Nanoelectronics 09. Atsufumi Hirohata Department of Electronics. Quick Review over the Last Lecture

Transcription

1 Nanoelectronics 09 Atsufumi Hirohata Department of Electronics 13:00 Monday, 12/February/2018 (P/T 006) Quick Review over the Last Lecture ( Field effect transistor (FET) ): ( Drain ) current increases with increasing a ( gate ) voltage. * ON OFF ( Esaki Tunneling diode p ): ( Single electron transistor (SET) ) : n *

2 Contents of Nanoelectonics I. Introduction to Nanoelectronics (01) 01 Micro- or nano-electronics? II. Electromagnetism (02 & 03) 02 Maxwell equations 03 Scholar and vector potentials III. Basics of quantum mechanics (04 ~ 06) 04 History of quantum mechanics 1 05 History of quantum mechanics 2 06 Schrödinger equation IV. Applications of quantum mechanics (07, 10, 11, 13 & 14) 07 Quantum well V. Nanodevices (08, 09, 12, 15 ~ 18) 08 Tunnelling nanodevices 09 Nanomeasurements 09 Nanomeasurements Scanning tunnelling microscope Scanning tunnelling spectroscopy Atom manipulation Atomic force microscope Transmission electron microscope Scanning electron microscope Surface analysis

3 Scanning Tunnelling Microscope (STM) In 1982, Gerd Binnig and Heinrich Rohrer invented scanning tunnelling microscopy : Au (001) surface : tunnelling current * ** Si Surface Reconstruction Atomic resolution by STM was clearly proved by Si surface observation in 1983 : Si (111) 7 7 surface reconstruction was proposed in 1959 : *

4 Si (111) 7 7 Surface Reconstruction * Scanning Tunnelling Spectroscopy (STS) In order to measure a density of states (DOS) with a STM tip, *

5 Atom Manipulation An individual atom can be manipulated by a STM tip shown by Donald Eigler in 1989 : 35 Xe atoms * ** Atom Manipulation by IBM

6 Atom Manipulation by IBM Atomic Force Microscope (AFM) In 1985, Gerd Binnig invented atomic force microscopy : Non-conductive surface can be observed. *

7 Magnetic Force Microscope (MFM) In 1987, a magnetic tip was introduced to observe a magnetic stray field : * By subtracting surface morphology, magnetic domains are observed. Similarly, scanning SQUID / Hall microscope were developed. C. C. Tsuei et al., Phys. Rev. Lett. 73, 593 (1994). A. Oral et al., Appl. Phys. Lett. 69, 1324 (1996). * Y. Martin, H. K. Wickramasinghe, Appl. Phys. Lett. 50, 1455 (1987). ** AFM / MFM Images MFM images can subtract dots morphology : 20 nm thick Fe dots (1 µm diameter) 30 nm thick NiFe dots (5 µm)

8 Transmission Electron Microscope (TEM) In 1933, Ernst A. F. Ruska and Max Knoll built an electron microscope : Preliminary electron microscope ( 17) in 1931 Improved to 12,000 in 1933 Commercially available from Siemens in 1938 Sample thickness : 200 ~ 300 nm Magnetic field acts as a lens to electron-beam : Hans W. H. Busch in 1927 * ** Early TEM Images Early oxide replica of etched Al : Si-Fe : *

9 Scanning Electron Microscope (SEM) In 1937, Manfred von Ardenne developed a scanning electron microscope : * ** SEM image of etched brass : Early SEM Images *

10 Scanning Transmission Electron Microscope (STEM) By scanning electron-beam, TEM resolution can be improved significantly : 0.8 Å resolution York JEOL Nanocentre By STEM, H atoms were directly observed : Capability of STEM Annular dark field (ADF) STEM Annular bright field (ABF) STEM Incident e-beam Specimen Diffraction electrons Detector Collection of electrons with large scattering angles. Collection of electrons with small scattering angles. Observation of heavy atoms. Observation of heavy and light atoms at the same time. * S. D. Findlay et al., Appl. Phys. Exp. 3, (2010).

11 Surface Spectroscopy By introducing electron-beam onto a sample surface : Reflected electron-beam Photo-emission electrons Incident electron-beam Characteristic X-ray Secondary electrons Auger electrons (AES) Sample Auger electrons are found by Lise Meitner in 1922 and Pierre V. Auger in 1925 : * ** Auger Electron Spectroscopy (AES) Penetration depth : * AES signal : Co 2 CrAl Al Cr Co AES mapping : ** * **

12 Electron Probe Micro-Analyser (EPMA) Electron Probe Micro-Analyser (EPMA) : Reflected electron-beam Photo-emission electrons Incident electron-beam Characteristic X-ray (EPMA, EDX) Secondary electrons Incident electron beam Auger electrons Bent crystal Sample Typical penetration depth : ~ 1 µm Detector Wavelength dispersive X-ray spectrometer (WDS) (EPMA) Counter Roland circle Energy dispersive X-ray spectrometer (EDS) (EDX) Example of Co 2 TiSn : EPMA Signals

13 Surface Structural Analysis Reflection high energy electron diffraction (RHEED) : Direct spot Shadow edge Sample Screen Typical penetration depth : a few nm Shadow edge [110] [010] [110] Laue spots Clean surface : Streak patterns Unit cell [110] Real space : fcc (001) surface 2nd st [110] 0th Reciprocal lattice : bcc (001) RHEED Observation RHEED patterns of Co 2 FeAl grown on GaAs (001) : [110] Co 2 FeAl 1.0 nm (2 4) GaAs (001) a top view (001) side view [110] Ga [110] 1 As [1-10] [100] Ö 2 Zinc blende a = nm 2.0 nm bcc [110] B2 Ö nm bcc [110] L nm Cr or Fe Al Co c (2 4) unit mesh epitaxial L2 1 (clean surface) Co 2 FeAl (001) <110> GaAs (001) <110>

14 Major techniques for surface analysis : Surface Analysis Techniques Incident beam Signals Composition Structure Electronic state Auger electron spectroscopy (AES) Auger electrons Qualitative analysis Auger electron spectra Auger electron diffraction (AED) Auger electrons Auger diffraction (~ a few atoms) Electron probe microanalyzer (EPMA) Characteristic X-ray Qualitative analysis (sensitivity ~ 0.1 %) X-ray spectra Energy dispersive X-ray analysis (EDX) Characteristic X-ray Qualitative analysis X-ray spectra X-ray photoelectron spectroscopy (XPS) Photo-emission electrons Qualitative analysis Atomic binding energy Photoemission electron microscopy (PEEM) X-ray / photon Photo-emission electrons Atom mapping Atomic binding energy Secondary ion mass spectroscopy (SIMS) Secondary electrons Qualitative analysis Electron energy-loss spectroscopy (EELS) Reflection high energy diffraction (RHEED) Low energy electron diffraction (LEED) X-ray absorption fine structure (XAFS) X-ray Secondary electrons Reflected electron-beam Reflected electron-beam Photo-emission electrons Surface absorption spectra Surface absorption spectra Reflected diffraction patterns Back-scattered diffraction patterns X-ray diffraction (XRD) X-ray Reflected X-ay X-ray diffraction Transmission electron diffraction (TED) Transmission electrons Diffraction patterns (t < 30 nm) * D. P. Woodruff and T. A. Delchar, Modern Techniques of Surface Science (Cambridge University Press, Cambridge, 1994). Detection Limits of Surface Analysis *