must:

10 5 Read and fully understand this SOP General Safety # Required Personal Protective Equipment Users must wear coveralls, bouffant caps, shoe covers, safety glasses, and gloves Shorts, open-toed shoes, high heels, and skirts, are forbidden Emergency Procedures and Contacts For non-life threatening emergencies: use the main cleanroom phone and call the emergency contact #'s listed on the wall or for police / ambulance, call In case of fire or other life threatening emergency: Exit the cleanroom through an emergency exit door Pull one of the fire alarms located in the main hallway outside of the cleanroom Dial campus police / ambulance at University after hours laboratory use policy No working alone, use the buddy system! Revised by Da id Easo Da id Easo / / Date / / st Modification Release fo Da is lea oo Updated fo ai g 40 wwwbuffaloedu/shared-facilities-equip

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