Lab1. Resolution and Throughput of Ion Beam Lithography.
|
|
- Edgar Benson
- 5 years ago
- Views:
Transcription
1 1 ENS/PHY463 Lab1. Resolution and Throughput of Ion Beam Lithography. (SRIM 2008/2013 computer simulation) Objective The objective of this laboratory work is to evaluate the exposure depth, resolution, and throughput of focused ion beam (FIB) processing of lithographic resist using SRIM simulation software. This objective is achieved by performing simulation of the process of ion irradiation of positive photoresist and determination of the size of ion beam exposed area. Principles Exposure of lithographic resist to ion irradiation results in its chemical modification. In case of positive resist, the ion-irradiated area of the resist becomes more soluble and can be removed in a solvent. Energetic ions propagating through target material collide with atoms of the target losing their energy. If the collisions are strong enough and the energy transferred to the target atoms exceeds a certain threshold energy Ed (displacement energy), these atoms leave their regular positions producing vacant atomic sites (vacancies). The knocked-out atoms and vacancies are the defects responsible for the changes of the properties of the ion-irradiated resist. A common software used for simulation of ion irradiation and the irradiation-induced defect production is SRIM [ Below, Fig. 1 shows an example of simulation of propagation of one Ga ion of initial energy 100 kev in a solid carbon target of density 1.2 g/cm 3.
2 2 Fig. 1. SRIM2008 simulation of defect production in solid carbon of density 1.2 g/cm 3 by one Ga ion of initial energy 100 kev. Red trace shows trajectory of Ga ion. Green lines and dots show trajectories of knocked-out carbon atoms of the target and the created vacancies. Bacause of the collisions with the atoms of target, the ion does not proparate along straight line. It experiences multiple collisions (scatterings). Some target atoms are knocked out of their regular sites violently and may move over long distances sometimes penetrating deeper than the initial ion. Since the energy loss of the ion and knock-outs is random process, every ion has its unique pathway and unique pattern of the created defects. The result of simulation of ion irradiation with many ions is shown in Fig. 2. Fig. 2a shows trajectories of the primary (implanted) ions. Fig. 2b shows pathways of the knock-out atoms of the target and the created defects. Fig. 2. SRIM2008 simulation of irradiation of solid carbon target of density of 1.2 g/cm 3 by 200 Ga ions of initial energy 100 kev. (a) Trajectories of ions are shown by red traces. Final positions of the ions are shown by black dots. (b) Trajectories of knock-out carbon atoms and distribution of created defects are shown by green lines and dots respectively. The distribution of the implanted ions through the depth has approximately gaussian shape the two main parameters of which are the depth of the maximum density Rp (projected range of ions, or ion range) and the width of the gaussian 2ΔRp. ΔRp is the longitudinal straggling, or average scattering of ions through the depth (Fig. 3a).
3 3 Fig. 3. SRIM2008 simulation of irradiation of solid carbon of density 1.2 g/cm 3 by Ga ions of initial energy 100 kev. (a) Depth distribution of density of the implanted Ga ions. (b) Depth distribution of density of the defects (vacancies). Depth distribution of the defects is shown in Fig. 3b. A considerable defect production starts from the very surface of the irradiated resist. The defect distribution curve does not have a gaussian shape. However, its tale towards greater depths can be approximated by gaussian distribution. Comparing distributions of the implaned ions and the created defects one can see that average penetration of the ions in deeper than that of the defects. The depth of the maximum density of the implanted ions is about 110 nm (1100 Å), whereas the maximum density of defects is at a depth of 70 nm (700 Å). Exposure Depth Since the radiation defects are the primary reason for the change of solubility of resist, the defect distribution through the depth determines the depth of the exposure and hence the thickness of the resist layer which can be processed with given ion species of given energy and given exposure dose. From the graph on Fig. 3b one can conclude that the maximum penetration depth of defects is about 200 nm. However, the density of defects at depths greater than 130 nm drops down rapidly. Thus, the effective depth of penetration of defects Rd is only about 130 nm. A simple estimation of the magnitude of Rd can be done calculating sum of the depth of the maximum concentration of implanted ions Rp (projected range of ions, or ion range) and the longitudinal straggling ΔRp: Rd = Rp +ΔRp. The results of the simulation shown in Fig. 3 yields in Rp = nm and ΔRp = 28.1 nm. Correspondingly Rd = nm. Thus, the thickness of the resist layer which can be used for this ion irradiation is about 140 nm. More precise calculation takes into account the dose of the ion irradiation and the critical concentration of defects corresponding to clearance dose Dc. With the increase in the ion dose, the
4 4 layer in which the concentration of defects exceeds Dc expands in depth and ultimately can be as deep as 200 nm. In order to calculate the ion dose required for the exposure of resist of a given depth d, the efficiency of defect production nd at this depth is determined from Fig. 3b. For instance, at a depth of 160 nm nd = 0.1 vacancy/ion*å = 10 7 vac/ion*cm. Then, the ion dose needed to achieve the critical defect concentration Nc at depth d is Dc = Nc/nd. A common critical defect concentration (clearing defect concentration) corresponding to the clearing dose Dc of polymeric resist is about Nc = cm -3. Thus, Dc = cm -2 at depth 150 nm. For a resist layer of thickness 100 nm, nd = 1.25 vacancy/ion*å = vac/ion*cm. Then the corresponding Dc = cm -2. Resolution Fig. 2 shows that even when the ions enter target in one and the same point, they do not propagate along one and the same straight line because of lateral (side) scattering. The lateral scattering broadens the damaged area and this broadening is especially pronounced for ion beams of small diameter. The lateral scattering of ions is described by lateral range Rl and lateral straggling ΔRl. The lateral deviation of ions from straight propagation shown in Fig. 2a is about 30 nm, whereas it is about 70 nm for defects (Fig. 2b). The lateral distribution of defects can be described in the same way as we did it for the depth distribution. Thus, we assume that the effective depth of the lateral propagation of defects equals the sum of the lateral range and the lateral straggling: Rdl = Rl +ΔRl. The simulation of lateral scattering is shown in Fig. 4. It is seen that the lateral scattering increases with depth. For simple modeling, average values of lateral range and lateral straggle can be taken: Rl = 15.7 nm and ΔRl = 19.9 nm. Correspondingly, Rdl = 35.6 nm.
5 5 Fig. 4. SRIM2008 simulation of lateral scaterring of 100 kev Ga ions in solid carbon of density 1.2 g/cm 3. Lateral scattering causes broadening of the area exposed to ion irradiation and consequently deteriorates resolution of ion lithography. The effective resolution of lithography R utilizing exposure with ion beam focused to diameter D can be estimated as: R = D + 2Rdl. In case of our simulation example, an ion beam of diameter 20 nm can provide resolution of 90 nm in 140 nm thick resist. Clearing dose An important parameter of any lithography method including ion beam lithography is the clearing dose Dc. Dc correspond to the number of particles per unit area sufficient for chemical modification of the resist in the irradiated area through the whole resist depth. Clearing dose can be also presented as the density of energy losses deposited by ions. Energy losses of energetic ions propagating through target material have to components: energy losses in elastic collisions with the target atoms (nuclear stopping) and energy losses in inelastic interaction with the target electrons (electronic stopping). The main result of nuclear stopping is the production of defects and heating the target (generation of phonons). Depth distribution of energy losses in our simulation example is shown in Fig. 5.
6 6 Fig. 5. SRIM2008 simulation of electronic (a) and nuclear (b) energy losses of 100 kev Ga ions in solid carbon of density 1.2 g/cm 3. Red traces show direct losses by Ga ions. Blue areas show losses by carbon recoils. Comparing Figs. 3, 4 and 5 one can conclude that effective deposition of energy and generation of defects occur in a layer of thickness Rd. The value of the clearing dose is specific for every combination ion specie and type of resist. It is established experimentally. Let us assume that Dc of 100 kev Ga ion beam lithography is cm 2. Then, for a 140 nm thick resist, average density of energy losses Eaverage is: Eaverage = (Dc Eion)/Rd = (10 12 cm -2 * 10 5 ev * J/eV)/140x10-7 cm = J/cm 3. Area density of the deposited energy, or the clearing dose is: Dc = Eaverage * Rd = 16 mj/cm 2. Thoughput Throughput of lithographical procedure T is the speed of exposure of resist at the clearing dose: T = A/t = I/(eDc) where A is the irradiated area and t is the time required for this irradiation, e is the electron charge and I is the ion beam current. For ion beam I = 10 pa, T = 100 µm 2 /s. If an ion beam of diameter 20 nm is used for making a pattern of straight lines, this pattern can be produced with a speed of 5 cm/s. Tasks of the lab work 1. Compare parameters of two lithography techniques which utilize Ga and He ion beams. In both cases a carbon-based resist of density 1.4 g/cm -3 and clearance dose 100 J/cm 3 is used. Displacement energy if carbon atoms in resist is 15 ev.
7 7 Input parameters of Ga ion beam lithography: Ion energy - 50 kev. Ion beam current is 20 pa. Nominal diameter of the ion beam is 10 nm. Sensitivity of resist Nc = cm -3. Input parameters of He ion beam lithography: Ion energy - 30 kev. Ion beam current is 10 pa. Nominal diameter of the ion beam is 5 nm. Sensitivity of resist Nc = cm Calculate thickness of the resist layer corresponding to the given clearing dose cm Calculate maximum thickness of the resist layer for the irradiation dose cm -2. Parameters to be found and compared: 1. Parameters of distribution of ions. 2. Parameters of distribution of damage. 3. Lithography resolution. 4. Clearing dose in units [ion/cm 2 ] and [J/cm 2 ]. 5. Throughput for areal exposure and line exposure. Questions 1. Which parameters of ion beam exposure are to be changed in order to process a thicker resist layer? 2. What are the advantages and disadvantages of using heavy ions for ion beam lithography? 3. What are the advantages and disadvantages of using light ions for ion beam lithography? 4. Lateral scattering makes resolution of ion beam lithography greater than ion beam diameter. Is it possible for ion beam lithography to achieve resolution less that ion beam diameter? Lab2. Ion Implantation. (SRIM 2008/2013 computer simulation) 1. Objectives - To give students hand-on experience of numerical simulation of ion doping used for fabrication of semiconductor nanodevices. - To familiarize students with SRIM software used for numerical simulation of ion implantation. - To perform numerical simulation of ion doping of planar structure of bipolar transistor.
8 Principles Parameters of ion-doped layer Ion implantation is the main doping method used for fabrication of in microelectronic devices. Over all, it is the most precise and controllable method of impurity doping of solids. In ion implantation, impurity toms are introduced into semiconductor substrate by ionizing them (creating ions), accelerating the ions to energies ranging from kiloelectronvolt (kev) to megaelectronvolt (MeV), and then literally shooting these ions onto the substrate surface (Fig. 1). Fig. 1. Principle of local doping of semiconductor using ion implantation and masking technique. Openings in the mask define the ion-doped areas. Mask must be thick enough to protect the masked areas from doping. Ions penetrate into semiconductor substrate to a certain doping depth Ri. This way a buried ion doped layer is created. Distribution of density of the implanted ions N(x) through the depth x is not uniform. It is approximately described by a Gaussian function (1): Thus, the distribution of ions through the depth on the implanted layer is described by a broad peak, the parameters of which are the maximum concentration Ni located below the surface at a depth Rp (the projected range) and the spread Rp (implantation straggle) (Fig. 2). (1)
9 9 2 Rp Rp Fig. 2. Depth distribution of boron ions implanted into silicon with equal dose cm -2, but at different energies. Depth of the doped layer and its width (2 Rp) increase with the implantation energy. Projected range Rp and straggling Rp are shown for 400 kev ions. The doping depth Ri primarily depends on the mass of the implanted ions, their energy and the chemical composition of the substrate. It is roughly proportional to the ion energy and inversely proportional to the ion mass. The ion-doped layer is buried under the substrate surface. The average depth of the doped layer is Rp, and its effective width is 2 Rp. In order to dope selected areas, masking technique is used. Mask covers the areas which must remain undoped. The openings in the mask define the areas of ion doping (Fig. 1). The mask must be thick enough to stop the ions completely and prevent from doping in the masked areas. Using ion implantation, layers doped with donors (e.g. phosphorous ions, P + ) and acceptors (e.g. boron ions, B + ) can be created. Using multiple implantations with appropriate energies through corresponding masks a multilayer doped structure can be made. Fig. 3 shows an example of threelayer ion-doped structure of bipolar transistor.
10 10 Fig. 3. Structure of planar bipolar transistor made by two implantations of B + ions and one implantation of P + ions Numerical simulation of ion doping with SRIM computer code Stopping and Range of Ions in Matter (SRIM) is a group of computer programs which calculate interaction of ions with matter. The essential program of these is Transport of Ions in Matter (TRIM). SRIM is very popular in the ion implantation research and technology community. The programs were developed by J. F. Ziegler and J. P. Biersack around 1983 and are being continuously upgraded. SRIM is based on a Monte Carlo simulation method, namely the binary collision approximation with a random selection of the impact parameter of the next colliding ion. The main output data of the SRIM simulation used in this lab work are three-dimensional distribution of the implanted ions and the implantation induced damage. The output data of simulation can be viewed in plots (while the calculation is proceeding) and also in detailed numerical files. The plots are especially useful to see if the calculation is proceeding as expected, but are usually limited in resolution. Most of the data files can be requested in the Setup Window for TRIM (menus at the bottom of the window), or can be requested during the calculation. All calculated averages are made over the entire calculation. Simulation of fabrication of planar bipolar p-n-p structure Simulation of ion doping of p-n-p structure starts with the calculation of the depth distribution of boron acceptors in the deepest p-type collector layer. Energy of the boron ions and the ion dose are chosen so that they ensure formation of the collector layer at the required depth with the required concentration of acceptors. An example is shown in Fig. 4. Collector layer is formed at a depth range from 260 to 500 nm by implantation of 100 kev B + ions (Fig. 4a). The maximum acceptor concentration of cm -3 is achieved at a depth of 350 nm (collector depth RC). The second step is the simulation of formation of the phosphorous-doped n-type base layer. The energy of P + ions and their dose have to be adjusted so that the distribution of the implanted phosphorous overlaps with the boron distribution in the collector layer only partially. The maximum concentration in the phosphorous-doped layer must correspond to the required density of donors in the base layer. In the depth range of overlapping, boron acceptors and phosphorous donors compensate each other. At the depth RCB, where the boron and phosphorous concentrations are equal, complete compensation occurs. At this depth the collector-base p-n junction is formed. In Fig. 5a the base layer is formed at depths from 10 to 250 nm by implantation of 130 kev P + ions. The maximum donor concentration in the base layer is about cm -3 at a depth of 180 nm (base depth RB). Collector-base junction is formed at a depth of 260 nm (RCB). Once RCB is determined, the simulation of the boron ion doping of the emitter layer is performed. The ion energy and dose are to be adjusted so that the emitter boron-doped layer has the required acceptor concentration and forms the emitter-base p-n junction at the required depth REB. The emitter layer in Fig. 4b is formed by 25 kev B + ion implantation. The maximum acceptor concentration in the emitter layer is about cm -3 at a depth of 110 nm (emitter depth RE) The emitter-base junction is formed at a depth of 160 nm (REB).
11 Phosphorous concentration, cm -3 Dopant Concentration, cm -3 Boron Concentration, cm -3 Boron Concentration, cm x10 17 B 100 kev 1.2x10 18 B 25 kev 4.0x x x x Depth (nm) Depth (nm) Fig. 4. Depth distribution of ion-implanted boron. (a) Implantation of 100 kev boron ions. (b) Implantation of 25 kev boron ions. 1.0x x10 17 P 130 kev 1.2x x10 18 Boron 6.0x x10 17 Phosphorous 6.0x10 17 Boron 4.0x x x x Depth (nm) Depth (nm) Fig. 5. (a) Depth distribution of ion-implanted phosphorous. (b) Distribution of implanted boron and phosphorous plotted on one graph. There is considerable overlapping of the distribution profiles.
12 Concentration, cm x10 18 EB junction 8.0x x10 17 BC junction 4.0x x10 17 p n p Depth, nm Fig. 6. Distribution of non-compensated boron acceptors (blue) and non-compensated phosphorous donors (red). Position of p-n junctions are shown with arrows. The ion dose which is required to achieve maximum concentration Nmax is calculated using formula: (2) 5.3. Procedure 1. Open SRIM simulation program. Open Stopping/Range Table option. Generate table of projected ranges and stragglings for boron ions. Determine ion energy EC corresponding to the chosen collector depth, e.g. RC = 400 nm. This depth corresponds to the projected range RpC of the boron ions in the collector layer. 2. Perform simulation of implantation of silicon with boron ions of energy EC. Obtain value of straggling RpC for the collector layer. Save the simulation data. 3. Calculate difference RCB = RpC - RpC. This is an approximate depth of the CB junction. 4. In the Stopping/Range Table option, generate table of projected ranges and stragglings for phosphorous ions. Determine energy EB of P + ions, for which RpB + RpB RCB. This is the energy of phosphorous ions implanted into base layer. 5. Perform simulation of implantation of silicon with phosphorous ions of energy EB. Obtain value of straggling RpC for the base layer. Save the simulation data.
13 13 6. Calculate difference REB = RpB - RpB. This is an approximate depth of the EB junction. 7. In the table of projected ranges and stragglings for B + ions find the energy of boron ions EE, for which RpB - RpB REB. This is the energy for boron ions implanted into emitter layer. 8. Perform two separate simulations of implantation in silicon of boron ions with the energies EC and EE. Perform simulation of implantation in silicon of phosphorous ions with the energy EB. Save the simulation data. 9. Plot the obtained three simulation profiles on one graph in coordinates Ion Concentration versus Depth. 10. Adjust each simulation profile so that the maximum concentrations correspond to the chosen values: e.g. NCmax = cm -3, NBmax = cm -3, and NEmax = cm Sum up the boron concentration profiles and subtract the phosphorous concentration profile. The depths where the total concentration is zero (complete compensation) are the junction depths. 12. Using the values of NC, NB and NE calculate the ion doses DC, DB and DE, which are required to achieve these concentrations Calculations and Discussion 1. Discuss the obtained distributions of boron and phosphorous over the depth of the transistor structure. 2. Compare the nominal depths of the CB and EB junctions found from Stopping/Range Tables with those obtained from the simulation profiles of implanted ions. 3. Calculate average concentrations of the implanted boron and phosphorous in collector, base and emitter layers. 5.5 Questions How you would change the parameters of ion doping in order to: a) reduce the width of the base layer? b) reduce concentration of active phosphorous in base layer?
Lab 3. Ion Implantation
1 Lab 3. Ion Implantation (SRIM 2008/2013 computer simulation) 1. Objectives - To give students hand-on experience of numerical simulation of ion doping used for fabrication of semiconductor nanodevices.
More informationLab 1. Resolution and Throughput of Ion Beam Lithography
1 ENS/PHY463 Lab 1. Resolution and Throughput of Ion Beam Lithography (SRIM 2008/2013 computer simulation) Objective The objective of this laboratory work is to evaluate the exposure depth, resolution,
More informationAccelerated ions. ion doping
30 5. Simulation of Ion Doping of Semiconductors 5.1. Objectives - To give students hand-on experience of numerical simulation of ion doping used for fabrication of semiconductor planar devices. - To familiarize
More informationDepartment of Engineering Science and Physics College of Staten Island. PHY315 Advanced Physics Laboratory. Lab Manuals
1 Department of Engineering Science and Physics College of Staten Island PHY315 Advanced Physics Laboratory Lab Manuals 2 Content Notes about this Lab Course Safety First! Lab Reports Lab Works 1. Basic
More informationIon Implantation ECE723
Ion Implantation Topic covered: Process and Advantages of Ion Implantation Ion Distribution and Removal of Lattice Damage Simulation of Ion Implantation Range of Implanted Ions Ion Implantation is the
More informationIon Implantation. alternative to diffusion for the introduction of dopants essentially a physical process, rather than chemical advantages:
Ion Implantation alternative to diffusion for the introduction of dopants essentially a physical process, rather than chemical advantages: mass separation allows wide varies of dopants dose control: diffusion
More informationFast Monte-Carlo Simulation of Ion Implantation. Binary Collision Approximation Implementation within ATHENA
Fast Monte-Carlo Simulation of Ion Implantation Binary Collision Approximation Implementation within ATHENA Contents Simulation Challenges for Future Technologies Monte-Carlo Concepts and Models Atomic
More informationInteraction of ion beams with matter
Interaction of ion beams with matter Introduction Nuclear and electronic energy loss Radiation damage process Displacements by nuclear stopping Defects by electronic energy loss Defect-free irradiation
More informationProcessing of Semiconducting Materials Prof. Pallab Banerji Department of Metallurgy and Material Science Indian Institute of Technology, Kharagpur
Processing of Semiconducting Materials Prof. Pallab Banerji Department of Metallurgy and Material Science Indian Institute of Technology, Kharagpur Lecture - 9 Diffusion and Ion Implantation III In my
More informationChanging the Dopant Concentration. Diffusion Doping Ion Implantation
Changing the Dopant Concentration Diffusion Doping Ion Implantation Step 11 The photoresist is removed with solvent leaving a ridge of polysilicon (the transistor's gate), which rises above the silicon
More informationIon Implant Part 1. Saroj Kumar Patra, TFE4180 Semiconductor Manufacturing Technology. Norwegian University of Science and Technology ( NTNU )
1 Ion Implant Part 1 Chapter 17: Semiconductor Manufacturing Technology by M. Quirk & J. Serda Spring Semester 2014 Saroj Kumar Patra,, Norwegian University of Science and Technology ( NTNU ) 2 Objectives
More informationCalculation of Ion Implantation Profiles for Two-Dimensional Process Modeling
233 Calculation of Ion Implantation Profiles for Two-Dimensional Process Modeling Martin D. Giles AT&T Bell Laboratories Murray Hill, New Jersey 07974 ABSTRACT Advanced integrated circuit processing requires
More informationReview of Semiconductor Fundamentals
ECE 541/ME 541 Microelectronic Fabrication Techniques Review of Semiconductor Fundamentals Zheng Yang (ERF 3017, email: yangzhen@uic.edu) Page 1 Semiconductor A semiconductor is an almost insulating material,
More informationEE 212 FALL ION IMPLANTATION - Chapter 8 Basic Concepts
EE 212 FALL 1999-00 ION IMPLANTATION - Chapter 8 Basic Concepts Ion implantation is the dominant method of doping used today. In spite of creating enormous lattice damage it is favored because: Large range
More informationLecture 5. Ion Implantation. Reading: Chapter 5
Lecture 5 Ion Implantation Reading: Chapter 5 Shockley patented the concept of Ion Implantation for semiconductor doping in 956 ( years after Pfann patented the diffusion concept). First commercial implanters
More informationSemiconductor Physics fall 2012 problems
Semiconductor Physics fall 2012 problems 1. An n-type sample of silicon has a uniform density N D = 10 16 atoms cm -3 of arsenic, and a p-type silicon sample has N A = 10 15 atoms cm -3 of boron. For each
More informationManufacturable AlGaAs/GaAs HBT Implant Isolation Process Using Doubly Charged Helium
Manufacturable AlGaAs/GaAs HBT Implant Isolation Process Using Doubly Charged Helium ABSTRACT Rainier Lee, Shiban Tiku, and Wanming Sun Conexant Systems 2427 W. Hillcrest Drive Newbury Park, CA 91320 (805)
More informationRadioactivity - Radionuclides - Radiation
Content of the lecture Introduction Particle/ion-atom atom interactions - basic processes on on energy loss - stopping power, range Implementation in in Nucleonica TM TM Examples Origin and use of particles
More informationStability of Semiconductor Memory Characteristics in a Radiation Environment
SCIENTIFIC PUBLICATIONS OF THE STATE UNIVERSITY OF NOVI PAZAR SER. A: APPL. MATH. INFORM. AND MECH. vol. 7, 1 (2014), 33-39. Stability of Semiconductor Memory Characteristics in a Radiation Environment
More informationMonte Carlo simulation and experimental study of stopping power of lithography resist and its application in development of a CMOS/EE process
Monte Carlo simulation and experimental study of stopping power of lithography resist and its application in development of a CMOS/EE process Predrag Habaš, Roman Stapor, Alexandre Acovic and Maurice Lobet
More informationVLSI Technology Dr. Nandita Dasgupta Department of Electrical Engineering Indian Institute of Technology, Madras
VLSI Technology Dr. Nandita Dasgupta Department of Electrical Engineering Indian Institute of Technology, Madras Lecture - 20 Ion-implantation systems and damages during implantation So, in our discussion
More informationMax-Planck-Institut für Plasmaphysik, EURATOM Association POB 1533, D Garching, Germany
DEPTH PROFILE REONSTRUTION FROM RUTHERFORD BAKSATTERING DATA U. V. TOUSSAINT, K. KRIEGER, R. FISHER, V. DOSE Max-Planck-Institut für Plasmaphysik, EURATOM Association POB 1533, D-8574 Garching, Germany
More informationMultilayer Nuclear Track Detectors for Retrospective Radon Dosimetry
Multilayer Nuclear Track Detectors for Retrospective Radon Dosimetry V. V. Bastrikov 1, M. V. Zhukovsky 2 1 Experimental Physics Department, Ural State Technical University, Mira St., 19/5, 620002, Ekaterinburg,
More informationModelling for Formation of Source/Drain Region by Ion Implantation and Diffusion Process for MOSFET Device
Modelling for Formation of Source/Drain Region by Ion Implantation and Diffusion Process for MOSFET Device 1 Supratim Subhra Das 2 Ria Das 1,2 Assistant Professor, Mallabhum Institute of Technology, Bankura,
More informationION IMPLANTATION - Chapter 8 Basic Concepts
ION IMPLANTATION - Chapter 8 Basic Concepts Ion implantation is the dominant method of doping used today. In spite of creating enormous lattice damage it is favored because: Large range of doses - 1 11
More informationLecture 150 Basic IC Processes (10/10/01) Page ECE Analog Integrated Circuits and Systems P.E. Allen
Lecture 150 Basic IC Processes (10/10/01) Page 1501 LECTURE 150 BASIC IC PROCESSES (READING: TextSec. 2.2) INTRODUCTION Objective The objective of this presentation is: 1.) Introduce the fabrication of
More informationIon implantation Campbell, Chapter 5
Ion implantation Campbell, Chapter 5 background why ion implant? elastic collisions nuclear and electronic stopping ion ranges: projected and lateral channeling ion-induced damage and amorphization basic
More informationSemiconductor Physics Problems 2015
Semiconductor Physics Problems 2015 Page and figure numbers refer to Semiconductor Devices Physics and Technology, 3rd edition, by SM Sze and M-K Lee 1. The purest semiconductor crystals it is possible
More informationSemiconductor-Detectors
Semiconductor-Detectors 1 Motivation ~ 195: Discovery that pn-- junctions can be used to detect particles. Semiconductor detectors used for energy measurements ( Germanium) Since ~ 3 years: Semiconductor
More informationSelf-study problems and questions Processing and Device Technology, FFF110/FYSD13
Self-study problems and questions Processing and Device Technology, FFF110/FYSD13 Version 2016_01 In addition to the problems discussed at the seminars and at the lectures, you can use this set of problems
More informationHeavy ion radiation damage simulations for CMOS image sensors
Heavy ion radiation damage simulations for CMOS image sensors Henok Mebrahtu a, Wei Gao a, Paul J. Thomas b*, William E. Kieser c, Richard I. Hornsey a a Department of Computer Science, York University,
More informationMake sure the exam paper has 9 pages (including cover page) + 3 pages of data for reference
UNIVERSITY OF CALIFORNIA College of Engineering Department of Electrical Engineering and Computer Sciences Spring 2006 EE143 Midterm Exam #1 Family Name First name SID Signature Make sure the exam paper
More informationEE143 LAB. Professor N Cheung, U.C. Berkeley
EE143 LAB 1 1 EE143 Equipment in Cory 218 2 Guidelines for Process Integration * A sequence of Additive and Subtractive steps with lateral patterning Processing Steps Si wafer Watch out for materials compatibility
More informationIntroduction. Neutron Effects NSEU. Neutron Testing Basics User Requirements Conclusions
Introduction Neutron Effects Displacement Damage NSEU Total Ionizing Dose Neutron Testing Basics User Requirements Conclusions 1 Neutron Effects: Displacement Damage Neutrons lose their energy in semiconducting
More informationIC Fabrication Technology
IC Fabrication Technology * History: 1958-59: J. Kilby, Texas Instruments and R. Noyce, Fairchild * Key Idea: batch fabrication of electronic circuits n entire circuit, say 10 7 transistors and 5 levels
More informationLecture 12 Ion Implantation
Lecture 12 Ion Implantation Chapter 9 Wolf and Tauber 1/98 Announcements Homework: Homework 3 is due at the start of class on Thursday (Nov 9 th ). Will be returned one week from Thursday (16 th Nov).
More informationInteraction of Particles and Matter
MORE CHAPTER 11, #7 Interaction of Particles and Matter In this More section we will discuss briefly the main interactions of charged particles, neutrons, and photons with matter. Understanding these interactions
More informationSimulation of Radiation Effects on Semiconductors
Simulation of Radiation Effects on Semiconductors Design of Low Gain Avalanche Detectors Dr. David Flores (IMB-CNM-CSIC) Barcelona, Spain david.flores@imb-cnm.csic.es Outline q General Considerations Background
More informationIntroduction to Semiconductor Physics. Prof.P. Ravindran, Department of Physics, Central University of Tamil Nadu, India
Introduction to Semiconductor Physics 1 Prof.P. Ravindran, Department of Physics, Central University of Tamil Nadu, India http://folk.uio.no/ravi/cmp2013 Review of Semiconductor Physics Semiconductor fundamentals
More informationChapter 9 Ion Implantation
Chapter 9 Ion Implantation Professor Paul K. Chu Ion Implantation Ion implantation is a low-temperature technique for the introduction of impurities (dopants) into semiconductors and offers more flexibility
More informationFabrication Technology, Part I
EEL5225: Principles of MEMS Transducers (Fall 2004) Fabrication Technology, Part I Agenda: Microfabrication Overview Basic semiconductor devices Materials Key processes Oxidation Thin-film Deposition Reading:
More informationA semiconductor is an almost insulating material, in which by contamination (doping) positive or negative charge carriers can be introduced.
Semiconductor A semiconductor is an almost insulating material, in which by contamination (doping) positive or negative charge carriers can be introduced. Page 2 Semiconductor materials Page 3 Energy levels
More informationLecture 1. OUTLINE Basic Semiconductor Physics. Reading: Chapter 2.1. Semiconductors Intrinsic (undoped) silicon Doping Carrier concentrations
Lecture 1 OUTLINE Basic Semiconductor Physics Semiconductors Intrinsic (undoped) silicon Doping Carrier concentrations Reading: Chapter 2.1 EE105 Fall 2007 Lecture 1, Slide 1 What is a Semiconductor? Low
More informationAnalysis of Ion Implantation Profiles for Accurate Process/Device Simulation: Analysis Based on Quasi-Crystal Extended LSS Theory
Analysis of Ion Implantation Profiles for Accurate Process/Device Simulation: Analysis Based on Quasi-Crystal xtended LSS Theory Kunihiro Suzuki (Manuscript received December 8, 9) Ion implantation profiles
More informationTest Simulation of Neutron Damage to Electronic Components using Accelerator Facilities
1 AP/DM-05 Test Simulation of Neutron Damage to Electronic Components using Accelerator Facilities D. King 1, E. Bielejec 1, C. Hembree 1, K. McDonald 1, R. Fleming 1, W. Wampler 1, G. Vizkelethy 1, T.
More informationUNIVERSITY OF CALIFORNIA College of Engineering Department of Electrical Engineering and Computer Sciences. Fall Exam 1
UNIVERSITY OF CALIFORNIA College of Engineering Department of Electrical Engineering and Computer Sciences EECS 143 Fall 2008 Exam 1 Professor Ali Javey Answer Key Name: SID: 1337 Closed book. One sheet
More informationDepth profiles of helium and hydrogen in tungsten nano-tendril surface morphology using Elastic Recoil Detection
PSFC/JA-12-82 Depth profiles of helium and hydrogen in tungsten nano-tendril surface morphology using Elastic Recoil Detection K.B. Woller, D.G. Whyte, G.M. Wright, R.P. Doerner*, G. de Temmerman** * Center
More informationMake sure the exam paper has 7 pages (including cover page) + 3 pages of data for reference
UNIVERSITY OF CALIFORNIA College of Engineering Department of Electrical Engineering and Computer Sciences Fall 2005 EE143 Midterm Exam #1 Family Name First name SID Signature Make sure the exam paper
More informationSTUDY ON IONIZATION EFFECTS PRODUCED BY NEUTRON INTERACTION PRODUCTS IN BNCT FIELD *
Iranian Journal of Science & Technology, Transaction A, Vol., No. A Printed in the Islamic Republic of Iran, 8 Shiraz University STUDY ON IONIZATION EFFECTS PRODUCED BY NEUTRON INTERACTION PRODUCTS IN
More informationChapter 2 Process Variability. Overview. 2.1 Sources and Types of Variations
Chapter 2 Process Variability Overview Parameter variability has always been an issue in integrated circuits. However, comparing with the size of devices, it is relatively increasing with technology evolution,
More informationCHARGED PARTICLE INTERACTIONS
CHARGED PARTICLE INTERACTIONS Background Charged Particles Heavy charged particles Charged particles with Mass > m e α, proton, deuteron, heavy ion (e.g., C +, Fe + ), fission fragment, muon, etc. α is
More informationElectrochemical Society Proceedings Volume
CALIBRATION FOR THE MONTE CARLO SIMULATION OF ION IMPLANTATION IN RELAXED SIGE Robert Wittmann, Andreas Hössinger, and Siegfried Selberherr Institute for Microelectronics, Technische Universität Wien Gusshausstr.
More informationImplantation isolation in AlGaAs/GaAs structures
Implantation isolation in AlGaAs/GaAs structures Lucas Held Master of Science Thesis Royal Institute of Technology (KTH) Stockholm, Sweden March 2011 Supervisor: Prof. Anders Hallén Abstract In this work
More informationEEE4106Z Radiation Interactions & Detection
EEE4106Z Radiation Interactions & Detection 2. Radiation Detection Dr. Steve Peterson 5.14 RW James Department of Physics University of Cape Town steve.peterson@uct.ac.za May 06, 2015 EEE4106Z :: Radiation
More informationSolid State Device Fundamentals
Solid State Device Fundamentals ENS 345 Lecture Course by Alexander M. Zaitsev alexander.zaitsev@csi.cuny.edu Tel: 718 982 2812 Office 4N101b 1 Outline - Goals of the course. What is electronic device?
More informationElectrical Resistance
Electrical Resistance I + V _ W Material with resistivity ρ t L Resistance R V I = L ρ Wt (Unit: ohms) where ρ is the electrical resistivity 1 Adding parts/billion to parts/thousand of dopants to pure
More informationXing Sheng, 微纳光电子材料与器件工艺原理. Doping 掺杂. Xing Sheng 盛兴. Department of Electronic Engineering Tsinghua University
微纳光电子材料与器件工艺原理 Doping 掺杂 Xing Sheng 盛兴 Department of Electronic Engineering Tsinghua University xingsheng@tsinghua.edu.cn 1 Semiconductor PN Junctions Xing Sheng, EE@Tsinghua LEDs lasers detectors solar
More informationChapter 2. Design and Fabrication of VLSI Devices
Chapter 2 Design and Fabrication of VLSI Devices Jason Cong 1 Design and Fabrication of VLSI Devices Objectives: To study the materials used in fabrication of VLSI devices. To study the structure of devices
More informationEE 5211 Analog Integrated Circuit Design. Hua Tang Fall 2012
EE 5211 Analog Integrated Circuit Design Hua Tang Fall 2012 Today s topic: 1. Introduction to Analog IC 2. IC Manufacturing (Chapter 2) Introduction What is Integrated Circuit (IC) vs discrete circuits?
More informationApplications of ion beams in materials science
Applications of ion beams in materials science J. Gyulai Research Institute for Technical Physics and Materials Science (MFA), Hung. Acad. Sci., Budapest Types of processing technologies Top-down - waste
More informationDetectors in Nuclear Physics (48 hours)
Detectors in Nuclear Physics (48 hours) Silvia Leoni, Silvia.Leoni@mi.infn.it http://www.mi.infn.it/~sleoni Complemetary material: Lectures Notes on γ-spectroscopy LAB http://www.mi.infn.it/~bracco Application
More informationHydrogen Ion-Implantation in Smart- Cut SOI Fabrication Technique Term Project Joy Johnson
Hydrogen Ion-Implantation in Smart- Cut SOI Fabrication Technique 1. INTRODUCTION Hydrogen Ion-Implantation in Smart-Cut SOI Fabrication Technique A decade ago, the Smart-Cut process was introduced as
More informationThe Monte Carlo Simulation of Secondary Electrons Excitation in the Resist PMMA
Applied Physics Research; Vol. 6, No. 3; 204 ISSN 96-9639 E-ISSN 96-9647 Published by Canadian Center of Science and Education The Monte Carlo Simulation of Secondary Electrons Excitation in the Resist
More informationThe Electromagnetic Properties of Materials
The lectromagnetic Properties of Materials lectrical conduction Metals Semiconductors Insulators (dielectrics) Superconductors Magnetic materials Ferromagnetic materials Others Photonic Materials (optical)
More informationSession 5: Solid State Physics. Charge Mobility Drift Diffusion Recombination-Generation
Session 5: Solid State Physics Charge Mobility Drift Diffusion Recombination-Generation 1 Outline A B C D E F G H I J 2 Mobile Charge Carriers in Semiconductors Three primary types of carrier action occur
More informationChem 481 Lecture Material 3/20/09
Chem 481 Lecture Material 3/20/09 Radiation Detection and Measurement Semiconductor Detectors The electrons in a sample of silicon are each bound to specific silicon atoms (occupy the valence band). If
More informationEE115C Winter 2017 Digital Electronic Circuits. Lecture 3: MOS RC Model, CMOS Manufacturing
EE115C Winter 2017 Digital Electronic Circuits Lecture 3: MOS RC Model, CMOS Manufacturing Agenda MOS Transistor: RC Model (pp. 104-113) S R on D CMOS Manufacturing Process (pp. 36-46) S S C GS G G C GD
More informationLecture 7: Extrinsic semiconductors - Fermi level
Lecture 7: Extrinsic semiconductors - Fermi level Contents 1 Dopant materials 1 2 E F in extrinsic semiconductors 5 3 Temperature dependence of carrier concentration 6 3.1 Low temperature regime (T < T
More informationFinal Examination EE 130 December 16, 1997 Time allotted: 180 minutes
Final Examination EE 130 December 16, 1997 Time allotted: 180 minutes Problem 1: Semiconductor Fundamentals [30 points] A uniformly doped silicon sample of length 100µm and cross-sectional area 100µm 2
More informationIntroduction into Positron Annihilation
Introduction into Positron Annihilation Introduction (How to get positrons? What is special about positron annihilation?) The methods of positron annihilation (positron lifetime, Doppler broadening, ACAR...)
More informationCharacterization of Irradiated Doping Profiles. Wolfgang Treberspurg, Thomas Bergauer, Marko Dragicevic, Manfred Krammer, Manfred Valentan
Characterization of Irradiated Doping Profiles, Thomas Bergauer, Marko Dragicevic, Manfred Krammer, Manfred Valentan Vienna Conference on Instrumentation (VCI) 14.02.2013 14.02.2013 2 Content: Experimental
More informationDetectors in Nuclear Physics (40 hours)
Detectors in Nuclear Physics (40 hours) Silvia Leoni, Silvia.Leoni@mi.infn.it http://www.mi.infn.it/~sleoni Complemetary material: Lectures Notes on γ-spectroscopy LAB http://www.mi.infn.it/~bracco Application
More informationChapter 8 Ion Implantation
Chapter 8 Ion Implantation 2006/5/23 1 Wafer Process Flow Materials IC Fab Metalization CMP Dielectric deposition Test Wafers Masks Thermal Processes Implant PR strip Etch PR strip Packaging Photolithography
More informationEnergetic particles and their detection in situ (particle detectors) Part II. George Gloeckler
Energetic particles and their detection in situ (particle detectors) Part II George Gloeckler University of Michigan, Ann Arbor, MI University of Maryland, College Park, MD Simple particle detectors Gas-filled
More informationQuiz #1 Practice Problem Set
Name: Student Number: ELEC 3908 Physical Electronics Quiz #1 Practice Problem Set? Minutes January 22, 2016 - No aids except a non-programmable calculator - All questions must be answered - All questions
More informationnmos IC Design Report Module: EEE 112
nmos IC Design Report Author: 1302509 Zhao Ruimin Module: EEE 112 Lecturer: Date: Dr.Zhao Ce Zhou June/5/2015 Abstract This lab intended to train the experimental skills of the layout designing of the
More informationde dx where the stopping powers with subscript n and e represent nuclear and electronic stopping power respectively.
CHAPTER 3 ION IMPLANTATION When an energetic ion penetrates a material it loses energy until it comes to rest inside the material. The energy is lost via inelastic and elastic collisions with the target
More informationNanostructures Fabrication Methods
Nanostructures Fabrication Methods bottom-up methods ( atom by atom ) In the bottom-up approach, atoms, molecules and even nanoparticles themselves can be used as the building blocks for the creation of
More informationLight element IBA by Elastic Recoil Detection and Nuclear Reaction Analysis R. Heller
Text optional: Institute Prof. Dr. Hans Mousterian www.fzd.de Mitglied der Leibniz-Gemeinschaft Light element IBA by Elastic Recoil Detection and Nuclear Reaction Analysis R. Heller IBA Techniques slide
More informationAccelerated Neutral Atom Beam Processing of Ultra-thin Membranes to Enhance EUV Transmittance. February 22, 2015
Accelerated Neutral Atom Beam Processing of Ultra-thin Membranes to Enhance EUV Transmittance February 22, 2015 1 Participation / Contacts Exogenesis Corporation, ANAB Technology Sean Kirkpatrick, Son
More informationUNIVERSITY OF CALIFORNIA, BERKELEY College of Engineering Department of Electrical Engineering and Computer Sciences
UNIVERSITY OF CALIFORNIA, BERKELEY College of Engineering Department of Electrical Engineering and Computer Sciences EE 105: Microelectronic Devices and Circuits Spring 2008 MIDTERM EXAMINATION #1 Time
More informationWeek 2: Chap. 2 Interaction of Radiation
Week 2: Chap. 2 Interaction of Radiation Introduction -- Goals, roll back the fog -- General Nomenclature -- Decay Equations -- Laboratory Sources Interaction of Radiation with Matter -- Charged Particles
More informationIn Situ Observation of Damage Evolution in Polycarbonate under Ion Irradiation with Positrons
Proc. 2nd Japan-China Joint Workshop on Positron Science JJAP Conf. Proc. 2 (2014) 011103 2014 The Japan Society of Applied Physics In Situ Observation of Damage Evolution in Polycarbonate under Ion Irradiation
More informationCalculating Band Structure
Calculating Band Structure Nearly free electron Assume plane wave solution for electrons Weak potential V(x) Brillouin zone edge Tight binding method Electrons in local atomic states (bound states) Interatomic
More informationEE 346: Semiconductor Devices. 02/08/2017 Tewodros A. Zewde 1
EE 346: Semiconductor Devices 02/08/2017 Tewodros A. Zewde 1 DOPANT ATOMS AND ENERGY LEVELS Without help the total number of carriers (electrons and holes) is limited to 2ni. For most materials, this is
More informationEE 143 MICROFABRICATION TECHNOLOGY FALL 2014 C. Nguyen PROBLEM SET #7. Due: Friday, Oct. 24, 2014, 8:00 a.m. in the EE 143 homework box near 140 Cory
Issued: Tuesday, Oct. 14, 2014 PROBLEM SET #7 Due: Friday, Oct. 24, 2014, 8:00 a.m. in the EE 143 homework box near 140 Cory Electroplating 1. Suppose you want to fabricate MEMS clamped-clamped beam structures
More informationPhysics of particles. H. Paganetti PhD Massachusetts General Hospital & Harvard Medical School
Physics of particles H. Paganetti PhD Massachusetts General Hospital & Harvard Medical School Introduction Dose The ideal dose distribution ideal Dose: Energy deposited Energy/Mass Depth [J/kg] [Gy] Introduction
More informationS1. X-ray photoelectron spectroscopy (XPS) survey spectrum of
Site-selective local fluorination of graphene induced by focused ion beam irradiation Hu Li 1, Lakshya Daukiya 2, Soumyajyoti Haldar 3, Andreas Lindblad 4, Biplab Sanyal 3, Olle Eriksson 3, Dominique Aubel
More informationLuminescence of Silicon Nanoparticles Synthesized by Ion Implantation
Digital Comprehensive Summaries of Uppsala Dissertations from the Faculty of Science and Technology 1651 Luminescence of Silicon Nanoparticles Synthesized by Ion Implantation THAWATCHART CHULAPAKORN ACTA
More informationLecture 04 Review of MOSFET
ECE 541/ME 541 Microelectronic Fabrication Techniques Lecture 04 Review of MOSFET Zheng Yang (ERF 3017, email: yangzhen@uic.edu) What is a Transistor? A Switch! An MOS Transistor V GS V T V GS S Ron D
More informationLecture 0: Introduction
Lecture 0: Introduction Introduction q Integrated circuits: many transistors on one chip q Very Large Scale Integration (VLSI): bucketloads! q Complementary Metal Oxide Semiconductor Fast, cheap, low power
More informationComputer simulation of the single crystal surface modification and analysis at grazing low-energy ion bombardment
IOP Conference Series: Materials Science and Engineering PAPER OPEN ACCESS Computer simulation of the single crystal surface modification and analysis at grazing low-energy ion bombardment Related content
More informationEmphasis on what happens to emitted particle (if no nuclear reaction and MEDIUM (i.e., atomic effects)
LECTURE 5: INTERACTION OF RADIATION WITH MATTER All radiation is detected through its interaction with matter! INTRODUCTION: What happens when radiation passes through matter? Emphasis on what happens
More informationhν' Φ e - Gamma spectroscopy - Prelab questions 1. What characteristics distinguish x-rays from gamma rays? Is either more intrinsically dangerous?
Gamma spectroscopy - Prelab questions 1. What characteristics distinguish x-rays from gamma rays? Is either more intrinsically dangerous? 2. Briefly discuss dead time in a detector. What factors are important
More informationDoping of Silicon with Phosphorus Using the 30 Si(p, g) 31 P Resonant Nuclear Reaction
S. Heredia-Avalos et al.: Doping of Silicon with Phosphorus 867 phys. stat. sol. (a) 176, 867 (1999) Subject classification: 61.72.Tt; 61.80.Jh; S5.11 Doping of Silicon with Phosphorus Using the 30 Si(p,
More informationChapter V: Interactions of neutrons with matter
Chapter V: Interactions of neutrons with matter 1 Content of the chapter Introduction Interaction processes Interaction cross sections Moderation and neutrons path For more details see «Physique des Réacteurs
More informationSemiconductor Device Physics
1 Semiconductor Device Physics Lecture 3 http://zitompul.wordpress.com 2 0 1 3 Semiconductor Device Physics 2 Three primary types of carrier action occur inside a semiconductor: Drift: charged particle
More informationInteractions of Particulate Radiation with Matter. Purpose. Importance of particulate interactions
Interactions of Particulate Radiation with Matter George Starkschall, Ph.D. Department of Radiation Physics U.T. M.D. Anderson Cancer Center Purpose To describe the various mechanisms by which particulate
More informationSupporting information for. Direct imaging of kinetic pathways of atomic diffusion in. monolayer molybdenum disulfide
Supporting information for Direct imaging of kinetic pathways of atomic diffusion in monolayer molybdenum disulfide Jinhua Hong,, Yuhao Pan,, Zhixin Hu, Danhui Lv, Chuanhong Jin, *, Wei Ji, *, Jun Yuan,,*,
More informationChapter V: Cavity theories
Chapter V: Cavity theories 1 Introduction Goal of radiation dosimetry: measure of the dose absorbed inside a medium (often assimilated to water in calculations) A detector (dosimeter) never measures directly
More information