Multi Beam Sputtering

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1 Equipment Manufacturer Multi Beam Sputtering Customization of ion beam deposition Our activities Compact ECR Ion sources Custom ion beam systems (ion implanter) Thin film deposition «on-demand» Thin film deposition systems Spin off of LPSC/CNRS/ Grenoble France Created 2014, Turnover k Our customers Research institutes Industry R&D Industry production A new standard for thin film deposition Pascal Sortais, Dresden, October 5 th /7

2 Who are we going to help? People who need thin films of complex composition and/or on unconventional sample geometries - multicomponent materials, magnetic multi layers, very smooth & dense films - tube, wire, room temperature substrates Current customer projects - Optics : multilayer multi component oxide films - Solar : stoichiometry control for CZTS - MEMS : ultra thin amorphous Carbon Film or material with controlled stress - Tribology : stoichiometry control for carbon-metal nano composites Our initial market : batch thin film deposition machines for 50 to 200 mm surface treatment Pascal Sortais, Dresden, October 5 th /7

3 Our solution The smallest ECR ion source for the only machine in the world working with 20 ion sources Vacuum Targets 15 Carbon vessel including 5 Gold 20 of the smallest Outer diameter ECR ion sources 80 mm 20 Davids stronger than 1 Goliath Mono source -> mono spot Uniformity over large area? Multi component layer? Multi source -> multi spot Uniformity over large area : scalable Multi component layer : 1 target/ source Pascal Sortais, Dresden, October 5 th /7 20 ion beams 300 mm of nanocomposite

4 Our innovation versus Competitors Simplicity of magnetron sputtering with the quality of ion beam sputtering Conventional PVD 1 Evaporation Simple but bad efficiency, chemical limitation 2 Magnetron sputtering Workhorse of deposition, difficult to customize 3 Ion beam Sputtering High quality but high complexity, very costly 4 Pulsed laser deposition Size limitation and very, very costly Multibeam sputtering Advantages Easily scalable technology Multi component deposition No maintenance : ECR filament less Size divide by 10 Better productivity Low cost for a given substrate size Two operational demonstrators Two exclusive licenses of French CNRS patents Pascal Sortais, Dresden, October 5 th /7

5 Road map From demonstrator Demonstrator operational First commercial use First trade show Characterization of three thin film showcases Hiring of a commercial manager Turnkey prototype operational First system sale to turnkey solution Pascal Sortais, Dresden, October 5 th /7

6 The team Management Pascal Sortais CEO/CTO co-founder Thierry Lamy Jean-Loup Ruffieux Scientific consultant Business developer Co-founder Co-founder Pierre Charreyron Business developer Consultant Investor partner Commercial manager Technical Merijntje Bronsgeest Surface physics Development Romain Digard Mechnical engineer Elisabeth Labarre Administration Farid Kaced Technician Production manager After sales staff 2016 and future Pascal Sortais, Dresden, October 5 th /7 2015

7 Investment opportunities Funding request : 750k for three actions - Characterization program 175 k - Turnkey prototype 325 k (including automation and standardization) - Commercial program 250 k Initial funding by founders Polygon Physics is becoming recognized as ion source manufacturer and its technology opens possibilities in the field of ion beam deposition so it offers. opportunities for business angel Contact : pascal.sortais@polygonphysics.com Pascal Sortais, Dresden, October 5 th /7

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