Nanocarbon Interconnects - From 1D to 3D

Transcription

1 Nanocarbon Interconnects - From 1D to 3D Cary Y. Yang Santa Clara University

2 Outline Introduction CNT as 1D interconnect structure CNT-graphene as all-carbon 3D interconnect Summary

3 Device Scaling driven by Moore s Law Doubles number of transistors on-chip every two years Enables packing more functions Reduces cost

4 On-chip Interconnects Intel 14 nm process press release 9/2014

5 Effect of Scaling on Interconnect Performance Resistivity of Cu surges with downward scaling ITRS 2007

6 Effect of Scaling on Interconnect Performance RC delay due to local interconnects IMEC, IITC 2016

7 Effect of Scaling on Interconnect Reliability Current density approaching electromigration limit of Cu interconnects Voids formed causing failure of interconnects SEM picture of an EM-failed Cu via ITRS 2013 M. A. Hussein, J. He, IEEE Trans. Semicon. Manufacturing 18 (2005)

8 Alternative Interconnect Materials and Structures Conductors with electron mean free path λ either significantly larger or smaller than those in Cu and W Current-carrying capacity significantly higher than Cu and W Cu Barrier Seed Electroplated Cu Inter-level dielectric Silicides (small λ): - Smaller grains than Cu less variation in ρ with scaling, e.g., NiSi x (30 µω-cm), Ag (12 µω-cm) - Current capacity 10 x Cu - Stoichiometry control Nanocarbons (large λ): - Near-ballistic transport - Current capacity 100 x Cu - High contact resistance Cu+ Cu + BS BS Cu Long MFP large λ Small λ Small MFP Interconnect Technologist Clarke et al., VLSI 2014

9 Alternative Interconnect Materials and Structures Nanocarbons as potential replacements for Cu Electromigration-resistant - Current-carrying capability > 10 7 A/cm 2 Long mean free path - High mobility and near-ballistic transport High thermal conductivity W/(K m) vs Cu 400 W/(K m) Contact resistance challenges

10 Alternative Interconnect Materials and Structures CNT vias/plugs in local interconnects M. H. Van der Veen, et al., IITC 2012

11 Alternative Interconnect Materials and Structures Graphene interconnects 8-nm-wide intercalated MLG: resistivity of 3.2 μω cm 30-nm-width bilayer interconnects of multilayer graphene and Ni D. Kondo, et al., IITC 2014 T. Ishikura, et al., IITC 2015

12 Nanocarbon Interconnects: Contact Resistance Challenges CNT-metal contacts Graphene-metal contacts P. Wilhite, et al., SST 29 (2014) Politou, et al., APL 107 (2015)

13 All-Carbon Interconnects: 1D to 3D CNT as local vertical interconnect Graphene as horizontal interconnect and/or active channel material sp 2 -bonded carbon interconnect F.D. Novaes,et al., ACS Nano (2010) Extension of superior nanocarbon properties to 3D integration sp 2 bonding for high electrical and thermal conductance

14 Outline Introduction CNT as 1D interconnect structure CNT-graphene as all-carbon 3D interconnect Summary

15 CNT Vias - Objectives Comprehensive characterization of CNT vias with linewidths approaching those used in current technology nodes Development of technique to extract contact resistance of fabricated CNT vias with linewidths down to 40 nm Assessment of CNT via performance and reliability and comparisons with Cu and W

16 Via Test Structure Fabrication Modify process to include a-si hard mask for via etching to achieve vertical sidewalls C. Zhou, et al., IEEE EDL 36, (2015)

17 Via Test Structures 200 nm CNT via patterns: layout design Wedge structure to create multiple heights

18 CNT Growth in Vias Vertically aligned CNTs are grown in vias using Ni catalyst in plasma-enhanced chemical vapor deposition (PECVD) system

19 Dielectric Filling and Polishing To maintain CNT vertical alignment in vias and to optimize CNT/metal interface at via top contact, void in via filled with Al 2 O 3 Atomic Layer Deposition of Al 2 O 3 using trimethylaluminum and water at a rate of 1 Å/cycle

20 Via Top Contact Metallization Selective top-contact metallization using electronbeam-induced deposition (EBID) Pt deposited on alternate vias along the wedge for five different via heights

21 Electrical Characterization Nanoprobing on individual vias to measure resistance

22 Resistance of CNT Vias vs Via width Lowest resistance obtained for a 60 nm via is 150 Ω. Lowest extrapolated resistance for a 30 nm via is 295 Ω. Statistical log average of R via for 60 nm vias is 1.7 kω with standard deviation between 420 Ω and 7.1 kω. C. Zhou, et al., IEEE EDL 36, (2015)

23 Resistance of 40 nm CNT Vias vs Via Height R via = R m + R C + ρ CNT h /A CNT R m = Underlayer, probes, probe contact contribution R C = Total CNT contact resistance ρ CNT = CNT resistivity A CNT = Total area of CNTs inside via No cap EBID-Pt cap A. Vyas, et al., Nanotechnology 27, (2016)

24 CNT Via Reliability Current stress experiment carried out to determine maximum current-carrying capacity J via = 330 MA/cm 2 1mA

25 Comparisons with Cu and W Via Width Height CNT Growth Temp ( C) CNT Areal Density (#/cm 2 ) Average CNT diameter (nm) R via (kω) This Work 40 nm 80 nm CNT via (Graham 2005) 30 nm 150 nm CNT via (Katagiri 2011) 70 nm 100 nm Cu (Adelman 2014) 30 nm 130 nm NA NA NA W (Walls 1997) 30 nm 130 nm NA NA NA J via (MA/cm 2 )

26 Outline Introduction CNT as 1D interconnect structure CNT-graphene as all-carbon 3D interconnect Summary

27 CNT/Graphene Test Structure Fabrication Graphene Growth Graphene Transfer onto Oxide CNT Growth on Graphene C Zhou, et al., Nanotechnology 28, (2016)

28 CNT/Graphene growth Fe catalyst (a) 2 Å, (b) 3 Å, (c) 5 Å, and (d) 1 nm

29 CNT-Graphene growth Fe catalyst 1 nm Fe 5 Å Fe 3 Å Fe 2 Å Fe

30 CNT Characterization Single-Walled: Diameter 1.5 nm Double-Walled: Diameter 4.8 nm Three-Walled: Diameter 6 nm Four-Walled: Diameter 7 nm

31 CNT Characterization CNT: tip growth mode

32 CNT/Graphene Characterization CNT-on- graphene: cross-section of CNT observed

33 CNT-Graphene Interface CNT-on- graphene interface observed; graphene layers probably distorted by CNT growth process

34 Electrical Characterization ALD oxide filler to strengthen CNT forest Exposure of CNT tips for probe contact Further CNT/Graphene contact resistance extraction in progress C Zhou, et al., Nanotechnology 28, (2016)

35 Summary Fabricated CNT vias down to 40 nm wide demonstrated superior reliability and promising performance CNT/Graphene 3D test structure successfully fabricated Graphene remains intact but distorted after Fe sputtering and dewetting CNT/Graphene interface is observed using TEM, suggesting some bonding between CNT walls and graphene surface CNT/Graphene contact resistance extracted from electrical measurements First-principle calculations of CNT-Graphene model structures in progress

36 Acknowledgements Changjian Zhou Anshul Vyas, Patrick Wilhite, Richie Senegor, Zachary Baron Yihan Chen, Mansun Chan Chai Yang Phillip Wang