Porous silicon as base material of MEMS-compatible fuel cell components
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1 Porous silicon as base material of MEMS-compatible fuel cell components José Geraldo Alves Brito Neto Tokyo University of Science - Faculty of Science and Technology Department of Mechanical Engineering - Hayase Group
2
3 Cathode Anode Galvanic Cells
4 Galvanic Cells Load Cathode Anode Salt Bridge
5 Anions Electrons Anode Side Reduced Reagent Cations Oxydized Product
6 Electrons Load Salt Bridge Cations Cathode Anode Anions
7 Cations Electrons Cathode side Anions Reduced Product Oxidized Reagent
8 Galvanic Cells Load Current Cathode Anode Salt Bridge
9 Galvanic Cells Current Load Anode Cathode
10 Galvanic Cells Current Load Ri Anode Cathode
11 Fuel Cells Electron donor: Fuel (H2, methanol, ethanol, glucose??) Electron acceptor: O2 Salt bridge: aqueous alkaline solution, molten alkaline carbonate, O2- conducting ceramic, polymeric electrolyte
12 Polymer Electrolyte Membrane Fuel Cells
13 Polymer Electrolyte Membrane Fuel Cells Nafion
14 Polymer Electrolyte Membrane Fuel Cells
15 Polymer Electrolyte Membrane Fuel Cells
16 Polymer Electrolyte Membrane Fuel Cells Current collector/ Field flow plates
17 Polymer Electrolyte Membrane Fuel Cells Gas diffusion layer
18 Polymer Electrolyte Membrane Fuel Cells Oxidation Catalyst Layer
19 Polymer Electrolyte Membrane Fuel Cells Anode
20 Polymer Electrolyte Membrane Fuel Cells Cathode Current collector Gas diffusion layer Reduction catalyst layer
21 Polymer Electrolyte Membrane Fuel Cells Polymer Electrolyte Membrane
22 Polymer Electrolyte Membrane Fuel Cells
23 Polymer Electrolyte Membrane Fuel Cells H2 O2
24 Current Collector Gas Diffusion Layer H2 Catalyst Layer Polymer Electrolyte Membrane H2 Electrons H+
25 Electrons Load H2 O2
26 Polymer Electrolyte Membrane Catalyst Layer Gas Diffusion Layer Current Collector H2O H+ O2 O2 Electrons
27 Polymer Electrolyte Membrane Fuel Cells Typically employed materials: Gas diffusion layer: carbon cloth Catalyst layer: platinum nanoparticles supported on finely divided carbon black Polymer electrolyte membrane: Nafion
28 source: Li et al - Electrochimica Acta
29 2 He (...) B C N O F Ne Al Si P S Cl Ar Cu Zn Ga Ge As Se Br Kr (...)
30 2 He (...) B C N O F Ne Al Si P S Cl Ar Cu Zn Ga Ge As Se Br Kr (...)
31 We must synthesize and manipulate porous materials by MEMS-compatible methods
32 We must synthesize and manipulate porous materials by MEMS-compatible methods Porous Silicon
33 Porous Silicon Silicon Wafer Counter electrode HF-containing bath
34 Porous Silicon Facile synthesis Compatible to MEMS technologies Wide range of pore morphologies can be obtained by changing simple parameters.
35 Porous Silicon Porous layer 5 m Bulk silicon
36 Porous Silicon
37 Porous Silicon Porous layer Bulk silicon 500nm
38 Porous Silicon
39 Immersion plating By immersion of the porous silicon sample in a solution containing PtCl62ions and HF, the following reactions take place: PtCl62-(aq) + Si(s) + 2H2O - SiO2(s) + 6F (aq) + 4H+(aq) - Pt(s) + SiO2(s) + 4H+(aq) + 6Cl (aq) SiF62-(aq) + 2H2O
40 Porous layer 5 m Bulk silicon
41 Porous platinum!! Porous layer Bulk silicon 5 m
42 138 Pt M line 810 Si K line 5 m Porous layer Bulk Silicon 5 m 0 0
43
44 Porous Platinum Roughness factors on the order of 600; Area/volume rations on the order of 80 m2/cm3
45
46 Cell assembly Silicon wafer Oxide layer
47 Cell assembly Removal of oxide layers by dipping in concentrated HF
48 Cell assembly Sputtering of a Cu layer
49 Cell assembly Patterned dissolution of the Cu layer
50 Cell assembly Formation of a porous silicon layer on the opposite face
51 Cell assembly Immersion plating of the Pt catalyst
52 Cell assembly Deposition of Ti and Au contact bands
53 Cell assembly Plasma etching of the fuel channels
54
55 Cell assembly Anode Cathode
56 Cell assembly Anode Polymer Electrolyte Membrane Cathode
57 Cell assembly Hot pressing of the membrane-electrode assembly Anode Polymer Electrolyte Membrane Cathode
58
59 Electrons H2 A Load Anode Cathode O2
60
61 Next Steps Extend the synthetic method to other metals Improve the characteristics of the porous Pt layers Solve problems of the cell assembly procedure Develop methods to produce other components of the cell based on porous silicon
62
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