SCME KIT OVERVIEW. Rainbow Wafer Kit

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Kristopher Simmons
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1 SCME KIT OVERVIEW Rainbow Wafer Kit Micro Nano Conference I

2 Objectives of Each Kit The SCME kits are designed to work both as a stand-alone activity as well as to support the materials introduced in one or more learning modules. 2

3 Current SCME Kits LIGA Micromachining Simulation GeneChip Model* MEMS: Making Micro Machines LM and DVD* Crystallography Rainbow Wafer Dynamic Cantilever Pressure Sensor Model* Lift-off Anisotropic Etch Pressure Sensor Process* MEMS Innovators (Capstone) 3

4 LIGA Micromachining Simulation Kit LIGA LIthographie (Lithography), Galvanoformung (electroforming) and Abformung (molding) In LIGA Micromachining Simulation, students make an electrolyte of copper acetate using copper tubing and vinegar. transfer a pattern to a metal plate (lithography), and then use the electrolyte to coat the exposed metal with copper (electroplating). Can be used to teach concepts of microtechnology fabrication, chemistry, science and engineering. 4

GeneChip Model Kit Student construct a portion of a DNA microarray using

representing a nucleotide base (adenine, quinine, cytosine, or thymine).

5 GeneChip Model Kit Student construct a portion of a DNA microarray using a substrate, several masks, and different colored beads, each color representing a nucleotide base (adenine, quinine, cytosine, or thymine). A finished model will consist of 64 probes (each probe being a 3 base oligonucleotide). Once the model is constructed, students match DNA test and control samples to the probes on the microarray and interpret the results. 5

6 GeneChip Model Kit This kit simulates a GeneChip (type of DNA Microarray) fabrication process. The process used is a modification of Affymetrix s Genechip process that uses photolithography to identify specific locations on each layer of a DNA microarray. This kit and the DNA Microarray Learning Module enhance one s understanding of how DNA microarrays are fabricated and used to identify specific genes and gene activity in a sample. This kit can be used to teach concepts of biology, genetics, biomedical analysis tools, medical research, and micro and nanotechnology. 6

7 MEMS: Making Micro Machines LM and DVD DVD MEMS Making Micro Machines MEMS applications MEMS fabrication MEMS operation MEMS design Supporting activities reinforce terminology and concepts introduced in the DVD A good introduction to MEMS Can be used in a variety of science, technology and engineering courses A great teaser for inquiring minds 7

8 Crystallography Kit and Learning Module Exploration of crystal structures, unit cells, crystal planes, self-assembly, and why crystals structures such as carbon and silicon are important to microtechnology. Crystal planes Identification of crystal planes using Miller Index notation Material properties of planes how the orientation affects the wafer s properties, the number of atoms on the surface of the plane and the conductivity and reaction potential. The kit supports two of three activities in the learning module Breaking wafers and Crystal Origami. The kit and the learning module can be used in science, material science, technology, math, engineering, and microtechnology classes. 8

9 Rainbow Wafer Kit A Rainbow wafer is a silicon wafer with a thick layer of silicon dioxide (oxide). The rainbow is created by lowering the wafer into buffered oxide etch (BOE) one strip or layer at a time. Each layer is held (by an operator) for set period of time, then lowered to the next level. This wafer was created in approximately 10 minutes (1 minute per layer). The bottom most level was in the BOE solution for the entire 10 minutes. The top most level (5000 angstroms) was never exposed to the BOE. 9

Rainbow Wafer Kit Stand alone activity or can be used with the Etch or

A potpourri of topics are explored: oxide growth on silicon, chemical

dry oxidation processes, light interference and how it affects what we

10 Rainbow Wafer Kit Stand alone activity or can be used with the Etch or Oxidation Learning Modules. A potpourri of topics are explored: oxide growth on silicon, chemical reactions of wet vs. dry oxidation processes, light interference and how it affects what we see as the color of oxide, and etch rates for oxide. Students estimate the thickness of several layers of SiO 2 on a silicon rainbow wafer using a color chart. 10

11 Rainbow Wafer Kit Once the thickness of each layer of the rainbow wafer has been estimated and recorded in a data table, the students create graphs comparing oxide thickness vs. time and oxide removed (etched) vs. time. Graph interpretation allows them to determine the etch rate of each layer and the average etch rate of the process. Students interpret graphs related to silicon dioxide (SiO 2 ) thickness on a silicon wafer to identify the differences in using wet or dry oxidation to grow silicon dioxide. They use the graphs to estimate oxide growth based on time and temperature. Classes chemistry, math, science, technologies, engineering, microtechnology 11

12 Dynamic Cantilever Kit This activity simulates the dynamic mode of operation for microcantilevers used in MEMS sensors. Students explore the motion of cantilevers under a varying mass and determine the relationship that expresses the resonant frequency of a cantilever as a function of mass, how cantilever width, thickness and density affect the resonant frequency and the relationship of frequency as a function of mass, Young's Modulus of Elasticity (E) for different materials, how the spring constant of a material is affected by length, width, and thickness, and how the natural frequency of a cantilever is affected by the spring constant. 12

13 Dynamic Cantilever Kit Digital video is used to record the cantilever s frequency with and without added mass. Data is collected from the video and recorded into a lab report. A complete lab report is generated in which the procedure, data, tables, observations, analysis, and conclusions are recorded. 13

14 Dynamic Cantilever Kit This activity can be used to support concepts of physics, electronics, math, engineering, and microtechnology. One of two activities for the MEMS Cantilever Learning Module. The MEMS Cantilever Learning Module covers applications of MEMS cantilevers such as Chemical Sensor Arrays and atomic force microscopes, how a cantilever works in both the dynamic and static modes, and how microcantilevers are affected by chemical reactions between the target mass and cantilever surface coating. 14

15 Pressure Sensor Model Kit MEMS pressure sensors are found cars, roads, bridges, blood pressure sensors, and tsunami detection systems to name a few. In this kit, students explore the effect that a materials length and cross-sectional area has on its resistance, how a pressure sensor works, the operation of a Wheatstone bridge sensing circuit, and how a change in pressure affects the output of a Wheatstone bridge sensing circuit by measuring resistance and voltage. Students build a pressure sensor with a Wheatstone bridge sensing circuit using graphene (pencil lead), and a diaphragm (balloon) on a substrate (paint can). 15

Pressure Sensor Model Kit Once the bridge is constructed, students test the workings of the bridge by measuring its resistance and voltage as pressure is applied to the

16 Pressure Sensor Model Kit Once the bridge is constructed, students test the workings of the bridge by measuring its resistance and voltage as pressure is applied to the surface of the balloon. This kit is part of the Wheatstone Bridge Learning Module. It can be used in electronics, math, physics, engineering and microtechnology classes. 16

This kit provides the tools for the execution of this process in a classroom setting.

17 Lift-off Kit Lift-off is one of ten process steps in the fabrication of the MTTC (Manufacturing Technology Training Center) pressure sensor process. This kit provides the tools for the execution of this process in a classroom setting. Students set up the process, observe lift-off in action, analyze the result of the process, and explain the process steps leading up to and during lift-off. 17

Can be used enforce concepts in chemistry,

18 Lift-off Kit Concepts covered Chemical safety (Material Safety Data Sheets and PPE) Chemical reactions of acetone with photoresist MEMS Pressure Sensor Processing Can be used enforce concepts in chemistry, manufacturing processing, safety, and microtechnology. 18

19 Anisotropic Etch Kit Anisotropic etch is the last ot ten process steps in the fabrication of the MTTC pressure sensor process. This kit provides the tools for the execution of this process in a lab setting. Because of the chemical used (sodium hydroxide), a fume hood and proper safety gear is required. Students set up the process, observe anisotropic etch in action, analyze the result of the process, and explain the process steps leading up to and during etch. 19

along planes of silicon (100) and (111) MEMS Pressure Sensor Processing Can be

20 Anisotropic Etch Kit Concepts covered Chemical safety (Material Safety Data Sheets and PPE) Chemical reactions of sodium hydroxide with silicon Chemical etching along planes of silicon (100) and (111) MEMS Pressure Sensor Processing Can be used enforce concepts in chemistry, manufacturing processing, safety, and microtechnology 20

21 Pressure Sensor Process Kit This kit can be used to get students curious about MEMS processing then used as a final assessment to assess their understanding of a process. Students study ten (10) process chips that represent the outcome for each of the ten (10) steps of a MEMS Pressure Sensor process. Students identify and explain the process step of each chip and arrange the chips in the correct order based on the sequential steps of the process. The process used for this activity was developed by the University of New Mexico s Manufacturing Technology Training Center (MTTC). This kit along with Lift-off and Anisotropic Etch are activities for the MTTC Pressure Sensor Process Learning Module. Can be used to teach concepts of safety, chemistry, and microtechnology. 21

22 MEMS Innovators Kit Working in a team, students design a MEMS component for a given application, build a model of the component, develop process masks, design the process for fabrication of the component, generate a report describing specific criteria of their component, and present their project to other teams. A capstone activity for a MEMS unit, course, or curriculum. 22

23 Today s SCME sessions on kits What are MEMS? MEMS: Making Micro Machines LM and DVD Pressure Sensor Model Pressure Sensor Model Kit Pressure Sensor Process Lift-off Kit Anisotropic Etch Kit PS Process Kit DNA Microarray GeneChip Model 23

24 To Order a SCME Kit See me and Barb during lunch! 24

The Miller Index Activity Crystallography Overview Learning Module Participant Guide

The Miller Index Activity Crystallography Overview Learning Module Participant Guide Crystallography Overview Learning Module Participant Guide The purpose of this learning module is to introduce the science of crystallography and its importance to microtechnology. Activities provide additional