Approval Block. Prepared by: Signature Date Evan Parnell 08 NOV Reviewed by: Signature Date. Approved by: Signature Date

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1 ATS-SOI-3660 Page: 1 of 6 Approval Block Prepared by: Signature Date Evan Parnell 08 NOV 2013 Reviewed by: Signature Date Brian Flynn 08 NOV 2013 Approved by: Signature Date Kristal Jewell 08 NOV 2013 Historical Reference Section: Section Name Section Number (i.e., 5.2.1) Revision Affected Explanation of Change Cover page N/A A Added Historical Reference Section, Changed Approval Block Format Footer N/A A Changed Fax# Header N/A B Updated Logo Document Control N/A C Review

2 ATS-SOI-3660 Page: 2 of 6 1. Purpose 2. Scope This document provides instruction for the utilization of the Met One Airborne Particle Counters. This document shall be followed by all personnel operating the Model A2400 and A2408 Airborne Particle Counters 3. References 3.1. Operator s Manual for the Model A2400 Airborne Particle Counter 3.2. Operator s Manual for the Model A2408 Airborne Particle Counter 3.3. ATS Safety Manual and Material Safety Data Sheet (MSDS) Archive Binder. 4. Equipment and Materials 4.1. Model A2400 Airborne Particle Counter 4.2. Model A2408 Airborne Particle Counter 4.3. Carrying case. 5. Safety Refer to ATS Safety Manual for safe operation of electrical equipment. 6. Responsibility 6.1. It is the responsibility of the President to assure that this document remains current It is the responsibility of the President, or any trained technician designee, to provide documented training in the utilization of this device.

3 ATS-SOI-3660 Page: 3 of It is the responsibility of the President to assure the general maintenance of this device and to assure that the recertification is performed in a timely manner It is the responsibility of the individual(s) operating this equipment to follow the procedures specified by this document. 7. General Description 7.1. The Met One Airborne Particle Counters are forward light-scattering, linear airborne particle counters. They operate on 120 volts, 50 or 60 Hz, adjusting automatically. The basic functions of the airborne particle counters are to sample air or other gas and report the quantity of particulates in the sample Sampling System: A vacuum pump provides a sample flow rate of 1 cfm for the instrument. It is an oil-free, dual head, rotary vane pump with a direct-coupled DC motor Scattering Chamber: The scattering chamber is not only an integral part of the sampling system; it is a major component in itself. The scattering chamber is a complex electro-optical unit that consists of a pair of hollow cones connected at the apexes. A pair of collimating lenses first straightens the light emerging from the light source, and then focuses it at the center of the sampling cone. An aperture forms a dark cone around the photomultiplier, preventing light from arriving directly on the photomultiplier. A condensing lens opposite the LED source focuses light scattered into this dark cone onto the photomultiplier tube Electronics: The signal from the photomultiplier is amplified and delivered to a signal-conditioning, analog-to-digital converter that is then sent to the microprocessor. 8. Theory of Operation 8.1. When air or gas is drawn through the scattering chamber, particulate matter in the sample passes through the focal point of the scattering chamber. Particulate matter scatters light into the dark cone and onto the photomultiplier tube, which converts the light into an electrical signal. The signal is amplified and digitized, then analyzed by a microprocessor to determine the intensity of the light scattered by the signal. This

4 ATS-SOI-3660 Page: 4 of 6 signal is then compared to a reference signal to provide an output that is normalized by the reference signal. An airborne particle counter is ideally suited to detect particulate matter in air or gas, reporting the mass concentrations encountered on a digital display. Particles less than 0.3 micron to approximately 50 microns can be detected. Since the particle counters reports concentration of particulate matter (relatively independent of size, shape, or color), many applications are possible. The airborne particle counters report particulate in either six channels (A ,.0.5, 1.0, 5.0, 10.0 and 20.0 um) or two channels (A and 5.0 um). 9. Preliminary Considerations 9.1. Collect all equipment necessary to conduct the desired operation Ensure that the equipment is within certification. 10. Setup 10.1 Ensure equipment is attached to a 120 volt power source. The sampling head (Isokinetic probe, high pressure gas diffuser) is to be attached by way of hytel-belvine tubing to the sample inlet connection on the top of the particle counter Place the isokinetic probe into the air flow stream. 11. Operation 11.1 Procedure a) Verify that all components of the cleanroom system which contribute to its operation are complete and functioning in accordance with the requirements of the type of cleanroom and the operational mode under test as agreed upon by the customer and ATS. b) Set operation on <Automatic> c) Set readout for <Cumulative>

5 ATS-SOI-3660 Page: 5 of 6 d) Set concentration for <0.5 um> e) Set beep mode for <00000> f) Set sample period for <1 minute> and hold for <0.5 seconds> g) Clear memory and enable printer by touching <enable>. h) Set i) Establish a test point grid at the working level that will satisfy user requirements and determine the number of sample locations that satisfy the specified cleanliness class. Determination of the number, location, and grid pattern of sampling points should be based on the specified cleanliness class and the grid specifications of ISO (FED-STD-209). j) Perform the airborne particle test by operating the laser particle counter by touching <start> and in accordance with the manufacturer s operational manual. Ensure that the measurements are made under ambient conditions. k) Reporting for the airborne particle count challenge should include the following: 1) Particle size range 2) The volume of air sampled 3) The particle counts 4) The time 5) The sampling point locations 12. Maintenance Weekly - Clean the scanning probe screens. These are located on the black and red circular scanning probe nozzles. - Clean the gross particulate screen located at the base of the flexible scanning probe extension.

6 ATS-SOI-3660 Page: 6 of 6 - Remove any loose debris from the Scanning Probe and front panel sampling ports. Annually - Calibrate and clean the airborne particle counter.

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